JPH05249342A - Optical waveguide device - Google Patents

Abstract

PURPOSE:To provide the optical waveguide device which can improve the non- self-aligned connection of optical fibers and an optical waveguide and the accuracy of the positions in a horizontal direction and the workability for optical axis alignment. CONSTITUTION:This optical waveguide device has an optical waveguide fitting hole 9 to be hollowed atop a packaging substrate 6, holding grooves 8 which are hollowed at both ends atop the packaging substrate 6 so as to be communicated with the optical waveguide fitting hole 9 and hold the optical film and step parts 5 which are provided on the surface of a optical waveguide substrate 1 and exist on both sides of the optical waveguide 2. The rising surfaces of the step parts 5 are brought into tight contact with the top edges at the flanks of the optical waveguide fitting hole 9 to couple the optical fibers 7, 7 and the optical waveguide 2 facing each other at the time of fitting the optical waveguide 2 into the optical waveguide fitting hole 9.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical component in the field of communication information processing, and more particularly to improvement of an optical waveguide device.

[0002]

2. Description of the Related Art As is well known, an optical waveguide device is arranged such that an optical waveguide is interposed between optical fibers facing each other, and these optical fibers and the optical waveguide are connected and connected in a line, and one optical fiber passes through the optical waveguide. Is a device that smoothly transmits an optical signal to the other optical fiber. In the case of smoothly transmitting an optical signal using this optical waveguide device, it is extremely important to connect the optical waveguides that are opposed to each other with the intervening optical waveguides. Therefore, conventionally, as described in JP-A-63-278471, many optical waveguide devices have been proposed which facilitate the connection between the optical fiber and the optical waveguide.

[0003]

However, in the conventional optical waveguide device, it has been necessary to spend a lot of time for connecting the optical fiber and the optical waveguide. In addition, in the conventional optical waveguide device, the positional relationship between the optical fiber and the optical waveguide greatly depends on the component accuracy, so that the component must be processed with high accuracy. On the other hand, in the conventional optical waveguide device, the V-groove of the mounting substrate and the optical fiber are aligned on the optical axis, and then the V-groove and the optical fiber are bonded with resin. However, since the temperature characteristics of the resin are extremely poor, there is a problem in that misalignment occurs.

The present invention has been made in view of the above, and provides an optical waveguide device capable of achieving an unaligned connection between an optical fiber and an optical waveguide, improving the positional accuracy in the horizontal direction, and improving the workability of optical axis alignment. It is intended to be provided.

[0005]

In the first aspect of the present invention, in order to achieve the above-mentioned object, an optical waveguide fitting hole provided in the upper surface of a mounting board and a communication hole communicating with the optical waveguide fitting hole. In this way, holding grooves are provided at both ends of the upper surface of the mounting substrate to hold the optical fiber, and stepped portions that are provided on the surface of the optical waveguide substrate and are located on both sides of the optical waveguide. When the optical fiber is fitted into the waveguide fitting hole, the step portion is closely attached to the side surface of the optical waveguide fitting hole to couple the optical fiber and the optical waveguide which face each other.

In the second aspect of the present invention, in order to achieve the above object, an optical waveguide fitting hole provided in the upper surface of a mounting board and the mounting so as to communicate with the optical waveguide fitting hole. Holding grooves that are provided at both ends of the upper surface of the substrate to hold the optical fiber, an optical waveguide centering guide that remains on the upper surface of the mounting substrate and is located on the side of the optical waveguide fitting hole, and an optical waveguide substrate. Is provided on the surface of the optical waveguide and is located on the side of the optical waveguide, and when the optical waveguide is fitted into the optical waveguide fitting hole, the optical waveguide aligning guide and the optical waveguide aligning groove are provided. It is characterized in that the optical axis of the optical waveguide and the optical axis of the optical waveguide which are opposed to each other by fitting the concave and convex portions are matched with each other.

[0007]

According to the first aspect of the present invention, when the optical waveguide is fitted into the optical waveguide fitting hole, the optical waveguide fitting hole, which has been processed by etching with high accuracy, can be accurately fitted to the upper edge of the side surface of the optical waveguide fitting hole. For example, since the optical fiber and the optical waveguide which face each other are closely adhered by closely contacting the elevation step processed by etching, the optical fiber and the optical waveguide can be connected in a non-centered manner in a short time.

Further, according to the second aspect of the present invention, when the optical waveguide is fitted into the optical waveguide fitting hole, the highly accurately designed optical waveguide aligning guide and the optical waveguide aligning groove are engaged with each other. The optical axis of the optical waveguide and the optical axis of the optical waveguide which face each other are aligned with each other by performing the centering fitting operation, so that the workability of the optical axis alignment can be greatly improved while preventing the axis shift.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The first invention of the present invention will be described in detail below with reference to an embodiment shown in FIGS. The optical waveguide device according to the first aspect of the present invention has a step on the side surface of the optical waveguide fitting hole 9 when the optical waveguide 2 formed on the optical waveguide substrate 1 is fitted into the optical waveguide fitting hole 9 of the mounting substrate 6. The portions 5 are closely attached to each other so that the optical fibers 7 and the optical waveguide 2 facing each other are coupled.

The optical waveguide substrate 1 is shown in FIGS.
As shown in (c), (d), and (e), it is configured in a rectangular plane shape, and a waveguide layer (not shown) is superposed on the surface, and
A substantially Y-shaped optical waveguide 2 is internally provided in the waveguide layer in the longitudinal direction, and after the optical waveguide 2 is internally provided, the optical waveguide 2 is formed to have a substantially convex cross-section as the surface is etched. Optical waveguide board 1
1 (a), (b), (c), (d) and (e) will be described. First, the optical waveguide substrate 1 (see FIG. 1 (a)) is provided with a waveguide layer and an optical waveguide 2. At the time of forming, the alignment marks 3 are simultaneously formed at the four corners of each substrate 1 of the optical waveguide path by using the alignment mark mask formed in the same mask as the optical waveguide 2 (see FIG. 1B). Next, a negative resist (regular photoresist) 4 is applied all over the waveguide layer, and a photolithographic mask (reticle) having a predetermined pattern (not shown) is adjusted on the alignment mark 3 to adjust the portion corresponding to the step of the negative resist 4. To expose. Then, the negative resist 4 is developed to form a resist pattern (see FIG.
(See (c)). Then, the exposed surface of the waveguide layer exposed from both sides of the negative resist 4 which plays the role of this mask is CCl.
Etching is performed by RIE using ₄ to form the step portions 5 on both sides of the optical waveguide substrate 1 (see FIG. 1D). After that, the negative resist 4 is removed from the waveguide layer (see FIG. 1E).

The step portion 5 remaining and protruding from both sides of the optical waveguide substrate 1 is stepped to a predetermined height (depth) based on the control of the etching time to be controlled, and the predetermined height is accompanied by the control. The alignment in the direction (depth direction) is extremely easy.

On the other hand, the mounting board 6 is shown in FIGS.
As shown in (c), (d), and (e), for example, a thick silicon plate is formed into a substantially rectangular shape in a plane, and one end of the upper surface has a center
A holding groove 8 for holding the tip of the optical fiber 7 is provided in the longitudinal direction, and a plurality of holding grooves 8 for holding the tips of the optical fibers 7 are arranged in the longitudinal direction at the other end of the upper surface. Based on the etching process after the holding groove 8 is recessed, the holding groove 8 is formed substantially at the center of the upper surface.
An optical waveguide fitting hole 9 communicating with the above is recessed in a plane rectangle.

