JPH0521931A - Manufacture of glass ceramic substrate - Google Patents

Manufacture of glass ceramic substrate

Info

Publication number
JPH0521931A
JPH0521931A JP19605791A JP19605791A JPH0521931A JP H0521931 A JPH0521931 A JP H0521931A JP 19605791 A JP19605791 A JP 19605791A JP 19605791 A JP19605791 A JP 19605791A JP H0521931 A JPH0521931 A JP H0521931A
Authority
JP
Japan
Prior art keywords
alumina
paste
film
electrode
green sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19605791A
Other languages
Japanese (ja)
Inventor
Yasuto Kudo
康人 工藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Metal Mining Co Ltd
Original Assignee
Sumitomo Metal Mining Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Mining Co Ltd filed Critical Sumitomo Metal Mining Co Ltd
Priority to JP19605791A priority Critical patent/JPH0521931A/en
Publication of JPH0521931A publication Critical patent/JPH0521931A/en
Pending legal-status Critical Current

Links

Landscapes

  • Manufacturing Of Printed Wiring (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

PURPOSE:To enable an electrode with an improved solder wetting property by applying an alumina substrate conductor paste in the market to a glass ceramic substrate by calcining a green sheet, an alumina paste, and a conductor paste collectively. CONSTITUTION:First, an alumina paste is printed and then dried for forming an alumina film in a same pattern as an electrode on a green sheet which consists of a glass powder and a ceramic powder. This alumina layer needs to be as thick as 3-15mum When the thickness is equal to 3mum or less, solder wetting property of the electrode is not sufficient. Also, when it is equal to or more than 15mum, strength of the alumina film is not sufficient and a problem of adhesion property of the electrode is generated. Then, a conductor paste is printed on this alumina film and then is dried. Various kinds of film-thickness conductive pastes which are available in the market can be utilized as the conductive paste. Finally, the conductive film, the alumina film, and the green sheet are as they are and are piled up on a desired another layer as needed and then they are baked at 800-930 deg.C.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、ガラスセラミック基板
の製造方法であって、特に市販のアルミナ基板用厚膜ペ
ーストを用いて半田濡れ性に優れた電極を形成する方法
に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a glass ceramic substrate, and more particularly to a method for forming an electrode having excellent solder wettability by using a commercially available thick film paste for alumina substrate.

【0002】[0002]

【従来の技術】近年、低温焼成用のセラミック多層基板
として、ガラスセラミック基板が開発されている。この
基板は、非晶質ガラスあるいは結晶化ガラスの粉末とア
ルミナ等のセラミック粉末の混合物に有機質のバインダ
と溶剤を加えてスラリー状とし、ドクターブレード法で
グリーンシートに成形して絶縁層とし、金、銀、銅等の
粉末を有機質ビヒクルに分散させたペースト状組成物を
該絶縁層上にスクリーン印刷等の手法で塗布して内層配
線パターンを形成し、所望の各層を積層して800〜9
30℃で焼成して得られる。また、外層配線の場合は、
内層配線と同様にグリーンシートに印刷して一括して焼
成する方法と、グリーンシートを焼成した後に導体ペー
ストを印刷して別途焼成する方法が取られている。
2. Description of the Related Art In recent years, a glass ceramic substrate has been developed as a ceramic multilayer substrate for low temperature firing. This substrate is made into a slurry by adding an organic binder and a solvent to a mixture of amorphous glass or crystallized glass powder and ceramic powder such as alumina, and is formed into an insulating layer by molding into a green sheet by the doctor blade method. A paste-like composition in which powders of silver, copper, etc. are dispersed in an organic vehicle is applied onto the insulating layer by a technique such as screen printing to form an inner layer wiring pattern, and desired layers are laminated to form 800 to 9 layers.
It is obtained by firing at 30 ° C. Also, in the case of outer layer wiring,
As in the case of the inner layer wiring, there are adopted a method of printing on a green sheet and firing it collectively, and a method of printing a conductor paste after firing the green sheet and firing it separately.

【0003】[0003]

【発明が解決しようとする課題】内層配線は半田濡れ性
が不要であるのに対して、外層配線は部品を半田で接続
するために半田濡れ性が重要品質であるが、ガラスセラ
ミック基板の外層配線に市販の導体ペーストを適用した
場合にはほとんど半田が付かないという問題があった。
これは、導体ペーストに含まれるガラス成分が焼成中に
ガラスセラミック基板方向へ移行せずに導体膜表面に残
留すること、およびガラスセラミック基板のガラスが焼
成中に導体膜中に移行して導体膜がガラスリッチになる
ことによる。
The inner layer wiring does not require solder wettability, while the outer layer wiring has solder solder wettability which is an important quality for connecting components with solder. When a commercially available conductor paste is applied to the wiring, there is a problem that almost no solder is attached.
This is because the glass component contained in the conductor paste does not move toward the glass ceramic substrate during firing and remains on the surface of the conductor film, and the glass of the glass ceramic substrate moves into the conductor film during firing and becomes a conductor film. Due to becoming glass rich.

【0004】本発明の目的は、市販のアルミナ基板用導
体ペーストをガラスセラミック基板に適用し、しかも半
田濡れ性の良好な電極を形成し得る方法を提供するにあ
る。
An object of the present invention is to provide a method of applying a commercially available conductor paste for alumina substrate to a glass ceramic substrate and forming an electrode having good solder wettability.

【0005】[0005]

【課題を解決するための手段】上記目的を達成するため
本発明の方法は、ガラス粉末とセラミック粉末とから成
るグリーンシート上に電極と同一パターンでアルミナペ
ーストを印刷後乾燥して3〜15μmのアルミナ膜を形
成する工程、該アルミナ膜上に電極パターンで導体ペー
ストを印刷して乾燥する工程、導体膜とアルミナ膜とグ
リーンシートをそのままで、必要により所望の他の層上
に重ね、一括して800〜930℃で焼成する工程とを
有する点に特徴がある。
In order to achieve the above object, the method of the present invention is such that an alumina paste is printed in the same pattern as an electrode on a green sheet composed of glass powder and ceramic powder, and then dried to obtain a thickness of 3 to 15 μm. The step of forming an alumina film, the step of printing a conductor paste on the alumina film with an electrode pattern and drying, the conductor film, the alumina film and the green sheet as they are, if necessary, overlaid on another desired layer and collectively. And a step of firing at 800 to 930 ° C.

【0006】[0006]

【作用】本発明において、導体ペーストは市販の各種厚
膜導電ペースト、即ち銀ペースト、銀−パラジウムペー
スト、銀−白金ペーストが利用できる。
In the present invention, various commercially available thick film conductive pastes, that is, silver pastes, silver-palladium pastes, and silver-platinum pastes can be used as the conductor pastes.

【0007】一方、アルミナペーストは、アルミナ粉末
と有機質ビヒクルとを混練してペースト状組成物とした
もので、この組成物は150〜400メッシュのスクリ
ーンによってグリーンシートまたは焼成基板上に塗布さ
れる。従って用いる粉末はこのスクリーンを円滑に通過
し得る粒径のものとすればよく、10ミクロン以上の粒
子が殆どない平均粒径2ミクロン以下のものが適してい
る。ビヒクルとしてターピネオール、ブチルカルビトー
ル、トルエンなどの溶剤にエチルセルロース、メタクリ
レート樹脂などを溶解したものを使用できる。スクリー
ン印刷に好適なペーストとするためには、ビヒクルは固
形分100重量部に対し10〜30重量部とするのが良
い。
On the other hand, the alumina paste is a paste composition obtained by kneading alumina powder and an organic vehicle, and this composition is applied on a green sheet or a fired substrate by a screen of 150 to 400 mesh. Therefore, the powder to be used may have a particle size that can smoothly pass through this screen, and an average particle size of 2 microns or less with few particles of 10 microns or more is suitable. As a vehicle, a solvent prepared by dissolving ethyl cellulose, a methacrylate resin or the like in a solvent such as terpineol, butyl carbitol or toluene can be used. In order to make the paste suitable for screen printing, the vehicle may be 10 to 30 parts by weight based on 100 parts by weight of the solid content.

【0008】本発明において、ガラスセラミック基板は
930℃以下で十分に焼結するものであれば良く、例え
ば硼珪酸ガラスをベースに酸化鉛、酸化亜鉛、アルカリ
土類金属の酸化物などを含有する軟化点600〜800
℃の非晶質ガラス粉末とアルミナ等のセラミックフィラ
ーとの混合物、あるいは600〜900℃で結晶化する
結晶化ガラスなどを原料とし、次の工程で基板に加工す
れば良い。すなわち、上述した粉末原料を有機質のバイ
ンダー、可塑剤、溶剤とともにボールミル中で混合し、
得られたスラリーを脱泡処理後、ドクターブレード法で
グリーンシートに成形し、該グリーンシートを適当な大
きさに切断して、最上部となるべき層にはアルミナペー
ストを電極と同一のパターンで印刷して乾燥し、続いて
電極パターンで導体ペーストをアルミナ層の上に印刷し
て乾燥するのである。
In the present invention, the glass-ceramic substrate may be one that can be sufficiently sintered at 930 ° C. or lower, and contains, for example, borosilicate glass as a base, lead oxide, zinc oxide, an oxide of an alkaline earth metal, and the like. Softening point 600-800
A raw material may be a mixture of amorphous glass powder at ℃ and a ceramic filler such as alumina, or crystallized glass that is crystallized at 600 to 900 ℃, and processed into a substrate in the next step. That is, the above powder raw materials are mixed with an organic binder, a plasticizer, and a solvent in a ball mill,
After defoaming the obtained slurry, it is formed into a green sheet by a doctor blade method, the green sheet is cut into an appropriate size, and an alumina paste is formed in the same layer as the electrode on the uppermost layer. It is printed and dried, and then a conductor paste is printed on the alumina layer with an electrode pattern and dried.

【0009】アルミナ層の厚さは、3〜15μmとする
必要がある。3μm以下になると電極の半田濡れ性が不
十分で、また15μm以上になるとアルミナ膜の強度が
不十分で電極の密着性に問題が発生するからである。上
記グリーンシートはそのまま焼成しても良いが、多層基
板を製造する場合は、内層導体を形成したグリーンシー
トを積み重ね、さらに最上部に上記のグリーンシートを
重ねて圧力50〜300kg/cm2 、温度60〜90
℃の条件でホットプレス機を用いて一体化すると良い。
このようにして得られた積層体を350〜600℃で予
備焼成して有機物を除去した後、800〜930℃で焼
成すればガラスセラミック多層基板が得られる。
The thickness of the alumina layer must be 3 to 15 μm. This is because when the thickness is 3 μm or less, the solder wettability of the electrode is insufficient, and when it is 15 μm or more, the strength of the alumina film is insufficient and a problem occurs in the adhesion of the electrode. The above green sheet may be fired as it is, but in the case of manufacturing a multilayer substrate, the green sheets on which the inner layer conductors are formed are stacked, and the above green sheet is further stacked on the uppermost portion to obtain a pressure of 50 to 300 kg / cm 2 , and a temperature. 60-90
It is advisable to integrate them by using a hot press machine under the condition of ° C.
The glass-ceramic multilayer substrate is obtained by pre-baking the thus obtained laminate at 350 to 600 ° C. to remove organic substances and then baking at 800 to 930 ° C.

【0010】本発明法によれば、導体ペースト中のガラ
ス成分はアルミナと親和性が強いのでアルミナ層へ移行
し、また、ガラスセラミック中のガラスもアルミナ層で
固定されて導体層へ移行しないので、半田濡れ性が良好
となる。また、アルミナ層は移行してきたガラスによっ
て強化されるので十分な強度を保持することができる。
According to the method of the present invention, since the glass component in the conductor paste has a strong affinity with alumina, it migrates to the alumina layer, and the glass in the glass ceramic is also fixed by the alumina layer and does not migrate to the conductor layer. The solder wettability is improved. Further, since the alumina layer is reinforced by the transferred glass, sufficient strength can be maintained.

【0011】なお、上記説明はガラスセラミックグリー
ンシート、アルミナペースト、導体ペーストを一括して
焼成する場合であるが、ガラスセラミックグリーンシー
トを先に焼成し、次いでアルミナ印刷工程以後を続けて
も同様の効果が得られる。
In the above description, the glass ceramic green sheet, the alumina paste, and the conductor paste are collectively fired, but the glass ceramic green sheet may be fired first, and then the alumina printing step and subsequent steps may be similarly performed. The effect is obtained.

【0012】[0012]

【実施例】平均粒径0.54μmのアルミナ粉末100
重量部を有機質ビヒクル25重量部とともに混練してペ
ースト状組成物とした。ビヒクルにはエチルセルロース
濃度22重量%のターピネオール溶液を用いた。
EXAMPLE Alumina powder 100 having an average particle size of 0.54 μm
A part by weight was kneaded with 25 parts by weight of an organic vehicle to prepare a paste composition. A terpineol solution having an ethyl cellulose concentration of 22% by weight was used as a vehicle.

