JPH0522229B2 - - Google Patents
Info
- Publication number
- JPH0522229B2 JPH0522229B2 JP18886786A JP18886786A JPH0522229B2 JP H0522229 B2 JPH0522229 B2 JP H0522229B2 JP 18886786 A JP18886786 A JP 18886786A JP 18886786 A JP18886786 A JP 18886786A JP H0522229 B2 JPH0522229 B2 JP H0522229B2
- Authority
- JP
- Japan
- Prior art keywords
- group
- acid
- atom
- double bond
- lower alkyl
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/031—Organic compounds not covered by group G03F7/029
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/029—Inorganic compounds; Onium compounds; Organic compounds having hetero atoms other than oxygen, nitrogen or sulfur
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Polymerisation Methods In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18886786A JPS6343133A (ja) | 1986-08-11 | 1986-08-11 | 高感度光重合性組成物 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18886786A JPS6343133A (ja) | 1986-08-11 | 1986-08-11 | 高感度光重合性組成物 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6343133A JPS6343133A (ja) | 1988-02-24 |
| JPH0522229B2 true JPH0522229B2 (cg-RX-API-DMAC10.html) | 1993-03-26 |
Family
ID=16231256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18886786A Granted JPS6343133A (ja) | 1986-08-11 | 1986-08-11 | 高感度光重合性組成物 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6343133A (cg-RX-API-DMAC10.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01238656A (ja) * | 1988-03-18 | 1989-09-22 | Nippon Paint Co Ltd | 高感度光重合性組成物 |
| JPH02238002A (ja) * | 1989-03-10 | 1990-09-20 | Nippon Paint Co Ltd | 感光性組成物 |
-
1986
- 1986-08-11 JP JP18886786A patent/JPS6343133A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6343133A (ja) | 1988-02-24 |
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