JPH0522547U - Electron beam irradiation device - Google Patents

Electron beam irradiation device

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Publication number
JPH0522547U
JPH0522547U JP7142091U JP7142091U JPH0522547U JP H0522547 U JPH0522547 U JP H0522547U JP 7142091 U JP7142091 U JP 7142091U JP 7142091 U JP7142091 U JP 7142091U JP H0522547 U JPH0522547 U JP H0522547U
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JP
Japan
Prior art keywords
electron beam
beam irradiation
sheet
steel plate
steel sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7142091U
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Japanese (ja)
Inventor
征夫 井口
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JFE Steel Corp
Original Assignee
JFE Steel Corp
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Filing date
Publication date
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Priority to JP7142091U priority Critical patent/JPH0522547U/en
Publication of JPH0522547U publication Critical patent/JPH0522547U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】 【目的】 低鉄損一方向珪素鋼板の製造における、特に
磁区細分化に寄与する電子ビーム照射の際に発生するX
線の漏洩を有利に防止する電子ビーム照射装置を提供す
る。 【構成】 一方向性珪素鋼板1の表面に連続して電子ビ
ームを照射する電子ビーム照射室6の鋼板1の入側及び
出側に、該鋼板1をその通板方向と直交する向きに一旦
導いた後に再び通板方向へ導くロール対3,8をそれぞ
れ設置し、さらにロール対を鋼板の通板間隔を残して鉛
板4で覆うことによって、X線の漏洩を防止する。
(57) [Abstract] [Purpose] X generated in electron beam irradiation in the production of low iron loss unidirectional silicon steel sheet, which particularly contributes to domain refinement.
Provided is an electron beam irradiation device that advantageously prevents leakage of rays. [Structure] The steel plate 1 is temporarily placed on the entrance side and the exit side of the steel plate 1 in an electron beam irradiation chamber 6 for continuously irradiating an electron beam on the surface of the unidirectional silicon steel plate 1 in a direction orthogonal to the passing direction. The pair of rolls 3 and 8 for guiding the sheet in the sheet passing direction again after being guided are respectively installed, and further, the roll pair is covered with the lead plate 4 leaving a sheet passing interval of the steel sheet, thereby preventing leakage of X-rays.

Description

【考案の詳細な説明】[Detailed description of the device]

【0001】[0001]

【産業上の利用分野】[Industrial applications]

この考案は、低鉄損一方向珪素鋼板の製造における、特に磁区細分化に供する 電子ビーム照射装置に関し、電子ビーム照射の際に発生するX線の漏洩を有利に 防止しようとするものである。 The present invention relates to an electron beam irradiation apparatus that is used for subdividing a magnetic domain particularly in the production of a low iron loss unidirectional silicon steel sheet, and it is an object of the present invention to advantageously prevent leakage of X-rays generated during electron beam irradiation.

【0002】[0002]

【従来の技術】[Prior Art]

一方向性けい素鋼板は製品の2次再結晶粒をゴス方位に高度に集積させ、その 鋼板表面上にフォルステライト質皮膜を、さらにその上に熱膨脹係数の小さい絶 縁被膜を被成したもので、厳格な制御を必要とする複雑、そして多岐にわたる工 程を得て製造される。 A unidirectional silicon steel sheet is one in which the secondary recrystallized grains of the product are highly integrated in the Goss orientation, a forsterite film is formed on the surface of the steel sheet, and an insulating film having a small thermal expansion coefficient is further formed on it. It is manufactured with complex and versatile processes that require strict control.

【0003】 このような一方向性けい素鋼板は、主として変圧器、その他電気機器の鉄心と して使用されていて、磁気特性として製品の磁束密度(B8値で代表される) が高 く、鉄損(W17/50 値で代表される) が低いこと、さらに表面性状の良好な絶縁 被膜を有することが要求されている。Such a unidirectional silicon steel sheet is mainly used as an iron core of a transformer and other electric devices, and has a high magnetic flux density (represented by a B 8 value) of a product as a magnetic property. However, it is required to have a low iron loss ( typically represented by W 17/50 value) and to have an insulating coating having a good surface property.

【0004】 特にエネルギー危機を境にして電力損失の低減を至上とする要請が著しく強ま り、変圧器用鉄心材料としての鉄損のより低い一方向性けい素鋼板の必要性は益 々重要なものとなってきている。[0004] In particular, the demand for reducing power loss has been remarkably strengthened at the border of the energy crisis, and the need for a unidirectional silicon steel sheet having a lower iron loss as an iron core material for a transformer is increasingly important. It is becoming a thing.

【0005】 さて一方向性けい素鋼板の鉄損改善の歴史は、ゴス方位2次再結晶集合組織の 改善の歴史であるといっても過言でなく、このような2次再結晶粒を制御する方 法としては、AlN, MnS及びMnSe等の1次再結晶粒成長抑制剤、いわゆるインヒビ ターを用いてゴス方位2次再結晶粒を優先成長させる方法が実施されていた。ま た最近に至ってはこのような2次再結晶集合組織を制御するものの他、鋼板表面 にレーザー照射(市山正:鉄と鋼,69(1983), P.895 、特公昭57-2252 号、同57 -53419号、同58-24605号、同58-24606号各公報参照) あるいはプラズマ照射( 特 開昭62-96617号、同62-151511 号、同62-151516 号及び同62-151517 号各公報参 照) により局部微小ひずみを導入して磁区を細分化し鉄損を低下させる画期的な 方法が提案されている。しかしながら、これらの方法に従って製造した鋼板は、 高温域まで加熱すると微小ひずみが消失するため、高温でのひずみ取り焼鈍を施 す必要がある巻鉄心トランス用材料としては使用できないという欠点があった。It is no exaggeration to say that the history of improving iron loss in unidirectional silicon steel sheets is the history of improving the Goth-oriented secondary recrystallization texture, and it is possible to control such secondary recrystallization grains. As a method of doing so, a method of preferentially growing the Goss-oriented secondary recrystallized grains using a primary recrystallized grain growth inhibitor such as AlN, MnS, and MnSe, a so-called inhibitor has been implemented. Moreover, in recent years, in addition to controlling such secondary recrystallization texture, laser irradiation on the surface of steel sheet (Masashi Ichiyama: Iron and Steel, 69 (1983), P.895, Japanese Patent Publication No. 57-2252). , No. 57-53419, No. 58-24605, No. 58-24606) or plasma irradiation (Japanese Patent Publication No. 62-96617, No. 62-151511, No. 62-151516 and No. 62-151517). (Refer to each publication), an epoch-making method for reducing the iron loss by subdividing the magnetic domain by introducing local microstrain has been proposed. However, the steel sheet manufactured according to these methods has a drawback that it cannot be used as a material for a wound core transformer that needs to be subjected to strain relief annealing at high temperature because minute strain disappears when heated to a high temperature range.

【0006】 このような高温のひずみ取り焼鈍を施しても鉄損が劣化しない方法としては、 仕上げ焼鈍板の表面に溝もしくはセレーションを形成する方法(特公昭50-35679 号、特開昭59-28525号及び同59-197520 号各公報参照) とか、仕上げ焼鈍板の表 面に微再結晶粒領域を形成する方法(特開昭56-130454 号公報参照) 、フォルス テライト質被膜に異厚あるいは欠損領域を形成する方法(特開昭60-92479号、同 60-92480号、同60-92481号及び同60−25879 号各公報参照) 、地鉄中、フォルス テライト質被膜中又は張力絶縁被膜中に異組成領域を形成する方法(特開昭60-1 03124 号及び同60-103182 号各公報参照) 等が知られている。As a method for preventing iron loss from deteriorating even when subjected to such high-temperature strain relief annealing, a method of forming grooves or serrations on the surface of a finish annealed plate (Japanese Patent Publication No. 50-35679, Japanese Patent Publication No. 59-59679). 28525 and 59-197520), or a method of forming fine recrystallized grain regions on the surface of the finish-annealed sheet (see Japanese Patent Laid-Open No. 56-130454), a forsterite coating with different thickness or Method for forming a defective region (see JP-A-60-92479, JP-A-60-92480, JP-A-60-92481 and JP-A-60-25879), ground iron, forsterite coating or tension insulation coating A method of forming a different composition region therein (see JP-A-60-1 03124 and JP-A 60-103182) is known.

【0007】 しかしながらこれらの方法は何れも工程が複雑になるかわりには鉄損の低減効 果は小さく、また製造コストが高いこともあって、工業的には採用されるには至 っていないのが現状であった。However, none of these methods has been industrially adopted because the effect of reducing iron loss is small and the manufacturing cost is high in spite of the complicated process. It was the current situation.

【0008】 そこで考案者らは特開平2−277780号公報において、一方向性けい素鋼板の仕 上げ焼鈍板及びその上に絶縁被膜を形成した鋼板の表面に、高電圧・低電流の電 子ビームを照射することによって、鋼板表面のフォルステライト質被膜及び絶縁 被膜が地鉄に圧入された微小圧入領域を、鋼板の圧延方向と直交する向きへ局所 的に導入して磁区細分化をはかることについて提案した。Therefore, the inventors of the present invention have disclosed in Japanese Patent Laid-Open No. 2-277780 that a high-voltage / low-current electron is applied to the surface of a finish-annealed unidirectional silicon steel sheet and a steel sheet having an insulating coating formed thereon. By irradiating the beam, the micro-injection region where the forsterite coating and insulating coating on the surface of the steel sheet are press-fitted into the base metal is locally introduced in the direction orthogonal to the rolling direction of the steel sheet to subdivide the magnetic domains. About.

【0009】 ここで磁区細分化を行って低鉄損一方向性けい素鋼板を製造する手段として、 高真空を利用しなければならないという大きなハンディをそなえている、高電圧 ・小電流の電子ビームを使用する理由は、これを有効に利用できれば、ビーム を細く絞ることが可能、ビームの操作が容易、ビームの侵入深さが深い、 ビームのエネルギー効率が良い等数々の利点があるためである。さらに最近の電 子ビームに係る技術は、100kv 以上の高電圧かつ10mA以下の小電流での電子ビー ムを実現し、絶縁被膜を有する一方向性けい素鋼板に対しても高速度で連続的に 電子ビームを照射できるようになってきた。Here, as a means for producing a low iron loss unidirectional silicon steel sheet by subdividing a magnetic domain, there is a great handicap that a high vacuum must be used, and a high voltage / small current electron beam is provided. The reason for using is that if it can be used effectively, there are many advantages such as being able to narrow the beam, easy beam operation, deep beam penetration, and high beam energy efficiency. .. Furthermore, the recent electron beam technology has realized an electron beam with a high voltage of 100 kv or more and a small current of 10 mA or less, and it is possible to continuously perform high speed even for unidirectional silicon steel sheets with an insulating coating. Can be irradiated with electron beams.

【0010】[0010]

【考案が解決しようとする課題】[Problems to be solved by the device]

このような背景から、積鉄芯及び巻鉄芯の両方に適用可能な一方向性けい素鋼 板を製造できるようになったが、一方で上述したような高電圧、低電流の電子ビ ームを鋼板上に照射した場合、鋼板から多量のX線が発生するため、X線に対す る防護対策が操業の安全上極めて重要な課題となってきた。 Against this background, it has become possible to manufacture unidirectional silicon steel sheets applicable to both laminated iron cores and wound iron cores. When a steel plate is irradiated with a large amount of X-rays, a large amount of X-rays are generated from the steel plate, so protective measures against X-rays have become an extremely important issue for operational safety.

【0011】 この考案は、一方向性けい素鋼板の表面に電子ビーム照射した際に鋼板から発 生するX線を遮断し安全に方向性けい素鋼板の磁区細分化を達成し得る電子ビー ム照射装置について提案することを目的とする。The present invention is an electronic beam capable of safely blocking the X-rays generated from the surface of a unidirectional silicon steel sheet by electron beam irradiation and safely subdividing the magnetic domain of the directional silicon steel sheet. The purpose is to propose an irradiation device.

【0012】[0012]

【課題を解決するための手段】[Means for Solving the Problems]

鋼板に電子ビームを照射した際に発生するX線は、全方位にわたって伝播する 。特に鋼帯を連続処理する場合、鋼板に沿って発生伝播するX線は、電子ビーム 照射室の外側に漏れる確率が極めて高く、この漏洩を防止する対策が必要である ことがわかった。さらにX線の漏洩防止手段について種々検討を加えた結果、電 子ビーム照射装置の鋼板の導入及び導出を工夫することにより、X線の漏洩を回 避できることを見出し、この考案を完成させた。 X-rays generated when a steel sheet is irradiated with an electron beam propagates in all directions. In particular, when the steel strip is continuously treated, the X-rays generated and propagated along the steel sheet have a very high probability of leaking to the outside of the electron beam irradiation chamber, and it has been found that measures to prevent this leakage are necessary. Furthermore, as a result of various studies on means for preventing X-ray leakage, it was found that X-ray leakage can be avoided by devising the introduction and derivation of the steel plate of the electron beam irradiation device, and the present invention was completed.

【0013】 すなわちこの考案は、一方向性珪素鋼板の表面に連続して電子ビームを照射す る電子ビーム照射室の鋼板の入側及び出側に、該鋼板をその通板方向と直交する 向きに一旦導いた後に再び通板方向へ導くロール対をそれぞれ設置し、さらにロ ール対を鋼板の通板間隔を残して鉛板で覆ってなる電子ビーム照射装置である。That is, the present invention is directed to the entrance and exit sides of a steel plate in an electron beam irradiation chamber that continuously irradiates an electron beam on the surface of a unidirectional silicon steel plate, by orienting the steel plate in a direction orthogonal to the passing direction. This is an electron beam irradiation device in which a pair of rolls that are once guided to the sheet passing direction are installed again, and the pair of rolls is covered with a lead plate while leaving the sheet passing intervals of the steel sheets.

【0014】[0014]

【作用】 この考案に従う電子ビーム照射装置は、電子ビーム照射室の鋼板の入側及び出 側に設置したロール対によって、まず鋼板をその通板方向と直交する向きに導い てX線の鋼板の通板方向又は通板方向と逆方向に沿う伝播を防ぎ、さらにX線の 伝播方向に鉛板を設け、すなわちロール対を鉛板で囲むことによって、X線の漏 洩を完全に遮断するものである。In the electron beam irradiation apparatus according to the present invention, the pair of rolls installed on the entrance side and the exit side of the steel plate in the electron beam irradiation chamber first guides the steel plate in the direction orthogonal to the passing direction of the steel plate to detect the X-ray steel plate. To prevent the X-ray leakage completely by preventing the propagation in the sheet passing direction or in the direction opposite to the sheet passing direction, and by providing the lead plate in the X-ray propagating direction, that is, by surrounding the roll pair with the lead plate. Is.

【0015】[0015]

