JPH06167634A - Connection structure of optical waveguide component - Google Patents

Abstract

PURPOSE:To provide a connection structure of the optical waveguide component which easily and precisely enables optical coupling between an optical waveguide and another optical component without requiring any special high-precision technology. CONSTITUTION:A groove 1a in a regular quadrangular pyramid shape is made in a waveguide substrate 1 where an optical waveguide is formed and the waveguide substrate 1 is held on a base plate 4 between the groove 1a and base plate 4 across spheres 7. The depth of the groove 1a and the diameter of the spheres 7 are so set that the height of the base plate 4 in an optical waveguide end surface formed on the waveguide substrate 1 matches the height of the end surfaces of optical fibers 5, held on the base plate 4 by being inserted and held between fiber array substrates 2 and 3, from the base plate 4, and the vertical positions of the optical waveguide end surface and the end surfaces of the optical fibers 5 are aligned with each other.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a connection structure for an optical waveguide component in which an end face of the optical waveguide is brought into contact with another optical component so that the optical waveguide is optically coupled to the other optical component.

[0002]

2. Description of the Related Art Conventionally, as a connection structure for connecting optical fibers, there is one disclosed in Japanese Patent Application Laid-Open No. 54-73061. The publication discloses the following optical connection structure between optical fiber arrays. Grooves having a V-shaped cross section are formed in parallel on each of the pair of prepared silicon (Si) substrates, and guide pins are engaged with the respective V grooves of one Si substrate. One end of this guide pin projects from the end of the substrate, and the V groove formed in the other Si substrate is engaged with this projection. In addition to the V-shaped groove with which the guide pin is engaged, each Si substrate is formed with a plurality of V-shaped grooves parallel to the V-shaped groove for holding the optical fiber. The end faces of the respective Si substrates are corrected by the guide pins so that their positions are abutted against each other, and the end faces of the optical fibers held by the respective Si substrates are brought into contact with each other, whereby the respective optical fiber arrays are optically coupled.

Regarding the connection structure between the optical fiber and the optical waveguide, there are some which use the V groove and the guide pin similar to the above. In other words, the optical waveguide is formed on one of the pair of Si substrates in which the V groove is formed, and the guide pin is engaged with the V groove so that the optical waveguide is relatively held to the other Si substrate. The correct position is corrected as described above.
By this position correction, the end face of the optical waveguide and the end face of the optical fiber are brought into contact with each other, and the optical waveguide and the optical fiber are optically coupled.

[0004]

However, in the above-mentioned conventional optical connection structure, it is difficult to always maintain the opening size of the V-shaped groove formed on the Si substrate, that is, the groove width at a constant width. . That is, the V-grooves are formed by using the etching anisotropy of the Si substrate having different etching rates depending on the crystal direction. The direction of the slits formed in the etching mask corresponding to the V-grooves is changed to the Si substrate. It is necessary to match the specific crystal orientation of. However, if the slit direction of the mask opened in a strip shape and the specific crystallographic direction of the Si substrate that are not aligned do not match, the Si substrate has a groove width larger than the slit width of the mask due to etching anisotropy. The V groove is formed. A change in the groove width means a change in the groove depth, and a change in the V groove depth changes the contact position between the guide pin and the Si substrate. As a result, the positional relationship of each Si substrate with respect to the guide pin changes.

In the Si substrate holding the optical fiber, the V groove engaging with the guide pin and the V groove holding the optical fiber are formed by the same anisotropic etching using the same mask. Even if is deviated from the crystallographic direction of the Si substrate, the width of each V groove formed is expanded at the same ratio. Therefore, the relative position where the guide pin and the optical fiber are in contact with each V groove of the Si substrate does not change.

On the other hand, in the Si substrate on which the optical waveguide is formed, first, the optical waveguide is formed on the substrate surface, and then the guide pin is engaged with the substrate surface having a predetermined positional relationship with the optical waveguide. V groove is formed. Therefore, in mask alignment when forming the V-groove, the width of the V-groove formed when the slit direction of the etching mask deviates with respect to the crystal direction of the Si substrate, and the width of the V-groove formed increases. An error occurs in the positional relationship with the waveguide. Therefore, even if the guide pin is engaged with the V groove formed on the waveguide substrate and the V groove of the optical fiber holding substrate is engaged with this guide pin, there is an error in the position of the optical waveguide with respect to the guide pin. The end faces of the optical waveguide and the end face of the optical fiber did not exactly coincide with each other, and each optical axis was displaced. As a result,
Optical propagation loss will occur at the connection between the optical waveguide and the optical fiber.

Further, in order to make the slit direction of the mask and the crystal direction of the Si substrate coincide with each other, a highly accurate mask pattern alignment technique is required, and the productivity is deteriorated.

The present invention has been made in order to solve such a problem, and does not require a special high-precision technique, and can easily and accurately optically couple an optical waveguide component and another optical component. An object of the present invention is to provide a connection structure for an optical waveguide component that can be manufactured.

[0009]

SUMMARY OF THE INVENTION The present invention provides an optical waveguide component connection structure in which an optical waveguide end face is brought into contact with another optical component to optically couple the optical waveguide to the other optical component. A conical groove or a conical groove whose head is cut is dug in the waveguide substrate on which the waveguide substrate is held on this base with a sphere sandwiched between the groove and the base. The depth of the groove and the diameter of the sphere depend on the height of the optical axis of the optical waveguide formed on the waveguide substrate from the base of the optical axis of other optical components held on the base. It is characterized in that it is set to a value that matches the height, and the vertical positions of the optical waveguide component and other optical components are matched.

The grooves are formed on the waveguide substrate at regular intervals, the other grooves are formed on other optical components at an interval equal to this interval, and linear grooves parallel to each other are formed on the base at an interval equal to this interval. A parallel groove is formed, and a sphere is sandwiched between the groove formed on the waveguide substrate and the parallel groove formed on the base so that the waveguide substrate and the base are opposed to each other and formed on another optical component. The other grooves formed on the base and the parallel grooves formed on the base are aligned with each other so that the other optical component and the base face each other, and the optical axis of the optical waveguide formed on the waveguide substrate The horizontal position of the optical component is aligned with the optical axis of the optical component.

The other optical component is an optical fiber, and the depth of the groove and the diameter of the sphere are such that the height of the end face of the optical waveguide formed on the waveguide substrate from the base is sandwiched between the holding substrates. It is characterized in that it is set to a value that matches the height of the end face of the optical fiber held on the base from the base, and the vertical positions of the end face of the optical waveguide and the end face of the optical fiber are matched.

The other optical component is an optical fiber, and the grooves are formed at regular intervals on the waveguide substrate, and the other grooves are formed on the holding substrate holding the optical fiber on the base at intervals equal to this interval. The linear parallel grooves are formed on the base in parallel with each other at an interval equal to this interval, and a sphere is sandwiched between the groove formed on the waveguide substrate and the parallel groove formed on the base. The waveguide substrate and the base are opposed to each other, the respective positions of the other grooves formed on the holding substrate and the parallel grooves formed on the base are aligned, and the holding substrate and the base are opposed to each other. The optical waveguide end face formed on the waveguide substrate and the optical fiber end face held on the holding substrate are aligned in horizontal position.

Further, the waveguide substrate is made of a silicon substrate having a (1,0,0) plane as a main surface, and a conical groove or a truncated conical groove cut in the waveguide substrate is anisotropic. It is characterized by being formed by etching.

The anisotropic etching is characterized in that it is performed using a mask having a circular opening.

[0015]

The groove is excavated in a conical shape or a conical shape in which the head is cut, so that the center position of the conical shape does not change even if the direction of the conical shape is deviated. Therefore, the center position of the groove is determined without depending on the crystal direction of the waveguide substrate.

