JPH05205328A - Magnetooptical recording medium - Google Patents
Magnetooptical recording mediumInfo
- Publication number
- JPH05205328A JPH05205328A JP1014292A JP1014292A JPH05205328A JP H05205328 A JPH05205328 A JP H05205328A JP 1014292 A JP1014292 A JP 1014292A JP 1014292 A JP1014292 A JP 1014292A JP H05205328 A JPH05205328 A JP H05205328A
- Authority
- JP
- Japan
- Prior art keywords
- recording medium
- magneto
- magnetooptical recording
- optical recording
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は書き換え可能な光磁気記
録媒体に関し、特に記録層の組成構造に係わる。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rewritable magneto-optical recording medium, and more particularly to a composition structure of a recording layer.
【0002】[0002]
【従来の技術】光磁気記録媒体の記録層である磁性膜は
特開昭60−237655号公報に記載されているよう
に、スパッタリングで成膜される。図3に従来の光磁気
記録媒体を作成するスパッタリング装置の概略図を示
す。図に示す様に真空槽11に希土類元素で構成される
ターゲット12と遷移金属で構成されるターゲット13
を互いに干渉しあわない様に配置し、その対向する位置
に回転機構を有した基板テーブル14を配置する。ポリ
カーボネイト基板16は基板テーブル14で一定の回転
数によって回転し、希土類金属層と遷移金属層を交互に
積層した構造を得ている。2. Description of the Related Art A magnetic film, which is a recording layer of a magneto-optical recording medium, is formed by sputtering as described in JP-A-60-237655. FIG. 3 shows a schematic view of a sputtering apparatus for producing a conventional magneto-optical recording medium. As shown in the figure, a vacuum chamber 11 has a target 12 made of a rare earth element and a target 13 made of a transition metal.
Are arranged so as not to interfere with each other, and the substrate table 14 having a rotation mechanism is arranged at a position facing each other. The polycarbonate substrate 16 is rotated on the substrate table 14 at a constant rotation speed to obtain a structure in which rare earth metal layers and transition metal layers are alternately laminated.
【0003】[0003]
【発明が解決しようとする課題】ところで、光磁気記録
媒体の磁気特性は磁性体内で同じ性質を持つ。それで、
記録のためにレーザ光照射する時、基板側から膜厚方向
に対して遠ざかるほど熱の伝達が遅れる。その結果、ド
メイン内部をみたとき磁化の大きさが膜厚方向に対して
バラツキが生じる。又、キューリー温度についても、あ
る時間上でみた場合、基板側に近い部分でキューリー温
度に到達しているが、離れた部分ではキューリー温度に
到達していないことになる。従って、ドメインのエッジ
部分の磁界の向きが不安定なものとなり、CN比などの
記録特性に悪影響を与える。By the way, the magneto-optical recording medium has the same magnetic characteristics in the magnetic body. So
When a laser beam is irradiated for recording, the heat transfer is delayed as the distance from the substrate side in the film thickness direction increases. As a result, when viewed inside the domain, the magnitude of magnetization varies in the film thickness direction. Regarding the Curie temperature, when viewed over a certain period of time, the Curie temperature reaches the Curie temperature in the portion close to the substrate side, but does not reach the Curie temperature in the distant portion. Therefore, the direction of the magnetic field at the edge portion of the domain becomes unstable, which adversely affects the recording characteristics such as the CN ratio.
【0004】[0004]
【課題を解決するための手段】本発明は、磁性層内に
B,C,Al,Si,P,Ti,V,Fe,Ni,C
u,Ga,Ge,Zr,Nb,Mo,In,Sn,S
b,Gd,Tb,Dy,Taの少なくとも一種の金属元
素を膜厚方向に対して、基板側から連続的に増加させな
がら添加する構造にする。According to the present invention, B, C, Al, Si, P, Ti, V, Fe, Ni, C are contained in a magnetic layer.
u, Ga, Ge, Zr, Nb, Mo, In, Sn, S
At least one metal element of b, Gd, Tb, Dy, and Ta is added while continuously increasing from the substrate side in the film thickness direction.
【0005】[0005]
【作用】上記手段により、基板から遠ざかるほどキュー
リー温度が下がっていく構造になる。そのため、記録時
にドメイン全体が同時にキューリー温度に到達し、ドメ
インの形成をより早くする。By the above means, the Curie temperature is lowered as the distance from the substrate increases. Therefore, during recording, the entire domain reaches the Curie temperature at the same time, which accelerates the formation of the domain.
【0006】[0006]
【実施例】本発明を図面とともに説明する。図1は本発
明に係わる一実施例の光磁気記録媒体の構成図を示す。
図において、SiN膜2が成膜されたポリカーボネイト
基板3上に希土類金属−遷移金属であるGdDyFeC
oを主成分とする磁性層1が形成され、この磁性層1内
にAlを連続的に添加量を増やしながら合金化させつつ
添加している。そして、その上にSiN膜4で保護して
いる。The present invention will be described with reference to the drawings. FIG. 1 is a block diagram of a magneto-optical recording medium according to an embodiment of the present invention.
In the figure, a rare earth metal-transition metal, GdDyFeC, is formed on a polycarbonate substrate 3 having a SiN film 2 formed thereon.
A magnetic layer 1 containing o as a main component is formed, and Al is continuously added to the magnetic layer 1 while alloying while increasing the addition amount. Then, the SiN film 4 is provided thereon for protection.
【0007】図2は本発明の光磁気記録媒体のキューリ
ー温度特性図である。図において、添加元素B,C,A
l,Si,P,Ti,V,Fe,Ni,Cu,Ga,G
e,Zr,Nb,Mo,In,Sn,Sb,Gd,T
b,Gd,Tb,Dy,Taを置換したときのキューリ
ー温度を示し、各元素とも添加量を増やすほどキューリ
ー温度が低下していくことが分かる。それで、これらの
元素を膜厚方向に対して順次、添加量を増やしていくこ
とにより、キューリー温度分布を記録層に持たせること
ができる。FIG. 2 is a Curie temperature characteristic diagram of the magneto-optical recording medium of the present invention. In the figure, additional elements B, C, A
l, Si, P, Ti, V, Fe, Ni, Cu, Ga, G
e, Zr, Nb, Mo, In, Sn, Sb, Gd, T
The Curie temperature when b, Gd, Tb, Dy, and Ta are replaced is shown, and it is understood that the Curie temperature decreases as the addition amount of each element increases. Therefore, the Curie temperature distribution can be provided in the recording layer by sequentially increasing the addition amount of these elements in the film thickness direction.
【0008】図4は光磁気記録媒体を作成するスパッタ
リング装置を示す。図4において、真空槽11にGdD
yFeCo合金からなるターゲット17とAlからなる
ターゲット18をスパッタリング時に互いに干渉しあう
ように配置し、これらのターゲットに対向する形で回転
機構を有する基板テーブル14が設置されている。スパ
ッタリング電源として高周波RF電源15,15´がそ
れぞれのターゲット17、18に独立して接続されてい
る。ポリカーボネイト樹脂基板16を基板テーブル14
に取りつけ、30rpmの回転数で回転させる。GdD
yFeCoとAlとは互いに干渉させ、積層構造になら
ないようにする。GdDyFeCoは一定のレートで成
膜を行い、Alの成膜レートはRF電源のパワーを高め
ることによって連続的に高くしていき、基板側から見て
遠ざかるほどAlの添加量が増えていくようにする。従
って、媒体のキューリー温度は膜厚方向に対して分布を
もつことになる。FIG. 4 shows a sputtering apparatus for producing a magneto-optical recording medium. In FIG. 4, GdD is added to the vacuum chamber 11.
A target 17 made of yFeCo alloy and a target 18 made of Al are arranged so as to interfere with each other at the time of sputtering, and a substrate table 14 having a rotating mechanism is installed so as to face these targets. High-frequency RF power sources 15 and 15 'are independently connected to the targets 17 and 18 as sputtering power sources. The polycarbonate resin substrate 16 is attached to the substrate table 14
It is attached to and is rotated at a rotation speed of 30 rpm. GdD
yFeCo and Al interfere with each other to prevent a laminated structure. GdDyFeCo is deposited at a constant rate, and the Al deposition rate is continuously increased by increasing the power of the RF power source, so that the Al addition amount increases as the distance from the substrate increases. To do. Therefore, the Curie temperature of the medium has a distribution in the film thickness direction.
【0009】尚、本発明は本実施例に限るものではな
く、磁性層にPt,Pd等の白金族とCo,Fe,Ni
等の遷移金属を交互に積層した人工格子膜を用い、これ
にAlを添加することによっても同様の効果を得ことが
できる。The present invention is not limited to this embodiment, but the magnetic layer contains platinum group such as Pt and Pd and Co, Fe and Ni.
Similar effects can be obtained by using an artificial lattice film in which transition metals such as the above are alternately laminated and adding Al thereto.
【0010】[0010]
【発明の効果】本発明により、高速転送速度での記録が
可能になり、且つ、記録ノイズの低減をもたらす。According to the present invention, recording can be performed at a high transfer rate and recording noise can be reduced.
【図1】本発明に係わる一実施例の光磁気記録媒体の構
成図。FIG. 1 is a configuration diagram of a magneto-optical recording medium according to an embodiment of the present invention.
【図2】本発明に係わる光磁気記録媒体のキューリー温
度特性図。FIG. 2 is a Curie temperature characteristic diagram of the magneto-optical recording medium according to the present invention.
【図3】従来の光磁気記録媒体を作成するスパッタリン
グ装置の概略図。FIG. 3 is a schematic view of a sputtering device for producing a conventional magneto-optical recording medium.
【図4】本考案の光磁気記録媒体を作成するスパッタリ
ング装置の概略図。FIG. 4 is a schematic view of a sputtering apparatus for producing the magneto-optical recording medium of the present invention.
1 磁性層 2 SiN膜 3 ポリカーボネイト基板 4 SiN膜(保護膜) 1 Magnetic layer 2 SiN film 3 Polycarbonate substrate 4 SiN film (protective film)
Claims (1)
媒体の記録層にB,C,Al,Si,P,Ti,V,F
e,Ni,Cu,Ga,Ge,Zr,Nb,Mo,I
n,Sn,Sb,Gd,Tb,Dy,Taの少なくとも
一種が置換によって添加されている光磁気記録媒体にお
いて、置換元素の添加量が基板側より連続的に増加され
ている光磁気記録媒体。1. B, C, Al, Si, P, Ti, V, F in a recording layer of a magneto-optical recording medium capable of performing thermomagnetic recording.
e, Ni, Cu, Ga, Ge, Zr, Nb, Mo, I
In a magneto-optical recording medium in which at least one of n, Sn, Sb, Gd, Tb, Dy, and Ta is added by substitution, a magneto-optical recording medium in which the addition amount of a substitution element is continuously increased from the substrate side.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP01014292A JP3177281B2 (en) | 1992-01-23 | 1992-01-23 | Magneto-optical recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP01014292A JP3177281B2 (en) | 1992-01-23 | 1992-01-23 | Magneto-optical recording medium |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH05205328A true JPH05205328A (en) | 1993-08-13 |
JP3177281B2 JP3177281B2 (en) | 2001-06-18 |
Family
ID=11742039
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP01014292A Expired - Fee Related JP3177281B2 (en) | 1992-01-23 | 1992-01-23 | Magneto-optical recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3177281B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015001768A1 (en) * | 2013-07-03 | 2015-01-08 | 富士電機株式会社 | Method for producing magnetic recording medium |
-
1992
- 1992-01-23 JP JP01014292A patent/JP3177281B2/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015001768A1 (en) * | 2013-07-03 | 2015-01-08 | 富士電機株式会社 | Method for producing magnetic recording medium |
JP2015015062A (en) * | 2013-07-03 | 2015-01-22 | 富士電機株式会社 | Manufacturing method of magnetic recording medium |
Also Published As
Publication number | Publication date |
---|---|
JP3177281B2 (en) | 2001-06-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |