JPH05208365A - Precise polishing finishing method and its device - Google Patents

Abstract

PURPOSE:To enable to maintain specified processing pressure at all times and finish the polishing with accuracy in processing even with a thin work. CONSTITUTION:These are a precise polishing finishing method of processing a work while maintaining specified processing pressure by measuring the processing pressure at polishing with a pressure sensor, and comparing the output with a specified set value inputted into a computed, and controlling the driver for work lifting on the basis of this comparison value, when performing precise polishing by pressing the work against a grinding wheel 17 rotating horizontally, and a device wherein a lift 8 is screwed on the vertical screw shaft 6 rotated by a driver 4, and a work rotary shaft 9 fitted with a work holder 13 is pivoted on this so as to be positioned above a rotatable grinding wheel 17, and a computer 21, to which a pressure setter 22 for input of a set value is attached through a pressure sensor 19 for measuring the processing pressure at work polishing, is connected to the work holder 13, the computer 21 is connected to the driver 4 through a signal generator 23 for positioning.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a precision polishing finishing method and apparatus for bringing a rotating polishing grindstone into close contact with a flat surface of a metal part, a ceramic substrate or the like to apply a working pressure, and more particularly to a polishing apparatus. The present invention relates to a precision polishing finishing method and apparatus capable of always maintaining a predetermined processing pressure during processing.

[0002]

2. Description of the Related Art Conventionally, in this type of precision polishing finishing, as a method of bringing a work into close contact with a polishing grindstone to generate a processing pressure, the work is pressed against an elastic body such as a coil spring and the elastic body is bent. A method is mainly used in which a processing pressure is generated by an elastic force generated or a work is directly lowered by a fluid pressure cylinder and brought into pressure contact with a grinding wheel to generate the processing pressure.

[0003]

However, in the method using the coil spring, the processing pressure can be known from the amount of deflection thereof, and in the fluid pressure cylinder method, it can be known by the pressure of the pressure fluid used, but both are indirect. The processing pressure itself is not measured in, and the actual processing pressure is unknown. In other words, since it is not possible to know the exact machining pressure during machining, the amount of flexure of the elastic body and the fluid pressure cylinder can be dealt with in response to subtle changes due to wear of the workpiece or abrasive wheel during polishing, pressure fluctuations of the pressure fluid source, etc. However, it is difficult to maintain a predetermined processing pressure at all times because the fluid pressure cannot be adjusted to a certain level, and in particular, for thin workpieces that are prone to distortion, there is a problem in that processing accuracy and flatness tend to vary.

[0004]

Means for Solving the Problems The present invention has solved the above-mentioned problems. In a precision polishing finishing method in which a workpiece is pressed against a horizontally rotating polishing grindstone to perform precision polishing of the surface, The processing pressure is measured by a pressure sensor and its output is compared with a predetermined set value that has been input to the computer in advance. The first invention is a precision polishing finishing method characterized in that polishing is carried out while maintaining the processing pressure, and a vertical type screw shaft rotatable by a drive device is moved up and down by the rotation of the screw shaft. An elevating body is screwed onto the work holder to rotatably support a work rotating shaft having a work holder attached to the lower end thereof, and a horizontally rotatable disk-shaped polishing grindstone is arranged below the work holder. ,further, The work holder is equipped with a pressure sensor for measuring the working pressure during work polishing, the pressure sensor is connected to a computer equipped with a pressure setter for inputting set values, and the computer is equipped with a signal generator for positioning. A second aspect of the present invention is a precision polishing finishing device characterized in that it is connected to the drive device through the above.

[0005]

The present invention will be described below with reference to the illustrated precision finishing device as an embodiment. Reference numeral 1 denotes a machine frame. A base 3 is horizontally projected near the upper side of a vertical support wall 2 provided on one side of the machine frame, and a drive device 4 such as a servomotor is provided above the base 3. A vertical screw shaft 6 is attached to the drive shaft, which is rotatably supported by a bearing portion 5 provided on the base 3, and is connected by a shaft coupling (not shown), and the screw shaft 6 is rotated by the drive device 4. It has become so.

Reference numeral 7 denotes an elevating body 7 screwed to the screw shaft 6 by means of an internal thread portion provided on the protruding portion 8 on one side.
A work rotating shaft 9 is rotatably held on the center side of the lifting body 7. Further, a vertical motor 11 is attached to the upper part of the lifting / lowering body 7 via a leg 10, and its drive shaft is connected to the upper end of the work rotating shaft 9 by a shaft joint 12, and the work rotating shaft is rotated. A work holder 13 is attached to the lower end of the shaft 9 so that the work can be attached and detached.
The work rotating shaft 9 rotates the work held by the work holder 13 by the drive of No. 1. A sliding portion 14 is formed on the side of the lifting body 7 facing the support wall body 2 as shown in FIG.
Is engaged with the guide portion 15 projecting at a corresponding position in the vertical direction so as to be slidable in the vertical direction. Therefore, the lifting body 7 is engaged with the guide portion 15 by the screw shaft 6 which is rotated by the operation of the drive device 4. It is guided and can be moved up and down along the support wall 2.

Reference numeral 17 denotes the machine frame 1 below the lifting body 7.
A disc-shaped polishing grindstone provided on a horizontal upper surface plate 16 protruding from the work piece, the grinding grindstone 17 being opposed to the lower side of the work holder 13 by a drive portion 18 provided below the work holder 13. Horizontally possible.

Reference numeral 19 is a pressure sensor such as a load cell, and the pressure sensor 19 is attached to the work holder 13 so that the processing pressure at the time of polishing can be measured. This is connected to the input side of the computer 21 via the AD converter 20. Connected to the computer 21, a pressure setting device 22 such as a digital switch for inputting a predetermined processing pressure as a set value is attached. Further, the driving device 4 is connected to the output side of the computer 21 via a positioning signal generator 23 and a pulse generator 24, and the processing pressure value and the pressure setting device 22 from the pressure sensor 19 at the time of polishing processing. The computer 21 performs a comparison with the set machining pressure value, and the comparison value is input from the signal generator 23 to the pulse generator 24 as a positioning signal, which is then output as a pulse signal from the pulse generator 24. The screw shaft 6 is rotated in a predetermined manner by being input to the drive device 4, and the elevation body 7 is lowered by the controlled lowering of the screw shaft 6 and the position of the lower end of the work rotating shaft 9 of the work W with respect to the polishing wheel 17. It is configured to be adjusted.
Reference numeral 25 denotes a processing pressure display unit in the computer 21.

[0009]

The function of the desired work W is as described above.
Is attached to the work holder 13 and the pressure sensor 19
Is attached to the work holder 13 so that the processing pressure can be measured, and a preset value of the processing pressure is input to the computer 21 by the pressure setting device 22. Then, the drive unit 19
The grinding wheel 17 is rotated horizontally by the motor 1
1, the workpiece rotating shaft 9 is rotated via the shaft joint 12, and then the driving device 4 is started to rotate the screw shaft 6, and the lifting body 7 screwed to this is lowered, By the lowering of the elevating / lowering body 7, the lower surface of the work W held by the work holder 13 is brought into contact with the surface of the rotating polishing grindstone 17 to start the polishing work, and the working pressure is sequentially increased with the lowering.

When the working pressure rises in this way, the rise in the working pressure is sent by the pressure sensor 19 to the AD converter 20 via a well-known sliding transmission mechanism or the like, where the analog signal on the input side is digital. The signal is converted and output from the signal and input to the computer 21, and the processing pressure is applied to the pressure setter 2.
When the set processing pressure input to the computer 21 from 2 is reached, the computer 21 causes the signal generator 23,
The signal sent to the driving device 4 via the pulse generator 24 changes, the driving device 4 stops, and the lowering of the work W ends,
Therefore, the polishing process is performed at the set processing pressure.

When the processing pressure changes as the polishing process progresses, the actual processing pressure is input to the computer 21 from the pressure sensor 19 in the same manner as described above, and the state is displayed on the display 2.
5, and a signal corresponding to the change is transmitted from the computer 21 to the drive unit 4 side as an output,
As a result, the screw shaft 6 rotates again, the lifting body 7 descends, and the pressing force of the work W against the grinding stone 17 increases and the processing pressure rises. Then, this processing pressure change signal is input to the computer 21 in the same manner as described above, the operation of the drive unit 4 is controlled in the same manner as described above, and the processing pressure is maintained at a predetermined set value.

When the predetermined polishing process is completed, the drive unit 4 is rotated in the reverse direction to raise the elevating body 7, the work W is separated from the polishing grindstone 17, and the motor 11 is stopped to stop the rotation of the work W. May be removed from the work holder 13 and replaced with a new work W, and the above steps may be repeated. According to the experiment, in the above-mentioned finishing, when the working pressure is up to 300 kg, it is possible to control the fluctuation of the working pressure in 100 g units. In that case, the response speed is within 1 second and most of the grinding is performed. A uniform processing pressure will be maintained throughout.

The pressure sensor 19 is removable by bolting, and the support wall 2 is fixed to the machine frame 1 in the embodiment, but it can be horizontally swung so that the work holder can be swung. It is also possible to make 13 movable on the surface of the grinding wheel 17.

[0014]

As is apparent from the above description, the present invention is as follows.
The processing pressure measured by the pressure sensor is immediately input to the computer where the predetermined setting processing pressure is input,
The result of comparison here is input as an operation signal to the drive device that raises and lowers the work, and the work is lowered until it reaches a predetermined processing pressure for the grinding wheel, making it possible to easily perform polishing processing by the processing pressure, and further Even if the machining pressure fluctuates during machining, this is immediately measured by the pressure sensor and fed back to the drive unit, and the corresponding lowering of the workpiece is performed and the machining pressure automatically returns to the set machining pressure. The product is polished in a stable and optimal state without fluctuations, and a product with consistently high surface accuracy and constant surface roughness can be obtained.In particular, the problem of strain generation for thin objects and easily distorted workpieces is eliminated, and the yield is improved. It is widely applicable to grinding, honing, lapping, polishing, etc. Therefore, the present invention has an extremely great contribution to the development of the industry as a solution to the problems of the conventional precision polishing finishing method and precision polishing finishing apparatus.

[Brief description of drawings]

FIG. 1 is a front view showing an embodiment of a precision polishing finishing device according to the present invention.

FIG. 2 is a plan view showing an embodiment of a precision polishing finishing device according to the present invention.

[Explanation of symbols]

 4 Drive device 6 Screw shaft 7 Lifting body 9 Work rotating shaft 13 Work holder 17 Grinding wheel 19 Pressure sensor 21 Computer 22 Pressure setting device 23 Signal generator

Claims (2)

[Claims] 1. In a precision polishing finishing method in which a workpiece is pressed against a horizontally rotating polishing grindstone to perform precision polishing of the surface, the processing pressure at the time of polishing is measured by a pressure sensor, and its output is input in advance to a computer. The precision is characterized by comparing with a predetermined set value, and based on this comparison value, the lifting amount of the drive device for lifting and lowering the work is controlled to carry out polishing while maintaining the predetermined working pressure. Abrasive finishing method. 2. A vertically movable screw shaft (6) which is rotatable by a drive device (4), and is raised and lowered by the rotation of the screw shaft (6).
The work holder (13) is screwed onto the work holder (13) to rotatably support the work rotating shaft (9) attached to the lower end, and the work holder (13) can be horizontally rotated below the work holder (13). A disk-shaped grinding wheel (17) is arranged, and further, the work holder (13) is equipped with a pressure sensor (19) for measuring the processing pressure during work polishing, and the pressure sensor is used for inputting a set value. A signal generator (2) for positioning the computer (21) is connected to the computer (21) to which the setting device (22) is attached.
A precision polishing finishing device characterized by being connected to the drive device (4) through 3).