JPH05251587A - Resin sealed semiconductor device - Google Patents
Resin sealed semiconductor deviceInfo
- Publication number
- JPH05251587A JPH05251587A JP4652392A JP4652392A JPH05251587A JP H05251587 A JPH05251587 A JP H05251587A JP 4652392 A JP4652392 A JP 4652392A JP 4652392 A JP4652392 A JP 4652392A JP H05251587 A JPH05251587 A JP H05251587A
- Authority
- JP
- Japan
- Prior art keywords
- resin
- semiconductor element
- island
- flow path
- resin flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Landscapes
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、樹脂封止半導体装置の
構造に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the structure of a resin-sealed semiconductor device.
【0002】[0002]
【従来の技術】従来の樹脂封止半導体装置は、図3に示
すようにアイランド4上に銀ペーストなどの接着剤で半
導体素子1を固着し、半導体素子1とインナーリード6
を金属細線5で接続した後、樹脂3により封止される。
表面実装に用いる樹脂封止半導体装置の厚さは、メモリ
ーカードの登場により急速に薄化傾向にあり、1mm以
下の厚さをもつ樹脂封止半導体装置が製品化されてい
る。これらはThin−Small−Outline−
Pakage(以下TSOPと略す)と呼ばれ近年急速
に生産量が増加している。TSOPには半導体装置の外
部リードのピッチと導出方向によりタイプ1とタイプ2
がある。タイプ2は、現在のメモリー製品の主流パッケ
ージであるSingle−Outline−Jlead
(以下SOJと略す)と半導体素子上の電極位置の互換
性があるため、今後数量がもっとも伸びると予測されて
いる。2. Description of the Related Art In a conventional resin-sealed semiconductor device, as shown in FIG. 3, a semiconductor element 1 is fixed on an island 4 with an adhesive such as silver paste, and the semiconductor element 1 and inner leads 6 are connected.
Are connected with a metal thin wire 5 and then sealed with a resin 3.
The thickness of the resin-encapsulated semiconductor device used for surface mounting is rapidly decreasing with the advent of memory cards, and resin-encapsulated semiconductor devices having a thickness of 1 mm or less have been commercialized. These are Thin-Small-Outline-
It is called “Page” (hereinafter abbreviated as “TSOP”), and the amount of production is increasing rapidly in recent years. Type 1 and type 2 are used for the TSOP depending on the pitch of the external leads of the semiconductor device and the lead-out direction.
There is. Type 2 is Single-Outline-Jlead, which is the mainstream package for current memory products.
It is predicted that the number will increase the most in the future because of the compatibility of the electrode position on the semiconductor element with (hereinafter abbreviated as SOJ).
【0003】[0003]
【発明が解決しようとする課題】上述した従来の樹脂封
止半導体装置で装置の厚さが1mm以下の場合、ボイド
が発生し易いという欠点があった。薄型の樹脂封止半導
体装置の場合、半導体素子およびアイランドと封入金型
壁面で構成される樹脂流路は非常に狭いため、この部分
の樹脂流動速度は半導体素子およびアイランドの側面を
通過する樹脂の流速よりもかなり遅い。したがって、半
導体素子上面およびアイランド下面が樹脂で充填される
前に、側面を進んだ樹脂でベンド孔が塞がれてしまい、
半導体素子上面およびアイランド下面の樹脂未充填部分
がボイドとして残存し外観が著しく損なわれる。The conventional resin-encapsulated semiconductor device described above has a drawback that voids are easily generated when the device has a thickness of 1 mm or less. In the case of a thin resin-sealed semiconductor device, the resin flow path composed of the semiconductor element and the island and the wall surface of the encapsulating mold is very narrow. It is much slower than the flow velocity. Therefore, before filling the upper surface of the semiconductor element and the lower surface of the island with the resin, the bend hole is blocked by the resin advancing on the side surface,
The resin unfilled portions on the upper surface of the semiconductor element and the lower surface of the island remain as voids, and the appearance is significantly impaired.
【0004】[0004]
【課題を解決するための手段】本発明の樹脂封止半導体
装置は、リードフレームおよび半導体素子からの樹脂厚
を一定にした断面をもつ構造を備えている。The resin-sealed semiconductor device of the present invention has a structure having a cross section in which the resin thickness from the lead frame and the semiconductor element is constant.
【0005】[0005]
【実施例】次に本発明について図面を参照して説明す
る。図1(a),(b)は、本発明の第1の実施例の樹
脂封止半導体装置の斜視図とAA断面図である。樹脂封
止半導体装置は半導体素子1とアイランド4,インナー
リード6,外部リード7からなるリードフレーム2と樹
脂3と金属細線5により構成される。半導体素子1を銀
ペーストなどによりアイランド4に固着したのち半導体
素子1のインナーリード6は金属細線5で結線される。The present invention will be described below with reference to the drawings. 1A and 1B are a perspective view and a sectional view taken along line AA of a resin-sealed semiconductor device according to a first embodiment of the present invention. The resin-sealed semiconductor device is composed of a semiconductor element 1, a lead frame 2 including an island 4, inner leads 6, and external leads 7, a resin 3, and a thin metal wire 5. After fixing the semiconductor element 1 to the island 4 with silver paste or the like, the inner leads 6 of the semiconductor element 1 are connected by the fine metal wires 5.
