JPH0527486Y2 - - Google Patents

Description

[Detailed Description of the Invention] <Industrial Application Field> The present invention relates to a thin film manufacturing apparatus using, for example, a vacuum evaporation method.

<Prior Art> Conventionally, this type of apparatus has been equipped with vapor deposition functional parts such as a crucible containing vapor deposition material and a heating filament surrounding the side wall of the crucible in a vacuum chamber. Each wiring of the functional component is individually screwed to a plurality of connection terminals provided on the wall of the vacuum chamber.

<Problems to be solved by the invention> By the way, according to conventional devices, when performing maintenance such as replacing vapor deposition functional parts, it is necessary to remove the wiring of the vapor deposition functional parts from the connection terminal by loosening the screws. When installing the evaporation functional component into the vacuum chamber again, it was necessary to screw the wiring of the component to the connection terminal. Work such as loosening screws must be done in a narrow space inside the vacuum chamber, and the worker is forced to work in an unnatural posture, making it difficult and time-consuming. It was hot.

Note that there are connector pairs on the market that can electrically connect or disconnect large current/high voltage wiring with a single touch, but these connector pairs have a low operating temperature range of around 200 degrees Celsius or more, and can be used in temperatures exceeding several hundred degrees Celsius. It was unsuitable for use in a vacuum chamber.

The purpose of the present invention is to enable easy electrical connection or disconnection between functional parts for thin film production and connection terminals, thereby reducing work time when replacing functional parts for thin film production, etc. An object of the present invention is to provide a thin film manufacturing apparatus.

<Means for Solving the Problems> The configuration for achieving the above object will be described with reference to drawings corresponding to embodiments.
A connector pair 6a, 6b is provided in the chamber 1, and the thin film manufacturing functional component (for example, heating filament) 3 and the connecting terminal 4 are electrically connected via the connector pair 6a, 6b.
Connector pair 6a, around connector pair 6a, 6b,
It is characterized in that a cooling means (water jacket) 5 is provided for cooling the water jacket 6b.

<Function> Even if the temperature inside the chamber 1 rises, the cooling means 5
This allows the connector pair 6a, 6b to be maintained at a predetermined temperature or lower. Therefore, it becomes possible to use a one-touch type connector pair 6a, 6b.

<Example> An example of the present invention will be described below based on the drawings.

The drawing is a longitudinal sectional view of a main part of an embodiment of the present invention, and shows an example in which the present invention is applied to a thin film manufacturing apparatus using a vacuum evaporation method.

A crucible 2 for accommodating a material to be deposited is disposed within a vacuum chamber 1 . The side wall of the crucible 2 is surrounded by a water jacket 5.

Two water channels 5a and 5b are formed along the wall of the water jacket 5. These two water channels 5a and 5b communicate with each other, and further communicate with a cooling water inlet A and an outlet B outside the vacuum chamber 1. Furthermore, two through holes 5c are bored in the wall of the water jacket 5 between the two water channels 5a and 5b.

On the other hand, current introducing shafts 3a are fixed to both ends of a heating filament 3 formed to surround the side wall of the crucible 1, respectively. A convex connector 6a is screwed to the end of each shaft 3a.

Further, two connecting terminals 4 are fixed to the wall of the vacuum chamber 1 via an insulating/sealing member 7, and each of the terminals 4 extends into the through hole 5c of the water jacket 5. Furthermore, a concave connector 6b having a concave portion into which a convex connector 6a can be inserted is screwed to the tip of each connection terminal 4. Note that a cylindrical insulating insulator 8 is inserted into each through hole 5c, and the connecting terminal 4
The wall of the water jacket 5 is insulated from the wall of the water jacket 5.

With the above configuration, by inserting each convex connector 6a into the recess of the concave connector 6b provided in the through hole 5a of the water jacket 5, the heating filament 3 and the connecting terminal 4 can be electrically connected. Furthermore, when performing work such as replacing the heating filament 3, the heating filament 3 can be disconnected from each connection terminal 4 by simply pulling out each current introduction shaft 3a upward. can. Here, since the convex and concave connectors 6a and 6b are connected within the through hole 5a of the wall of the water jacket 5, even if the temperature inside the vacuum chamber 1 rises, each connector 6a, 6b
can be maintained at a predetermined temperature, for example, below 200°C.

In this embodiment, the connector pair 6a, 6b is configured to be cooled by the water jacket 5 for cooling the peripheral portion of the crucible 2.
The present invention is not limited to this, but the connector pair 6
It goes without saying that another water jacket may be formed along the periphery of the connectors 6a and 6b, and the connector pair 6a and 6b may be cooled by this water jacket.

Further, in the above embodiment, the connector pair 6a, 6b is configured to be cooled by a cooling device that uses water as a refrigerant, but the present invention is not limited to this, and may be cooled using liquid nitrogen, freon gas, helium, etc. A cooling device using gas or other liquids or gases such as ammonia gas as a refrigerant may also be applied.

The above describes an example in which the present invention is applied to a heating filament in a thin film manufacturing apparatus using a vacuum evaporation method. However, the present invention is not limited to this, and can be applied to a thin film manufacturing apparatus using other methods such as a cluster ion beam method. can also be applied.

<Effects of the invention> As explained above, according to the invention, the functional component for thin film production and the connection terminal are configured to be electrically connected within the chamber via a pair of one-touch connectors, which is different from the conventional method. The functional parts for thin film production can be separated from the connection terminals without the need for work such as loosening screws, which was previously done, and maintenance such as replacement of the functional parts for thin film production is easier compared to the conventional location. It can be done easily and in a short time.

[Brief explanation of the drawing]

The drawing is a longitudinal sectional view of a main part of an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Vacuum chamber, 3... Heating filament, 4... Connection terminal, 5... Water jacket, 6a... Convex connector, 6b... Concave connector.

Claims (1)

[Scope of utility model registration request] In an apparatus for forming a thin film on the surface of a sample in the chamber by supplying electrical energy to a functional component for thin film production in the chamber through a connection terminal provided in the chamber, a connector is provided in the chamber. A pair of connectors is provided, and the functional unit for thin film production and the connection terminal are electrically connected via the pair of connectors, and a cooling means is provided around the pair of connectors to cool the pair of connectors. A thin film manufacturing device characterized by: