JPH0527486Y2 - - Google Patents
Info
- Publication number
- JPH0527486Y2 JPH0527486Y2 JP797488U JP797488U JPH0527486Y2 JP H0527486 Y2 JPH0527486 Y2 JP H0527486Y2 JP 797488 U JP797488 U JP 797488U JP 797488 U JP797488 U JP 797488U JP H0527486 Y2 JPH0527486 Y2 JP H0527486Y2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- pair
- chamber
- connector
- connectors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 claims description 15
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 238000001816 cooling Methods 0.000 claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 15
- 238000010438 heat treatment Methods 0.000 description 8
- 238000007740 vapor deposition Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000003507 refrigerant Substances 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP797488U JPH0527486Y2 (enExample) | 1988-01-25 | 1988-01-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP797488U JPH0527486Y2 (enExample) | 1988-01-25 | 1988-01-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01114665U JPH01114665U (enExample) | 1989-08-02 |
| JPH0527486Y2 true JPH0527486Y2 (enExample) | 1993-07-13 |
Family
ID=31213441
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP797488U Expired - Lifetime JPH0527486Y2 (enExample) | 1988-01-25 | 1988-01-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0527486Y2 (enExample) |
-
1988
- 1988-01-25 JP JP797488U patent/JPH0527486Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01114665U (enExample) | 1989-08-02 |
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