JPH0524240Y2 - - Google Patents
Info
- Publication number
- JPH0524240Y2 JPH0524240Y2 JP1987021638U JP2163887U JPH0524240Y2 JP H0524240 Y2 JPH0524240 Y2 JP H0524240Y2 JP 1987021638 U JP1987021638 U JP 1987021638U JP 2163887 U JP2163887 U JP 2163887U JP H0524240 Y2 JPH0524240 Y2 JP H0524240Y2
- Authority
- JP
- Japan
- Prior art keywords
- glove box
- box body
- glove
- radioactive contaminants
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000356 contaminant Substances 0.000 claims description 20
- 230000002285 radioactive effect Effects 0.000 claims description 20
- 239000000428 dust Substances 0.000 claims description 15
- 238000004140 cleaning Methods 0.000 claims 1
- 229920003023 plastic Polymers 0.000 description 12
- 239000004033 plastic Substances 0.000 description 12
- 238000007689 inspection Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 239000003758 nuclear fuel Substances 0.000 description 1
- 244000144985 peep Species 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
Landscapes
- Manipulator (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987021638U JPH0524240Y2 (ru) | 1987-02-16 | 1987-02-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987021638U JPH0524240Y2 (ru) | 1987-02-16 | 1987-02-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63128500U JPS63128500U (ru) | 1988-08-23 |
| JPH0524240Y2 true JPH0524240Y2 (ru) | 1993-06-21 |
Family
ID=30818261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987021638U Expired - Lifetime JPH0524240Y2 (ru) | 1987-02-16 | 1987-02-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0524240Y2 (ru) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014156137A1 (ja) * | 2013-03-29 | 2014-10-02 | パナソニックヘルスケア株式会社 | アイソレータシステム |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5432160U (ru) * | 1977-08-05 | 1979-03-02 | ||
| JPS5942894U (ja) * | 1982-09-09 | 1984-03-21 | 株式会社東芝 | グロ−ブボツクス |
-
1987
- 1987-02-16 JP JP1987021638U patent/JPH0524240Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5432160U (ru) * | 1977-08-05 | 1979-03-02 | ||
| JPS5942894U (ja) * | 1982-09-09 | 1984-03-21 | 株式会社東芝 | グロ−ブボツクス |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63128500U (ru) | 1988-08-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4532970A (en) | Particle-free dockable interface for integrated circuit processing | |
| US4616683A (en) | Particle-free dockable interface for integrated circuit processing | |
| JPS60220945A (ja) | 集積回路処理装置 | |
| KR100428827B1 (ko) | 측면에도어를구비한300㎜미세환경포드 | |
| US4684021A (en) | Bottom loading wafer carrier box | |
| JPH05157302A (ja) | クリーンベンチモジュールシステム | |
| EP0138473A2 (en) | System for integrated circuit processing | |
| US20030070404A1 (en) | Glove box contamination-proof mail handling | |
| EP0951050B1 (en) | Container for transporting precision substrates | |
| JPH0524240Y2 (ru) | ||
| US3498687A (en) | Movable access paneling for ultra clean work stations | |
| GB2126710A (en) | Storage case to prevent dust contamination | |
| EP0151336B1 (en) | System for integrated circuit processing | |
| JP6542609B2 (ja) | 機器封じ込め装置 | |
| JP6688017B2 (ja) | 機器封じ込め装置 | |
| JP2004269214A (ja) | 浄化空気通風式の保管設備 | |
| JP2013200302A (ja) | ホットセル | |
| Bässler et al. | Containment technology | |
| JP2002079117A (ja) | 安全キャビネット | |
| TW471008B (en) | Substrate transport device | |
| JPH0745488A (ja) | 清浄雰囲気保持容器 | |
| KR20150124639A (ko) | 폐기물통이 내장된 클린벤치 | |
| KR101061997B1 (ko) | 엘씨디 레티클 케이스 | |
| RU9223U1 (ru) | Лабораторный бокс | |
| JP6557200B2 (ja) | 物品搬出入装置および物品搬出入方法 |