For example, when the waveguide substrate is a Si substrate having the (1,0,0) plane as the main surface, the orthogonal <
The 0,1, / 1> direction and the <0, / 1, / 1> direction are forward mesa directions, and the waveguide substrate has a quadrangular pyramid cross section or a quadrangular pyramid whose head is cut by anisotropic etching. Shaped grooves are formed. At this time, when etching is performed using a mask having a circular opening, a square pyramidal groove is formed in the waveguide substrate due to the etching anisotropy of the Si substrate.

Further, the mutual vertical position between the waveguide substrate having the optical waveguide formed thereon and the other optical component is determined by the depth of the groove formed in the waveguide substrate and between the groove and the base. It is set by the diameter of the ball that is sandwiched. The mutual horizontal position between the waveguide substrate on which the optical waveguide is formed and the other optical component is
It is set by aligning the grooves formed at regular intervals on the waveguide substrate and other optical components with the parallel grooves formed on the base.

[0018]

1 is a perspective view showing a connection structure between an optical waveguide and an optical fiber according to a first embodiment of the present invention.

Under this connection structure, the waveguide substrate 1 and the fiber array substrates 2 and 3 are opposed to the base plate 4, and the optical waveguide formed on the waveguide substrate 1 and the fiber array substrates 2 and 3 are connected to each other. The held optical fiber 5 is optically connected.

The base plate 4 is made of stainless steel or Si material, and linear grooves 4a are formed in parallel on the surface thereof. The parallel grooves 4a are formed by machining or anisotropic etching to have a V-shaped cross section, and the distance between the centers of the grooves 4a is set to a distance L.

The waveguide substrate 1 is made of Si material, and regular square pyramidal grooves 1a are formed at the four corners of the substrate. FIG. 2 is a trihedral view showing the waveguide substrate 1. The figure (a) is a plan view and the figure (b) is a waveguide substrate 1 along the line IIb-IIb.
The fracture | rupture side view which was fractured | broken, and the same figure (c) has shown the fracture | rupture front view which the waveguide substrate 1 was fractured | broken along the IIc-IIc line. An optical waveguide 6 is formed on the surface of the waveguide substrate 1, and light incident from one optical waveguide end face 6a is emitted from the other optical waveguide end face 6b, 6c, 6d. Further, from this three-view drawing, it is understood that the groove 1a is formed in a regular quadrangular pyramid shape having a square opening surface as the bottom surface and one point as the apex. The centers of the grooves 1a in the width direction are formed at a distance L, and are set equal to the intervals of the parallel grooves 4a formed on the base plate 4. When the vertices of each groove 1a are connected, a quadrangle with one side being L is formed. A sphere 7 shown in FIG. 1 is sandwiched between each of the grooves 1a formed in the waveguide substrate 1 and the parallel groove 4a formed in the base plate 4, and the waveguide substrate 1 and the base plate 4 are separated from each other by this sphere. Opposed via 7. Each ball 7 is made of, for example, a stainless material, and the diameter of each ball 7 is set to be equal. The groove 1a is formed as follows.

The waveguide substrate 1 is a Si substrate having a (1,0,0) plane as a main surface, and has a <0,1, / 1> direction and a direction orthogonal to anisotropic etching using KOH as an etchant. The <0, / 1, / 1> direction is the forward mesa direction. The groove 1a is formed by using an etching mask made of SiO ₂ or SiN after the optical waveguide 6 is formed on the waveguide substrate 1. In this etching mask, each groove 1
A circular window centered on a point corresponding to the apex of a is formed, and the waveguide substrate 1 exposed in the circular window is dipped in a KOH solution. In the Si substrate immersed in the solution, due to the anisotropy in which the etching rate varies depending on the crystal direction, the forward mesa-shaped V groove is formed in the two orthogonal directions. As a result, the regular pyramid-shaped groove 1a having the apex at the center of the circular window is dug. The bottom surface of this regular quadrangular pyramid is opened as a square on the surface of the waveguide substrate 1 and is inscribed in the circular window. The direction of one side of this square matches the <0,1, / 1> direction of the Si substrate, and the direction of the other side perpendicular to this one side is <0,1, / 1> of the Si substrate.
/ 1, / 1> direction.

