JPH0521405B2 - - Google Patents

Info

Publication number
JPH0521405B2
JPH0521405B2 JP14179685A JP14179685A JPH0521405B2 JP H0521405 B2 JPH0521405 B2 JP H0521405B2 JP 14179685 A JP14179685 A JP 14179685A JP 14179685 A JP14179685 A JP 14179685A JP H0521405 B2 JPH0521405 B2 JP H0521405B2
Authority
JP
Japan
Prior art keywords
receiving element
light
light receiving
divided
prism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP14179685A
Other languages
English (en)
Japanese (ja)
Other versions
JPS622110A (ja
Inventor
Kimyuki Mitsui
Makoto Sakai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Tokyo Seimitsu Co Ltd filed Critical Agency of Industrial Science and Technology
Priority to JP14179685A priority Critical patent/JPS622110A/ja
Publication of JPS622110A publication Critical patent/JPS622110A/ja
Publication of JPH0521405B2 publication Critical patent/JPH0521405B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP14179685A 1985-06-28 1985-06-28 光学式粗さ計 Granted JPS622110A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14179685A JPS622110A (ja) 1985-06-28 1985-06-28 光学式粗さ計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14179685A JPS622110A (ja) 1985-06-28 1985-06-28 光学式粗さ計

Publications (2)

Publication Number Publication Date
JPS622110A JPS622110A (ja) 1987-01-08
JPH0521405B2 true JPH0521405B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-03-24

Family

ID=15300336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14179685A Granted JPS622110A (ja) 1985-06-28 1985-06-28 光学式粗さ計

Country Status (1)

Country Link
JP (1) JPS622110A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS622110A (ja) 1987-01-08

Similar Documents

Publication Publication Date Title
US5696589A (en) Optical caliper with compensation for specimen deflection and method
CN1979086A (zh) 低走离干涉仪
JPH0652170B2 (ja) 光結像式非接触位置測定装置
US7554675B2 (en) Light wavefront measuring instrument, light wavefront measuring method, and light source adjusting method
JPS63144206A (ja) 物体位置の測定方法
CN1329766C (zh) 超精密回转轴与激光直写机直写光轴空间对准方法
US4657396A (en) Optical method for detecting errors in shape
JPH0521405B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CN1051975A (zh) 表面三维形貌非接触测量仪
JPH0521404B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CN1060268C (zh) 激光双焦干涉球面轮廓仪
JPH07111334B2 (ja) 表面形状測定装置
JPH0214642B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
US4115008A (en) Displacement measuring apparatus
CN101344386A (zh) 多面镜电机的偏心测量装置
CN113932909B (zh) 一种刀具颤振状态的在线检测装置
KR100332035B1 (ko) 단일 파장 레이저 광의 다중패스를 이용한 거리 측정장치 및 방법
JP2966950B2 (ja) 試料変位測定装置
JPH0211084B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP0427692A2 (en) A contactless measuring probe
JP5656242B2 (ja) 形状計測方法、形状計測装置、及び工作機械
JPS6033003A (ja) 形状測定装置
JPS63148106A (ja) 物体位置測定装置
JPS63256836A (ja) レ−ザ光束の微小偏角の測定装置
JP2000018915A (ja) 光学部品の偏心測定方法および偏心測定装置

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term