JPH0520718A - Spin coating method for protective layer to disk-shaped recording medium and device therefor - Google Patents

Spin coating method for protective layer to disk-shaped recording medium and device therefor

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Publication number
JPH0520718A
JPH0520718A JP3168293A JP16829391A JPH0520718A JP H0520718 A JPH0520718 A JP H0520718A JP 3168293 A JP3168293 A JP 3168293A JP 16829391 A JP16829391 A JP 16829391A JP H0520718 A JPH0520718 A JP H0520718A
Authority
JP
Japan
Prior art keywords
recording medium
shaped recording
disk
outer peripheral
disc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3168293A
Other languages
Japanese (ja)
Inventor
Yutaka Yoshida
吉田  裕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP3168293A priority Critical patent/JPH0520718A/en
Publication of JPH0520718A publication Critical patent/JPH0520718A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To uniformly form a protective layer having a uniform thickness on a disk-shaped recording medium. CONSTITUTION:The disk-shaped recording medium 1 is adhered to a turn table 4 and the outer peripheral end of the disk-shaped recording medium 1 is previously heated by a nichrome wire 6. A coating liquid 10 is dropped from a nozzle 8 onto the surface in the inner peripheral part of the disk-shaped recording medium 1 and a spindle motor 2 is started to rotate the turn table 4 and eventually the disk-shaped recording medium 1 in an arrow A direction for a prescribed period of time. The dropped coating liquid is made to arrive at the outer peripheral end of the disk-shaped recording medium 1 by the effect of centrifugal force and is heated, by which the temp. is raised and the viscosity is lowered. Consequently, the coating liquid of the unnecessary amt. at the outer peripheral end is splashed to the outside of the disk-shaped recording medium 1 by the effect of the centrifugal force and is thereby removed.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、円盤状記録媒体へ保護
層を塗布する方法およびその装置に関し、特に、磁場変
調法によるオーバーライト可能な光磁気記録媒体の保護
層として放射線硬化型の樹脂または塗料を塗布するのに
好適な回転塗布方法および回転塗布装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for applying a protective layer to a disk-shaped recording medium, and more particularly, to a radiation-curable resin as a protective layer for an overwritable magneto-optical recording medium by a magnetic field modulation method. Further, the present invention relates to a spin coating method and spin coating apparatus suitable for applying a paint.

【0002】[0002]

【従来の技術】磁場変調法によるオーバーライト可能な
光磁気ディスクおよびその装置としては、例えば特開昭
51−107121号公報、特開昭63−217548
号公報、特開昭59−215008号公報および特公昭
60−48806号公報等にそれぞれ記載されているよ
うに、記録する情報に応じて光磁気記録層への印加磁場
を変調させる方式が知られている。また、これらの装置
に使用される光磁気ディスクの構成は、基板上に、記録
層と無機誘電体保護層の積層膜を形成し、さらに、その
上に保護層としての樹脂層を設けた構成が一般的であ
る。
2. Description of the Related Art As an overwritable magneto-optical disk and a device therefor using a magnetic field modulation method, for example, JP-A-51-107121 and JP-A-63-217548 are available.
As described in JP-B No. 59-215008, JP-B No. 60-48806 and the like, there are known methods for modulating the magnetic field applied to the magneto-optical recording layer according to the information to be recorded. ing. Further, the structure of the magneto-optical disk used in these devices is such that a laminated film of a recording layer and an inorganic dielectric protective layer is formed on a substrate, and a resin layer as a protective layer is further provided thereon. Is common.

【0003】従来、前記保護層の成形方法としては、ス
ピンコーターを用いた回転塗布方式が一般的であり、こ
の回転塗布方式とは、被塗布体(円盤状記録媒体)の内
周部表面上に塗布液を滴下し、被塗布体を回転させるこ
とによって、塗布液を遠心力の作用によって流延させ
て、被塗布体の表面に保護層を形成する方法である。
Conventionally, a spin coating method using a spin coater has been generally used as a method for forming the protective layer. This spin coating method is a method for forming a surface of an inner peripheral portion of an object to be coated (disk-shaped recording medium). Is a method of forming a protective layer on the surface of the object to be coated by casting the coating solution by the action of centrifugal force by dropping the coating solution onto the object and rotating the object to be coated.