【0013】一方、ガラスセラミック基板として、Pb
O3.07、SiO2 51.7、Al2 3 8.4、B
2 3 7.3、CaO1.9各重量%の組成のガラス粉
末(平均粒径2.2μm)とアルミナ粉末(平均粒径
0.54μm)を50/50の比率で混合し、この粉末
100重量部にポリビニルブチラール9重量部、フタル
酸ジイソブチル7重量部、オレイン酸1重量部、イソプ
ロピルアルコール40重量部、トリクロロエタン20重
量部を加えてボールミルで24時間混合してスラリーと
し、脱泡処理後にドクターブレード法で0.7mm厚さ
のグリーンシートを成形した。
On the other hand, as a glass ceramic substrate, Pb
O3.07, SiO 2 51.7, Al 2 O 3 8.4, B
2 O 3 7.3 and CaO 1.9 glass powder (average particle size 2.2 μm) and alumina powder (average particle size 0.54 μm) each having a composition of 50% by weight were mixed at a ratio of 50/50, and the powder 100 9 parts by weight of polyvinyl butyral, 7 parts by weight of diisobutyl phthalate, 1 part by weight of oleic acid, 40 parts by weight of isopropyl alcohol, and 20 parts by weight of trichloroethane were added to parts by weight, and mixed by a ball mill for 24 hours to form a slurry. A 0.7 mm thick green sheet was formed by the blade method.

【0014】該グリーンシートから1インチ角の小片を
切り出し、この小片上に、種々の電極パターンで先ずア
ルミナペーストをスクリーン印刷により0〜18.9μ
mの膜厚で塗布し、さらに、市販の銀−パラジウムペー
スト(C−4160、C−4910 住友金属鉱山
(株)製)をこのアルミナ膜上に印刷して乾燥した。グ
リーンシート小片は次いで520℃で3時間予備焼成し
て有機物を除去し、引き続いて900℃、1時間で焼成
し、電極膜について次の様な試験に供した。
A small piece of 1 inch square is cut out from the green sheet, and an alumina paste is first screen-printed on the small piece with various electrode patterns by 0 to 18.9 μm.
Then, a commercially available silver-palladium paste (C-4160, C-4910 manufactured by Sumitomo Metal Mining Co., Ltd.) was printed on the alumina film and dried. The green sheet pieces were then pre-baked at 520 ° C. for 3 hours to remove organic substances, and subsequently baked at 900 ° C. for 1 hour, and the electrode films were subjected to the following tests.

【0015】(イ)半田濡れ性−10ミリ角の電極パタ
ーン上にフラックス(タムラ化研製、XA−100)を
塗布して、該パターンを37Pb/63Sn半田浴(2
30℃)に5秒間浸漬し、冷却後パターン上の濡れ面積
比率を求めた。結果を表1に示す。
(A) Solder wettability: Flux (Tamura Kaken Co., Ltd., XA-100) was applied on a 10 mm square electrode pattern, and the pattern was applied to a 37Pb / 63Sn solder bath (2
After being immersed in (30 ° C.) for 5 seconds and cooled, the wetted area ratio on the pattern was obtained. The results are shown in Table 1.

【0016】(ロ)接着強度−2ミリ角のパターン上に
0.65mmφのメッキ銅線を37Pb/63Snの半
田を用いて半田付けし、垂直方向に引っ張って剥離し、
剥離時の引張力を求めた。
(B) Adhesive strength-2. A 0.65 mmφ plated copper wire is soldered on a 2 mm square pattern using 37 Pb / 63 Sn solder and pulled vertically to be peeled off.
The tensile force at the time of peeling was determined.

【0017】(ハ)エージング強度−上記と同様にして
錫メッキ銅線を半田付けした基板を150℃の恒温槽中
に1000時間放置した後、上記と同様の剥離試験に供
した。
(C) Aging strength-The substrate to which the tin-plated copper wire was soldered in the same manner as above was left in a constant temperature bath at 150 ° C for 1000 hours and then subjected to the same peeling test as above.

【0018】[0018]

【表1】 [Table 1]

【0019】表1において、半田濡れ80%以上、接着
強度4.0kg以上、エージング強度2.0kg以上は
合格の○印を、それ以下に×印を付けて示している。
In Table 1, the solder wetting of 80% or more, the adhesive strength of 4.0 kg or more, and the aging strength of 2.0 kg or more are indicated by a pass mark ◯ and a mark X below that mark.

【0020】表1の結果は、実験No.1〜7で上記の
3特性が全て合格しているが、実験No.8〜13から
アルミナ膜が薄過ぎても、又厚過ぎても何れかの特性が
不合格になることを示している。
The results shown in Table 1 are the results of Experiment No. Although all of the above three characteristics were passed in Nos. 1 to 7, Experiment No. From 8 to 13, it is shown that any of the characteristics fails if the alumina film is too thin or too thick.

