JPH05235522A - Method of forming polyimide film - Google Patents
Method of forming polyimide filmInfo
- Publication number
- JPH05235522A JPH05235522A JP3953992A JP3953992A JPH05235522A JP H05235522 A JPH05235522 A JP H05235522A JP 3953992 A JP3953992 A JP 3953992A JP 3953992 A JP3953992 A JP 3953992A JP H05235522 A JPH05235522 A JP H05235522A
- Authority
- JP
- Japan
- Prior art keywords
- polyamic acid
- film
- wiring board
- printed wiring
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Manufacture Of Macromolecular Shaped Articles (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】プリント配線板、特にポリイミド
樹脂を基材としたフレキシブルプリント配線板におい
て、電気回路の絶縁あるいはハンダの際に不要の電気回
路が形成されることを防止するソルダーレジスト等とし
て使用するポリイミド膜の形成方法に関する。[Industrial application] In printed wiring boards, especially flexible printed wiring boards using a polyimide resin as a base material, as a solder resist or the like for preventing formation of unnecessary electric circuits during insulation or soldering of the electric circuits. The present invention relates to a method for forming a polyimide film used.
【0002】[0002]
【従来の技術】ポリイミド樹脂を基材とするフレキシブ
ルプリント配線板は現在、カメラ、カメラ一体型VT
R、携帯用電話をはじめとする各種の電子機器等へ用い
られており、今後も使用される分野が増加するものとみ
られる。2. Description of the Prior Art Flexible printed wiring boards based on polyimide resin are currently used in cameras and camera-integrated VTs.
It is used in various electronic devices such as R and mobile phones, and it is expected that the field of use will increase in the future.
【0003】フレキシブルプリント配線板は一般に、実
装形態が匡体の形状に応じて折り曲げたり、折り畳んだ
りすることが可能であるという特性を有しており、搭載
するチップ部品も小型でかつ部品点数の少ない用途に対
しては、もっぱら配線板表層部にカバーレイ(補強シー
ト)を形成して補強する方式が主流となっている。この
場合に用いられるカバーレイは、ベースフィルムと同等
のフィルム上にエポキシ系接着剤を塗布したものを用
い、回路の形成された表層上に積層しているが、形成す
べきカバーレイの形状が複雑であったり、はんだ付けを
するためのパッド類が多数ある場合には、回路を露出す
べき形状に合わせてフィルムに開口部を形成する必要が
あったり、回路パターンに合わせて積層する必要があ
る。Generally, the flexible printed wiring board has a characteristic that the mounting form can be bent or folded according to the shape of the housing, and the chip parts to be mounted are also small in size and have a small number of parts. For a small number of applications, a method of forming a cover lay (reinforcing sheet) exclusively on the surface layer of the wiring board to reinforce is mainly used. The cover lay used in this case is a film equivalent to the base film coated with an epoxy adhesive, and is laminated on the surface layer on which the circuit is formed. If it is complicated or there are many pads for soldering, it is necessary to form openings in the film according to the shape to expose the circuit, or to laminate according to the circuit pattern. is there.
【0004】また、LSI実装用基板においては、搭載
するLSI部品のピン数も多く、また受動部品も含め表
面実装部品(SMD:Surface Mountin
gDevice)が主流となり、このようなSMD搭載
用パッドを数多く有するものが多く用いられている。こ
の場合には、ポリイミド系カバーレイよりも特性面にお
いては劣るものの、SMD搭載用パッド等の形状の豊富
さに対応しやすいという利点から、エポキシ系樹脂を主
成分とするソルダーレジストをスクリーン印刷法にて塗
布形成するという技術が主流を成している。Further, in the LSI mounting board, the number of pins of the LSI component to be mounted is large, and the surface mounting component (SMD: Surface Mount) including the passive component is also included.
gDevice) has become the mainstream, and a large number of such SMD mounting pads are used. In this case, although the characteristics are inferior to those of the polyimide-based coverlay, a solder resist containing an epoxy-based resin as a main component is screen-printed by the screen-printing method because it is easy to deal with the abundance of shapes of SMD mounting pads and the like. The mainstream technology is coating and forming.