【0004】ところで、保護層に用いる樹脂組成物は、
溶剤を含むタイプの樹脂、または塗料を直接積層膜上に
塗布する場合、積層膜が基板から浮き上がって剥離した
り、積層膜にクラックが生じるのを防ぐために、無溶剤
タイプのものが好ましい。また、樹脂の硬化方法は、基
板の耐熱性を考慮すると、熱硬化よりも低温で硬化し、
かつ紫外線や電子線を用いて硬化する、いわゆる放射線
硬化方式が好ましい。以上述べたとおり、保護層に用い
る樹脂としては、無溶剤タイプの放射線硬化型の樹脂を
用いることが一般的である。
By the way, the resin composition used for the protective layer is
When a resin containing a solvent or a coating material is directly applied to the laminated film, a solventless type is preferable in order to prevent the laminated film from being lifted from the substrate and peeled off or cracks in the laminated film. Further, the resin curing method, when considering the heat resistance of the substrate, is cured at a lower temperature than thermosetting,
In addition, a so-called radiation curing method of curing using ultraviolet rays or electron beams is preferable. As described above, the resin used for the protective layer is generally a solventless type radiation curable resin.

【0005】[0005]

【発明が解決しようとする課題】上述した回転塗布方法
は、円盤状記録媒体の外周端部に塗布液が集まってもり
上がる現象が起こる。このような塗膜の厚い部分は、例
えば磁場変調方式の光磁気記録媒体に用いる場合、光磁
気記録装置に装着して回転させたときに、磁気ヘッドや
スライダー部に接触し、これらを損傷させてしまうこと
が問題となっている。このような塗膜のもり上がりは、
塗布液の粘度が高いほど顕著である。
In the spin coating method described above, a phenomenon occurs in which the coating liquid collects and rises at the outer peripheral edge of the disk-shaped recording medium. When used in a magnetic field modulation type magneto-optical recording medium, such a thick portion of the coating film may come into contact with the magnetic head or the slider portion when it is mounted on the magneto-optical recording device and rotated to damage them. It is a problem that it ends up. The rise of such a coating film is
The higher the viscosity of the coating liquid, the more remarkable.

【0006】一般的な溶剤タイプの塗布液であれば、塗
布液中の溶剤成分を多くして粘度を低下させることによ
り、この塗膜の外周端部のもり上がりを防止することが
容易であるが、上述した無溶剤タイプの場合は困難であ
る。なぜならば、無溶剤タイプの放射線硬化型樹脂の場
合、その構成成分中に反応性希釈剤の濃度を高くすれ
ば、ある程度塗布液の粘度は低下するが、その反面、硬
化後の塗膜物性がもろくなるからである。
In the case of a general solvent type coating solution, it is easy to prevent the outer peripheral edge of the coating film from rising by increasing the solvent component in the coating solution to reduce the viscosity. However, it is difficult for the above-mentioned solventless type. This is because, in the case of a solventless type radiation curable resin, if the concentration of the reactive diluent in the constituents is increased, the viscosity of the coating solution will decrease to some extent, but on the other hand, the physical properties of the coating film after curing will be Because it becomes brittle.

【0007】本発明は、上記従来技術の有する問題点に
鑑みてなされたものであり、円盤状記録媒体上に、均一
な厚さの保護層を一様に形成することができる、円盤状
記録媒体への保護層の回転塗布方法およびその装置を提
供することを目的とする。
The present invention has been made in view of the above problems of the prior art, and is capable of forming a protective layer having a uniform thickness uniformly on a disk recording medium. An object of the present invention is to provide a method and apparatus for spin coating a protective layer on a medium.

【0008】[0008]

【課題を解決するための手段】上記目的を達成するた
め、本発明の円盤状記録媒体への保護層の回転塗布方法
は、予め円盤状記録媒体の外周端部を加熱しておき、前
記円盤状記録媒体の内周部表面上に塗布液を滴下すると
ともに、前記円盤状記録媒体を回転させるものである。
In order to achieve the above object, the method of spin coating a protective layer on a disk-shaped recording medium according to the present invention is performed by heating the outer peripheral edge of the disk-shaped recording medium in advance, The disc-shaped recording medium is rotated while the coating liquid is dropped on the surface of the inner peripheral portion of the disk-shaped recording medium.

