JPH0467899B2 - - Google Patents
Info
- Publication number
- JPH0467899B2 JPH0467899B2 JP61131456A JP13145686A JPH0467899B2 JP H0467899 B2 JPH0467899 B2 JP H0467899B2 JP 61131456 A JP61131456 A JP 61131456A JP 13145686 A JP13145686 A JP 13145686A JP H0467899 B2 JPH0467899 B2 JP H0467899B2
- Authority
- JP
- Japan
- Prior art keywords
- vibrating beam
- type
- vibrating
- magnetic
- natural frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910052710 silicon Inorganic materials 0.000 claims description 10
- 239000010703 silicon Substances 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 239000010408 film Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 4
- 239000012535 impurity Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 230000010355 oscillation Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 150000003376 silicon Chemical class 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910000889 permalloy Inorganic materials 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009429 electrical wiring Methods 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000001151 other effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13145686A JPS62288542A (ja) | 1986-06-06 | 1986-06-06 | 振動式半導体トランスジユ−サ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13145686A JPS62288542A (ja) | 1986-06-06 | 1986-06-06 | 振動式半導体トランスジユ−サ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62288542A JPS62288542A (ja) | 1987-12-15 |
| JPH0467899B2 true JPH0467899B2 (de) | 1992-10-29 |
Family
ID=15058381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13145686A Granted JPS62288542A (ja) | 1986-06-06 | 1986-06-06 | 振動式半導体トランスジユ−サ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62288542A (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2526987B2 (ja) * | 1988-05-17 | 1996-08-21 | 横河電機株式会社 | 振動式トランスデュ―サ |
| JPH02269928A (ja) * | 1989-04-12 | 1990-11-05 | Yokogawa Electric Corp | 真空計 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5526487A (en) * | 1978-05-30 | 1980-02-25 | Itt | Pressure converter and producing same |
-
1986
- 1986-06-06 JP JP13145686A patent/JPS62288542A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5526487A (en) * | 1978-05-30 | 1980-02-25 | Itt | Pressure converter and producing same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62288542A (ja) | 1987-12-15 |
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