JPS6237200U - - Google Patents

Info

Publication number
JPS6237200U
JPS6237200U JP12854485U JP12854485U JPS6237200U JP S6237200 U JPS6237200 U JP S6237200U JP 12854485 U JP12854485 U JP 12854485U JP 12854485 U JP12854485 U JP 12854485U JP S6237200 U JPS6237200 U JP S6237200U
Authority
JP
Japan
Prior art keywords
plasma
gas introduction
gas
introduction tube
electrode plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12854485U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0528720Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12854485U priority Critical patent/JPH0528720Y2/ja
Publication of JPS6237200U publication Critical patent/JPS6237200U/ja
Application granted granted Critical
Publication of JPH0528720Y2 publication Critical patent/JPH0528720Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP12854485U 1985-08-22 1985-08-22 Expired - Lifetime JPH0528720Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12854485U JPH0528720Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-08-22 1985-08-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12854485U JPH0528720Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-08-22 1985-08-22

Publications (2)

Publication Number Publication Date
JPS6237200U true JPS6237200U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-03-05
JPH0528720Y2 JPH0528720Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-07-23

Family

ID=31024312

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12854485U Expired - Lifetime JPH0528720Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-08-22 1985-08-22

Country Status (1)

Country Link
JP (1) JPH0528720Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04182997A (ja) * 1990-11-16 1992-06-30 Inter Nitsukusu Kk 高速サンプル・ホールド回路
JP2006100305A (ja) * 2004-09-28 2006-04-13 Asm Japan Kk プラズマ処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04182997A (ja) * 1990-11-16 1992-06-30 Inter Nitsukusu Kk 高速サンプル・ホールド回路
JP2006100305A (ja) * 2004-09-28 2006-04-13 Asm Japan Kk プラズマ処理装置

Also Published As

Publication number Publication date
JPH0528720Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-07-23

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