JPH0524159Y2 - - Google Patents

Info

Publication number
JPH0524159Y2
JPH0524159Y2 JP1983161221U JP16122183U JPH0524159Y2 JP H0524159 Y2 JPH0524159 Y2 JP H0524159Y2 JP 1983161221 U JP1983161221 U JP 1983161221U JP 16122183 U JP16122183 U JP 16122183U JP H0524159 Y2 JPH0524159 Y2 JP H0524159Y2
Authority
JP
Japan
Prior art keywords
charged particle
focus coil
accelerating
current
voltage dividing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1983161221U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6067700U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16122183U priority Critical patent/JPS6067700U/ja
Publication of JPS6067700U publication Critical patent/JPS6067700U/ja
Application granted granted Critical
Publication of JPH0524159Y2 publication Critical patent/JPH0524159Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
JP16122183U 1983-10-17 1983-10-17 荷電粒子加速装置 Granted JPS6067700U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16122183U JPS6067700U (ja) 1983-10-17 1983-10-17 荷電粒子加速装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16122183U JPS6067700U (ja) 1983-10-17 1983-10-17 荷電粒子加速装置

Publications (2)

Publication Number Publication Date
JPS6067700U JPS6067700U (ja) 1985-05-14
JPH0524159Y2 true JPH0524159Y2 (h) 1993-06-18

Family

ID=30354380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16122183U Granted JPS6067700U (ja) 1983-10-17 1983-10-17 荷電粒子加速装置

Country Status (1)

Country Link
JP (1) JPS6067700U (h)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4812880U (h) * 1971-06-22 1973-02-13
JPS5766856U (h) * 1980-10-08 1982-04-21

Also Published As

Publication number Publication date
JPS6067700U (ja) 1985-05-14

Similar Documents

Publication Publication Date Title
US2193602A (en) Device for accelerating electrons to very high velocities
US2219193A (en) Cathode ray apparatus
US3801792A (en) Electron beam apparatus
JP4276340B2 (ja) サイクロトロン用電磁石の設計方法及びサイクロトロンシステム
US12362129B2 (en) Particle beam column
US4835399A (en) Charged particle beam apparatus
US3133874A (en) Production of thin film metallic patterns
JPH0524159Y2 (h)
US3225248A (en) Device for producing a high-intensity beam of charge carriers of small aperture
US3275867A (en) Charged particle generator
US3312858A (en) Deflecting system for charge carrier beams
JP3138292B2 (ja) イオンビーム照射方法およびその装置
JPH027503B2 (h)
JP3081965B2 (ja) イオンビーム発生装置
JPH063720B2 (ja) 集束イオンビ−ム装置
JPS613098A (ja) 荷電ビ−ム装置
JPH0232746B2 (h)
DE19513683C2 (de) Hochstromgepulstes Linsenmultiplett für die Strahlführung und Strahloptik von elektrisch geladenen Teilchen
JPH0518838Y2 (h)
JPH0234414B2 (h)
JPH02201855A (ja) ウィーンフィルタ
JPS5911258A (ja) 静電記録用静電潜像書きこみ装置
JP3180270B2 (ja) マイクロイオンビーム装置
JPH0728716Y2 (ja) 荷電粒子加速装置
JPH0562419B2 (h)