【実施例】【Example】

図1はこの考案の連続電子ビーム照射装置の配列を示したものである。図中1 は矢印方向に進行する鋼板、2は電子ビーム照射室の鋼板入側に設けた差圧室で 、考案者らが先に特開昭64-3373 号公報にて開示した、電子ビーム照射室へ向け て漸次真空度を上げていく複数の予備排気室をそなえる、いわゆるエア・トゥ・ エア(Air-to-Air)方式である。3は鋼板をその通板方向と直交する向きに一旦導 いてS字状に通板した後に再び通板方向へ導くロール対で、具体的にはブライド ルロールの形式で用いることが有利である。このロール対3は、鋼板1の通板間 隔を残して、周囲を鉛板4で覆い、さらに鉛板4の周囲を鋼などのケーシング5 で覆うことによって、X線の漏洩を完全に防止する。さらにロール対3をブライ ドルロール形式とすることによって、鋼板1の蛇行及び張力制御を同時に行うこ とが可能である。なおロール対3は、ブライドルロール形式に限らず、例えば図 3に示すように、ロールを離間して配置し、鋼板を各ロールで折り曲げて進行方 向を変える構造でもよい。 また6は鋼板1の表面に電子ビームの照射を行う電子ビーム照射室で、この電 子ビーム照射室6には、図4に示すように、複数の電子ビームガン7を通板方向 にずらして配設してなるのが特徴である。そして各電子ビームガン7においては 、60kv以上で500kv 以下の高電圧で、加速電流5mA 以下の細く絞った電子ビーム を照射することが好ましい。さらに8は上記ロール対3と同様に、鉛板4及びケ ーシング5をそなえるブライドルロール形式のロール対で、X線の漏洩と鋼板1 の蛇行及び張力制御を同時に行うもので、9は電子ビーム照射室の鋼板入側に設 けた差圧室で、上記差圧室2と同様、電子ビーム照射室へ向けて漸次真空度を高 め、この差圧室9から鋼板1を大気中に導出する。 FIG. 1 shows the arrangement of the continuous electron beam irradiation apparatus of the present invention. In the figure, 1 is a steel plate that travels in the direction of the arrow, and 2 is a differential pressure chamber provided on the steel plate entrance side of the electron beam irradiation chamber, which was previously disclosed by the inventors in JP-A-64-3373. This is the so-called air-to-air system, which has multiple pre-evacuation chambers that gradually increase the vacuum level toward the irradiation chamber. Reference numeral 3 denotes a roll pair that guides the steel sheet in a direction orthogonal to the sheet passing direction, passes the sheet in an S-shape, and then guides it again in the sheet passing direction. Specifically, it is advantageous to use it in the form of a briddle roll. This roll pair 3 completely prevents leakage of X-rays by covering the periphery of the steel plate 1 with a lead plate 4 and leaving the space between the steel plates 1 covered, and further covering the periphery of the lead plate 4 with a casing 5 made of steel or the like. To do. Further, by making the roll pair 3 into a bridle roll type, it is possible to simultaneously perform meandering and tension control of the steel plate 1. Note that the roll pair 3 is not limited to the bridle roll type, and may have a structure in which the rolls are spaced apart and the steel plate is bent by each roll to change the traveling direction as shown in FIG. 3, for example. Further, 6 is an electron beam irradiation chamber for irradiating the surface of the steel plate 1 with an electron beam. In this electron beam irradiation chamber 6, as shown in FIG. 4, a plurality of electron beam guns 7 are arranged so as to be displaced in the plate passing direction. The feature is that it is installed. In each electron beam gun 7, it is preferable to irradiate the electron beam with a high voltage of 60 kv or more and 500 kv or less and a finely focused electron beam with an acceleration current of 5 mA or less. Further, 8 is a bridle roll type roll pair having a lead plate 4 and a casing 5, similar to the roll pair 3, and is for simultaneously controlling leakage of X-rays and meandering and tension of the steel plate 1, and 9 is an electron beam. In the differential pressure chamber provided on the steel plate entrance side of the irradiation chamber, the vacuum degree is gradually increased toward the electron beam irradiation chamber, and the steel plate 1 is led out to the atmosphere from the differential pressure chamber 9 as in the differential pressure chamber 2. ..

【0016】 一方向性けい素鋼の最終仕上げ焼鈍板を、図1に示した電子ビーム照射装置に 通して鋼板表面に電子ビーム照射を行った。このときのラインスピードは30m/mi n 及び真空度は5×10-4Torrで、電子ビームの発生条件は加速電圧:225kv 、電 流:1.2mA であった。The final annealed sheet of unidirectional silicon steel was passed through the electron beam irradiation apparatus shown in FIG. 1 to irradiate the surface of the steel sheet with electron beams. At this time, the line speed was 30 m / min, the degree of vacuum was 5 × 10 −4 Torr, and the electron beam generation conditions were an acceleration voltage: 225 kv and a current: 1.2 mA.

【0017】 かくして得られた製品の磁気特性は、B8=1.93T 、W17/50=0.75W/kgで、電子 ビーム照射しない鋼板に比較して約12%鉄損が向上した。またこの処理中のX線 の漏洩は0.005 Rm で安全上全く問題のないレベルであった。さらに処理中に鋼 板の蛇行も全くなく、かつ張力付与も順調であった。The magnetic properties of the product thus obtained were B 8 = 1.93T and W 17/50 = 0.75W / kg, and the iron loss was improved by about 12% as compared with the steel sheet not irradiated with the electron beam. The leakage of X-rays in this process was at a level no safety problem at all in 0.005 R m. Furthermore, there was no meandering of the steel plate during processing, and tension was applied smoothly.

【0018】[0018]

【考案の効果】[Effect of the device]

この考案によれば、高電圧、低電流の電子ビームを鋼板上に照射した場合に、 不可避に発生する多量のX線を漏洩することのない構造の電子ビーム照射装置を 提供でき、従ってこの電子ビーム照射装置を用いることによって安全な操業を達 成し得る。 According to this invention, it is possible to provide an electron beam irradiation apparatus having a structure that does not leak a large amount of X-rays that are inevitably generated when a high voltage, low current electron beam is irradiated on a steel plate. Safe operation can be achieved by using a beam irradiation device.

【図面の簡単な説明】[Brief description of drawings]

【図1】この考案に従う電子ビーム照射装置を示す模式
図である。
FIG. 1 is a schematic view showing an electron beam irradiation device according to the present invention.

【図2】ロール対の構造を示す模式図である。FIG. 2 is a schematic view showing a structure of a roll pair.

【図3】ロール対の構造を示す模式図である。FIG. 3 is a schematic view showing a structure of a roll pair.

【図4】電子ビーム照射室の電子ビームガンの配置を示
す模式図である。
FIG. 4 is a schematic view showing an arrangement of electron beam guns in an electron beam irradiation chamber.

【符号の説明】[Explanation of symbols]

1 鋼板 2 差圧室 3 ロール対 4 鉛板 5 ケーシング 6 電子ビーム照射室 7 電子ビームガン 8 ロール対 9 差圧室 1 Steel Plate 2 Differential Pressure Chamber 3 Roll Pair 4 Lead Plate 5 Casing 6 Electron Beam Irradiation Chamber 7 Electron Beam Gun 8 Roll Pair 9 Differential Pressure Chamber

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 【請求項1】 一方向性珪素鋼板の表面に連続して電子
ビームを照射する電子ビーム照射室の鋼板の入側及び出
側に、該鋼板をその通板方向と直交する向きに一旦導い
た後に再び通板方向へ導くロール対をそれぞれ設置し、
さらにロール対を鋼板の通板間隔を残して鉛板で覆って
なる電子ビーム照射装置。
1. A steel sheet is once guided to the entrance side and the exit side of a steel sheet in an electron beam irradiation chamber for continuously irradiating an electron beam on the surface of the unidirectional silicon steel sheet, in a direction orthogonal to the sheet passing direction. After that, each roll pair that leads to the passing direction is installed again,
In addition, an electron beam irradiation device in which a pair of rolls is covered with a lead plate while leaving a gap between the steel plates.
JP7142091U 1991-09-05 1991-09-05 Electron beam irradiation device Pending JPH0522547U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7142091U JPH0522547U (en) 1991-09-05 1991-09-05 Electron beam irradiation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7142091U JPH0522547U (en) 1991-09-05 1991-09-05 Electron beam irradiation device

Publications (1)

Publication Number Publication Date
JPH0522547U true JPH0522547U (en) 1993-03-23

Family

ID=13460005

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7142091U Pending JPH0522547U (en) 1991-09-05 1991-09-05 Electron beam irradiation device

Country Status (1)

Country Link
JP (1) JPH0522547U (en)

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JP2019511629A (en) * 2016-01-22 2019-04-25 ポスコPosco Method and apparatus for magnetic domain refinement of grain oriented electrical steel sheet
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108699616A (en) * 2015-12-30 2018-10-23 Posco公司 The magnetic domain thinning method and its device of oriented electrical steel sheets
EP3399058A4 (en) * 2015-12-30 2018-11-14 Posco Method for refining magnetic domain of grain-oriented electrical steel sheet, and device therefor
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JP2019509394A (en) * 2016-01-22 2019-04-04 ポスコPosco Magnetic domain refinement method and apparatus for grain-oriented electrical steel sheet
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