【0005】[0005]
【発明が解決しようとする課題】片面もしくは両面配線
基板として使用するフレキシブルプリント基板の補強用
のカバーレイを積層する方法にあっては、回路が複雑で
あったり、露出させるべき箇所が多い場合には、カバー
レイに開口部形成した後、基板と積層し熱プレスで加熱
加圧して、接着剤を硬化させるが、一般に本方式ではカ
バーレイの張り合わせのずれが大きく微細なSMD搭載
用パッド等を有する基板への適用は困難である。SUMMARY OF THE INVENTION In a method of laminating a coverlay for reinforcing a flexible printed circuit board used as a single-sided or double-sided wiring board, when the circuit is complicated or there are many places to be exposed, After forming an opening in the cover lay, it is laminated with the substrate and heated and pressed by a hot press to cure the adhesive. Generally, in this method, however, a cover SMD mounting pad or the like with a large deviation of the cover lay bonding is used. It is difficult to apply it to a substrate having it.
【0006】エポキシ系ソルダーレジストをスクリーン
印刷法にて塗布する方法にあっては、印刷後の熱硬化処
理中においてヤング率低下に基づくブリードアウト現象
により、にじみが生じ、金属露出部分を被覆することが
起こり、狭ピッチパッド部、特に多ピンパッケージの代
表であるQFP(Quad Flat Packag
e)等用の配線を有する基板に対してはソルダーレジス
トの被膜が金属表面を覆い、はんだ接続不良を引き起こ
すという問題点を有している。また、エポキシ系樹脂と
基板のポリイミドとの熱膨張係数の相違から、熱硬化後
に基板のそりが生じることを免れない。In the method of applying the epoxy solder resist by the screen printing method, bleeding occurs due to the bleed-out phenomenon due to the Young's modulus decrease during the heat curing treatment after printing, and the exposed metal part is covered. The narrow pitch pad section, especially QFP (Quad Flat Packg), which is a typical multi-pin package,
For a substrate having wiring for e) etc., there is a problem that the coating film of the solder resist covers the metal surface and causes poor solder connection. Further, due to the difference in thermal expansion coefficient between the epoxy resin and the polyimide of the substrate, warping of the substrate is unavoidable after thermal curing.
【0007】一方、感光性エポキシ系ソルダーレジスト
を用いてパターン形成する方法の場合には、狭ピッチカ
バーレイへの対応はなし得るものの、耐熱性が低く、熱
処理に基づく絶縁性の低下等の問題点を有しており、ま
た他のエポキシ系ソルダーレジストと同様にポリイミド
基板との熱膨張係数の差に基づくそり現象を生じること
などの問題点を有している。On the other hand, in the case of a method of forming a pattern using a photosensitive epoxy-based solder resist, although it can cope with a narrow pitch coverlay, it has a low heat resistance and there is a problem that the insulation property is deteriorated by heat treatment. In addition, as with other epoxy-based solder resists, there is a problem in that a warpage phenomenon occurs due to the difference in thermal expansion coefficient from the polyimide substrate.
【0008】これらの問題点を克服すべく、ポリイミド
樹脂を主成分とする感光性ポリイミドレジストなどの提
案もなされているが、感光性を付与したポリイミド樹脂
は極めて高価であり、塗布面積の広い回路基板に対して
の適用はコスト的に採用できないという問題点を有して
いる。In order to overcome these problems, a photosensitive polyimide resist containing a polyimide resin as a main component has been proposed, but the polyimide resin provided with photosensitivity is extremely expensive and a circuit having a wide coating area is used. There is a problem that application to a substrate cannot be adopted in terms of cost.
