JPH0518389B2 - - Google Patents

Info

Publication number
JPH0518389B2
JPH0518389B2 JP21696285A JP21696285A JPH0518389B2 JP H0518389 B2 JPH0518389 B2 JP H0518389B2 JP 21696285 A JP21696285 A JP 21696285A JP 21696285 A JP21696285 A JP 21696285A JP H0518389 B2 JPH0518389 B2 JP H0518389B2
Authority
JP
Japan
Prior art keywords
output signal
counting
counter
output
bias voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP21696285A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6275371A (ja
Inventor
Masayoshi Shimada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP21696285A priority Critical patent/JPS6275371A/ja
Publication of JPS6275371A publication Critical patent/JPS6275371A/ja
Publication of JPH0518389B2 publication Critical patent/JPH0518389B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Radiation (AREA)
JP21696285A 1985-09-30 1985-09-30 Ｍｃｐ荷電粒子計数装置 Granted JPS6275371A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21696285A JPS6275371A (ja) 1985-09-30 1985-09-30 Ｍｃｐ荷電粒子計数装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21696285A JPS6275371A (ja) 1985-09-30 1985-09-30 Ｍｃｐ荷電粒子計数装置

Publications (2)

Publication Number Publication Date
JPS6275371A JPS6275371A (ja) 1987-04-07
JPH0518389B2 true JPH0518389B2 (OSRAM) 1993-03-11

Family

ID=16696644

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21696285A Granted JPS6275371A (ja) 1985-09-30 1985-09-30 Ｍｃｐ荷電粒子計数装置

Country Status (1)

Country Link
JP (1) JPS6275371A (OSRAM)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2581701B2 (ja) * 1987-09-08 1997-02-12 株式会社島津製作所 波高選別器
JP2726442B2 (ja) * 1988-08-31 1998-03-11 日本電子株式会社 荷電粒子検出器用電源装置
EP2490441A1 (en) * 2011-02-16 2012-08-22 Paul Scherrer Institut Single photon counting detector system having improved counter architecture
IL320025A (en) * 2018-06-08 2025-06-01 Asml Netherlands Bv Semiconductor charged particle detector for microscopy

Also Published As

Publication number Publication date
JPS6275371A (ja) 1987-04-07

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