JPS63144929A - 精密加工機械における粗動及び微動可能な二重駆動機構 - Google Patents

精密加工機械における粗動及び微動可能な二重駆動機構

Info

Publication number
JPS63144929A
JPS63144929A JP29154086A JP29154086A JPS63144929A JP S63144929 A JPS63144929 A JP S63144929A JP 29154086 A JP29154086 A JP 29154086A JP 29154086 A JP29154086 A JP 29154086A JP S63144929 A JPS63144929 A JP S63144929A
Authority
JP
Japan
Prior art keywords
drive
hollow structure
ball screw
resolving power
movable part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP29154086A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0520223B2 (OSRAM
Inventor
Yoshiyuki Tomita
良幸 冨田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
Original Assignee
Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Priority to JP29154086A priority Critical patent/JPS63144929A/ja
Publication of JPS63144929A publication Critical patent/JPS63144929A/ja
Publication of JPH0520223B2 publication Critical patent/JPH0520223B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Machine Tool Units (AREA)
JP29154086A 1986-12-09 1986-12-09 精密加工機械における粗動及び微動可能な二重駆動機構 Granted JPS63144929A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29154086A JPS63144929A (ja) 1986-12-09 1986-12-09 精密加工機械における粗動及び微動可能な二重駆動機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29154086A JPS63144929A (ja) 1986-12-09 1986-12-09 精密加工機械における粗動及び微動可能な二重駆動機構

Publications (2)

Publication Number Publication Date
JPS63144929A true JPS63144929A (ja) 1988-06-17
JPH0520223B2 JPH0520223B2 (OSRAM) 1993-03-18

Family

ID=17770227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29154086A Granted JPS63144929A (ja) 1986-12-09 1986-12-09 精密加工機械における粗動及び微動可能な二重駆動機構

Country Status (1)

Country Link
JP (1) JPS63144929A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993009911A1 (fr) * 1991-11-15 1993-05-27 Yotaro Hatamura Dispositif a vis de commande et systeme de commande de micro-mouvement a positionnement de precision

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993009911A1 (fr) * 1991-11-15 1993-05-27 Yotaro Hatamura Dispositif a vis de commande et systeme de commande de micro-mouvement a positionnement de precision
US5644951A (en) * 1991-11-15 1997-07-08 Hatamura; Yotaro Feed screw apparatus and precise positioning and fine feed system

Also Published As

Publication number Publication date
JPH0520223B2 (OSRAM) 1993-03-18

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Legal Events

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