【0006】半導体素子1のインナーリード6の結線が
完了したリードフレーム2は封入金型にセットされ図1
(a)の矢印方向から樹脂が注入される。また金型内の
空気は、対向するベント側より排出される。樹脂は半導
体素子1上面およびアイランド4下面と金型壁面で構成
される狭く、流動抵抗が大きい流路よりも半導体素子1
とアイランド4の側部の流路の方を早く進む。装置の厚
さが薄くなるほど、この樹脂流動の差は顕著になり、厚
さが1.0mm以下になると、側部流路の樹脂はベント
側に到達した段階で半導体素子1上面、アイランド4下
面の樹脂充填は終了していない。その後側部を進みベン
ド側に到達した樹脂はベンド全体を塞いでしまい半導体
素子1上面およびアイランド4下面の未充填部がボイド
として残存する。本発明は半導体素子1上面およびアイ
ランド4下面と側部におけるインナーリード6上下面の
樹脂流路厚aを均一にした断面をもち、この断面で樹脂
の流動長を各部分でそろえ未充填部をなくしボイド発生
を防止するものである。The lead frame 2 in which the connection of the inner leads 6 of the semiconductor element 1 is completed is set in an encapsulating mold, and FIG.
Resin is injected from the direction of the arrow in (a). The air in the mold is discharged from the opposite vent side. The resin is composed of the upper surface of the semiconductor element 1 and the lower surface of the island 4 and the mold wall surface, and is narrower than the flow path having a large flow resistance.
And proceed faster along the flow path on the side of the island 4. This difference in resin flow becomes more significant as the device becomes thinner, and when the thickness becomes 1.0 mm or less, the resin in the side flow passage reaches the vent side, and the upper surface of the semiconductor element 1 and the lower surface of the island 4 are reached. The resin filling has not been completed. The resin that has proceeded to the side portion after that and reached the bend side blocks the entire bend, and the unfilled portions of the upper surface of the semiconductor element 1 and the lower surface of the island 4 remain as voids. The present invention has a cross section in which the resin flow path thickness a of the upper surface of the semiconductor element 1 and the lower surface of the island 4 and the upper and lower surfaces of the inner lead 6 on the sides are made uniform, and the flow length of the resin is made uniform at each of the cross sections and the unfilled portion is formed. This is to prevent the occurrence of voids.
【0007】図2(a),(b)は本発明の第2の実施
例の斜視図とAA断面図である。この実施例では樹脂流
路の均一性を高めるために半導体素子1およびアイラン
ド4の側面からの樹脂厚aを等しくする断面を設けたこ
とを特徴とする。この実施例の利点は樹脂の流れの均一
性がより高められるというところである。2 (a) and 2 (b) are a perspective view and an AA sectional view of a second embodiment of the present invention. This embodiment is characterized in that a cross section for equalizing the resin thickness a from the side surfaces of the semiconductor element 1 and the island 4 is provided in order to improve the uniformity of the resin flow path. The advantage of this embodiment is that the homogeneity of the resin flow is increased.
【0008】[0008]
【発明の効果】以上説明したように本発明は、樹脂封止
半導体装置において半導体素子上面およびアイランド下
面の樹脂流路幅と半導体素子とアイランド側面の樹脂流
路幅を均一化する断面をもつことにより樹脂流動長を各
流路にて等しくし、未充填によるボイド発生を防止する
という効果を有する。このような断面部をもつことによ
り従来構造ではボイド発生率が5〜20%であったもの
が0%へ減少する。As described above, according to the present invention, in the resin-sealed semiconductor device, the resin channel width on the upper surface of the semiconductor element and the lower surface of the island and the resin channel width on the side surface of the semiconductor element and the island are made uniform. Thus, the resin flow length is made equal in each flow path, and there is an effect of preventing the occurrence of voids due to unfilling. By having such a cross-sectional portion, the void generation rate of 5 to 20% in the conventional structure is reduced to 0%.
【図1】(a),(b)は本発明の第1の実施例の斜視
図とAA断面図である。1A and 1B are a perspective view and an AA sectional view of a first embodiment of the present invention.
【図2】(a),(b)は本発明の第2の実施例の斜視
図とAA断面図である。2 (a) and 2 (b) are a perspective view and an AA sectional view of a second embodiment of the present invention.
【図3】(a),(b)は従来の樹脂封止半導体装置の
斜視図とAA断面図である。3A and 3B are a perspective view and a sectional view taken along line AA of a conventional resin-sealed semiconductor device.
1 半導体素子 2 リードフレーム 3 樹脂 4 アイランド 5 金属細線 6 インナーリード 7 外部リード 1 semiconductor element 2 lead frame 3 resin 4 island 5 thin metal wire 6 inner lead 7 external lead
Claims (1)
レームおよび半導体素子からの樹脂の厚さが均一になる
断面をもつことを特徴とする樹脂封止半導体装置。1. A resin-encapsulated semiconductor device having a cross section in which the resin from the lead frame and the semiconductor element has a uniform thickness.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4652392A JPH05251587A (en) | 1992-03-04 | 1992-03-04 | Resin sealed semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4652392A JPH05251587A (en) | 1992-03-04 | 1992-03-04 | Resin sealed semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH05251587A true JPH05251587A (en) | 1993-09-28 |
Family
ID=12749640
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4652392A Withdrawn JPH05251587A (en) | 1992-03-04 | 1992-03-04 | Resin sealed semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH05251587A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014154780A (en) * | 2013-02-12 | 2014-08-25 | Toyota Motor Corp | Semiconductor device |
-
1992
- 1992-03-04 JP JP4652392A patent/JPH05251587A/en not_active Withdrawn
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014154780A (en) * | 2013-02-12 | 2014-08-25 | Toyota Motor Corp | Semiconductor device |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19990518 |