JPH0528720Y2 - - Google Patents

Info

Publication number
JPH0528720Y2
JPH0528720Y2 JP12854485U JP12854485U JPH0528720Y2 JP H0528720 Y2 JPH0528720 Y2 JP H0528720Y2 JP 12854485 U JP12854485 U JP 12854485U JP 12854485 U JP12854485 U JP 12854485U JP H0528720 Y2 JPH0528720 Y2 JP H0528720Y2
Authority
JP
Japan
Prior art keywords
plasma
gas
gas introduction
electrode plate
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP12854485U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6237200U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12854485U priority Critical patent/JPH0528720Y2/ja
Publication of JPS6237200U publication Critical patent/JPS6237200U/ja
Application granted granted Critical
Publication of JPH0528720Y2 publication Critical patent/JPH0528720Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP12854485U 1985-08-22 1985-08-22 Expired - Lifetime JPH0528720Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12854485U JPH0528720Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-08-22 1985-08-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12854485U JPH0528720Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-08-22 1985-08-22

Publications (2)

Publication Number Publication Date
JPS6237200U JPS6237200U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-03-05
JPH0528720Y2 true JPH0528720Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-07-23

Family

ID=31024312

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12854485U Expired - Lifetime JPH0528720Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-08-22 1985-08-22

Country Status (1)

Country Link
JP (1) JPH0528720Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2627214B2 (ja) * 1990-11-16 1997-07-02 インターニックス株式会社 高速サンプル・ホールド回路
JP4572100B2 (ja) * 2004-09-28 2010-10-27 日本エー・エス・エム株式会社 プラズマ処理装置

Also Published As

Publication number Publication date
JPS6237200U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-03-05

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