【0009】[0009]
【課題を解決するための手段】基板上にポリアミド酸含
有物質を塗布乾燥して形成したポリアミド酸膜上に、ポ
リアミド酸膜エッチング用レジストのパターンを形成し
て、ポリアミド酸膜をエッチング液によってエッチング
した後に、ポリアミド酸膜エッチング用レジストを除去
し、ポリアミド酸膜を熱処理してイミド化し、回路の線
間の絶縁あるいはソルダーレジストとして好適な任意の
領域に限定して形成したポリイミド膜を得るものであ
る。Means for Solving the Problems A polyamic acid film etching resist is formed by forming a pattern of a polyamic acid film etching resist on a polyamic acid film formed by coating and drying a polyamic acid-containing substance on a substrate. After that, the polyamic acid film etching resist is removed, and the polyamic acid film is subjected to heat treatment to be imidized to obtain a polyimide film formed by limiting to any area suitable for insulation between circuit lines or as a solder resist. is there.
【0010】すなわち、ポリアミド酸中に含有される溶
剤成分の濃度を調整し、加熱による重合反応によってイ
ミド化を促進させる前にエッチング液によってエッチン
グし、ポリアミド酸膜に所定の加工を施し、その後に重
合反応を行うことで狭ピッチ配線の絶縁膜、あるいは狭
ピッチパッドに対応したポリイミド膜からなるソルダー
レジストを得るものである。That is, the concentration of the solvent component contained in the polyamic acid is adjusted, and the polyamic acid film is subjected to predetermined processing by etching with an etching solution before the imidization is promoted by the polymerization reaction by heating, and then the polyamic acid film is subjected to predetermined processing. By performing a polymerization reaction, a solder resist made of a polyimide film corresponding to a narrow pitch wiring insulating film or a narrow pitch pad is obtained.
【0011】[0011]
【作用】本発明の方法によるポリイミド膜の形成方法に
あっては、エッチングによる良好な加工技術を提供する
ことが可能であるため、高価な感光性ポリアミド樹脂を
用いずして狭ピッチ形成されたSMD搭載用パッドに対
応し得る微細なソルダーレジスト像の形成が可能とな
る。その結果、耐熱性や耐折性に富み、さらには基板に
対する応力を最小限に抑えることが可能な信頼性の高い
絶縁膜、あるいはソルダーレジスト膜を形成することが
可能となる。In the method of forming a polyimide film according to the method of the present invention, since a good processing technique by etching can be provided, a narrow pitch is formed without using an expensive photosensitive polyamide resin. It is possible to form a fine solder resist image corresponding to the SMD mounting pad. As a result, it is possible to form a highly reliable insulating film or solder resist film which has high heat resistance and folding resistance and which can minimize stress on the substrate.
【0012】[0012]
【実施例】以下図面を参照し本発明をさらに詳細に説明
をする。図1に本発明のポリイミド膜からなるソルダー
レジスト層の形成方法の一実施例を示す。ポリイミドフ
イルム上に銅箔を積層形成した基板1上の銅箔面上にノ
ボラック系ポジ型フォトレジスト等のフォトレジストを
塗布した後、SMD搭載用パッド2を有する回路のパタ
ーンを形成した。The present invention will be described in more detail with reference to the drawings. FIG. 1 shows an embodiment of a method for forming a solder resist layer made of a polyimide film of the present invention. A photoresist such as a novolac-based positive photoresist was applied on the copper foil surface of the substrate 1 on which a copper foil was laminated and formed on a polyimide film, and then a circuit pattern having an SMD mounting pad 2 was formed.
【0013】得られたレジストの回路パターンを用いて
塩化第2鉄、塩化第2銅等のエッチング液によって銅箔
面をエッチングして回路の形成を行った(図1
(a))。Using the obtained circuit pattern of the resist, the copper foil surface was etched with an etching solution such as ferric chloride or cupric chloride to form a circuit (FIG. 1).
(A)).
【0014】次いで、銅箔上のフォトレジストをアルカ
リ等によって剥離した後に、銅箔表面を表面処理し、N
−メチル−2−ピロリドン等を溶剤としたポリアミド酸
含有物質を銅箔表面にスクリーン印刷法等によって塗布
を行った。一回の塗布では所望の膜厚が得られない場合
には、塗布と乾燥の工程を繰り返し行った後に、150
℃程度の温度で乾燥しポリアミド酸膜3を完成させた
(図1(b))。Next, after peeling off the photoresist on the copper foil with an alkali or the like, the surface of the copper foil is surface treated and N
A polyamic acid-containing substance using methyl-2-pyrrolidone or the like as a solvent was applied to the copper foil surface by a screen printing method or the like. If the desired film thickness cannot be obtained by one-time coating, after repeating the steps of coating and drying,
It was dried at a temperature of about 0 ° C. to complete the polyamic acid film 3 (FIG. 1 (b)).
【0015】次に、ポリアミド酸膜3上に耐溶剤型ゴム
系レジストを塗布した後、所定のフォトマスクを用いて
露光し、現像を行いSMD搭載用パッド部等の導体上の
ポリアミド酸膜が露出するようにポリアミド酸膜エッチ
ング用レジストパターン4を形成した(図1(c))。Next, a solvent-resistant rubber-based resist is applied on the polyamic acid film 3 and then exposed using a predetermined photomask and developed to form a polyamic acid film on the conductor such as the SMD mounting pad. A resist pattern 4 for etching a polyamic acid film was formed so as to be exposed (FIG. 1 (c)).
【0016】次いで、基板のポリイミドフイルム側を基
板固定具に密着固定し、エッチング槽内において、アミ
ン溶液、ヒドラジン、アルカリ水溶液、アルカリのアル
コール溶液等よりなるエッチング液5をスプレーあるい
はエッチング液中に浸漬してSMD搭載用パッドの間の
絶縁被膜を形成する箇所を除いてエッチングを行った
(図1(d))。Then, the polyimide film side of the substrate is closely fixed to the substrate fixture, and the etching solution 5 consisting of amine solution, hydrazine, alkaline aqueous solution, alkaline alcohol solution, etc. is sprayed or dipped in the etching solution in the etching bath. Then, etching was performed except for the portion where the insulating film was formed between the SMD mounting pads (FIG. 1D).
【0017】しかる後、ポリアミド酸膜上に形成された
ポリアミド酸膜エッチング用レジスト4を剥離液を用い
て剥離した後、熱風炉においてポリアミド酸の熱重合反
応を促進させ、所定の部分にポリイミド膜からなるソル
ダーレジスト7を形成した(図1(e))。After that, the resist 4 for etching the polyamic acid film formed on the polyamic acid film is stripped by using a stripping solution, and then the thermal polymerization reaction of the polyamic acid is promoted in a hot-air stove so that the polyimide film is formed on a predetermined portion. A solder resist 7 composed of was formed (FIG. 1E).
【0018】次いで、SMD搭載用パッド上には、パラ
ジウム薄膜7を無電解めっきによって析出させた(図1
(e))。Next, a palladium thin film 7 was deposited on the SMD mounting pad by electroless plating (FIG. 1).
(E)).
【0019】また、ポリアミド酸膜エッチング用レジス
トとして、アルカリ現像が可能なノボラック樹脂系のレ
ジストを使用した場合には、アルカリ系のポリアミド酸
のエッチング液を使用するならば、レジストのアルカリ
現像と同時にポリアミド酸のエッチングを同時に行うこ
とができる。When a novolac resin-based resist capable of alkali development is used as the polyamic acid film etching resist, if an alkali-based polyamic acid etching solution is used, the resist is alkali-developed at the same time. The polyamic acid can be etched at the same time.
【0020】ポリアミド酸膜の熱重合反応は、250℃
以下の熱処理では5%水酸化ナトリウム水溶液に対する
耐食性が劣り、溶解現象を生じてしまい熱重合が不完全
であり、また290℃以上の熱処理では耐食性は良好で
あるものの露出した金属銅が熱酸化によって劣化し、加
えて銅とポリイミド膜との接触部において一部剥離現象
を示すことが確認されるので、熱重合反応の促進には2
50℃〜280℃の温度の雰囲気にて実施することか望
ましい。また、回路基板として片面回路の例を示した
が、両面配線基板、多層配線基板に対しても同様に適用
することができる。The thermal polymerization reaction of the polyamic acid film is 250 ° C.
In the following heat treatment, the corrosion resistance to a 5% sodium hydroxide aqueous solution is inferior, a dissolution phenomenon occurs, and thermal polymerization is incomplete, and in the heat treatment at 290 ° C or higher, the corrosion resistance is good but the exposed metallic copper is thermally oxidized. It is confirmed that the film is deteriorated and, in addition, partially peels off at the contact portion between the copper and the polyimide film.
It is desirable to carry out in an atmosphere having a temperature of 50 ° C to 280 ° C. Further, although the example of the single-sided circuit is shown as the circuit board, the present invention can be similarly applied to a double-sided wiring board and a multilayer wiring board.
【0021】実施例1 18μmの厚さの電解銅箔を形成した無接着剤タイプの
ポリイミドベース銅張積層基板(商品名:ESPANE
X 新日鉄化学製)を基板として、銅箔面側にノボラッ
ク系ポジ型フォトレジスト(商品名:OFPR−800
東京応化工業製)を塗布した後、露光、現像によりパ
ッドピッチ0.2mm(ランド幅0.16mm、ギャッ
プ0.04mm)のSMD搭載用パッドを有する回路の
パターンを形成し、得られたレジストの回路パターンに
基づいて塩化第2鉄含有エッチング液によって銅箔をエ
ッチングした。Example 1 A non-adhesive type polyimide-based copper-clad laminated substrate (trade name: ESPANE) on which an electrolytic copper foil having a thickness of 18 μm was formed
X As a substrate, a novolac-based positive photoresist (trade name: OFPR-800) is used as a substrate on the copper foil surface side.
After coating with Tokyo Ohka Kogyo Co., Ltd., a pattern of a circuit having an SMD mounting pad with a pad pitch of 0.2 mm (land width 0.16 mm, gap 0.04 mm) is formed by exposure and development, and the resulting resist is Based on the circuit pattern, the copper foil was etched with an etching solution containing ferric chloride.
【0022】次いで、回路を構成する銅箔上のフォトレ
ジストをアルカリによって剥離した後に銅箔部をリン酸
溶液にて整面処理した。Next, the photoresist on the copper foil forming the circuit was peeled off with an alkali, and then the copper foil portion was surface-treated with a phosphoric acid solution.
【0023】次に、N−メチル−2−ピロリドンを溶剤
として30%含有するポリアミド酸(粘度230ポイ
ズ、25℃)を基板上の回路の銅箔表面に、市販のポリ
アミド繊維製のメッシュ150を用いスクリーン印刷法
によって塗布し、塗布の後に150℃において2分間乾
燥した。得られた膜厚は8μmであったので、スクリー
ン印刷による塗布と乾燥を合計3回実施することにより
所定膜厚の23μmに調整し、3回目には熱風オーブン
中において150℃で5分間熱処理を施した。Next, a commercially available polyamide fiber mesh 150 was coated with polyamic acid containing 30% of N-methyl-2-pyrrolidone as a solvent (viscosity 230 poise, 25 ° C.) on the copper foil surface of the circuit on the substrate. It was applied by the screen printing method used, and after application, it was dried at 150 ° C. for 2 minutes. Since the obtained film thickness was 8 μm, it was adjusted to a predetermined film thickness of 23 μm by performing coating and drying by screen printing three times in total, and the third time, heat treatment was performed at 150 ° C. for 5 minutes in a hot air oven. gave.
【0024】ポリアミド酸の被膜上には耐溶剤型ゴム系
レジスト(OMRレジスト:東京応化工業製)を塗布し
た後、所定のフォトマスクを用いて露光し、メチルイソ
ブチルケトンを主溶剤とする現像液により現像を行いS
MD搭載用パッド部を含む所定の導体上のポリアミド酸
膜が露出するようにポリアミド酸膜エッチング用レジス
トパターンを形成した。A solvent resistant rubber resist (OMR resist: manufactured by Tokyo Ohka Kogyo Co., Ltd.) is coated on the polyamic acid film, and then exposed using a predetermined photomask, and a developing solution containing methyl isobutyl ketone as a main solvent. And develop by S
A polyamic acid film etching resist pattern was formed so that the polyamic acid film on a predetermined conductor including the MD mounting pad portion was exposed.
【0025】次いで、基板のポリイミドフイルム側を基
体固定具に固定し、エッチング槽内において、水加ヒド
ラジン溶液(日本カーバイド社製)をエッチング液とし
てスプレー圧3kgf/cm2 、温度50℃にて30秒
間スプレーエッチングを行い、SMD搭載用パッド間の
40μmに絶縁被覆を形成する箇所を除いてポリアミド
酸膜を除去した。Then, the polyimide film side of the substrate was fixed to a substrate fixing tool, and a hydrazine hydrate solution (manufactured by Nippon Carbide Co.) was used as an etching solution in an etching tank at a spray pressure of 3 kgf / cm 2 and a temperature of 50 ° C. for 30 minutes. Spray etching was performed for 2 seconds, and the polyamic acid film was removed except for the portion where the insulating coating was formed in 40 μm between the SMD mounting pads.
【0026】しかる後、ポリアミド酸膜上に形成された
ゴム系レジストを専用剥離液を用いて剥離した後、熱風
炉において260℃にて2分間処理を行い、ポリアミド
酸の熱重合反応を促進させ、所定の部分にポリイミド膜
が形成された回路基板を完成させた。Then, the rubber-based resist formed on the polyamic acid film was stripped using a dedicated stripping solution, and then treated in a hot air oven at 260 ° C. for 2 minutes to accelerate the thermal polymerization reaction of the polyamic acid. A circuit board having a polyimide film formed on a predetermined portion was completed.
【0027】得られたポリイミド膜を形成した基板を、
300℃1分間の耐はんだ性試験を行ったところ、耐は
んだ性において特に問題はなく良好な外観を呈した。ま
た、0.18mmピッチのQFP搭載用パッドを有する
ポリイミド被覆を設けた回路基板の導体部に0.3μm
のパラジウムを無電解めっきによって施した後、リフロ
ーソルダー試験を行った結果、パッド間におけるソルダ
ーブリッジ現象は1個所もなく良好なはんだ接続結果が
得られた。The substrate on which the obtained polyimide film is formed is
When a soldering resistance test was performed at 300 ° C. for 1 minute, there was no particular problem in soldering resistance, and a good appearance was exhibited. In addition, the conductor portion of the circuit board provided with the polyimide coating having the 0.18 mm pitch QFP mounting pad has a thickness of 0.3 μm.
As a result of conducting a reflow soldering test after applying the palladium of No. 1 by electroless plating, there was no solder bridge phenomenon between the pads, and a good soldering connection result was obtained.
【0028】実施例2 ポリアミド酸中の固形分を種々変化させて粘度を変えた
点を除いては実施例1と同様の条件で銅箔上にスクリー
ン印刷し、その結果を表1に示す。Example 2 Screen printing was performed on a copper foil under the same conditions as in Example 1 except that the solid content in the polyamic acid was variously changed to change the viscosity, and the results are shown in Table 1.
