JPH0517699B2 - - Google Patents
Info
- Publication number
- JPH0517699B2 JPH0517699B2 JP56181411A JP18141181A JPH0517699B2 JP H0517699 B2 JPH0517699 B2 JP H0517699B2 JP 56181411 A JP56181411 A JP 56181411A JP 18141181 A JP18141181 A JP 18141181A JP H0517699 B2 JPH0517699 B2 JP H0517699B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- ion implantation
- ions
- thin film
- conductive thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H10P30/20—
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56181411A JPS5882519A (ja) | 1981-11-12 | 1981-11-12 | 半導体のイオン注入方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56181411A JPS5882519A (ja) | 1981-11-12 | 1981-11-12 | 半導体のイオン注入方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5882519A JPS5882519A (ja) | 1983-05-18 |
| JPH0517699B2 true JPH0517699B2 (enExample) | 1993-03-09 |
Family
ID=16100287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56181411A Granted JPS5882519A (ja) | 1981-11-12 | 1981-11-12 | 半導体のイオン注入方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5882519A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH083628B2 (ja) * | 1986-10-13 | 1996-01-17 | 三菱電機株式会社 | 非帯電性レジスト |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5949685B2 (ja) * | 1977-12-27 | 1984-12-04 | 富士通株式会社 | イオン注入法 |
| FR2490873A1 (fr) * | 1980-09-24 | 1982-03-26 | Varian Associates | Procede et dispositif destines a produire une neutralisation amelioree d'un faisceau d'ions positifs |
-
1981
- 1981-11-12 JP JP56181411A patent/JPS5882519A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5882519A (ja) | 1983-05-18 |
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