【0009】また、円盤状記録媒体の内周部表面上に塗
布液を滴下するとともに、前記円盤状記録媒体の外周端
部を加熱しつつ円盤状記録媒体を回転させてもよい。
Further, the coating liquid may be dropped on the surface of the inner peripheral portion of the disc-shaped recording medium, and the disc-shaped recording medium may be rotated while heating the outer peripheral end of the disc-shaped recording medium.

【0010】上記方法を実施するための装置としては、
円盤状記録媒体を回転させるための回転手段と、前記円
盤状記録媒体の内周部表面上に塗布液を滴下するための
滴下手段と、前記円盤状記録媒体の外周端部を加熱する
ための加熱手段とを有する。また、円盤状記録媒体を回
転させるための回転手段は、円盤状記録媒体を支持する
ためのテーブルと、該テーブルを回転させるためのモー
タとから構成され、円盤状記録媒体の外周端部を加熱す
るための加熱手段は、前記テーブルに埋設された発熱体
と、該発熱体に通電するための電源とから構成されてい
るものとすることができる。
As an apparatus for carrying out the above method,
Rotating means for rotating the disk-shaped recording medium, dropping means for dropping the coating liquid on the inner peripheral surface of the disk-shaped recording medium, and for heating the outer peripheral end of the disk-shaped recording medium. And heating means. The rotating means for rotating the disk-shaped recording medium is composed of a table for supporting the disk-shaped recording medium and a motor for rotating the table, and heats the outer peripheral end of the disk-shaped recording medium. The heating means for performing the heating may be composed of a heating element embedded in the table and a power source for energizing the heating element.

【0011】さらに、円盤状記録媒体の外周端部を加熱
するための加熱手段として、発熱体と電源との代わり
に、前記外周端部にレーザー光を照射するレーザー光照
射装置を用いることもできる。
Further, as a heating means for heating the outer peripheral end of the disk-shaped recording medium, a laser light irradiating device for irradiating the outer peripheral end with a laser beam may be used instead of the heating element and the power source. .

【0012】[0012]

【作用】上記のとおり構成された請求項1に記載の発明
では、予め被塗布体である円盤状記録媒体の外周端部を
加熱しておくことにより、円盤状記録媒体が回転する
際、滴下された塗布液は遠心力の作用により円盤状記録
媒体の外周端部に達し、加熱されて温度が上昇し、粘度
が低下する。その結果、前記外周端部上の不必要な量の
塗布液は、前記遠心力の作用により円盤状記録媒体外に
飛散して除去される。
In the invention according to claim 1 configured as described above, the outer peripheral end of the disk-shaped recording medium which is the object to be coated is heated in advance so that the disk-shaped recording medium drops when it rotates. The applied coating solution reaches the outer peripheral end of the disk-shaped recording medium by the action of centrifugal force, and is heated to increase the temperature and decrease the viscosity. As a result, an unnecessary amount of coating liquid on the outer peripheral edge is scattered and removed outside the disc-shaped recording medium by the action of the centrifugal force.

【0013】請求項2に記載の発明では、円盤状記録媒
体を加熱しつつ円盤状記録媒体を回転させることによ
り、円盤状記録媒体上に滴下された塗布液は、請求項1
の発明と同様に、遠心力の作用により円盤状記録媒体の
外周端部に達し、加熱されて温度が上昇し、粘度が低下
する。その結果、前記外周端部上の不必要な量の塗布液
は、前記遠心力の作用により円盤状記録媒体外に飛散し
て除去される。
According to the second aspect of the invention, the coating liquid dripped onto the disc-shaped recording medium by rotating the disc-shaped recording medium while heating the disc-shaped recording medium,
Similar to the invention described in (1), the outer peripheral edge of the disk-shaped recording medium is reached by the action of centrifugal force, and is heated to increase the temperature and decrease the viscosity. As a result, an unnecessary amount of coating liquid on the outer peripheral edge is scattered and removed outside the disc-shaped recording medium by the action of the centrifugal force.

【0014】[0014]

【実施例】次に、本発明の実施例について、図面を参照
して説明する。 (第1実施例)先ず、第1実施例に係る回転塗布装置の
構成について説明する。
Embodiments of the present invention will now be described with reference to the drawings. (First Embodiment) First, the structure of the spin coating apparatus according to the first embodiment will be described.

