JPH0519391B2 - - Google Patents

Info

Publication number
JPH0519391B2
JPH0519391B2 JP62304239A JP30423987A JPH0519391B2 JP H0519391 B2 JPH0519391 B2 JP H0519391B2 JP 62304239 A JP62304239 A JP 62304239A JP 30423987 A JP30423987 A JP 30423987A JP H0519391 B2 JPH0519391 B2 JP H0519391B2
Authority
JP
Japan
Prior art keywords
liquid
bellows
piezoelectric element
diaphragm
laminated piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62304239A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01144690A (ja
Inventor
Akira Wachi
Minehisa Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ohkura Electric Co Ltd
Original Assignee
Ohkura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ohkura Electric Co Ltd filed Critical Ohkura Electric Co Ltd
Priority to JP62304239A priority Critical patent/JPH01144690A/ja
Publication of JPH01144690A publication Critical patent/JPH01144690A/ja
Publication of JPH0519391B2 publication Critical patent/JPH0519391B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Impact Printers (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP62304239A 1987-11-30 1987-11-30 積層圧電アクチュエータ Granted JPH01144690A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62304239A JPH01144690A (ja) 1987-11-30 1987-11-30 積層圧電アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62304239A JPH01144690A (ja) 1987-11-30 1987-11-30 積層圧電アクチュエータ

Publications (2)

Publication Number Publication Date
JPH01144690A JPH01144690A (ja) 1989-06-06
JPH0519391B2 true JPH0519391B2 (enrdf_load_html_response) 1993-03-16

Family

ID=17930671

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62304239A Granted JPH01144690A (ja) 1987-11-30 1987-11-30 積層圧電アクチュエータ

Country Status (1)

Country Link
JP (1) JPH01144690A (enrdf_load_html_response)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0410591U (enrdf_load_html_response) * 1990-05-09 1992-01-29
JPH0468571U (enrdf_load_html_response) * 1990-10-25 1992-06-17
JP2658812B2 (ja) * 1993-08-12 1997-09-30 日本電気株式会社 圧電アクチュエータ
JPH10275018A (ja) * 1997-03-31 1998-10-13 Hitachi Metals Ltd マスフローコントローラ
DE10159749A1 (de) * 2001-12-05 2003-06-12 Bosch Gmbh Robert Brennstoffeinspritzventil
JP2008032445A (ja) * 2006-07-27 2008-02-14 Sii Nanotechnology Inc 圧電アクチュエータおよびそれを用いた走査型プローブ顕微鏡
WO2011001603A1 (ja) 2009-06-29 2011-01-06 パナソニック株式会社 アルカリ乾電池
JP6047316B2 (ja) * 2012-06-29 2016-12-21 日本特殊陶業株式会社 圧電アクチュエータ
JP2014193035A (ja) * 2013-03-27 2014-10-06 Taiheiyo Cement Corp 圧電アクチュエータ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU506789B2 (en) * 1974-10-03 1980-01-24 Physics International Company Improvement in piezoelectric stack insulation
JPS61149991U (enrdf_load_html_response) * 1985-03-08 1986-09-16

Also Published As

Publication number Publication date
JPH01144690A (ja) 1989-06-06

Similar Documents

Publication Publication Date Title
CN106015685B (zh) 一种适用于高压气体的压电比例调节阀
EP2071189B1 (en) Microfluidic device
US6148842A (en) Compensation element for the compensation of temperature-conditioned length changes of an object
JPH0519391B2 (enrdf_load_html_response)
US5759014A (en) Micropump
KR0159490B1 (ko) 마이크로 밸브
US20070243084A1 (en) Stacked piezoelectric diaphragm members
WO2003069159A1 (en) Piezoelectrically driven fluid pump
CN101115924A (zh) 反应驱动的能量传输装置
JP2003148416A (ja) 空気式アクチュエータ
US6490881B1 (en) Generating displacement and theroacoustic refrigerator
US6761028B2 (en) Drive device
US11067187B2 (en) Fluidic control valve with small displacement actuators
WO2011107157A1 (en) Valve, layer structure comprising a first and a second valve, micropump and method of producing a valve
JPH10509790A (ja) 電気油圧駆動装置
ITMI941962A1 (it) Attuatore elettroidraulico
TW202200922A (zh) 閥裝置
JP5435798B2 (ja) 乱流制御装置及び乱流制御用アクチュエータの製造方法
US20040076531A1 (en) Circuit changeover switch
JPS6228507A (ja) 電歪体駆動のアクチユエ−タ
JP2000197374A (ja) ピエゾアクチュエ―タ並びにこれを用いた制御弁
CN211202250U (zh) 一种双腔体压电隔膜泵
CN110259670A (zh) 一种驱动器
CN115151748B (en) Valve device
Wu et al. A piezoelectrically-driven high flow rate axial polymer microvalve with solid hydraulic amplification