JPH05285842A - Manufacture of diamond wheel - Google Patents

Manufacture of diamond wheel

Info

Publication number
JPH05285842A
JPH05285842A JP11405992A JP11405992A JPH05285842A JP H05285842 A JPH05285842 A JP H05285842A JP 11405992 A JP11405992 A JP 11405992A JP 11405992 A JP11405992 A JP 11405992A JP H05285842 A JPH05285842 A JP H05285842A
Authority
JP
Japan
Prior art keywords
diamond
particles
wheel
film
plating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11405992A
Other languages
Japanese (ja)
Inventor
Tamaki Iida
玉樹 飯田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP11405992A priority Critical patent/JPH05285842A/en
Publication of JPH05285842A publication Critical patent/JPH05285842A/en
Pending legal-status Critical Current

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  • Polishing Bodies And Polishing Tools (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE:To provide a high mechanical strength by a method wherein the surface of a wheel made of an Al alloy is modified and treated by means of a carboxylic acid dielectric water solution after the surface of the wheel is covered with an Al film, and thereafter electroless plating of Mo is applied, and the surface thereof is covered with a continuous layer of diamond multicrystal particles. CONSTITUTION:An Al film is formed on the surface of an Al alloy being a base material for a wheel by a vacuum deposition method and a spattering method. After the surface of the Al film is modified and treated by means of an organic carboxylic acid dielectric water solution, electroless Mo plating is applied on the Al film. A continuous layer of diamond multicrystal particles is caused to grow on an Mo plating Al alloy base material through a gas phase method or by means of a micro CVD or a plasma CVD device. Namely, a diamond layer wherein the multicrystal particles of diamond are firmly bonded to each other and the large and small particles of multicrystal particles form an aggregate which is adhered to an Mo plated layer is formed. The drop and breakage of diamond particles owing to vibration and the impact of a polishing machine are reliably prevented from occurring.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は研削性能に優れたダイヤ
モンドホイールの製造方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a diamond wheel having excellent grinding performance.

【0002】[0002]

【従来の技術】研磨、研削、切断、削孔等の作業に使用
されるダイヤモンドホイールはダイヤモンド砥粒を接着
剤によってホイール表面に接着していたが、機械の振
動、衝撃による砥粒の欠けや破砕等から砥粒が脱離して
目詰まりを起こす等研削性能が劣化すると共に、ホイー
ルの発熱、ひいては被研削材をも破損したり、傷つける
ような欠点を有していた。ダイヤモンドホイールに使用
されているダイヤモンド砥粒は天然あるいは人工のダイ
ヤモンド単結晶からなる砥粒で、切削性能は優れている
が振動、衝撃に弱いと云う欠点を有している。これに反
してダイヤモンドの多結晶粒子は破壊強度が高く、特に
重研削に対しては好適である。然しながらダイヤモンド
の多結晶粒子は天然には殆ど産出されず工業的に利用さ
れることはなかった。また、一般的にダイヤモンドホイ
ールは比較的寸法の大きいものが多く、周速度も 500〜
300m/minと大きいため、ホイール基材に軽量で機械的
強度のあるアルミニウム合金を使用しているものが多
い。
2. Description of the Related Art Diamond wheels used for polishing, grinding, cutting, drilling, and the like had diamond abrasive grains adhered to the wheel surface with an adhesive. Grinding performance is deteriorated such that abrasive grains are detached from crushing and clogging occurs, and the wheel has a drawback that heat is generated and the material to be ground is also damaged or damaged. The diamond abrasive grains used in the diamond wheel are abrasive grains composed of natural or artificial diamond single crystals, and have excellent cutting performance, but have the drawback of being weak against vibration and impact. On the other hand, polycrystalline diamond particles have high fracture strength and are particularly suitable for heavy grinding. However, polycrystalline diamond particles were rarely produced in nature and never used industrially. Generally, most diamond wheels have relatively large dimensions, and the peripheral speed is 500 ~.
Since it is as large as 300 m / min, many aluminum alloys that are lightweight and have mechanical strength are used for the wheel base material.

