JPH0518045Y2 - - Google Patents

Info

Publication number
JPH0518045Y2
JPH0518045Y2 JP5379686U JP5379686U JPH0518045Y2 JP H0518045 Y2 JPH0518045 Y2 JP H0518045Y2 JP 5379686 U JP5379686 U JP 5379686U JP 5379686 U JP5379686 U JP 5379686U JP H0518045 Y2 JPH0518045 Y2 JP H0518045Y2
Authority
JP
Japan
Prior art keywords
chisel
polishing
polished
angle
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP5379686U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62165842U (US20020051482A1-20020502-M00012.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5379686U priority Critical patent/JPH0518045Y2/ja
Publication of JPS62165842U publication Critical patent/JPS62165842U/ja
Application granted granted Critical
Publication of JPH0518045Y2 publication Critical patent/JPH0518045Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP5379686U 1986-04-10 1986-04-10 Expired - Lifetime JPH0518045Y2 (US20020051482A1-20020502-M00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5379686U JPH0518045Y2 (US20020051482A1-20020502-M00012.png) 1986-04-10 1986-04-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5379686U JPH0518045Y2 (US20020051482A1-20020502-M00012.png) 1986-04-10 1986-04-10

Publications (2)

Publication Number Publication Date
JPS62165842U JPS62165842U (US20020051482A1-20020502-M00012.png) 1987-10-21
JPH0518045Y2 true JPH0518045Y2 (US20020051482A1-20020502-M00012.png) 1993-05-13

Family

ID=30880189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5379686U Expired - Lifetime JPH0518045Y2 (US20020051482A1-20020502-M00012.png) 1986-04-10 1986-04-10

Country Status (1)

Country Link
JP (1) JPH0518045Y2 (US20020051482A1-20020502-M00012.png)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0719707Y2 (ja) * 1988-05-16 1995-05-10 文明 鈴木 鏨固定具の研磨角度調整部材
EP0405301B1 (en) * 1989-06-29 1995-08-30 Applied Materials, Inc. Apparatus for handling semiconductor wafers

Also Published As

Publication number Publication date
JPS62165842U (US20020051482A1-20020502-M00012.png) 1987-10-21

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