JPH0519089B2 - - Google Patents
Info
- Publication number
- JPH0519089B2 JPH0519089B2 JP28627387A JP28627387A JPH0519089B2 JP H0519089 B2 JPH0519089 B2 JP H0519089B2 JP 28627387 A JP28627387 A JP 28627387A JP 28627387 A JP28627387 A JP 28627387A JP H0519089 B2 JPH0519089 B2 JP H0519089B2
- Authority
- JP
- Japan
- Prior art keywords
- vibrating
- epitaxial layer
- vibrating beam
- silicon
- strain sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 28
- 239000004065 semiconductor Substances 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 description 31
- 239000010703 silicon Substances 0.000 description 31
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 27
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 11
- 229910052796 boron Inorganic materials 0.000 description 11
- 238000010586 diagram Methods 0.000 description 8
- 239000012535 impurity Substances 0.000 description 8
- 238000005530 etching Methods 0.000 description 6
- 230000005284 excitation Effects 0.000 description 6
- 229910052732 germanium Inorganic materials 0.000 description 6
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 6
- 230000010355 oscillation Effects 0.000 description 6
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 229910052698 phosphorus Inorganic materials 0.000 description 5
- 239000011574 phosphorus Substances 0.000 description 5
- 150000003376 silicon Chemical class 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 239000012670 alkaline solution Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28627387A JPH01127928A (ja) | 1987-11-12 | 1987-11-12 | 振動形歪センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28627387A JPH01127928A (ja) | 1987-11-12 | 1987-11-12 | 振動形歪センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01127928A JPH01127928A (ja) | 1989-05-19 |
| JPH0519089B2 true JPH0519089B2 (de) | 1993-03-15 |
Family
ID=17702230
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28627387A Granted JPH01127928A (ja) | 1987-11-12 | 1987-11-12 | 振動形歪センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01127928A (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4839514B2 (ja) * | 2000-02-21 | 2011-12-21 | 株式会社デンソー | 燃料電池システム |
| CN102374915B (zh) * | 2010-08-06 | 2013-05-22 | 中国科学院电子学研究所 | 一种电磁驱动谐振式微结构压力传感器封装方法 |
| JP5429696B2 (ja) * | 2011-12-02 | 2014-02-26 | 横河電機株式会社 | 振動式トランスデューサの製造方法 |
-
1987
- 1987-11-12 JP JP28627387A patent/JPH01127928A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01127928A (ja) | 1989-05-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5188983A (en) | Polysilicon resonating beam transducers and method of producing the same | |
| EP0400939B1 (de) | Halbleiterwandler mit Schwingelement | |
| EP0451992B1 (de) | Schwingungserkennung eines Mikrobalkens durch eine Hülle | |
| JP3226402B2 (ja) | 絶縁体上シリコン技術を用いた加速度計の製造方法およびそれにより得られる加速度計 | |
| US4926143A (en) | Oscillator using H-shaped single crystal silicon vibrator | |
| US5009108A (en) | Vibrating type transducer | |
| JP2005037309A (ja) | 振動式トランスデューサ | |
| JPH0519089B2 (de) | ||
| JPH0468576B2 (de) | ||
| JPH0468575B2 (de) | ||
| JPH0628662Y2 (ja) | 振動形差圧センサ | |
| JPH04304679A (ja) | 圧力センサ | |
| JPH0781919B2 (ja) | 振動形半導体トランスデューサ | |
| JPH0756466B2 (ja) | 振動形半導体トランスデューサ | |
| JP5007912B2 (ja) | 半導体梁を有する構造体 | |
| JP2822594B2 (ja) | 振動形トランスデュサ | |
| JPH0467899B2 (de) | ||
| JP2822596B2 (ja) | 振動形トランスデュサ | |
| JP2679349B2 (ja) | 振動式半導体トランスデューサ | |
| JP2513280B2 (ja) | メカニカルフィルタ― | |
| JPH0519090B2 (de) | ||
| JPH0468574B2 (de) | ||
| JPH0519091B2 (de) | ||
| JPH01138432A (ja) | 振動形差圧センサ | |
| JPH07101749B2 (ja) | 振動形トランスデュサの製造方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term | ||
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 15 Free format text: PAYMENT UNTIL: 20080315 |