JPH0519098B2 - - Google Patents
Info
- Publication number
- JPH0519098B2 JPH0519098B2 JP14437087A JP14437087A JPH0519098B2 JP H0519098 B2 JPH0519098 B2 JP H0519098B2 JP 14437087 A JP14437087 A JP 14437087A JP 14437087 A JP14437087 A JP 14437087A JP H0519098 B2 JPH0519098 B2 JP H0519098B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- waveguide
- reference light
- measurement
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005259 measurement Methods 0.000 claims description 36
- 230000003287 optical effect Effects 0.000 claims description 23
- 239000013307 optical fiber Substances 0.000 claims description 8
- 238000005253 cladding Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 45
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 25
- 239000004065 semiconductor Substances 0.000 description 4
- 230000000087 stabilizing effect Effects 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003487 electrochemical reaction Methods 0.000 description 2
- 239000008151 electrolyte solution Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Light Guides In General And Applications Therefor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62144370A JPS63308539A (ja) | 1987-06-10 | 1987-06-10 | 超小型ガスセンサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62144370A JPS63308539A (ja) | 1987-06-10 | 1987-06-10 | 超小型ガスセンサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63308539A JPS63308539A (ja) | 1988-12-15 |
| JPH0519098B2 true JPH0519098B2 (fr) | 1993-03-15 |
Family
ID=15360536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62144370A Granted JPS63308539A (ja) | 1987-06-10 | 1987-06-10 | 超小型ガスセンサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63308539A (fr) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1291642A1 (fr) * | 2001-09-05 | 2003-03-12 | Linde Medical Sensors AG | Système de capteur pour la détection de substances chimiques comprenant un guide intégré d'ondes lumineuses |
| JP2006220625A (ja) * | 2005-02-14 | 2006-08-24 | Denso Corp | 赤外線式ガス検知装置 |
| US20120223232A1 (en) * | 2009-11-17 | 2012-09-06 | Nec Corporation | Gas detection device |
| CN108169158A (zh) * | 2017-11-29 | 2018-06-15 | 全球能源互联网研究院有限公司 | 一种基于气体传感器的气体检测系统 |
| JP6895480B2 (ja) * | 2018-07-06 | 2021-06-30 | 旭化成エレクトロニクス株式会社 | ガス検出装置 |
-
1987
- 1987-06-10 JP JP62144370A patent/JPS63308539A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63308539A (ja) | 1988-12-15 |
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