【0021】[0021]

【発明の効果】本発明法により、市販の導体ペーストを
用いてガラスセラミック基板上に、半田濡れ性が良好で
しかも接着強度も優れた電極を形成できるようになっ
た。
According to the method of the present invention, it is possible to form an electrode having good solder wettability and excellent adhesive strength on a glass ceramic substrate by using a commercially available conductor paste.

Claims (1)

【特許請求の範囲】 【請求項1】 ガラス粉末とセラミック粉末とから成る
グリーンシート上に電極と同一パターンでアルミナペー
ストを印刷後乾燥して3〜15μmのアルミナ膜を形成
する工程、該アルミナ膜上に電極パターンで導体ペース
トを印刷して乾燥する工程、導体膜とマルミナ膜とグリ
ーンシートをそのままで、必要により所望の他の層上に
重ね、一括して800〜930℃で焼成する工程とを有
するガラスセラミック基板の製造方法。
Claim: What is claimed is: 1. A step of forming an alumina film having a thickness of 3 to 15 .mu.m by printing an alumina paste in the same pattern as an electrode on a green sheet made of glass powder and ceramic powder and then drying the alumina film. A step of printing a conductor paste on the electrode pattern and drying it, a step of directly laminating the conductor film, the marmina film and the green sheet on another layer as desired, and baking them collectively at 800 to 930 ° C. A method for manufacturing a glass-ceramic substrate having a.
JP19605791A 1991-07-11 1991-07-11 Manufacture of glass ceramic substrate Pending JPH0521931A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19605791A JPH0521931A (en) 1991-07-11 1991-07-11 Manufacture of glass ceramic substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19605791A JPH0521931A (en) 1991-07-11 1991-07-11 Manufacture of glass ceramic substrate

Publications (1)

Publication Number Publication Date
JPH0521931A true JPH0521931A (en) 1993-01-29

Family

ID=16351484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19605791A Pending JPH0521931A (en) 1991-07-11 1991-07-11 Manufacture of glass ceramic substrate

Country Status (1)

Country Link
JP (1) JPH0521931A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0228220A (en) * 1988-07-15 1990-01-30 Nok Corp Method for carrying out surface treatment of cured rubber moldings
WO2012067253A1 (en) * 2010-11-17 2012-05-24 パナソニック株式会社 Ceramic substrate and method for producing same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0228220A (en) * 1988-07-15 1990-01-30 Nok Corp Method for carrying out surface treatment of cured rubber moldings
WO2012067253A1 (en) * 2010-11-17 2012-05-24 パナソニック株式会社 Ceramic substrate and method for producing same

Similar Documents

Publication Publication Date Title
JPH05235497A (en) Copper conductive paste
JP3785903B2 (en) Multilayer substrate and manufacturing method thereof
JPH08161931A (en) Conductive paste, and conductive body and multilayer ceramic board using it
JP4385484B2 (en) Multilayer ceramic substrate manufacturing method and copper-based conductive paste
JPH0521931A (en) Manufacture of glass ceramic substrate
JP6897704B2 (en) Black mark composition and electronic components using it
JP3082154B2 (en) Baking type conductive paste for ceramic electronic components and ceramic electronic components
JP2002362987A (en) Electronic component and method for manufacturing the same
JP3098288B2 (en) Conductor composition and ceramic substrate using the same
JP3686687B2 (en) Low temperature fired ceramic circuit board
JP3929989B2 (en) An electrically conductive paste and a ceramic multilayer circuit board using the electrically conductive paste.
JP2699467B2 (en) Conductive paste and multilayer ceramic substrate
JP2727651B2 (en) Ceramic substrate
EP1184882A1 (en) Conductor pattern built in multilayer board, multilayer board having built-in conductor pattern, and method of manufacturing multilayer board
JPH0650703B2 (en) Paste composition and method for manufacturing laminated ceramic capacitor
JP3222296B2 (en) Conductive ink
JPH0644670B2 (en) Ceramic circuit board manufacturing method
JP3689988B2 (en) Conductive composition and multilayer ceramic substrate
JP2000049431A (en) Ceramic circuit board
JPH0548225A (en) Conductive paste
JP2893711B2 (en) Conductive paste and ceramic substrate
JPH05315720A (en) Conductor material for class or glass ceramic board
WO2018216509A1 (en) Composition for forming conductor, conductor, production method therefor, and chip resistor
JPH0964230A (en) Manufacture of ceramic substrate
JPH04334803A (en) Conductor paste composite and ceramic substrate