【0029】[0029]
【表1】 [Table 1]
【0030】ポリアミド酸濃度が20%(粘度37)未
満では、1回の印刷にて得られたポリアミド酸膜の膜厚
が3μm以下と極めて薄く、さらにはライン部のカバー
リング性も悪く不良個所を生じた。(粘度には温度等の
測定条件を記載して下さい。)また、ポリアミド酸固形
分濃度が50%(粘度419)以上の場合には、1回の
印刷で得られた膜厚は厚いもののスクリーンとの離脱性
が悪く、印刷後の平坦性に乏しいため、良好な形状のも
のを得ることが出来なかった。When the polyamic acid concentration is less than 20% (viscosity 37), the thickness of the polyamic acid film obtained by one printing is as thin as 3 μm or less, and the covering property of the line part is also poor and defective. Occurred. (Please describe the measurement conditions such as temperature in the viscosity.) When the polyamic acid solid content concentration is 50% (viscosity 419) or more, the thickness of the film obtained by one printing is a screen. Since the releasability from and was poor and the flatness after printing was poor, a good shape could not be obtained.
【0031】実施例3 ポリアミド酸中のN−メチル−2−ピロリドンの含有量
を変化させて実施例1と同様に処理をしたポリアミド酸
膜の熱乾燥後のN−メチル−2−ピロリドンの含有量と
エッチング特性の関係を表2に示す。Example 3 Inclusion of N-methyl-2-pyrrolidone after thermal drying of a polyamic acid film treated in the same manner as in Example 1 by changing the content of N-methyl-2-pyrrolidone in the polyamic acid. Table 2 shows the relationship between the amount and the etching characteristics.
【0032】[0032]
【表2】 [Table 2]
【0033】熱乾燥後のN−メチル−2−ピロリドン含
有量が29%以上の場合には、水加ヒドラジン液による
腐食速度が極めて速く、エッチング速度の分布が大きい
ことに加え、エッチング加工された面が基板に対して大
きく傾斜しており、微細部の加工が困難であった。When the N-methyl-2-pyrrolidone content after heat drying was 29% or more, the corrosion rate by the hydrazine hydrate solution was extremely high, and the etching rate distribution was large, and etching was performed. The surface was greatly inclined with respect to the substrate, and it was difficult to process the fine portion.
【0034】[0034]
【発明の効果】本発明によるプリント回路基板上への絶
縁膜あるいはソルダーレジストとして好適なポリイミド
膜の形成方法は、塗布したポリアミド酸の被膜をエッチ
ングし所定形状のレジストパターンを形成するため、微
細形状への対応が容易であり、特に狭ピッチのSMD搭
載用パッド等を有する回路基板についても有効であり、
エッチング加工をポリアミド酸時に行うために、熱重合
反応を経て形成されたポリイミド樹脂に比べて薬剤によ
るエッチングも容易である。According to the method of forming a polyimide film suitable as an insulating film or a solder resist on a printed circuit board according to the present invention, the applied polyamic acid film is etched to form a resist pattern having a predetermined shape. It is easy to deal with, especially effective for a circuit board having a narrow pitch SMD mounting pad, etc.
Since the etching process is performed at the time of polyamic acid, etching with a chemical is easier than that of a polyimide resin formed through a thermal polymerization reaction.
【0035】さらに、形成される絶縁膜あるいはレジス
トがポリイミドからなるので、エポキシ樹脂を用いた場
合に比べて耐熱性、絶縁性が向上することに加え、基板
として用いるポリイミド樹脂との熱膨張係数を等しくす
ることが可能となり、熱処理後の基板のそりの発生を防
止することができる。Further, since the formed insulating film or resist is made of polyimide, the heat resistance and the insulating property are improved as compared with the case of using the epoxy resin, and the coefficient of thermal expansion with the polyimide resin used as the substrate is increased. It is possible to make them equal, and it is possible to prevent warpage of the substrate after heat treatment.