【0015】図1に示すように、装置本体(不図示)に
スピンドルモータ2が固定支持されており、このスピン
ドルモータ2の出力軸(回転軸)3の先端部には、ター
ンテーブル4の中心部下面が固着されている。このター
ンテーブル4は、その上面に円盤状記録媒体1を支持す
る構成を有する上、円盤状記録媒体1の外周部位に対応
する部位にリング状の溝5が形成されている。前記スピ
ンドルモータ2およびターンテーブル4により、円盤状
記録媒体1を回転させるための回転手段が構成されてい
る。
As shown in FIG. 1, a spindle motor 2 is fixedly supported by an apparatus main body (not shown), and a tip of an output shaft (rotary shaft) 3 of the spindle motor 2 has a center of a turntable 4 at its tip. The lower surface of the part is fixed. The turntable 4 has a structure for supporting the disc-shaped recording medium 1 on its upper surface, and has a ring-shaped groove 5 formed in a portion corresponding to the outer peripheral portion of the disc-shaped recording medium 1. The spindle motor 2 and the turntable 4 constitute a rotating means for rotating the disk-shaped recording medium 1.

【0016】前記リング状の溝5内には発熱体としての
ニクロム線6が一様に設けられており、このニクロム線
6に通電するための交流電源7がターンテーブル4に埋
設されている。また、ターンテーブル4に支持された円
盤状記録媒体1の中心部上方には、円盤状記録媒体1の
内周部表面上に塗布液10を滴下するための滴下手段と
してのノズル8が設けられており、このノズル8は、塗
布液を貯留する貯留部材(不図示)に連通されている。
A nichrome wire 6 as a heating element is uniformly provided in the ring-shaped groove 5, and an AC power supply 7 for energizing the nichrome wire 6 is embedded in the turntable 4. Further, above the central portion of the disc-shaped recording medium 1 supported by the turntable 4, a nozzle 8 as a dropping means for dropping the coating liquid 10 on the inner peripheral surface of the disc-shaped recording medium 1 is provided. The nozzle 8 is in communication with a storage member (not shown) that stores the coating liquid.

【0017】次に、回転塗布方法について説明する。Next, the spin coating method will be described.

【0018】室内溝およびプリフォーマット信号を有す
る厚さ1.2mm、直径86mmのポリカーボネートデ
ィスク基板上に、スパッタリング(スパッタ圧0.2P
a、投入パワー500W)により膜厚500×10-4μ
のSi34 層を成膜し、その上に膜厚400×10-4
μの非晶質GdFe層および膜厚400×10-4μの非
晶質TbFe層をスパッタ圧0.3Paのスパッタリン
グにて順次積層して磁気記録層を設ける。さらに、膜厚
700×10-4μのSi34 層をスパッタ圧0.2P
a、投入パワー500Wで成膜して、光磁気の円盤状記
録媒体を得た。次に、図1に示したように、この円盤状
記録媒体1を回転塗布装置のターンテーブル4に装着
し、交流電源7によりニクロム線6に通電する電流値を
調整しながらニクロム線6で円盤状記録媒体1の外周端
部を一様に加熱した。このとき、接触式デジタル温度計
で前記外周端部の温度を測定したところ35℃であっ
た。この状態で、ノズル8より光硬化性樹脂(商品名S
PC339、日本化薬(株)製)からなる塗布液10を
所定量滴下するとともに、スピンドルモータ2を起動し
てターンテーブル4ひいては円盤状記録媒体1を矢印A
方向に所定時間だけ回転させる。該回転の際、滴下され
た塗布液は遠心力の作用により円盤状記録媒体1の外周
端部に達し、加熱されて温度が上昇し、粘度が低下す
る。その結果、前記外周端部上の不必要な量の塗布液
は、前記遠心力の作用により円盤状記録媒体1外に飛散
して除去される。
Sputtering (sputtering pressure 0.2 P) was performed on a polycarbonate disk substrate having a thickness of 1.2 mm and a diameter of 86 mm, which had a chamber groove and a preformat signal.
a, input power 500W), film thickness 500 × 10 -4 μ
Of Si 3 N 4 is formed, and the film thickness is 400 × 10 −4 on it.
An amorphous GdFe layer having a thickness of μ and an amorphous TbFe layer having a thickness of 400 × 10 −4 μ are sequentially stacked by sputtering at a sputtering pressure of 0.3 Pa to form a magnetic recording layer. Further, a Si 3 N 4 layer having a film thickness of 700 × 10 −4 μ is sputtered at a pressure of 0.2 P.
a, a film was formed with an input power of 500 W to obtain a magneto-optical disc-shaped recording medium. Next, as shown in FIG. 1, the disk-shaped recording medium 1 is mounted on the turntable 4 of the spin coater, and the nichrome wire 6 is used to adjust the current value to be applied to the nichrome wire 6 by the AC power supply 7. The outer peripheral edge of the flat recording medium 1 was uniformly heated. At this time, the temperature of the outer peripheral edge portion was measured by a contact type digital thermometer and was 35 ° C. In this state, the photo-curable resin (product name S
A predetermined amount of the coating liquid 10 made of PC339 and Nippon Kayaku Co., Ltd. is dropped, and the spindle motor 2 is activated to turn the turntable 4 and thus the disc-shaped recording medium 1 into an arrow A.
Rotate in the direction for a predetermined time. During the rotation, the dropped coating liquid reaches the outer peripheral end of the disk-shaped recording medium 1 by the action of centrifugal force, is heated and the temperature rises, and the viscosity decreases. As a result, an unnecessary amount of the coating liquid on the outer peripheral edge is scattered and removed outside the disc-shaped recording medium 1 by the action of the centrifugal force.

