JPH0518053B2 - - Google Patents
Info
- Publication number
- JPH0518053B2 JPH0518053B2 JP18615984A JP18615984A JPH0518053B2 JP H0518053 B2 JPH0518053 B2 JP H0518053B2 JP 18615984 A JP18615984 A JP 18615984A JP 18615984 A JP18615984 A JP 18615984A JP H0518053 B2 JPH0518053 B2 JP H0518053B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- measured
- sample
- incident
- reflected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003595 spectral effect Effects 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 3
- 238000004611 spectroscopical analysis Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 11
- 239000010408 film Substances 0.000 description 9
- 230000010287 polarization Effects 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000005357 flat glass Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 206010041662 Splinter Diseases 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59186159A JPS6162841A (ja) | 1984-09-04 | 1984-09-04 | 分光反射率測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59186159A JPS6162841A (ja) | 1984-09-04 | 1984-09-04 | 分光反射率測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6162841A JPS6162841A (ja) | 1986-03-31 |
| JPH0518053B2 true JPH0518053B2 (fi) | 1993-03-10 |
Family
ID=16183412
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59186159A Granted JPS6162841A (ja) | 1984-09-04 | 1984-09-04 | 分光反射率測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6162841A (fi) |
-
1984
- 1984-09-04 JP JP59186159A patent/JPS6162841A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6162841A (ja) | 1986-03-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |