JPH051992Y2 - - Google Patents
Info
- Publication number
- JPH051992Y2 JPH051992Y2 JP1986164159U JP16415986U JPH051992Y2 JP H051992 Y2 JPH051992 Y2 JP H051992Y2 JP 1986164159 U JP1986164159 U JP 1986164159U JP 16415986 U JP16415986 U JP 16415986U JP H051992 Y2 JPH051992 Y2 JP H051992Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrostrictive element
- block
- fixed
- base
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006073 displacement reaction Methods 0.000 claims description 12
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 9
- 239000000919 ceramic Substances 0.000 claims description 6
- 238000010030 laminating Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 238000010008 shearing Methods 0.000 description 6
- 239000012790 adhesive layer Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
Landscapes
- Control Of Position Or Direction (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986164159U JPH051992Y2 (is) | 1986-10-23 | 1986-10-23 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986164159U JPH051992Y2 (is) | 1986-10-23 | 1986-10-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6370296U JPS6370296U (is) | 1988-05-11 |
JPH051992Y2 true JPH051992Y2 (is) | 1993-01-19 |
Family
ID=31093019
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986164159U Expired - Lifetime JPH051992Y2 (is) | 1986-10-23 | 1986-10-23 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH051992Y2 (is) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2858877B2 (ja) * | 1990-05-28 | 1999-02-17 | 日本電気株式会社 | 圧電アクチュエータの駆動方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5449093A (en) * | 1977-09-26 | 1979-04-18 | Nec Corp | Piezoelectric actuator |
JPS5972135A (ja) * | 1982-10-18 | 1984-04-24 | Hitachi Ltd | 超精密xy移動装置 |
JPS6059981A (ja) * | 1983-09-09 | 1985-04-06 | Asahi Okuma Ind Co Ltd | 駆動装置 |
-
1986
- 1986-10-23 JP JP1986164159U patent/JPH051992Y2/ja not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5449093A (en) * | 1977-09-26 | 1979-04-18 | Nec Corp | Piezoelectric actuator |
JPS5972135A (ja) * | 1982-10-18 | 1984-04-24 | Hitachi Ltd | 超精密xy移動装置 |
JPS6059981A (ja) * | 1983-09-09 | 1985-04-06 | Asahi Okuma Ind Co Ltd | 駆動装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS6370296U (is) | 1988-05-11 |
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