JPH0520223B2 - - Google Patents

Info

Publication number
JPH0520223B2
JPH0520223B2 JP29154086A JP29154086A JPH0520223B2 JP H0520223 B2 JPH0520223 B2 JP H0520223B2 JP 29154086 A JP29154086 A JP 29154086A JP 29154086 A JP29154086 A JP 29154086A JP H0520223 B2 JPH0520223 B2 JP H0520223B2
Authority
JP
Japan
Prior art keywords
hollow structure
axis
drive
ball screw
servo motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP29154086A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63144929A (ja
Inventor
Yoshuki Tomita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
Original Assignee
Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Priority to JP29154086A priority Critical patent/JPS63144929A/ja
Publication of JPS63144929A publication Critical patent/JPS63144929A/ja
Publication of JPH0520223B2 publication Critical patent/JPH0520223B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Machine Tool Units (AREA)
JP29154086A 1986-12-09 1986-12-09 精密加工機械における粗動及び微動可能な二重駆動機構 Granted JPS63144929A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29154086A JPS63144929A (ja) 1986-12-09 1986-12-09 精密加工機械における粗動及び微動可能な二重駆動機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29154086A JPS63144929A (ja) 1986-12-09 1986-12-09 精密加工機械における粗動及び微動可能な二重駆動機構

Publications (2)

Publication Number Publication Date
JPS63144929A JPS63144929A (ja) 1988-06-17
JPH0520223B2 true JPH0520223B2 (OSRAM) 1993-03-18

Family

ID=17770227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29154086A Granted JPS63144929A (ja) 1986-12-09 1986-12-09 精密加工機械における粗動及び微動可能な二重駆動機構

Country Status (1)

Country Link
JP (1) JPS63144929A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69230137T2 (de) * 1991-11-15 2000-05-25 Yotaro Hatamura Vorschubvorrichtung mit einer schraube und mit einer feineinstellung

Also Published As

Publication number Publication date
JPS63144929A (ja) 1988-06-17

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Legal Events

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LAPS Cancellation because of no payment of annual fees