A method of manufacturing the mounting board 6 will be described with reference to FIGS.
To explain based on (c), (d) and (e), first, referring to FIG.
The holding groove 8 is provided in the upper surface of the mounting substrate 6 shown in FIG.
Alignment mark 3 is marked on the upper surface (see FIG. 2 (b))
Then, a positive resist (negative photoresist) 10 is applied all over the upper surface, and then an optical waveguide of the positive resist 10 is formed by using the same photolithographic mask used in the step of FIG. The fitting hole surrounding portion is allowed to cure and remain, and a resist pattern of the same size as the negative resist 4 but having the opposite shape and opposite shape is formed from the positive resist 10 (see FIG. 2C). Then, the portion corresponding to the optical waveguide fitting hole of the positive resist 10 which plays the role of this mask is CCl.
₄ is etched by RIE to form an optical waveguide fitting hole 9 in the center of the upper surface of the mounting substrate 6 (see FIG. 2D), and then the positive resist 10 is removed from the upper surface of the mounting substrate 6 (see FIG. 2D). 2 (e)).

The optical waveguide fitting hole 9 is recessed so that the edge thereof and the holding groove 8 have a predetermined positional relationship during etching. Further, the edge of the optical waveguide fitting hole 9 and the center of the holding groove 8 are configured so as to correspond to the positional relationship between the optical waveguide 2 and the edge of the step portion 5 during etching.

Therefore, the plurality of optical fibers 7 and 7 facing each other
The optical waveguide 2 is interposed between the optical fibers 7 and
In order to connect 7 and the optical waveguide 2 in a row, as shown in FIG. 3, the optical waveguide substrate 1 is attached to the center of the upper surface of the mounting substrate 6, and the optical waveguide 2 is fitted in the optical waveguide fitting hole 9. It suffices to join the optical waveguides 7 and the optical waveguides 2 arranged in line so that the raised portions of the step portion 5 are closely overlapped and superposed on the upper edge of the side surface of the optical waveguide fitting hole 9 without a gap.

According to the above structure, when the optical waveguide 2 is fitted into the optical waveguide fitting hole 9, the step portion highly accurately etched is formed on the upper edge of the side surface of the optical waveguide fitting hole 9 which is highly accurately etched. Since the optical fibers 7 and 7 and the optical waveguide 2 which are opposed to each other by closely contacting the vertical surfaces of 5 are coupled, the optical fibers 7 and 7 and the optical waveguide 2 can be connected in an extremely short time, and the optical fibers 7 and 7 can be positioned in the horizontal direction without positioning. It is possible to connect and couple the optical fibers 7 and 7 with the optical waveguide 2 with non-centering connection and with high efficiency. Further, using the same photolithographic mask, the positive resist 1 having the same size as the negative resist 4 but the opposite normal and reverse directions is used.
Since a resist pattern of 0 is formed, it is expected that the positioning work, which requires extremely accurate positioning, will be greatly facilitated.

In the above embodiment, the negative resist 4 is used for the optical waveguide substrate 1 and the positive resist 10 is used for the mounting substrate 6, respectively. However, the positive resist 10 is used for the optical waveguide substrate 1 and the mounting substrate 6 is used. Even if each of the negative resists 4 is used, the same operation and effect as those of the above-mentioned embodiment can be obtained.

Next, the second invention of the present invention will be described in detail based on the embodiment shown in FIGS. The optical waveguide device according to the second aspect of the present invention includes an optical waveguide alignment guide 12 and an optical waveguide alignment guide when the optical waveguide 2 formed on the optical waveguide substrate 1 is fitted into the optical waveguide fitting hole 9 of the mounting substrate 6. The optical fiber 7 and the optical waveguide 2 which are fitted in the core groove 11 by concavo-convex fitting and face each other.
The optical axes of are matched.

As shown in FIG. 5, the optical waveguide substrate 1 has a planar rectangular shape, and a waveguide layer (not shown) is superposed on the surface of the optical waveguide substrate 1, and a substantially X-shaped optical waveguide 2 is longitudinally formed on the waveguide layer. The optical waveguide centering grooves 11 located on both sides of the optical waveguide 2 are provided inwardly in the direction, and are recessed in the longitudinal direction. The pair of optical waveguide alignment grooves 11 are highly accurately recessed in a parallel pattern having a width of 0.2 mm, a height of 0.062 mm, and an interval of 5 mm, for example, and cooperate with the optical waveguide alignment guide 12 to be fitted. It has a function of exerting a heart effect and matching the optical axes of the optical fibers 7 and 7 facing each other with each other.