【0019】こののち、電子線照射装置(日新ハイボル
テージ社製、キュアトロンEBC−200−20−15
型)を用い、加速電圧150KVで10Mradの電子
線を照射し保護層を形成した。
After this, an electron beam irradiation device (manufactured by Nisshin High Voltage Co., Ltd., Curetron EBC-200-20-15) was used.
Type) was used to irradiate an electron beam of 10 Mrad at an accelerating voltage of 150 KV to form a protective layer.

【0020】このようにして得られた円盤状記録媒体1
の厚さを、内周部(半径30mm)と外周端部(半径4
1mm)との位置においてマイクロメータでそれぞれ測
定して、外周端部の厚みから内周部の厚みを引いて、外
周端部の保護層のふくらみ量を求めたところ約0.8μ
であった。
The disk-shaped recording medium 1 thus obtained
The thickness of the inner peripheral part (radius 30 mm) and the outer peripheral part (radius 4
1 mm) and the thickness of the inner peripheral portion was subtracted from the thickness of the outer peripheral edge to obtain the bulge amount of the protective layer at the outer peripheral edge, which was about 0.8 μm.
Met.

【0021】また、ニクロム線6へ通電する電流値を調
節して円盤状記録媒体1の外周端部の温度がそれぞれ4
5℃,55℃,65℃となるように設定し、かつ他の条
件は同様にしてそれぞれ保護層を形成した3つの円盤状
記録媒体を得た。
Further, the temperature of the outer peripheral end of the disk-shaped recording medium 1 is adjusted to 4 by adjusting the value of the electric current applied to the nichrome wire 6.
Three disc-shaped recording media were formed so that the temperatures were set to 5 ° C., 55 ° C., and 65 ° C., and under the other conditions, the protective layers were formed in the same manner.

【0022】これら3つの円盤状記録媒体の各外周端部
の保護層のふくらみ量はそれぞれ約0.2μであった。
The bulge amount of the protective layer at the outer peripheral edge of each of these three disk-shaped recording media was about 0.2 μm.

【0023】上述の実施例の比較例として、ニクロム線
6に通電せず、かつ他の条件は同様にして、円盤状記録
媒体に保護層を形成したところ、保護層のふくらみ量は
約3.4μであった。
As a comparative example of the above-mentioned embodiment, when the protective layer was formed on the disc-shaped recording medium under the same conditions except that the nichrome wire 6 was not energized, the bulge amount of the protective layer was about 3. It was 4μ.

【0024】これらの実験結果を図2に示す。The results of these experiments are shown in FIG.

【0025】図2から明らかなように、予め円盤状記録
媒体の外周端部を加熱しておいた方が、保護層のふくら
み量は、従来例と比較して極めて小さい。 (第2実施例)図3に示すように、本実施例の回転塗布
装置は、円盤状記録媒体1Xの外周端部を加熱するため
の加熱手段として、第1実施例の発熱体と交流電源の代
わりに、円盤状記録媒体1Xの外周端面にレーザー光9
Xを照射するレーザー光照射装置(不図示)を用いたも
のである。その他の構成は図1に示したものと同一であ
る。
As is apparent from FIG. 2, when the outer peripheral edge of the disk-shaped recording medium is heated in advance, the amount of swelling of the protective layer is much smaller than in the conventional example. (Second Embodiment) As shown in FIG. 3, the spin coating apparatus of the present embodiment uses a heating element and an AC power source of the first embodiment as heating means for heating the outer peripheral end of the disk-shaped recording medium 1X. Instead of the laser beam 9 on the outer peripheral end face of the disk-shaped recording medium 1X.
A laser light irradiation device (not shown) for irradiating X is used. Other configurations are the same as those shown in FIG.

