JPH05173B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a correction polishing apparatus, and more particularly to a correction polishing apparatus suitable for partial correction polishing of the surface shape of a workpiece having an optical mirror surface, such as a lens or a mold.

[Conventional technology] In order to obtain a smooth optical mirror surface by processing a workpiece such as a lens into the designed surface shape with high precision,
A surface created by grinding or the like is finished by uniform polishing, and after shape measurement, a partial correction polishing process is required in which the surface is polished while removing local shape errors based on the measurement results. A conventional device used for this partial correction polishing process is shown in FIG.

In this figure, 1 is a rotating work such as a lens, 2 is a felt attached to the tip of a spindle 4 that is rotated by a drive motor 3, and the spindle 4 is supported by a bracket 5 via a ball bearing. It is attached to a slide shaft 6 that is movable in the direction of the workpiece 1.

In the conventional device, with the above configuration, the felt 2 coated with an abrasive material is pressed against the rotated workpiece 1, and the felt 2 is rotated by the drive motor 3.
Work 1 was being partially corrected and polished.

[Problems to be Solved by the Invention] However, in the conventional device as described above, since a ball bearing is used to support the spindle 4,
High-precision rotation cannot be obtained, and as a result, the whirling (rotational wobbling) of the felt 2 increases, and the area that contacts the machining surface of the workpiece 1 becomes wider, making it difficult to locally polish small areas. Furthermore, since the portion of the felt 2 that contacts the workpiece 1 is always at the same position, there is a problem that the abrasive material applied to the felt 2 becomes clogged and the amount of polishing of the workpiece 1 is unstable. In addition to the felt mentioned above, Bakelite and cast iron are used as tools.
As abrasive materials, paste-like diamond + grease or mixtures of diamond + oil (or water) are used, but the amount of polishing cannot be maintained at a constant level due to floating abrasive grains in either abrasive material, making it unstable. There's a problem.

Therefore, in view of the above-mentioned conventional problems, the present invention
It is an object of the present invention to provide a correction polishing device that can stably polish the amount of correction polishing of minute parts and obtain more accurate polishing processing.

[Means for Solving the Problems] In order to achieve the above object, the present invention provides a measuring means for measuring a machined surface of a workpiece while rotating the workpiece by a turning means, and measurement data of the measuring means. corrective machining amount determining means for determining the corrective machining amount and corrective machining position to be corrected on the machining surface based on design value data given in advance; calculation means for calculating the rotation speed at a position where the workpiece is to be corrected based on data indicating the relationship between the turning angle at the speed and the amount of correction processing; a drive control means for controlling the turning speed of the turning means; a processing means for supplying an abrasive tape between the correction processing surface of the workpiece being rotated and the pressing tool to polish the processing surface to be corrected; It is characterized by having the following.

[Function] The present invention performs corrective polishing by controlling the relative position and velocity of the polishing tool (nose) and the workpiece based on the measured data and design value data of the workpiece. Full automation of the series of correction grinding work from measurement to correction machining can be achieved, greatly reducing the operation work, and at the same time, the polishing tool and workpiece can be precisely controlled according to the amount of correction machining to be corrected and the correction machining position. This makes it possible to achieve more accurate correction polishing.

[Example] Hereinafter, an example of the present invention will be described in detail with reference to the drawings.

A. Overall configuration of corrective polishing apparatus FIGS. 1 and 2 show the overall configuration of an embodiment of a corrective polishing apparatus to which the present invention is applied. In FIG. 1 showing the overall appearance of the device from the front, 10 is a surface plate, 11 is a turning table fixed on the surface plate and can be rotated horizontally, 22 is a large diameter gear fixed above the turning table 11, 13 is a rotating table 1 via a small diameter gear 14 that meshes with the gear 12.
An encoder (angle detector) 15 transmits the rotation of the rotating table 11 and reads the rotation angle of the rotating table 11 (hereinafter referred to as a rotating angle). 16
17 is an origin switch that detects the origin of the rotation angle of the rotation table 11, and 17 is a support that fixes the origin switch 16 on the surface plate 10.