Although not shown, a pair of optical waveguide alignment grooves 11
Explaining the method of recessing, first, a negative resist (positive photoresist) is applied all over the waveguide layer, then,
While using a photolithographic mask (reticle) with a predetermined pattern, the portion of the negative resist corresponding to the optical waveguide alignment groove is photosensitized to form a resist pattern using the photoprinting principle, and then the negative resist that plays the role of this mask is formed. SF6, 20scem, 10P
Dry etching is performed under the conditions of a and 60 minutes to form a pair of optical waveguide alignment grooves 11 in the waveguide layer, and then the negative resist is removed from the waveguide layer.

On the other hand, as shown in FIG. 4, the mounting substrate 6 is made of, for example, a silicon plate of 10 mm × 60 mm, and an optical waveguide fitting hole 9 to be fitted into the optical waveguide 2 is recessed in a plane substantially rectangular shape at the center of the upper surface. The optical waveguide centering guides 12 for mounting the optical waveguide fitting holes 9 are provided on both sides of the upper surface so as to be projected, and the optical waveguide fitting holes 9 are provided at both ends of the upper surface. A plurality of holding grooves 8 that communicate with each other are arranged side by side and are recessed.

As shown in FIG. 4, the pair of optical waveguide alignment guides 12 are, for example, formed in a parallel pattern with a width of 0.2 mm, a height of 0.062 mm, and an interval of 5 mm so as to be projected with high precision. Has been extended to. Further, as shown in FIG. 4, the plurality of holding grooves 8 are highly accurately recessed in a parallel pattern having a width of 0.125 mm, a height of 0.062 mm, and an interval of 0.250 mm so as to match the position of the optical waveguide 2. It has a function of holding the tip of the optical fiber 7.

Although not shown, a method of forming the upper surface of the mounting substrate 6 excluding the holding groove 8 will be described. First, a positive resist (negative photoresist) is applied all over the upper surface of the mounting substrate 6, and then the above-mentioned method is performed. Using the same photolithographic mask as the photolithographic mask, the portion corresponding to the optical waveguide alignment guide of the positive resist is photo-cured, and from this positive resist, a resist pattern of the same size as the negative resist, which is the opposite of normal and reverse, is formed, and then, The portion corresponding to the non-optical waveguide centering guide of positive resist which plays the role of this mask is SF6, 20sce.
The optical waveguide fitting hole 9 is recessed in the upper surface of the mounting substrate 6 by dry etching under the conditions of m, 10 Pa, and 60 min, and a pair of optical waveguide aligning guides 12 are left protruding. Remove the positive resist from the top surface.

Therefore, the plurality of optical fibers 7 and 7 facing each other
The optical waveguide 2 is interposed between the optical fibers 7 and
7 and the optical waveguide 2 are connected and connected in a row, as shown in FIGS.
As shown in FIG. 2, the optical waveguide substrate 1 is attached to the center of the upper surface of the mounting substrate 6, the optical waveguide 2 is fitted into the optical waveguide fitting hole 9, and the pair of optical waveguide aligning guides 12 are fitted to the pair of optical waveguide aligning guides 12. Groove 11
It suffices to connect the optical fibers 7 and the optical waveguides 2, which are respectively arranged by fitting in concave and convex, and the optical waveguide 2 in a line.

According to the above construction, when the optical waveguide 2 is fitted into the optical waveguide fitting hole 9, the highly accurately designed optical waveguide aligning guide 12 and the optical waveguide aligning groove 11 are fitted to each other by concavo-convex fitting. The optical axis of the optical waveguide and the optical axis of the optical waveguide that face each other are aligned to prevent axial misalignment.
It is expected that the workability of optical axis alignment will be greatly improved. Furthermore, since the same photolithographic mask is used to form a resist pattern of a positive resist having the same size as the negative resist and the reverse of the reverse direction, it is expected that the positioning work, which requires extremely accurate positioning, will be greatly facilitated.

