JPS63106142U - - Google Patents

Info

Publication number
JPS63106142U
JPS63106142U JP19948286U JP19948286U JPS63106142U JP S63106142 U JPS63106142 U JP S63106142U JP 19948286 U JP19948286 U JP 19948286U JP 19948286 U JP19948286 U JP 19948286U JP S63106142 U JPS63106142 U JP S63106142U
Authority
JP
Japan
Prior art keywords
pitch
conversion mechanism
wafers
wafer
pitch conversion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19948286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19948286U priority Critical patent/JPS63106142U/ja
Publication of JPS63106142U publication Critical patent/JPS63106142U/ja
Pending legal-status Critical Current

Links

JP19948286U 1986-12-26 1986-12-26 Pending JPS63106142U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19948286U JPS63106142U (enrdf_load_stackoverflow) 1986-12-26 1986-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19948286U JPS63106142U (enrdf_load_stackoverflow) 1986-12-26 1986-12-26

Publications (1)

Publication Number Publication Date
JPS63106142U true JPS63106142U (enrdf_load_stackoverflow) 1988-07-08

Family

ID=31161148

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19948286U Pending JPS63106142U (enrdf_load_stackoverflow) 1986-12-26 1986-12-26

Country Status (1)

Country Link
JP (1) JPS63106142U (enrdf_load_stackoverflow)

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