18 is a base on the work side fixed to the rotary gear 12 of the turning table 11, 19 is a linear guardrail fixed to the base 18, 20 is a slider that is mounted on the linear guardrail 19 and can slide on the linear guardrail 19, and 21 is a slider. A spindle 22 mounted on the spindle 20 is a work drive motor that rotates the work 1 attached to the tip of the spindle 21 via the spindle 21. 23 moves the slider 20 to move the workpiece 1
a workpiece feed handle for aligning the center of curvature of the rotary table 11 with the center of rotation of the rotary table 11;
is a lock screw that stops the movement of the slider 20.

25 is a base on the tool side fixed to the surface plate 10;
26 is a linear guardrail fixed to the base 25, 27 is a slider mounted on the linear guardrail 26, 28 is a feed screw that slides the slider 27 straight in the horizontal direction, and 29 is a feed screw 28.
30 is a bearing that supports the feed screw 28 on the base 25; 31 is a bearing box fixed to the slider 27; 32 is an air slide shaft that is supported by the bearing box 31 and slides in the horizontal direction; 33 is a weight that applies a load to the slide shaft 32. The weight 33 is the slide shaft 3
The wire 36 is fixed to a pin 34 protruding from the end of the bearing box 31, and is attached to the lower end of a wire 36 wound around a pulley 35 attached to the bearing box 31. It has a pressing effect. 37 is a lock screw that stops the movement of the slider 27.

38 is a tool with a spherical tip (hereinafter referred to as a nose) attached to the tip of the slide shaft 32 to attach the wrap tape 39 to the workpiece 1. An abrasive material is evenly applied to one surface of the wrap tape 39 on the workpiece side. Fixed, tape 3
The fine protrusions remaining on the surface of the workpiece 1 due to the movement of the workpiece 9 are scraped off with a uniform abrasive material to mirror-polish it. 40 is an abrasive supply device that supplies the lap tape 39 between the workpiece 1 and the nose 38;
It has a supply reel 41 for feeding out the tape and a take-up reel 42 for winding the tape.

Next, in FIG. 2 showing the overall appearance of the device from above, 43 is a turning table drive motor that turns the turning table 11, and 44 is a slider 2.
A handle 29 is attached to this feed screw 44.
45 is a bearing that supports the feed screw 44. 46 is a scale attached to the base 25;
7 is an origin switch that detects the origin of the scale 46, 48 is a slide shaft drive motor that slides the slide shaft 32, 49 is a motor bracket fixed to the bearing box 31, 50 is a feed screw, and 51 is a stopper attached to the feed screw 50. It is.

In the above configuration, the work 1 is available in various sizes and can be freely attached to and detached from the spindle 21. At the start of work, the worker (operator) turns the handle 23 on the right side of the figure and reads the value on the scale 46.
The slider 20 is moved to a position that matches the size of the workpiece 1, and the lock screw 24 is tightened to fix the movement of the slider 20. Next, the operator turns the handle 29 on the left side of the figure to remove the nose 38 attached to the abrasive supply device (tape feed device) 40.
Slide the slider 27 until it comes close to the workpiece 1, and fix the slider 27 with the lock screw 37.

Next, when the operator presses down a start button (not shown), the drive motor 48 starts, rotates the feed screw 50, and slides the slide shaft 32 in the direction of the workpiece 1. At this time, by using an aerostatic bearing as the bearing box 31, the running (movement) of the slide shaft 32 can be controlled with high precision. In this way, the nose 38 attached to the abrasive supply device 40 fixed to the slide shaft 32
butt it against workpiece 1 with wrap tape 39 in between. At this time, the abrasive coated surface of the lap tape 39 comes into contact with the workpiece 1. Also, since the weight 33 acts on the slide shaft 32, the nose 38
is pressed against the workpiece 1 with a constant pressure.

Next, start the drive motor 22 and move the workpiece 1.
At the same time, the lap tape 39 is tensioned approximately vertically upward along the curved surface of the tip of the nose 38 by a drive motor (described later), and the abrasive material on the wrap tape 39 causes the tip of the nose 38 to come into contact with the workpiece 1. Polishing is performed only on the areas that are present.

