JPH0521709B2 - - Google Patents

Info

Publication number
JPH0521709B2
JPH0521709B2 JP61274380A JP27438086A JPH0521709B2 JP H0521709 B2 JPH0521709 B2 JP H0521709B2 JP 61274380 A JP61274380 A JP 61274380A JP 27438086 A JP27438086 A JP 27438086A JP H0521709 B2 JPH0521709 B2 JP H0521709B2
Authority
JP
Japan
Prior art keywords
housing
receiver
cup
polishing head
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP61274380A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63127827A (ja
Inventor
Manabu Hisada
Masahiro Tomita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Priority to JP27438086A priority Critical patent/JPS63127827A/ja
Publication of JPS63127827A publication Critical patent/JPS63127827A/ja
Publication of JPH0521709B2 publication Critical patent/JPH0521709B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
JP27438086A 1986-11-18 1986-11-18 電解バフ複合研摩装置 Granted JPS63127827A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27438086A JPS63127827A (ja) 1986-11-18 1986-11-18 電解バフ複合研摩装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27438086A JPS63127827A (ja) 1986-11-18 1986-11-18 電解バフ複合研摩装置

Publications (2)

Publication Number Publication Date
JPS63127827A JPS63127827A (ja) 1988-05-31
JPH0521709B2 true JPH0521709B2 (enrdf_load_html_response) 1993-03-25

Family

ID=17540855

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27438086A Granted JPS63127827A (ja) 1986-11-18 1986-11-18 電解バフ複合研摩装置

Country Status (1)

Country Link
JP (1) JPS63127827A (enrdf_load_html_response)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2606408Y2 (ja) * 1993-04-06 2000-11-06 日新工機株式会社 研磨機
KR100489703B1 (ko) * 2001-11-23 2005-05-16 학교법인연세대학교 공작기계 헤드 인터페이스와 그 연마 및 연삭공구
ES2660404T3 (es) * 2003-06-26 2018-03-22 Tokyo Stainless Grinding Co., Ltd. Cabezal de reducción de superficie giratoria, dispositivo de reducción de superficie electrolítica y método de reducción de superficie electrolítica
JP2013158864A (ja) * 2012-02-03 2013-08-19 Nagatsu Precision Mold Co Ltd 荷重載荷装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56142930U (enrdf_load_html_response) * 1980-03-25 1981-10-28
JPS5727651A (en) * 1980-07-23 1982-02-15 Hitachi Ltd Profiling polisher
JPS57178663A (en) * 1981-04-24 1982-11-02 Hitachi Zosen Corp Control method of pressing force by grinding wheel
JPS6099564A (ja) * 1983-11-02 1985-06-03 Sumitomo Heavy Ind Ltd 工具押付力検出装置
JPS61257751A (ja) * 1985-05-02 1986-11-15 Shin Nippon Koki Kk 研削工具および研削アタツチメント

Also Published As

Publication number Publication date
JPS63127827A (ja) 1988-05-31

Similar Documents

Publication Publication Date Title
TWI485040B (zh) 修整裝置、及修整方法
US6702646B1 (en) Method and apparatus for monitoring polishing plate condition
US20070015442A1 (en) Method and apparatus for measuring abrasion amount and pad friction force of polishing pad using thickness change of slurry film
JP2009148877A (ja) 研磨パッドのドレッシング方法、研磨パッドのドレッシング装置、研磨パッドのプロファイル測定方法、基板研磨装置、及び基板研磨方法
JP4484413B2 (ja) 力制御方式研磨のためのスピンドル組立体
US4370835A (en) Working pressure control mechanism
CN110919535A (zh) 一种恒力执行器
CN112720194A (zh) 一种主动恒压力控制砂带机
JPS6350147B2 (enrdf_load_html_response)
JP2004524700A (ja) 調整可能な力をエアプラテンに適用する化学機械平滑化システム
JPH0521709B2 (enrdf_load_html_response)
JP2016022524A (ja) スポット溶接ガンの電極の研磨システム
CA1075006A (en) Tilt infeed by eccentric wheelhead support
GB2104424A (en) Gear finishing machines
US4993097A (en) Circuit board deburring system
CN210046481U (zh) 一种可遥控调压的珩磨工具
JPH08257911A (ja) 電解ドレッシング用電流調整装置
JP2000061838A (ja) ドレッシング装置および方法
JPH1058309A (ja) ポリッシング装置および方法
JPH04240023A (ja) 電解バフ複合研磨装置
JPH10286769A (ja) ポリッシング装置
JPS6360009A (ja) 圧延ロ−ルのオンライン研削方法
CN220700645U (zh) 印刷装置以及自动胶压闭环控制系统
CN218137321U (zh) 驱动装置以及抛光设备
CN215089795U (zh) 一种轧机辊缝调节装置

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees