JPH0522864Y2 - - Google Patents
Info
- Publication number
- JPH0522864Y2 JPH0522864Y2 JP16122083U JP16122083U JPH0522864Y2 JP H0522864 Y2 JPH0522864 Y2 JP H0522864Y2 JP 16122083 U JP16122083 U JP 16122083U JP 16122083 U JP16122083 U JP 16122083U JP H0522864 Y2 JPH0522864 Y2 JP H0522864Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- charged particle
- particle beam
- path
- rotationally movable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002245 particle Substances 0.000 claims description 27
- 239000004020 conductor Substances 0.000 claims description 6
- 238000005259 measurement Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000005684 electric field Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
Landscapes
- Tests Of Electronic Circuits (AREA)
- Electron Sources, Ion Sources (AREA)
- Measurement Of Current Or Voltage (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16122083U JPS6068478U (ja) | 1983-10-17 | 1983-10-17 | 回転型ビ−ム電流測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16122083U JPS6068478U (ja) | 1983-10-17 | 1983-10-17 | 回転型ビ−ム電流測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6068478U JPS6068478U (ja) | 1985-05-15 |
| JPH0522864Y2 true JPH0522864Y2 (en, 2012) | 1993-06-11 |
Family
ID=30354378
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16122083U Granted JPS6068478U (ja) | 1983-10-17 | 1983-10-17 | 回転型ビ−ム電流測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6068478U (en, 2012) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2979954B2 (ja) * | 1994-05-06 | 1999-11-22 | 株式会社島津製作所 | 分析装置 |
-
1983
- 1983-10-17 JP JP16122083U patent/JPS6068478U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6068478U (ja) | 1985-05-15 |
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