At this time, the amount of polishing with the lap tape 39 depends on the force with which the nose 38 presses the workpiece 1, the pressurizing time, the rotational speed of the workpiece 1, the running speed of the lap tape 39, and the type of abrasive material applied to the lap tape 39. It changes over time. The force F exerted by the nose 38 on the workpiece 1 is the weight W of the weight 33.
It can be adjusted by Further, by changing the speed of the drive motor 43, the pressurizing time T during which the nose 38 is in contact with a certain angle of the workpiece 1 via the wrap tape 39 can be adjusted. Also,
In order to partially polish the workpiece 1, the drive motor 43 is driven to rotate the rotary table 11 at a relatively high speed until the nose 38 hits the portion of the workpiece 1 to be polished (swivel angle). The turning angle at this time is read by the encoder 13. Further, by using an aerostatic bearing for the bearing of the turning table 11, highly accurate rotation control can be obtained.

B. Configuration of Abrasive Supply Device FIGS. 3 to 8 show the configuration of an embodiment of the abrasive supply device 40 to which the present invention is applied, in which FIG. 3 is a front view, FIG. 4 is a right side view, 5 is a plan view, FIG. 6 is a cross section taken along the line AA in FIG. 3, FIG. 7 is a cross section taken along BB in FIG. 3, and FIG.
C section is shown.

In FIG. 3, reference numerals 56 to 60 indicate guide rollers, and the wrap tape 39 supplied from the supply reel 41 is wound and fed in this order around guide rollers 55 to 60 and a rotationally driven rubber ring 61.
Finally, it is wound up with a winding ream 42. The guide rollers 55, 56, 58, 60 are roller shafts 55a, 5
bracket 62 via 6a, 58a, 60a
Although the guide roller 5 is fixed to rotate freely,
7 is supported via an arm 63 so as to be movable by its own weight around a support shaft 64 from the position indicated by the solid line in this figure to the position indicated by the broken line in this figure, and the range of movement upward and downward is limited by upper and lower stoppers 65 and 66. Limited. When the wrap tape 39 becomes almost empty on the supply reel 41 or comes off the guide rollers, the wrap tape 39
As the tension of the guide roller 57 decreases, the guide roller 57 immediately descends due to its own weight, and the micro switch 67 detects this descent of the guide roller 57 via the detection rod 68.

69 is a tension roller that applies appropriate tension to the wrap tape 39; 70 is a tension arm that supports the tension roller 69; 71 is a tension spring that pulls the tension arm 70; and 72 is a support shaft that rotatably supports the tension arm 70. , 73 is a spring support shaft of the tension spring 71. The tension arm 70 is biased by a tension spring 71 to press the tension roller 69 against the rubber ring 61 and apply appropriate tension to the wrap tape 39 running between the tension roller 69 and the rubber ring 61.

74 is a sleeve that prevents the wrap tape 39 from coming off the nose 38; the wrap tape 39 passes through the inside of the sleeve 74, turns over at the tip of the nose 38, passes through the inside of the sleeve 74 again, and goes to the guide roller 59; is a belt that transmits rotational force to the take-up reel 42.

Next, in FIG. 4, 76 is the take-up reel 4.
2 and a reel drive motor that drives the rubber ring 61;
77a and 77b are a pair of bevel gears that transmit the rotation of the drive motor 76 to the pulley shaft 78;
9b is a bearing of the pulley shaft 78, and the above-mentioned rubber ring 61 is fixed to the pulley shaft 78.
80 is a pulley shaft on the driven side, and belt 75
Driving force is transmitted from the pulley shaft 78 on the drive side via the drive side pulley shaft 78. 81 is a bearing of the pulley shaft 80;
2 is a retaining ring of the pulley shaft 80; 83 is a thrust washer disposed on both sides of the take-up reel 42;
84 is a bearing of the take-up reel 42, 85 is a presser washer for the take-up reel 42, 86 is a compression spring, and 87 is a press screw that fixes the take-up reel 42 to the pulley shaft 80 via the compression spring 86.

In FIG. 5, 88 is a support shaft of the supply reel 42, which is fixed to the bracket 62. 8
Members 9 to 93 are used for attaching and detaching the supply reel 42, and 89 is a thrust washer;
0 is a bearing, 91 is a presser washer, 92 is a compression spring,
93 is a cap screw.

FIG. 6 shows the structure near the arm 63, where 94 is a bearing provided on the roller shaft 57a of the guide roller 57, and 95 is a retaining ring that prevents the guide roller 57 from falling off. A groove portion (guide groove) 57b for guiding the wrap tape 39 is formed on the surface. A bearing 96 rotatably supports the arm 63 to which the guide roller 57 is attached, and is attached to the support shaft 64.
It is prevented from slipping off by a retaining ring 97.

FIG. 7 shows the structure near the tension arm 70, where 98 is a retaining ring attached to the support shaft 72, 99 is a compression spring attached to the tension arm 70, 100 is a retaining ring of the compression spring 99, 1
01 is a retaining ring of the tension roller 69, 102 is a retaining pin of the tension roller 69, and 103 is a stopper shaft.

Further, FIG. 8 shows the structure in the vicinity of the guide roller 60. Here, 104 is a bearing of the guide roller 60, 105 is a retaining ring, and the guide roller 60 is rotatably fixed to the bracket 62 by the roller shaft 60a. A groove portion (guide groove) 60 for guiding the wrap tape 39 is provided on the circumferential surface of the guide roller 60.
b is formed. Other fixed guide rollers 55, 56, 58, and 59 shown in FIG. 3 have substantially the same structure as the guide roller 60 shown in FIG. 8.

As shown in FIGS. 3 and 4, the abrasive supply device (tape feeding device) 40 has a bracket 62 attached to the slide shaft 32, and moves integrally with the nose 38 as the slide shaft 32 slides. The wrap tape 39 wound around the supply reel 42 is wrapped around the guide rollers 55, 56, 57, 5.
8. Tip of nose 38, guide rollers 59, 6
0, and is sandwiched between the rubber ring 61 attached to the pulley shaft 78 and the tension roller 69,
It is wound onto a rotating take-up reel 14. At this time, the pulley shaft 78 is rotated by the drive motor 76 via gears 77a and 78b, and the rubber ring 6
Rotate 1. The rotational speed of the drive motor 76 can be changed arbitrarily, thereby making it possible to vary the running speed of the wrap tape 39.

When the pulley shaft 78 rotates, the pulley shaft 80 rotates via the belt 75, and the rotated pulley shaft 80 rotates the take-up reel 41 by the frictional force of the thrust washer 83. The frictional force of the thrust washer 83 can be adjusted by the position of the retaining screw 87, and the friction force of the thrust washer 83 is generated by the biasing force of the compression spring 80 deflected by the retaining screw 87.

Wrap tape 3 wound on take-up reel 41
9 gradually increases the winding diameter and the winding speed becomes faster than the speed of the tape being run by the rubber ring 61. Therefore, the pulley shaft 80 and the winding reel 41 are The wrap tape 39 is designed to slide so that the running speed of the wrap tape 39 is always kept constant. Further, the force with which the tension roller 69 is pressed against the rubber ring 61 is exerted by the tension spring 71, and the pressing force can be changed by changing the position of the hole in the tension arm 70 through which the tension spring 71 is attracted.

Wrap tape 3 is attached to the nose 38 as described below.
A tape guide groove is cut to prevent the part 9 from coming off, and the shape of the tip of the nose 38 is similar to that of the workpiece 1.
The workpiece 1 is machined into a spherical shape so that it can polish minute parts of the workpiece 1, and it comes into contact with the workpiece 1 at a point. Further, a cylindrical sleeve 74 is fitted around the outer periphery of the nose 38, and a wrap tape 39 is fitted around the nose 38.
is fed between the upper and lower grooves of the sleeve 74 and the nose 38, so the wrap tape 39
I can't get out of 8.

Further, the guide roller 57 is attached to the arm 63 and supported by the tension of the wrap tape 39. The wrap tape 39 wound on the supply reel 42 is transferred to the take-up reel 4 as described above.
1, and finally the wrap tape 39 comes off the supply reel 42 and the tension of the wrap tape 39 decreases, so the guide roller 5
7 can no longer be supported, and the guide roller 57 moves down toward the lower end. Immediately after the guide roller 57 is lowered, the micro switch 67 is activated to stop the drive motor 76 and stop the lap tape 39 from running.