In this embodiment, since the pattern opened in the etching mask is circular and the groove 1a to be dug is in the shape of a cone, it is not necessary to consider the Si crystal direction of the waveguide substrate 1. That is, if the mutual relationship of the center positions of the circular window matches the mutual relationship of the center positions of the groove 1a,
The pitch L and the groove depth between the grooves 1a formed by anisotropic etching do not change regardless of the crystal direction of the waveguide substrate 1.

For example, the etching mask is the waveguide substrate 1.
If it does not match the crystallographic direction of, the direction in which the groove 1a is formed is only shifted as shown in FIG. In this case, the position of the apex of each regular quadrangular pyramid coincides with the center of the circular window of the etching mask, and the direction of each side of the square of the regular quadrangular pyramid bottom coincides with two orthogonal directions exhibiting anisotropy.
Even if the orientation of the regular quadrangular pyramid formed in the groove 1a shifts as described above, the center of the sphere 7 coincides with the center of the groove 1a. this is,
This is because the contact points between each side surface of the regular quadrangular pyramid and the sphere 7 are on the same circumference centered on the vertex of the regular quadrangular pyramid. Further, even if the direction in which the groove 1a is formed is deviated, the depth of the groove 1a does not change. Therefore, the groove 1a can be formed without considering the crystal orientation of the waveguide substrate 1, and the positional relationship of the waveguide substrate 1 with respect to the base plate 4 is determined only by setting the groove depth and the groove interval. To be done.

Since the groove 1a can be formed regardless of the crystallographic direction of the waveguide substrate 1a, it is not necessary to align the optical waveguide 6 with the crystallographic direction of the waveguide substrate 1.

The fiber array substrates 2 and 3 are made of stainless steel or Si material, and each substrate surface has 2
Kinds of grooves 2a, 2b and 3a, 3b are formed. The grooves 2a and 3a are a pair of parallel grooves with which a guide pin 8 made of a stainless material or the like is engaged, and the grooves 2b and 3b are grooves in which the optical fiber 5 is held. Each groove 2a, b, 3
Each of a and b has a V-shaped cross section, and when the fiber array substrates 2 and 3 are made of a stainless material, they are machined, and when they are made of a Si material, each groove is formed by machining or anisotropic etching. Formed at the same time. The center interval between the parallel grooves 2a and 3a with which the guide pin 8 is engaged is set to a distance L, which is set equal to the interval between the parallel grooves 4a formed on the base plate 4. The positions of the grooves 2b and 3b holding the optical fiber 5 with respect to the grooves 2a and 3a with which the guide pins 8 are engaged correspond to the end face positions 6a to 6d of the optical waveguide 6 with respect to the groove 1a in the waveguide substrate 1. is doing. A guide pin 8 is engaged between each of the grooves 2a, 3a formed on the fiber array substrates 2, 3 and the parallel groove 4a formed on the base plate 4, and the fiber array substrate 2,
3 and the base plate 4 are opposed to each other. Further, the optical fibers 5 are engaged with the grooves 2b and 3b formed in the fiber array substrates 2 and 3, and the optical fibers 5 are sandwiched between the fiber array substrates 2 and 3 and the base substrate 4 and placed on the base plate 4. Held in.

The positional relationship between the fiber array substrates 2 and 3 with respect to the base plate 4 is set by the groove spacing and groove depth of the grooves 2a and 3a.

In such a structure, when the components are arranged on the base plate 4 as shown by the arrows, the state shown in FIG. 4 is obtained. In the figure, the same parts as those in FIG.

The waveguide substrate 1 is held on the base plate 4 via the sphere 7, and the fiber array substrates 2 and 3 are held on the base plate 4 via the guide pins 8. The holding state of the waveguide substrate 1 is shown in the cross-sectional view shown in FIG. 5 taken along the line V-V, and the waveguide substrate 1 is in contact with the sphere 7 between the regular quadrangular pyramid-shaped groove 1a and the parallel groove 4a. 1 is held on the base plate 4. The sphere 7 fitted in the groove 1a slides in the parallel groove 4a, so that the waveguide substrate 1 moves on the base plate 4 in a direction regulated by the parallel groove 4a. Further, the fiber array substrates 2 and 3 are held on the base plate 4 in contact with the guide pins 8 between the V-shaped parallel grooves 2a and 3a and the parallel grooves 4a, and the parallel grooves are guided by the guide pins 8. 4a moves in the forming direction. Therefore, when the fiber array substrates 2 and 3 move toward the center of the base plate 4 and the waveguide substrate 1 is sandwiched between the fiber array substrates 2 and 3, the optical waveguide 6 and the optical fiber 5 are optically separated. Join.

That is, the position of the waveguide substrate 1 on which the optical waveguide 6 is formed in the vertical direction with respect to the base plate 4 is set by the diameter of the sphere 7 and the depth of the regular quadrangular pyramid-shaped groove 1a. The optical axis height of the optical waveguide 6 from the surface of the base plate 4 is set to a value that matches the optical axis height of the optical fiber 5 from the surface of the base plate 4. In addition, the waveguide substrate 1
The horizontal positions of the fiber array substrates 2 and 3 relative to each other are parallel grooves 4a formed in the base plate 4 at a distance L.
The grooves 1a formed in the waveguide substrate 1 at a distance L,
By setting the parallel grooves 2a and 3a formed at the distance L on the fiber array substrates 2 and 3 to coincide with each other, a predetermined positional relationship is set. That is, the waveguide substrate 1
And each groove 1 formed in the fiber array substrates 2 and 3
By aligning a, 2a, 3a with the parallel groove 4a of the base plate 4, an optical waveguide 6 having a predetermined positional relationship with the groove 1a and an optical fiber 5 having a similar positional relationship with the grooves 2a, 3a are formed. The respective optical axes of are aligned in the horizontal position.

As a result, the end face of the optical waveguide 6 and the end face of the optical fiber 5 are brought into contact with each other under the above-described connection structure, so that the optical waveguide 6 and the optical fiber 5 are vertically and horizontally aligned with each optical axis. The positions are aligned with no alignment, and good optical coupling without optical propagation loss is realized. In this optical coupling, the light propagated from one optical fiber 5 held on the fiber array substrate 2 enters from one end face 6a of the optical waveguide 6 formed on the waveguide substrate 1 and the other three end faces. 6
It is emitted from b, c and d. Since the three optical fibers 5 held by the fiber array substrate 3 are optically coupled to each of these end faces, the light branched by the optical waveguide 6 is propagated to each optical fiber 5.

In the connection structure of the optical waveguide and the optical fiber according to the present embodiment as described above, when the groove 1a for position guide is formed in the waveguide substrate 1, the crystal orientation of the waveguide substrate 1 is not taken into consideration. The mask can be adjusted. Therefore, the problem that the mask pattern for forming the groove is displaced from the crystallographic direction of the Si substrate and the width of the groove formed is widened as in the conventional case is solved. Further, it is possible to connect the optical waveguide and the optical fiber with high productivity without requiring a highly accurate mask alignment technique.

FIG. 6 is a perspective view showing a connection structure between an optical waveguide and an optical fiber according to the second embodiment of the present invention.
The same parts as those in FIG.

The connection structure according to the second embodiment and the first structure
The difference from the connection structure according to the embodiment is that a sphere 11 is provided instead of the guide pin 8 between the grooves 2a, 3a formed in the fiber array substrates 2, 3 and the parallel groove 4a formed in the base plate 4. The structure is the same as that of the first embodiment except that it is sandwiched. The diameters of these spheres 11 are set equal to each other. In this second embodiment, each fiber array substrate 2, 3 has a parallel groove 4a with a sphere 11 in between.
The movement direction is regulated by the movement, and it moves on the base plate 4. In this embodiment as well, similar to the above embodiments, it is not necessary to consider the crystallographic direction of the Si substrate when forming the groove 1a in the waveguide substrate 1, and the same effect as that of the above embodiments is obtained.

FIG. 7 is a perspective view showing the connection structure between the optical waveguide and the optical fiber according to the third embodiment of the present invention.
The same parts as those in FIG.

The connection structure according to the third embodiment and the second structure
The difference from the connection structure according to the embodiment is that the fiber array substrates 2 and 3 are made of Si material and the V-shaped grooves 2a and 3a are formed.
Is a point where regular square pyramid shaped grooves 2c and 3c are formed at an interval of a distance L, and the other points are the above second points.
It has the same structure as the embodiment. In this third embodiment,
Since the sphere 11 fits into the square pyramidal grooves 2c and 3c, the sphere 11 does not separate from the fiber array substrates 2 and 3. Therefore, each fiber array substrate 2, 3 is connected to the base plate 4
Can be easily moved with respect to. Each of these grooves 2
c and 3c are formed in the same manner as when forming the groove 1a in the waveguide substrate 1. Also in the present embodiment, the above first and second
The same effect as that of each of the embodiments can be obtained.

In the description of each of the above embodiments, the groove 1a formed in the waveguide substrate 1 is described as a regular quadrangular pyramid groove, but the anisotropic etching time for the waveguide substrate 1 is adjusted. The shape of the groove 1a may be formed in a regular quadrangular pyramid shape whose head is cut. In the third embodiment, the regular square pyramidal grooves 2c formed in the fiber array substrates 2 and 3,
The same applies to 3c. Further, in the description of each of the above-described embodiments, the groove 4a formed in the base plate 4 and the grooves 2a, 3a formed in the fiber array substrates 2 and 3 are described as having a V-shaped cross section, but the cross section is trapezoidal. It may be formed in. Even if each groove is formed in this way, the same effect as that of each of the above-described embodiments can be obtained.

[0038]

As described above, according to the present invention, the groove formed in the optical waveguide is formed in a conical shape or a conical shape in which the head is cut. The position does not change. Therefore, the center position of the groove is determined without depending on the crystal direction of the waveguide substrate. Further, the mutual vertical position between the waveguide substrate on which the optical waveguide is formed and the other optical component is determined by the depth of the groove formed on the waveguide substrate and the sphere sandwiched between the groove and the base. Set by the diameter of. The horizontal position of the waveguide substrate on which the optical waveguide is formed and the other optical components are parallel to each other based on the grooves formed at regular intervals on the waveguide substrate and the other optical components. Set by matching the groove.

Therefore, according to the present invention, there is provided a connection structure for an optical waveguide component, which does not require any special high-precision technique and can optically couple the optical waveguide and another optical component easily and accurately. It

[Brief description of drawings]

FIG. 1 is a perspective view showing a connection structure between an optical waveguide and an optical fiber according to a first embodiment of the present invention.

FIG. 2 is a trihedral view showing a waveguide substrate.

FIG. 3 is a plan view showing a groove formed when the mask position is displaced.

FIG. 4 is a perspective view showing a state in which a waveguide substrate and a fiber array substrate are held on a base plate.

FIG. 5 is a cross-sectional view showing a held state of a waveguide substrate and a base plate.

FIG. 6 is a perspective view showing a connection structure between an optical waveguide and an optical fiber according to a second embodiment of the present invention.

FIG. 7 is a perspective view showing a connection structure between an optical waveguide and an optical fiber according to a third embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Waveguide substrate, 1a ... Regular pyramidal groove, 2, 3 ... Fiber array substrate, 2a, b, 3a, b ... V-shaped cross-section groove, 4 ... Base plate, 4a ... Parallel groove, 5 ... Optical fiber, 6
... optical waveguide, 7 ... sphere, 8 ... guide pin.

Claims (9)

[Claims] 1. A connection structure for an optical waveguide component, wherein an end face of the optical waveguide is brought into contact with another optical component so that the optical waveguide is optically coupled to the other optical component, in a waveguide substrate having the optical waveguide formed therein. A pyramidal groove having a conical shape or a cut head is dug, and the waveguide substrate is held on the base with a sphere interposed between the groove and the base, and the depth of the groove and The diameter of the sphere is such that the height of the optical axis of the optical waveguide formed on the waveguide substrate from the base is the base of the optical axis of the other optical component held on the base. The optical waveguide component connection structure is characterized in that the vertical positions of the optical waveguide component and the other optical component are matched with each other. 2. The waveguide substrate is provided with the grooves at regular intervals, the other optical component is provided with other grooves at an interval equal to the interval, and the linear base is parallel to the base at an interval equal to the interval. A parallel groove is formed, and a sphere is sandwiched between the groove formed on the waveguide substrate and the parallel groove formed on the base so that the waveguide substrate and the base are opposed to each other. The other groove formed on the optical component and the parallel groove formed on the base are aligned with each other so that the other optical component and the base are opposed to each other and are formed on the waveguide substrate. The optical waveguide component connection structure according to claim 1, wherein the optical axes of the optical waveguide and the optical axes of the other optical components are aligned in horizontal position. 3. The other optical component is an optical fiber, and the depth of the groove and the diameter of the sphere are such that the height of the end face of the optical waveguide formed on the waveguide substrate from the base is:
It is set to a value that matches the height from the base of the optical fiber end face held on the base by being sandwiched by a holding substrate, and the vertical positions of the optical waveguide end face and the optical fiber end face are matched. The connection structure for an optical waveguide component according to claim 1, wherein 4. The other optical component is an optical fiber, and the grooves are formed at regular intervals on a waveguide substrate, and another groove is formed on a holding substrate for holding the optical fiber on the base at intervals equal to the interval. Grooves are formed, linear parallel grooves are formed on the base in parallel with each other at equal intervals, and a sphere is formed between the grooves formed on the waveguide substrate and the parallel grooves formed on the base. The waveguide substrate and the base are sandwiched so as to face each other, and the respective positions of the other groove formed in the holding substrate and the parallel groove formed in the base are aligned with each other, and The said base is made to oppose and the horizontal position of the said optical waveguide end surface formed in the waveguide substrate and the said optical fiber end surface hold | maintained at the holding | maintenance board | substrate is made to correspond. Connection structure of optical waveguide components. 5. The other groove formed on the holding substrate has a V-shaped or trapezoidal cross section, and a guide pin is sandwiched between the groove and the parallel groove formed on the base. 5. The optical waveguide component according to claim 4, wherein the positions of the other groove and the parallel groove are aligned and the optical fiber is held between the holding substrate and the base. Connection structure. 6. The other groove formed on the holding substrate has a V-shaped or trapezoidal cross section, and a sphere is sandwiched between the groove and the parallel groove formed on the base. 5. The optical waveguide component connection according to claim 4, wherein the respective positions of the other groove and the parallel groove are aligned with each other, and the optical fiber is held between the holding substrate and the base. Construction. 7. The other groove formed in the holding substrate is formed in a cone shape or a cone shape in which the head is cut, and a sphere is formed between the groove and the parallel groove formed in the base. 5. The optical waveguide according to claim 4, wherein the other groove and the parallel groove are sandwiched and the respective positions of the parallel groove are aligned with each other, and the optical fiber is held between the holding substrate and the base. Connection structure of parts. 8. The waveguide substrate is made of a silicon substrate having a (100) plane as a main surface, and the groove formed in the waveguide substrate is formed by anisotropic etching. A connection structure for an optical waveguide component according to claim 7. 9. The connection structure of an optical waveguide component according to claim 8, wherein the anisotropic etching is performed using a mask having a circular opening.