【図1】本発明のポリイミド系ソルダーレジストの形成
方法の一実施例を説明する図。FIG. 1 is a diagram illustrating an example of a method for forming a polyimide solder resist according to the present invention.
1…基板、2…SMD搭載用パッド、3…ポリアミド酸
膜、4…ポリアミド酸膜エッチング用レジストパター
ン、5…エッチング液、6…ソルダーレジスト、7…パ
ラジウム薄膜1 ... Substrate, 2 ... SMD mounting pad, 3 ... Polyamic acid film, 4 ... Polyamic acid film etching resist pattern, 5 ... Etching solution, 6 ... Solder resist, 7 ... Palladium thin film
Claims (2)
形成方法において、基板上にポリアミド酸含有物質を塗
布の後に乾燥して形成したポリアミド酸膜上に、ポリア
ミド酸膜エッチング用レジストのパターンを形成した後
にポリアミド酸膜をエッチング液によってエッチング
し、次いでポリアミド酸膜エッチング用レジストを除去
し、ポリアミド酸膜を熱処理してポリイミドとすること
を特徴とするポリイミド膜の形成方法。1. A method for forming a polyimide film on a specific area of a substrate, wherein a pattern of a polyamic acid film etching resist is formed on a polyamic acid film formed by applying a polyamic acid-containing substance on a substrate and then drying the same. After forming the film, the polyamic acid film is etched with an etching solution, the polyamic acid film etching resist is removed, and the polyamic acid film is heat-treated to form a polyimide film.
2−ピロリドンを溶剤としたポリアミド酸を20〜40
重量%の濃度を有することを特徴とする請求項1記載の
ポリイミド膜の形成方法。2. The polyamic acid-containing substance is N-methyl-
20-40 polyamic acid using 2-pyrrolidone as a solvent
The method for forming a polyimide film according to claim 1, wherein the polyimide film has a concentration of wt%.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3953992A JPH05235522A (en) | 1992-02-26 | 1992-02-26 | Method of forming polyimide film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3953992A JPH05235522A (en) | 1992-02-26 | 1992-02-26 | Method of forming polyimide film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH05235522A true JPH05235522A (en) | 1993-09-10 |
Family
ID=12555858
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3953992A Pending JPH05235522A (en) | 1992-02-26 | 1992-02-26 | Method of forming polyimide film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH05235522A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7594320B2 (en) | 1997-01-10 | 2009-09-29 | Ibiden Co., Ltd. | Method of manufacturing printed wiring board |
JP2014053608A (en) * | 2012-09-10 | 2014-03-20 | Samsung Electro-Mechanics Co Ltd | Circuit board and production method of the same |
JP2015216358A (en) * | 2014-05-09 | 2015-12-03 | 律勝科技股▼分▲有限公司 | Circuit board and multilayer circuit board |
JP2020113681A (en) * | 2019-01-15 | 2020-07-27 | 株式会社京写 | Print circuit board |
-
1992
- 1992-02-26 JP JP3953992A patent/JPH05235522A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7594320B2 (en) | 1997-01-10 | 2009-09-29 | Ibiden Co., Ltd. | Method of manufacturing printed wiring board |
US7765692B2 (en) | 1997-01-10 | 2010-08-03 | Ibiden Co., Ltd. | Method of manufacturing printed wiring board |
JP2014053608A (en) * | 2012-09-10 | 2014-03-20 | Samsung Electro-Mechanics Co Ltd | Circuit board and production method of the same |
JP2015216358A (en) * | 2014-05-09 | 2015-12-03 | 律勝科技股▼分▲有限公司 | Circuit board and multilayer circuit board |
JP2020113681A (en) * | 2019-01-15 | 2020-07-27 | 株式会社京写 | Print circuit board |
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