【0003】然しながら、その表面に直接気相マイクロ
CVD 法でダイヤモンドコーティング(多結晶粒子の成長
および薄膜の生成を含む)を施すには、基材を 700℃以
上特には 800℃以上に加熱する必要があるのに、アルミ
ニウム合金の融点が 660℃近辺であるため、耐熱性がな
く事実上不可能であった。一方アルミニウムに耐熱性金
属や合金をスパッタリングや電気めっき、化学めっきで
直接結合させる、即ち金属結合させればアルミニウムの
耐熱性が著しく向上することが知られており、その例と
して、[技術資料「MoめっきAl基材」、津田研究所、19
90年10月22日]によれば、アルミニウムの表面を有機カ
ルボン酸誘導体を含む水溶液中でpH7、浴温90℃の条件
で5〜7分間浸漬して改質処理することによって置換め
っきに必要なAl+3イオンの適量を放出させた後、無電解
モリブデンめっきが可能なことが知られている。しかし
ながら、アルミニウム合金には、耐熱性金属や合金をス
パッタリング、電気めっきまたは化学めっきで直接結合
させることができないという欠点があった。
However, the gas phase micro
To apply diamond coating (including growth of polycrystalline particles and formation of thin film) by the CVD method, it is necessary to heat the substrate to 700 ° C or higher, especially 800 ° C or higher, but the melting point of the aluminum alloy is 660 ° C. Since it is in the vicinity, it has no heat resistance and is virtually impossible. On the other hand, it is known that the heat resistance of aluminum is remarkably improved by directly bonding a heat resistant metal or alloy to aluminum by sputtering, electroplating, or chemical plating. Mo-plated Al substrate ", Tsuda Laboratory, 19
According to [October 22, 1990], it is necessary for displacement plating by immersing the surface of aluminum in an aqueous solution containing an organic carboxylic acid derivative for 5 to 7 minutes at pH 7 and a bath temperature of 90 ° C for modification treatment. It is known that electroless molybdenum plating is possible after releasing an appropriate amount of various Al +3 ions. However, aluminum alloys have the drawback that heat-resistant metals and alloys cannot be directly bonded by sputtering, electroplating or chemical plating.

【0004】[0004]

【発明が解決しようとする課題】アルミニウム合金表面
に硬度に優れ接着強度の高いダイヤモンド砥粒を生成さ
せるには気相からダイヤモンド多結晶粒子を析出させる
必要がある。従って、本発明はかかる課題を解決するた
めにアルミニウム合金製ホイール表面にダイヤモンド多
結晶粒子を成長させ、研削性能に優れ、機械的強度の高
いダイヤモンドホイールを提供しようとするものであ
る。
In order to generate diamond abrasive grains having excellent hardness and high adhesive strength on the surface of an aluminum alloy, it is necessary to precipitate polycrystalline diamond particles from the vapor phase. Therefore, in order to solve such a problem, the present invention aims to provide a diamond wheel having excellent grinding performance and high mechanical strength by growing polycrystalline diamond particles on the surface of an aluminum alloy wheel.

【0005】[0005]

【課題を解決するための手段】本発明者等は、このよう
な課題を解決するためにアルミニウム合金の表面に気相
マイクロ CVD法を用いて多結晶ダイヤモンド粒子を成長
させる条件を鋭意検討した結果、アルミニウム合金基材
表面に特定の前処理を施すと良いとの知見を得て本発明
を完成させたもので、その要旨は、アルミニウム合金製
ホイール表面を真空蒸着法またはスパッタリング法によ
りアルミニウム被膜で被覆した後、有機カルボン酸誘導
体水溶液で改質処理し、次いでモリブデンの無電解メッ
キを施し、更にその表面を気相マイクロCVD 法によりダ
イヤモンド多結晶粒子の連続層で被覆することを特徴と
するダイヤモンドホイールの製造方法にある。
Means for Solving the Problems As a result of the present inventors, in order to solve such problems, as a result of diligent examination of conditions for growing polycrystalline diamond particles on the surface of an aluminum alloy by using a vapor phase micro CVD method. The present invention has been completed with the knowledge that it is better to perform a specific pretreatment on the surface of an aluminum alloy base material. The gist of the invention is that the surface of an aluminum alloy wheel is coated with an aluminum film by a vacuum deposition method or a sputtering method. After coating, diamond is characterized by being modified with an aqueous solution of an organic carboxylic acid derivative, then electrolessly plated with molybdenum, and further coating the surface with a continuous layer of diamond polycrystalline particles by a vapor phase micro CVD method. It is in the wheel manufacturing method.

