JPH052636B2 - - Google Patents
Info
- Publication number
- JPH052636B2 JPH052636B2 JP24351184A JP24351184A JPH052636B2 JP H052636 B2 JPH052636 B2 JP H052636B2 JP 24351184 A JP24351184 A JP 24351184A JP 24351184 A JP24351184 A JP 24351184A JP H052636 B2 JPH052636 B2 JP H052636B2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- single crystal
- liquid surface
- crystal growth
- melt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013078 crystal Substances 0.000 claims description 43
- 239000007788 liquid Substances 0.000 claims description 43
- 230000004927 fusion Effects 0.000 claims description 18
- 239000000155 melt Substances 0.000 claims description 17
- 238000010438 heat treatment Methods 0.000 claims description 12
- 238000005259 measurement Methods 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000000034 method Methods 0.000 description 8
- 230000008569 process Effects 0.000 description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 229910002804 graphite Inorganic materials 0.000 description 6
- 239000010439 graphite Substances 0.000 description 6
- 239000010453 quartz Substances 0.000 description 6
- 239000002994 raw material Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000001514 detection method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000009529 body temperature measurement Methods 0.000 description 2
- 239000005337 ground glass Substances 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000004033 diameter control Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000010309 melting process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/14—Heating of the melt or the crystallised materials
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
- C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24351184A JPS61122187A (ja) | 1984-11-20 | 1984-11-20 | 単結晶引上機 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24351184A JPS61122187A (ja) | 1984-11-20 | 1984-11-20 | 単結晶引上機 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61122187A JPS61122187A (ja) | 1986-06-10 |
| JPH052636B2 true JPH052636B2 (enrdf_load_stackoverflow) | 1993-01-12 |
Family
ID=17104988
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24351184A Granted JPS61122187A (ja) | 1984-11-20 | 1984-11-20 | 単結晶引上機 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61122187A (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2707736B2 (ja) * | 1989-04-10 | 1998-02-04 | 三菱マテリアル株式会社 | 単結晶育成方法 |
| US5408952A (en) * | 1991-04-26 | 1995-04-25 | Mitsubishi Materials Corporation | Single crystal growth method |
| US5746828A (en) * | 1996-01-16 | 1998-05-05 | General Signal Corporation | Temperature control system for growing high-purity monocrystals |
| TW541365B (en) * | 1996-08-30 | 2003-07-11 | Sumitomo Sitix Corp | Single crystal pulling method and single crystal pulling device |
| KR100951853B1 (ko) | 2007-12-27 | 2010-04-12 | 주식회사 실트론 | 잉곳 직경 조절장치 및 잉곳 성장방법 |
-
1984
- 1984-11-20 JP JP24351184A patent/JPS61122187A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61122187A (ja) | 1986-06-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |