JPS63106141U - - Google Patents

Info

Publication number
JPS63106141U
JPS63106141U JP19948186U JP19948186U JPS63106141U JP S63106141 U JPS63106141 U JP S63106141U JP 19948186 U JP19948186 U JP 19948186U JP 19948186 U JP19948186 U JP 19948186U JP S63106141 U JPS63106141 U JP S63106141U
Authority
JP
Japan
Prior art keywords
stage
wafers
pitch
wafer
alignment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19948186U
Other languages
English (en)
Japanese (ja)
Other versions
JPH064586Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19948186U priority Critical patent/JPH064586Y2/ja
Publication of JPS63106141U publication Critical patent/JPS63106141U/ja
Application granted granted Critical
Publication of JPH064586Y2 publication Critical patent/JPH064586Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Stacking Of Articles And Auxiliary Devices (AREA)
  • Specific Conveyance Elements (AREA)
JP19948186U 1986-12-26 1986-12-26 ウエハー移し替え装置 Expired - Lifetime JPH064586Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19948186U JPH064586Y2 (ja) 1986-12-26 1986-12-26 ウエハー移し替え装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19948186U JPH064586Y2 (ja) 1986-12-26 1986-12-26 ウエハー移し替え装置

Publications (2)

Publication Number Publication Date
JPS63106141U true JPS63106141U (enrdf_load_stackoverflow) 1988-07-08
JPH064586Y2 JPH064586Y2 (ja) 1994-02-02

Family

ID=31161146

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19948186U Expired - Lifetime JPH064586Y2 (ja) 1986-12-26 1986-12-26 ウエハー移し替え装置

Country Status (1)

Country Link
JP (1) JPH064586Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023073741A (ja) * 2021-11-16 2023-05-26 株式会社Ｓｃｒｅｅｎ Ｓｐｅ テック 基板移載装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023073741A (ja) * 2021-11-16 2023-05-26 株式会社Ｓｃｒｅｅｎ Ｓｐｅ テック 基板移載装置

Also Published As

Publication number Publication date
JPH064586Y2 (ja) 1994-02-02

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