JPH0527518B2 - - Google Patents

Info

Publication number
JPH0527518B2
JPH0527518B2 JP62150517A JP15051787A JPH0527518B2 JP H0527518 B2 JPH0527518 B2 JP H0527518B2 JP 62150517 A JP62150517 A JP 62150517A JP 15051787 A JP15051787 A JP 15051787A JP H0527518 B2 JPH0527518 B2 JP H0527518B2
Authority
JP
Japan
Prior art keywords
pulse
outputs
output
oscillator
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62150517A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63313681A (ja
Inventor
Yoshihide Kanehara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP62150517A priority Critical patent/JPS63313681A/ja
Publication of JPS63313681A publication Critical patent/JPS63313681A/ja
Publication of JPH0527518B2 publication Critical patent/JPH0527518B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)
  • Lasers (AREA)
JP62150517A 1987-06-17 1987-06-17 パルスレ−ザ加工装置 Granted JPS63313681A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62150517A JPS63313681A (ja) 1987-06-17 1987-06-17 パルスレ−ザ加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62150517A JPS63313681A (ja) 1987-06-17 1987-06-17 パルスレ−ザ加工装置

Publications (2)

Publication Number Publication Date
JPS63313681A JPS63313681A (ja) 1988-12-21
JPH0527518B2 true JPH0527518B2 (enExample) 1993-04-21

Family

ID=15498589

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62150517A Granted JPS63313681A (ja) 1987-06-17 1987-06-17 パルスレ−ザ加工装置

Country Status (1)

Country Link
JP (1) JPS63313681A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6373026B1 (en) 1996-07-31 2002-04-16 Mitsubishi Denki Kabushiki Kaisha Laser beam machining method for wiring board, laser beam machining apparatus for wiring board, and carbonic acid gas laser oscillator for machining wiring board

Also Published As

Publication number Publication date
JPS63313681A (ja) 1988-12-21

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