JPH0528720Y2 - - Google Patents
Info
- Publication number
- JPH0528720Y2 JPH0528720Y2 JP12854485U JP12854485U JPH0528720Y2 JP H0528720 Y2 JPH0528720 Y2 JP H0528720Y2 JP 12854485 U JP12854485 U JP 12854485U JP 12854485 U JP12854485 U JP 12854485U JP H0528720 Y2 JPH0528720 Y2 JP H0528720Y2
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- gas
- gas introduction
- electrode plate
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012777 electrically insulating material Substances 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011796 hollow space material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12854485U JPH0528720Y2 (ko) | 1985-08-22 | 1985-08-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12854485U JPH0528720Y2 (ko) | 1985-08-22 | 1985-08-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6237200U JPS6237200U (ko) | 1987-03-05 |
| JPH0528720Y2 true JPH0528720Y2 (ko) | 1993-07-23 |
Family
ID=31024312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12854485U Expired - Lifetime JPH0528720Y2 (ko) | 1985-08-22 | 1985-08-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0528720Y2 (ko) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2627214B2 (ja) * | 1990-11-16 | 1997-07-02 | インターニックス株式会社 | 高速サンプル・ホールド回路 |
| JP4572100B2 (ja) * | 2004-09-28 | 2010-10-27 | 日本エー・エス・エム株式会社 | プラズマ処理装置 |
-
1985
- 1985-08-22 JP JP12854485U patent/JPH0528720Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6237200U (ko) | 1987-03-05 |
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