【0006】以下、本発明を詳細に説明する。先ず、第
1工程としてホイールの基材となるアルミニウム合金の
表面にアルミニウムを公知の真空蒸着法あるいはスパッ
タリング法により 100〜 200μmの厚さに被覆する。ア
ルミニウムの真空蒸着は室温下、5×10-4Torr以下の眞
空で基材の加熱はしないで行えば良い。またスパッタリ
ングも眞空蒸着と略同様の条件で良い。
The present invention will be described in detail below. First, in the first step, aluminum is coated on the surface of an aluminum alloy, which is a base material of a wheel, to a thickness of 100 to 200 μm by a known vacuum vapor deposition method or sputtering method. Vacuum deposition of aluminum may be performed at room temperature under a vacuum of 5 × 10 −4 Torr or less without heating the substrate. Further, the sputtering may be performed under substantially the same conditions as the vacuum evaporation.

【0007】第2工程としてアルミニウム被膜の上に無
電解モリブデンめっきを施す。この無電解Moめっきも公
知の方法によれば良く、アルミニウム合金の表面を有機
カルボン酸誘導体を含む水溶液中で、pH7、浴温90℃の
条件で5〜7分間浸漬すれば、置換めっきに必要なAl+3
イオンの適量が放出され所謂改質処理が施される。有機
カルボン酸誘導体としては、くえん酸、こはく酸、酒石
酸、グルコン酸等のオキシカルボン酸とその塩類、アミ
ノ酸、およびEDTA等のポリアミノカルボン酸が例示さ
れ、これらの内から1種または2種以上を選択して使用
する。続いて無電解Moめっき浴中で、浴温85〜95℃、pH
6.5 〜7.5 の条件で5〜15分間浸積すれば、Moが継続的
に析出する。このMoめっき厚さは 0.2〜1μmが良く、
0.2μm未満ではしわとなり、1μmを越えると経済的
でなくなる。
As a second step, electroless molybdenum plating is applied on the aluminum coating. This electroless Mo plating may be carried out by a known method. If the surface of the aluminum alloy is immersed in an aqueous solution containing an organic carboxylic acid derivative at pH 7 and a bath temperature of 90 ° C for 5 to 7 minutes, it is necessary for displacement plating. Na Al +3
A proper amount of ions are released and a so-called modification treatment is performed. Examples of the organic carboxylic acid derivatives include citric acid, succinic acid, tartaric acid, oxycarboxylic acids such as gluconic acid and salts thereof, amino acids, and polyaminocarboxylic acids such as EDTA. One or more of these may be used. Select and use. Then, in the electroless Mo plating bath, bath temperature 85 ~ 95 ℃, pH
Mo is continuously precipitated when immersed for 5 to 15 minutes under the condition of 6.5 to 7.5. This Mo plating thickness should be 0.2-1 μm,
If it is less than 0.2 μm, it becomes wrinkled, and if it exceeds 1 μm, it becomes uneconomical.

【0008】Mo無電解めっき浴の組成としては、モリブ
デン酸アンモニウム等が用いられ、Moが 0.5〜3モル/リット
ル 、有機カルボン酸誘導体が4〜15モル/リットル 、塩化アン
モニウム等の無電解めっき浴安定剤が 0.1〜 0.5モル/リット
ル 、その他、pH調整剤としてアンモニア等が用いられ
る。
As the composition of the Mo electroless plating bath, ammonium molybdate or the like is used, 0.5 to 3 mol / liter of Mo, 4 to 15 mol / liter of an organic carboxylic acid derivative, and an electroless plating bath of ammonium chloride or the like. A stabilizer is 0.1 to 0.5 mol / liter, and ammonia or the like is used as a pH adjuster.

【0009】第3工程では以上のようにして作製したMo
めっきAl合金基材にマイクロ CVDあるいはプラズマ CVD
装置等を用いて気相法によりダイヤモンド多結晶粒子の
連続層を成長させる。この場合ダイヤモンドホイールに
は通常ダイヤモンドの粒子径によって粗仕上げ用、中仕
上げ用及び上仕上げ用と使い分けられているのでダイヤ
モンド多結晶粒子の粒子径を調整する必要があり、この
粒子径調整方法としては、気相から合成されるダイヤモ
ンドの生成床となる基材の表面を予めダイヤモンド粒子
で研磨して傷を付けておいて析出させる方法が用いられ
る。このダイヤモンド多結晶の平均粒径は粗仕上げ用で
は20〜 100μm、中仕上げ用では6〜12μm、上仕上げ
用では1〜5μmが好ましい。また、Moめっき層を被覆
し、成長したダイヤモンド多結晶粒子を強力に接着して
いるダイヤモンド薄膜は1〜 100μmが好ましく、1μ
m未満では接着強度不足となり、 100μmを越えても接
着強度が不足し剥れ易くなる。
In the third step, Mo prepared as described above
Micro CVD or plasma CVD on plated Al alloy substrate
A continuous layer of polycrystalline diamond particles is grown by a vapor phase method using an apparatus or the like. In this case, the diamond wheel is usually used for rough finishing, for intermediate finishing and for upper finishing depending on the particle diameter of the diamond, so it is necessary to adjust the particle diameter of the polycrystalline diamond particles. A method is used in which the surface of a base material, which is a bed for producing diamond synthesized from a gas phase, is preliminarily polished with diamond particles to be scratched and deposited. The average grain size of this polycrystalline diamond is preferably 20 to 100 μm for rough finishing, 6 to 12 μm for intermediate finishing, and 1 to 5 μm for upper finishing. The diamond thin film covering the Mo plating layer and strongly adhering the grown polycrystalline diamond particles is preferably 1-100 μm, and 1 μm is preferable.
If it is less than m, the adhesive strength will be insufficient, and if it exceeds 100 μm, the adhesive strength will be insufficient and peeling will occur easily.

【0010】第4工程は第3工程までで作製されたダイ
ヤモンドコーティングホイール基材を台金に接着剤、溶
接等で接合してダイヤモンドホイールとする。ホイール
基材のアルミニウム合金としては、組成式(重量%)で
表すと、Al-Si (Al:86〜90、 Si:10〜14) 、Al-Mg(Al:90
〜99.8、 Mg:0.2〜10)、Al-Si-Mg(Al:70〜89.8、Si:10〜1
4、 Mg:0.2〜10)等が例示されるが、強度および硬度の点
からAl-Si およびAl-Si-Mgが好適である。
In the fourth step, the diamond-coated wheel base material produced in the third step is joined to the base metal with an adhesive, welding or the like to form a diamond wheel. The aluminum alloy of the wheel base material is expressed by the composition formula (% by weight): Al-Si (Al: 86-90, Si: 10-14), Al-Mg (Al: 90
~ 99.8, Mg: 0.2 ~ 10), Al-Si-Mg (Al: 70 ~ 89.8, Si: 10 ~ 1
4, Mg: 0.2-10) and the like, but Al-Si and Al-Si-Mg are preferable in terms of strength and hardness.

【0011】以上の様な工程を経て製造されたダイヤモ
ンドホイールはダイヤモンド多結晶粒子がアルミニウム
合金基材に強力に接着しており、従来品のように振動、
衝撃に弱いと云う欠点を克服したもので、破壊強度の高
い、特に重研削向きと云う特徴がある。
The diamond wheel manufactured through the above steps has diamond polycrystal particles strongly adhered to the aluminum alloy base material, and vibrates like a conventional product.
It overcomes the drawback of being vulnerable to impact and has a high breaking strength, especially for heavy grinding.

【0012】[0012]

【実施例】以下、本発明の実施態様を実施例を挙げて具
体的に説明するが、本発明はこれらに限定されるもので
はない。 (実施例)外径20mmφ内径16mmφ厚さ10mmのアルミニウ
ム合金(87.7Al-12.0Si-0.3Mg 各重量)板をホイール基
材として用い、その表面を真空蒸着法によりAlを蒸着し
た。基材を真空蒸着装置EBX-60型(日本眞空技術 (株)
製商品名)の反応室に納め、内部を真空ポンプにて10-5
Torrまで真空にした後、電子線加熱器に電流を 350mA流
して純Al材を加熱し、約4時間蒸着処理してAl膜厚を 1
00μmとした。次にこの基材を洗剤脱脂(70℃×2分
間)、アルカリ脱脂(25℃×1分間)、改質処理(くえ
ん酸Na5モル/リットル 水溶液にpH7、浴温90℃で5分間浸積
する)、Mo無電解めっき(浴組成:モリブデン酸アンモ
ニウム1モル/リットル 、塩化アンモニウム0.2モル/リットル、くえ
ん酸Na9モル/リットル 溶液に90℃で10分間浸積する)の処理
を行いMoめっきAl基材を作製した。 次にこの基材をマ
イクロ CVD装置にてダイヤモンド多結晶粒子を被覆する
ため、前処理として平均粒子径0.25μmのダイヤモンド
パウダーを0.5 重量%エチルアルコール水溶液中に入
れ、超音波洗浄器で約30分間研磨を行った。次いでこれ
をアセトン洗浄した後、この基材をマイクロ CVD装置の
反応器内に入れ内部を10-2Torrまで真空にし、 CH42、
H298各容量%の混合ガスを導入し、内部圧力を25Torrに
して 2.45GHzのマイクロ波を 1.2KW印加し約50時間処理
してダイヤモンドコーティングを片面のみ行った。この
様にして作製したホイール基材をアルミニウム合金製の
台金にアクリル系接着剤により接着してダイヤモンドホ
イールを作製した。次に直径16mmφの軸金を通して研削
試験を次の様に行ない、結果を表1に示した。
EXAMPLES The embodiments of the present invention will be specifically described below with reference to examples, but the present invention is not limited thereto. (Example) An aluminum alloy (87.7Al-12.0Si-0.3Mg each weight) plate having an outer diameter of 20 mm, an inner diameter of 16 mm and a thickness of 10 mm was used as a wheel base material, and Al was vapor-deposited on its surface by a vacuum vapor deposition method. Vacuum evaporation system EBX-60 type (Nippon Shinku Technology Co., Ltd.)
(Product name) reaction chamber and vacuum pump for 10 -5
After evacuating to Torr, a current of 350 mA is applied to the electron beam heater to heat the pure Al material, and the Al film is evaporated to a thickness of 1
It was set to 00 μm. Next, this substrate is degreased with detergent (70 ° C x 2 minutes), alkaline degreased (25 ° C x 1 minute), and modified (sodium citrate 5 mol / liter) is immersed in an aqueous solution at pH 7 and bath temperature 90 ° C for 5 minutes. ), Mo electroless plating (bath composition: ammonium molybdate 1 mol / l, ammonium chloride 0.2 mol / l, sodium citrate 9 mol / l immersed in a solution at 90 ° C for 10 minutes). A material was produced. Next, in order to coat this base material with diamond polycrystal particles with a micro CVD device, as a pretreatment, diamond powder with an average particle size of 0.25 μm was placed in a 0.5 wt% ethyl alcohol aqueous solution, and was ultrasonically cleaned for about 30 minutes. Polished. Then, after it was washed with acetone, internal take this substrate in a reactor of a micro CVD apparatus was evacuated to 10 -2 Torr, CH 4 2,
A mixed gas of H 2 98 each volume% was introduced, the internal pressure was set to 25 Torr, and a microwave of 2.45 GHz was applied at 1.2 KW for about 50 hours to perform diamond coating on only one surface. The wheel base material thus produced was adhered to an aluminum alloy base metal with an acrylic adhesive to produce a diamond wheel. Next, a grinding test was conducted as follows through a shaft having a diameter of 16 mm, and the results are shown in Table 1.

【0013】研削試験 平面研削機:テーブル横送り:20m/min、湿式研削で水
をかける、ダイヤモンドホイール周速度:1,300 m/mi
n。 被研削物:Al-Si 合金(88Al- 12Si各重量%)。 切込量:研削で生じた研削粉の粒度(μmまたはmm)を
測定して切込深さを評価する。 破砕性:研削状況を目視観察により評価する。特大:非
常に良く研磨できる。大:良く研磨できる。 集中度:ダイヤモンド砥粒の含有量を重量%によって表
す。(cts/ccとの関係は、50%= 2.2cts/cc、75%=3.3ct
s/cc、100%=4.4cts/cc、150%=6.6cts/ccである)
Grinding test Surface grinder: table traverse: 20 m / min, wet grinding with water, diamond wheel peripheral speed: 1,300 m / mi
n. Workpiece: Al-Si alloy (88Al-12Si each weight%). Depth of cut: The depth of cut is evaluated by measuring the grain size (μm or mm) of the grinding powder generated by grinding. Crushability: The grinding condition is evaluated by visual observation. Oversized: Can be ground very well. Large: Can be polished well. Concentration: The content of diamond abrasive grains is expressed by weight%. (The relationship with cts / cc is 50% = 2.2cts / cc, 75% = 3.3ct
s / cc, 100% = 4.4cts / cc, 150% = 6.6cts / cc)

【0014】(比較例)従来市販されている同一寸法の
ダイヤモンドホイール(三京ダイヤモンド工業社製、型
番D140H100R30K-123、ダイヤモンド粒度:140 #、集中
度:100 )を用いて実施例と同様の研削試験を行ない、
その結果を表1に併記した。
(Comparative Example) Grinding in the same manner as in Example using a commercially available diamond wheel of the same size (manufactured by Sankyo Diamond Industrial Co., Ltd., model number D140H100R30K-123, diamond grain size: 140 #, concentration degree: 100) Test,
The results are also shown in Table 1.

【0015】[0015]

【表1】 [Table 1]

【0016】[0016]

【発明の効果】本発明によれば、ダイヤモンドの多結晶
粒子同志が強固に結び付き、多結晶粒子の大小粒子が集
合体をなしてMoめっき層に密着しているダイヤモンド薄
膜上に生成しているため、研磨機械の振動、衝撃等によ
りダイヤモンド粒子の抜け落ちや衝撃による割れ等が少
なく、ひいては研削性能の劣化が起こりにくい重研削用
ダイヤモンドホイールが得られ、産業上その利用価値は
極めて高い。
EFFECTS OF THE INVENTION According to the present invention, the polycrystalline particles of diamond are tightly bound to each other, and large and small particles of polycrystalline particles are formed on the diamond thin film which is aggregated and adheres to the Mo plating layer. Therefore, a diamond wheel for heavy grinding is obtained which is less likely to have diamond particles falling off or cracking due to shock due to vibration or shock of the polishing machine, and thus has a very high industrial utility value.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】アルミニウム合金製ホイール表面を真空蒸
着法またはスパッタリング法によりアルミニウム被膜で
被覆した後、有機カルボン酸誘導体水溶液で改質処理
し、次いでモリブデンの無電解メッキを施し、更にその
表面を気相マイクロCVD 法によりダイヤモンド多結晶粒
子の連続層で被覆することを特徴とするダイヤモンドホ
イルの製造方法。
1. A wheel surface made of an aluminum alloy is coated with an aluminum film by a vacuum deposition method or a sputtering method, modified with an aqueous solution of an organic carboxylic acid derivative, then subjected to electroless plating of molybdenum, and the surface thereof is vaporized. A method for producing a diamond foil, which comprises coating a continuous layer of polycrystalline diamond particles by a phase micro CVD method.
JP11405992A 1992-04-07 1992-04-07 Manufacture of diamond wheel Pending JPH05285842A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11405992A JPH05285842A (en) 1992-04-07 1992-04-07 Manufacture of diamond wheel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11405992A JPH05285842A (en) 1992-04-07 1992-04-07 Manufacture of diamond wheel

Publications (1)

Publication Number Publication Date
JPH05285842A true JPH05285842A (en) 1993-11-02

Family

ID=14628006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11405992A Pending JPH05285842A (en) 1992-04-07 1992-04-07 Manufacture of diamond wheel

Country Status (1)

Country Link
JP (1) JPH05285842A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014162206A (en) * 2013-02-27 2014-09-08 Mitsuboshi Diamond Industrial Co Ltd Scribing wheel, holder unit, scribe apparatus and method of producing scribing wheel
DE102021115887A1 (en) 2021-06-18 2022-12-22 Oerlikon Surface Solutions Ag, Pfäffikon Process for improving the adhesion of diamond coatings

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014162206A (en) * 2013-02-27 2014-09-08 Mitsuboshi Diamond Industrial Co Ltd Scribing wheel, holder unit, scribe apparatus and method of producing scribing wheel
DE102021115887A1 (en) 2021-06-18 2022-12-22 Oerlikon Surface Solutions Ag, Pfäffikon Process for improving the adhesion of diamond coatings

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