In the above-mentioned embodiment, the negative resist is used for the optical waveguide substrate 1 and the positive resist is used for the mounting substrate 6, respectively. However, the positive resist is used for the optical waveguide substrate 1 and the negative resist is used for the mounting substrate 6. , Respectively, the same effects as those of the above-mentioned embodiment can be obtained. Further, in the above embodiment, only dry etching is shown, but it goes without saying that KOH (wet) may be used as an etching material. Further, although the case where the optical waveguide fitting hole 9 has a rectangular shape in the plan view is shown, the optical waveguide fitting hole 9 may be formed in a V groove shape or the like.

[0027]

As described above, according to the first invention of the present invention, when the optical waveguide is fitted into the optical waveguide fitting hole, the side edge of the optical waveguide fitting hole which is etched with high precision is Since the optical fiber and the optical waveguide that face each other are closely attached by closely adhering the elevated surface of the step portion that has been etched with high precision, the optical fiber and the optical waveguide can be connected in an extremely short time, and in addition, there is no centering connection, and There is a remarkable effect that the optical fiber and the optical waveguide can be connected and coupled with high efficiency.

Further, according to the second aspect of the present invention, when the optical waveguide is fitted into the optical waveguide fitting hole, the highly accurately designed optical waveguide aligning guide and the optical waveguide aligning groove are engaged with each other. The optical axis of the optical fiber and the optical axis of the optical waveguide that oppose each other are surely aligned with each other, so that the axis misalignment is surely prevented,
Moreover, there is a remarkable effect that the workability of optical axis alignment can be greatly improved.

[Brief description of drawings]

1 (a), (b), (c), (d), (e) are perspective views showing a manufacturing process of an optical waveguide substrate of an optical waveguide device according to a first aspect of the present invention.

2 (a), (b), (c), (d), (e) are perspective views showing a manufacturing process of a mounting substrate of an optical waveguide device according to a first aspect of the present invention.

FIG. 3 is an exploded perspective view showing an assembled state of the optical waveguide device according to the first aspect of the present invention.

FIG. 4 is a perspective view showing a mounting substrate of an optical waveguide device according to a second invention of the present invention.

FIG. 5 is a perspective view showing an optical waveguide substrate of an optical waveguide device according to a second invention of the present invention.

FIG. 6 is an exploded perspective view showing an assembled state of the optical waveguide device according to the second invention of the present invention.

FIG. 7 is a perspective view showing a state after assembly of the optical waveguide device according to the second invention of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Optical waveguide substrate, 2 ... Optical waveguide, 5 ... Step, 6 ... Mounting substrate, 7 ... Optical fiber, 8 ... Retaining groove, 9 ... Optical waveguide fitting hole, 11 ... Optical waveguide aligning groove, 12 ... Optical Waveguide alignment guide.

Claims (2)

[Claims] 1. An optical waveguide fitting hole provided on the upper surface of a mounting board, and holding grooves provided on both ends of the upper surface of the mounting board for communicating with the optical waveguide fitting hole and holding optical fibers.
The optical waveguide board is provided with a stepped portion that is located on both sides of the optical waveguide board, and the stepped portion is closely attached to the side surface of the optical waveguide fitting hole when the optical waveguide board is fitted into the optical waveguide fitting hole. An optical waveguide device characterized by coupling an optical fiber and an optical waveguide facing each other. 2. An optical waveguide fitting hole provided on the upper surface of the mounting board, and holding grooves provided at both ends of the upper surface of the mounting board so as to communicate with the optical waveguide fitting hole and holding optical fibers.
An optical waveguide alignment guide that remains on the upper surface of the mounting substrate and is located on the side of the optical waveguide fitting hole, and an optical waveguide alignment guide that is recessed on the surface of the optical waveguide substrate and located on the side of the optical waveguide. A core groove is provided, and when the optical waveguide is fitted into the optical waveguide fitting hole, the optical waveguide aligning guide and the optical waveguide aligning groove are fitted in concavo-convex to match the optical axis of the optical fiber and the optical axis of the optical waveguide facing each other. An optical waveguide device characterized by: