JPH0521341B2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a semiconductor substrate storage box, and in particular to a semiconductor substrate storage box used for simultaneous chemical treatment, storage, transportation, etc. of a plurality of semiconductor substrates in a semiconductor device manufacturing process. Regarding storage boxes.

[Conventional technology]

Conventionally, this type of semiconductor substrate storage box has a structure consisting of a frame or side plates that fix two side plates having grooves for vertically holding a plurality of semiconductor substrates at regular intervals, with the grooves facing each other. was.

[Problem that the invention seeks to solve]

The conventional semiconductor substrate storage box described above is designed to hold semiconductor substrates at equal intervals, so that in the normal storage state, the front surface of a semiconductor substrate forming a semiconductor device faces the back surface of another semiconductor substrate. Because they fit together, they receive a uniform effect when performing chemical treatments, etc. However, a semiconductor substrate stored at the extreme end, where the surface of the semiconductor substrate is in a position facing the side plate of the storage box, has the disadvantage that the surface of the semiconductor substrate is affected differently from the surface of other semiconductor substrates due to variations in the distance between the side plate and the side plate. There is.

In addition, when observing the performance of a semiconductor device during chemical treatment, or when observing the surface of a semiconductor substrate in storage, the semiconductor substrate must be removed from the storage box, which requires additional man-hours. There is a drawback that serious damage can be caused to the semiconductor device due to contact with the semiconductor device or erroneous operation at the time of extraction.

[Means for solving problems]

The semiconductor substrate storage box of the present invention stores a plurality of semiconductor substrates, and is provided on a side plate portion facing a surface forming a semiconductor device of the semiconductor substrate stored at the end, and has a size comparable to that of the surface. The semiconductor substrate has a window made of a transparent material, and is configured such that the distance between the inner surface of the window and the surface is equal to the distance between the other semiconductor substrates.

〔Example〕

Next, the present invention will be explained with reference to the drawings.

FIG. 1 is a perspective view of an embodiment of the present invention, and FIG. 2 is a sectional view taken along line A-A' in FIG.

This embodiment has a storage box main body 1 and a window 2. The storage box body 1 is provided with a plurality of grooves 1a, 1b, 1c, . A window 2 made of transparent material is installed. It is assumed that the window 2 is approximately the same size as the surface of the semiconductor substrate 3. As shown in Figure 2,
The distance l between the inner surface of the window 2 and the semiconductor substrate 3 at the end adjacent to the window 2 is configured to be equal to the storage distance h of each of the other semiconductor substrates 3.

According to this embodiment configured as described above, the interval l
Since and h are equal, when performing chemical treatment etc.
All the semiconductor substrates 3 housed can be processed with the same effect under the same conditions. Furthermore, since the window 2 is transparent and has a size comparable to that of the surface of the semiconductor substrate 3, the surface condition of the semiconductor substrate 3 can be observed from the outside through the window 3 without having to take out the semiconductor substrate 3. .

〔Effect of the invention〕

As explained above, the present invention provides a transparent window in the side plate part and configures the interval between the window and the adjacent semiconductor substrate to be equal to the interval between the other semiconductor substrates, so that a plurality of semiconductor substrates can be processed by chemical treatment, etc. When carrying out this process, the surfaces of all the semiconductor substrates stored can be subjected to the same action under the same conditions, and therefore the results of the manufacturing process of the semiconductor substrates observed through the window will differ from those of the semiconductor devices on other semiconductor substrates. This has the effect of making it possible to control the manufacture of semiconductor devices of uniform quality. Furthermore, since the surface of the semiconductor substrate can be observed through the window while the semiconductor substrate is stored, it is possible to prevent damage to the surface of the semiconductor substrate due to erroneous operation when taking out the semiconductor substrate.

[Brief explanation of drawings]

FIG. 1 is a perspective view of an embodiment of the present invention, and FIG. 2 is a sectional view taken along line A-A' in FIG. DESCRIPTION OF SYMBOLS 1...Storage box main body, 2...Window, 3...Semiconductor substrate, 11...Side plate part.

Claims (1)

[Claims] 1. In a semiconductor substrate storage box for storing a plurality of semiconductor substrates, a transparent transparent plate having the same size as the surface of the semiconductor substrate stored at the end is provided on the side plate portion facing the surface forming the semiconductor device of the semiconductor substrate stored at the end. 1. A semiconductor substrate storage box, comprising a window made of a material, and configured such that the distance between the inner surface of the window and the surface is equal to the distance between the other semiconductor substrates.