JPH0522729Y2 - - Google Patents
Info
- Publication number
- JPH0522729Y2 JPH0522729Y2 JP601188U JP601188U JPH0522729Y2 JP H0522729 Y2 JPH0522729 Y2 JP H0522729Y2 JP 601188 U JP601188 U JP 601188U JP 601188 U JP601188 U JP 601188U JP H0522729 Y2 JPH0522729 Y2 JP H0522729Y2
- Authority
- JP
- Japan
- Prior art keywords
- rails
- curtain
- rail
- clean
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000638 solvent extraction Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 description 17
- 238000012423 maintenance Methods 0.000 description 6
- 238000011109 contamination Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000003749 cleanliness Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Curtains And Furnishings For Windows Or Doors (AREA)
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP601188U JPH0522729Y2 (nl) | 1988-01-22 | 1988-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP601188U JPH0522729Y2 (nl) | 1988-01-22 | 1988-01-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01112350U JPH01112350U (nl) | 1989-07-28 |
| JPH0522729Y2 true JPH0522729Y2 (nl) | 1993-06-11 |
Family
ID=31209882
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP601188U Expired - Lifetime JPH0522729Y2 (nl) | 1988-01-22 | 1988-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0522729Y2 (nl) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4693971B2 (ja) * | 2000-09-29 | 2011-06-01 | 日本無機株式会社 | 搬送用クリーンユニット |
-
1988
- 1988-01-22 JP JP601188U patent/JPH0522729Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01112350U (nl) | 1989-07-28 |
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