【0026】本実施例では、回転塗布の際、ターンテー
ブル4Xを矢印AX方向に回転させるとともに、円盤状
記録媒体1Xの外周端面にレーザー光9Xを照射して、
予め円盤状記録媒体1Xの外周端部を一様に加熱してお
く。その他の工程は第1実施例のものと同様である。
In this embodiment, during spin coating, the turntable 4X is rotated in the direction of arrow AX, and the outer peripheral end face of the disk-shaped recording medium 1X is irradiated with laser light 9X.
The outer peripheral edge of the disk-shaped recording medium 1X is uniformly heated in advance. The other steps are similar to those of the first embodiment.

【0027】上述した各実施例において、使用する塗布
液の粘度が高いほど、円盤状記録媒体の外周端部の設定
温度を高くする、すなわち塗布液の粘度性状に合わせ
て、円盤状記録媒体の外周端部の温度を設定すればよ
い。
In each of the above-mentioned embodiments, the higher the viscosity of the coating liquid used, the higher the set temperature of the outer peripheral end of the disc-shaped recording medium, that is, the disc-shaped recording medium is adjusted to the viscosity of the coating liquid. The temperature of the outer peripheral edge may be set.

【0028】また、予め円盤状記録媒体の外周端部を加
熱しておき、前記円盤状記録媒体を回転しつつ、塗布液
を滴下するものを示したが、これに限られず、円盤状記
録媒体の内周部表面上に塗布液を滴下するとともに、前
記外周端部を加熱しつつ、円盤状記録媒体を回転させて
もよい。
Further, although the outer peripheral end portion of the disc-shaped recording medium is heated in advance and the coating liquid is dropped while the disc-shaped recording medium is rotated, the present invention is not limited to this, and the disc-shaped recording medium is not limited thereto. The disc-shaped recording medium may be rotated while the coating liquid is dropped onto the surface of the inner peripheral portion of the above and the outer peripheral end portion is heated.

【0029】[0029]

【発明の効果】本発明は、以上説明したとおり構成され
ているので、円盤状記録媒体の表面上に均一な厚さの保
護層を一様に形成することができ、この円盤状記録媒体
を使用する光磁気装置の磁気ヘッドやスライダー部等が
破損しないという効果を奏する。
Since the present invention is configured as described above, it is possible to uniformly form a protective layer having a uniform thickness on the surface of a disk-shaped recording medium. The magnetic head and slider of the magneto-optical device used are not damaged.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の、円盤状記録媒体へ保護層を形成する
ための回転塗布装置の第1実施例の概略構成図である。
FIG. 1 is a schematic configuration diagram of a first embodiment of a spin coating apparatus for forming a protective layer on a disk-shaped recording medium of the present invention.

【図2】本実施例の回転塗布方法と、従来例との比較結
果を示すグラフで、横軸に円盤状記録媒体の外周端部の
設定温度をとり、縦軸に前記外周端部のふくらみ量をと
ったものである。
FIG. 2 is a graph showing the results of comparison between the spin coating method of the present example and the conventional example, in which the horizontal axis represents the set temperature of the outer peripheral edge of the disk-shaped recording medium and the vertical axis represents the bulge of the outer peripheral edge. It is a quantity.

【図3】本発明の、円盤状記録媒体へ保護層を形成する
ための回転塗布装置の第2実施例の概略構成図である。
FIG. 3 is a schematic configuration diagram of a second embodiment of a spin coating apparatus for forming a protective layer on a disk-shaped recording medium according to the present invention.

【符号の説明】[Explanation of symbols]

1,1X 円盤状記録媒体(被塗布体) 2,2X スピンドルモータ 3,3X 出力軸(回転軸) 4,4X ターンテーブル 5 溝 6 ニクロム線 7 交流電源 8,8X ノズル 9X レーザー光 10,10X 塗布液 A,AX 円盤状記録媒体の回転方向 1,1X disk-shaped recording medium (coated material) 2,2X spindle motor 3,3X output shaft (rotating shaft) 4,4X turntable 5 grooves 6 Nichrome wire 7 AC power supply 8,8X nozzle 9X laser light 10,10X coating liquid A, AX Disk rotation direction

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 予め円盤状記録媒体の外周端部を加熱し
ておき、前記円盤状記録媒体の内周部表面上に塗布液を
滴下するとともに、前記円盤状記録媒体を回転させる、
円盤状記録媒体への保護層の回転塗布方法。
1. An outer peripheral end of a disk-shaped recording medium is heated in advance, a coating liquid is dropped on the surface of the inner peripheral part of the disk-shaped recording medium, and the disk-shaped recording medium is rotated.
A method of spin-coating a protective layer on a disk-shaped recording medium.
【請求項2】 円盤状記録媒体の内周部表面上に塗布液
を滴下するとともに、前記円盤状記録媒体の外周端部を
加熱しつつ円盤状記録媒体を回転させる、円盤状記録媒
体への保護層の回転塗布方法。
2. A disc-shaped recording medium, wherein the coating liquid is dropped on the inner peripheral surface of the disc-shaped recording medium and the disc-shaped recording medium is rotated while heating the outer peripheral end of the disc-shaped recording medium. Spin coating method for protective layer.
【請求項3】 円盤状記録媒体を回転させるための回転
手段と、前記円盤状記録媒体の内周部表面上に塗布液を
滴下するための滴下手段と、前記円盤状記録媒体の外周
端部を加熱するための加熱手段とを有する、円盤状記録
媒体への保護層の回転塗布装置。
3. A rotating means for rotating the disc-shaped recording medium, a dropping means for dropping a coating liquid on the inner peripheral surface of the disc-shaped recording medium, and an outer peripheral end portion of the disc-shaped recording medium. And a heating means for heating the disk. A spin coater for applying a protective layer to a disk-shaped recording medium.
【請求項4】 円盤状記録媒体を回転させるための回転
手段は、円盤状記録媒体を支持するためのテーブルと、
該テーブルを回転させるためのモータとから構成され、 円盤状記録媒体の外周端部を加熱するための加熱手段
は、前記テーブルに埋設された発熱体と、該発熱体に通
電するための電源とから構成されている請求項3に記載
の円盤状記録媒体への保護層の回転塗布装置。
4. A rotating means for rotating the disc-shaped recording medium, a table for supporting the disc-shaped recording medium,
The heating means for heating the outer peripheral end of the disk-shaped recording medium comprises a motor for rotating the table, a heating element embedded in the table, and a power source for energizing the heating element. A spin coating apparatus for a protective layer onto a disk-shaped recording medium according to claim 3, which is composed of:
【請求項5】 円盤状記録媒体の外周端部を加熱するた
めの加熱手段として、発熱体と電源との代わりに、前記
外周端部にレーザー光を照射するレーザー光照射装置を
用いる請求項4に記載の円盤状記録媒体への保護層の回
転塗布装置。
5. A laser light irradiating device for irradiating the outer peripheral end portion with a laser beam is used as the heating means for heating the outer peripheral end portion of the disk-shaped recording medium, instead of the heating element and the power source. An apparatus for spin coating a protective layer onto a disk-shaped recording medium according to.
JP3168293A 1991-07-09 1991-07-09 Spin coating method for protective layer to disk-shaped recording medium and device therefor Pending JPH0520718A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3168293A JPH0520718A (en) 1991-07-09 1991-07-09 Spin coating method for protective layer to disk-shaped recording medium and device therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3168293A JPH0520718A (en) 1991-07-09 1991-07-09 Spin coating method for protective layer to disk-shaped recording medium and device therefor

Publications (1)

Publication Number Publication Date
JPH0520718A true JPH0520718A (en) 1993-01-29

Family

ID=15865328

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3168293A Pending JPH0520718A (en) 1991-07-09 1991-07-09 Spin coating method for protective layer to disk-shaped recording medium and device therefor

Country Status (1)

Country Link
JP (1) JPH0520718A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004027772A1 (en) * 2002-09-19 2004-04-01 Tdk Corporation Production method for disk-like recording medium

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004027772A1 (en) * 2002-09-19 2004-04-01 Tdk Corporation Production method for disk-like recording medium

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