On the other hand, as shown in FIG. 5, the supply reel 42 is braked by the frictional force of the thrust washer 89, applying tension to the wrap tape 39. The frictional force of the thrust washer 89 is applied by adjusting the retaining screw 93 to deflect the compression spring 92. If the tension roller 69 is kept pressed against the rubber ring 61 when the abrasive material supply device 40 is stored for a long period of time, the rubber ring 61 will deform and the running of the lap tape 39 will become unstable during processing. The tension roller 69 is fixed by inserting the stopper shaft 103 into the hole drilled in the hole 62, so that the tension roller 69 is separated from the rubber ring 61 (see FIG. 7).

C Structure of Nose (Processing Tool) FIGS. 9 to 18 show examples of the structure of the nose 38 according to the embodiment of the present invention.

FIG. 9 shows a longitudinal section of the nose 38 during polishing, FIG. 10 shows a section taken along the line XX in FIG. 9, FIG. 11 shows a longitudinal section of only the nose 38, and FIG. 12 shows its right side. In Figures 9 to 12, 38
38a is a tape guide groove of the nose 38 formed along the running direction of the wrap tape 39, and 38b is a spherical portion (convex curved surface) at the tip of the nose 38. Further, at the position of the groove portion 38a of the nose 38,
A cylindrical sleeve 74 is fitted to cover the groove 38a. Lap tape 39 is guide roller 5
groove 38a on the lower side of the nose 38.
and the sleeve 74, passes through the exposed spherical tip 38b of the nose 38, and reenters between the upper groove 38a of the nose 38 and the sleeve 74;
Guided by guide rollers 59. In this way, since the sleeve 74 covers the groove 38a, the wrap tape 39 is accurately guided and does not come off. Further, since the tip portion 38b of the nose 38 is spherical, it makes contact with the workpiece 1 at a point, making it possible to polish a minute portion of the workpiece 1.

The shape of the tip of the nose 38 is required to have high shape accuracy in order to apply pressure to the correct processing position, and particularly in the embodiment of the present invention, highly accurate sphericity is required. However, in the integrally shaped nose 38 as shown in FIGS. 9 to 12, the tip portion 38b
It is difficult to process a spherical surface, and it is difficult to obtain a highly accurate spherical surface.

13 to 18 show an embodiment in which a separate steel ball 106 is attached to the tip of the nose 38 to obtain a highly accurate spherical surface. The steel ball 106 is easily available with the required high sphericity, such as a commercially available steel ball (for example, a bearing ball).
can also be used. This steel ball 106 is fixedly attached to the tip of the nose body 38c using an adhesive or the like, and tape guide grooves 106a are formed on the upper and lower surfaces of the nose body 38 and the steel ball 106. If the amount of workpiece 1 to be processed is large, please refer to Figures 13 to 16.
Relatively large diameter steel ball 10 as shown in the example shown in the figure.
6 to increase the amount of polishing, and when the amount of machining is small, such as a small diameter work, it is better to use a relatively small diameter steel ball 106 as shown in FIGS. 17 and 18.

D Processing Principle Figures 19 to 21 show the processing principle of the embodiment of the present invention. As shown in FIG. 19, with the surface of the lap tape 39 coated with the abrasive material facing the workpiece 1, apply the nose 38 to the part of the workpiece 1 to be polished.
When the tip of the nose 38 is pressed against the lap tape 39, the workpiece 1 is rotated clockwise in the direction of the arrow, and the lap tape 39 is run upward, the part of the workpiece 1 that the nose 38 has touched is polished. The abrasive material on the lap tape 39 can be applied evenly, so it does not cause problems like conventional floating abrasive grains.
The amount of polishing can be kept constant. In addition, since new abrasive material is always supplied to the workpiece 1 during polishing by the running of the lap tape 39, clogging of the abrasive material does not occur, and since the machined surface is always polished with an ideal cutting edge, the amount of polishing is reduced. is stabilized and a high-precision mirror finish can be obtained. In addition, since the tool (nose) 38 itself is not rotated, problems due to rotational vibration of the tool do not occur, and since the tip of the nose 38 is made into a true spherical surface, the nose 38 hits the workpiece 1 at a point, resulting in local polishing in an extremely small area. can be performed with high precision. Further, since the constant pressure with which the nose 38 is pressed against the workpiece 1 is adjusted by the weight 33, the workpiece 1 can be polished with an optimum machining pressure, and the amount of machining can be stabilized.

Here, the amount of polishing performed by the lap tape 39 is determined by the number of revolutions of the workpiece 1, the running speed of the lap tape 39, and the amount of polishing performed by the lap tape 39, as described above.
Type of abrasive applied to 9 and nose 38
It is determined by the pressing force and pressing time applied to workpiece 1.

Therefore, as shown in FIG. 20, the workpiece 1 is rotated at a constant speed of _V2 , the lap tape 39 runs at a constant speed of _V1 , and the workpiece 1 of the nose 38 is rotated at a constant speed of V2.
If the pressing force F applied to the workpiece 1 is adjusted to a constant pressure by the weight 33, and the type of abrasive material in the lap tape 20 is constant, then the nose 38 is pressed against the workpiece 1.
It can be seen that by adjusting and controlling the pressurizing time, it is possible to appropriately control the amount of polishing and obtain highly accurate mirror polishing. However, the minute protrusions 107 on the workpiece 1 generally vary in size, and their positions also vary as shown in FIG. It is necessary to move the workpiece 1 to the measured position and press the nose 38 against it, and to increase or decrease the pressurizing time for the pressing depending on the size of the protrusion 107. This movement of the workpiece 1 is carried out by the turning table 11.
This is achieved by controlling the rotation angle of the rotation table 11 with the drive motor 43, and the pressurization time is achieved by variable control of the rotation speed of the rotation table 11. It has also been confirmed through experiments that the amount of machining and the rotation speed described above are inversely proportional.

E. Configuration of Control Device FIG. 22 shows an example of the circuit configuration of the control system according to the embodiment of the present invention. In this figure, 110 is a control computer, which controls the processing according to the present invention according to the control procedure shown in FIG. 23, which is stored in advance in the memory 111. 112 is a work shaft motor driver (drive circuit) that drives and controls the drive motor 22 that rotates the workpiece 1; 113 is a tape feed motor driver that drives and controls the drive motor 76 that sends the lap tape 39; This is a nose feed motor driver that drives and controls the drive motor 48 that sends data through the motor driver 112 to 1.
14 controls the rotation of the corresponding motor in accordance with a command signal (control signal) from the control computer 110. 115 inputs the output from the encoder 13 that detects the turning angle of the turning table 11;
Computer 110 for controlling rotation axis angle data
116 is a drive motor 4 that rotates (swivels) the rotation table 11.
This is a rotation axis motor driver that drives and controls the 3.

A machining program input section 117 inputs a machining program as described below supplied from the main computer 118, and the machining program consists of combination data of the rotation angle and rotation speed of the rotation table 11. Reference numeral 119 is an FD driver that drives and controls a floppy disk (FD) 120.

Next, an example of the control operation of the embodiment of the present invention will be explained with reference to the flowchart of FIG.

First, before partially modifying the workpiece 1, the control computer 110 inputs a modification program (machining program) from the machining program input section 117 and stores it in a predetermined area of the memory 111 (step S1). Next, the operator
Rotate the center of curvature of workpiece 1 by rotating table 1.
1, and once the control computer 110 confirms this coincidence (step
S2), then the control computer 110
Based on the correction program stored in the workpiece 11, a command is issued to the rotation axis motor driver 116 to operate the drive motor 43, and the rotation table 11 is rotated to the correction part of the workpiece 1 (step
S3).

Next, the control computer 110 issues a command to the work shaft motor driver 112 to operate the drive motor 22 to rotate the workpiece 1, and also issues a command to the tape feed motor driver 113 to operate the drive motor 76 to rotate the lap tape. 39 (step S4).

Next, the control computer 110 issues a command to the nose feed motor driver 114 to operate the drive motor 48, and the nose 38 is brought into contact with the workpiece 1 with the wrap tape 39 interposed therebetween and stopped (step S5). Subsequently, the control computer 110 gives a rotation speed command to the rotation axis motor driver 116 based on the modification program stored in the memory 111 to control the motor 43.
and inputs turning angle data from the encoder 13 via the turning angle detector 115 (step S6).

Next, the control computer 110 outputs the rotation speed corresponding to the detected rotation angle to the rotation axis motor driver 116 based on the correction program stored in the memory 111, and controls the rotation speed of the motor 43 (step S7). ). The control operations in steps S6 and S7 described above are performed by the encoder 13.
is sent back sequentially until the detection value reaches the predetermined end angle stored in the correction program, and when the detected turning angle detected by the encoder 13 reaches the above-mentioned predetermined end angle (step S8), the control computer 110 A command is issued to the feed motor driver 114 to operate the drive motor 48 to separate the wrap tape 39 from the workpiece 1 (step S9), and the workpiece axis motor driver 11
2 and the tape feed motor driver 113 to stop both drive motors 22 and 76, and finish the corrective polishing of one part (step S10).

When all of the data in the correction program is not completed, that is, when other parts of the workpiece 1 are also to be corrected and polished, the process returns to step S3 and repeats the processes from steps S3 to S10 until the correction program is completed (step S11). .

F. Configuration of processing amount measuring means By providing a non-contact measuring device to the apparatus according to the embodiment of the present invention shown in Fig. 1, it can be easily used (commonly used) as a processing amount measuring means (device) before and after polishing. is shown in Fig. 24.

In FIG. 24, 121 is a non-contact measuring device, and a general non-contact measuring device such as a non-contact electric micrometer, a laser range finder, an optical scale, etc. can be used. This non-contact measuring device 1
21 may be installed at any position as long as the displacement of the slide shaft 32 that is displaced integrally with the nose 38 can be measured, for example, it may be placed behind the slide shaft 32 as shown in this figure. 122 is a position-adjustable stand for fixing the non-contact measuring device 121 in the mounting position; 123 is a non-contact measuring device 121;
This is a measurement meter that can amplify and display the output signal of Measurement data from the non-contact measuring device 121 is amplified and then converted into a digital signal, which is sent to the control computer 110 in FIG. 22 for processing. Other components are the first
Since it is similar to the embodiment shown in the figure, detailed explanation thereof will be omitted.

In the above configuration, lap tape (tape-like abrasive member) 3 is attached to the processing surface of the workpiece (workpiece) 1.
The wrap tape 39 is removed from the above-mentioned nose (pressing member) 38 which presses the workpiece 9 for grinding and polishing, and the nose 38 is brought into direct contact with the workpiece 1 as a probe of the processing amount measuring means.

After bringing the nose 38 into direct contact with the workpiece 1,
The turning angle of the turning table 11 is set to the original position, the bearing box 31 is fixed with the lock screw 37, and the turning table 11 is rotated. In this way, if the workpiece 1 is rotated after the nose 38 is brought into direct contact with the workpiece 1, the nose 38 is brought into contact with the workpiece 1 with a constant pressure via the slide shaft 32 due to the pressing force of the weight 33. As shown in FIG. 25, the slide shaft 32, to which the nose 38 is attached, is displaced following the shape and fine irregularities of the surface of the workpiece 1, and the slide shaft 32 to which the nose 38 is attached is also simultaneously displaced together with the nose 38.

The displacement of this slide shaft 32 is measured by the non-contact measuring device 1.
At step 21, the measurement is performed at a predetermined pitch and outputted to the control computer 110. Control computer 11
0 once stores the measurement data of the measuring device 121 and the rotation angle data of the rotation table 11 obtained from the encoder 13 in the memory 111,
The difference (error) from the design data (ideal value) of the workpiece 1 is determined, and correction data consisting of the correction processing amount and its processing position is created.

In particular, in this embodiment, the slide shaft 32 is supported by an air bearing in the bearing box 31, an appropriate constant contact pressure is applied by the weight 33, and the tip of the nose 38 is formed into a spherical shape for point contact. , it has extremely good followability, and even minute changes in unevenness on the surface of the workpiece 1 can be measured extremely accurately, for example, in units of 5/100 to 2/100 μm, using the non-contact measuring device 121. Furthermore, in this embodiment, since the pressing member, which is a tool, can also be used as a probe, there is no need to use an expensive dedicated measuring device, and problems caused by adjusting the setting of the workpiece 1 (setting deviation) can be avoided. This has the advantage that corrective grinding and polishing can be performed immediately after measurement, which greatly shortens the processing time.
Furthermore, since it is possible to fully automate everything from measurement to correction processing, operational work is significantly reduced, and manufacturing costs can be reduced.

G. Configuration of Machining Data Creation Means FIG. 26 shows an example of the configuration of a machining data creation means for creating machining data (correction program) provided to the partial correction polishing apparatus as shown in FIG. In this figure, 131 is a measuring device that outputs an error curve (data) from measurement data and an ideal curve (data) to be described later, 132 is a floppy disk (FD) that provides the ideal curve to the measuring device 131, and 133 is a measuring device. 134 is a floppy disk that provides the cutting amount curve to the automatic programmer 133; 135 is the automatic programmer 13;
This is a processing machine as shown in FIG. 1 which inputs the processing data obtained from Step 3 as a correction program and performs partial correction polishing processing.

The measuring device 131 includes a displacement measuring means such as the non-contact electric micrometer 121 shown in FIG.
The 27th Workpiece 1 indicated by the turning angle θ and the deviation from the spherical surface of workpiece 1 as shown in Figure A.
From the measured value and the deviation .gamma. from the ideal curve (design curve) stored in the floppy disk 132, an error curve expressed in the .gamma.-.theta. system as shown in FIG. 27B is calculated and output.

The automatic programmer 133 includes arithmetic control means such as the main computer 118 in FIG.
From the error curve shown in FIG. B and the cutting amount curve shown in FIG. 27C stored in the floppy disk 134, the curve shown in FIG. Output the processed data as shown.

FIG. 27C shows a cutting amount curve representing the relationship between the turning angle θ and the cutting amount when the turning table 11 is turned at a constant speed. When the turning angle θ is close to zero (origin), the nose 38 is located near the center of the rotating work 1, and as the turning angle θ increases, the nose 38 moves relatively toward the outer circumference of the work 1. Therefore, the circumferential speed of the rotating workpiece 1 decreases toward the center, and FIG. 27C shows that if the rotation speed is constant, the amount of machining decreases as the rotation angle θ increases. Furthermore, the amount of cutting decreases as the rotation speed increases, and increases as the rotation speed decreases, so the amount of cutting is inversely proportional to the rotation speed, as shown by the broken line curve in FIG. 27C.

Therefore, the automatic programmer 133 compares the error curve and the cutting amount curve at a predetermined pitch (at the same turning angle), and calculates the turning speed for the angular turning angle during partial correction machining. For example, at a certain turning angle θ _i , if the error is 5 μm and the amount of cutting at a constant turning speed V ₀ is 1 μm, the turning speed V during machining is V=V ₀ /5. In addition, since the actual correction machining parts are thought to be scattered randomly on the workpiece 1, the machining data given to the processing machine 135 is calculated at a turning speed between certain turning angles, as shown in FIG. This is an instruction to make a turn.

The processing machine 135 inputs the processing data as a correction program, and performs a partial correction polishing process on the workpiece 1 according to the control procedure shown in FIG. 31 or the control procedure shown in FIG. 23 described above. .

Next, an example of the operation of the measuring device 131 described above will be described in detail with reference to the flowchart of FIG.

As shown in FIG. 24 above, a non-contact measuring device (for example, a non-contact electric micrometer) 121
is placed behind the slide shaft 32, the workpiece 1 is attached to the spindle 21, and the center of curvature of the workpiece 1 and the turning table 1 are aligned by operating the handle 29.
1, the wrap tape 39 is removed from the nose 38, the nose 38 is moved closer to the work 1 by operating the handle 29, and the bearing box 31 is fixed with the lock nut 37. Further, the weight 33 is selected to provide an appropriate contact pressure. After completing the above preparation work, the operator presses a measurement start button on the operation desk (not shown). By pressing this button, the control procedure shown in FIG. 29 is started.

First, in response to a measurement start instruction, the control computer 110 starts the drive motor 43 via the rotation axis motor driver 116, and sets the rotation angle of the rotation table 11 to the origin 0°. This origin position is detected by the origin switch 16 (see FIG. 1) (step S21).

Next, the control computer 110 starts the drive motor 48 via the nose feed motor driver 114, moves the slide shaft 32 forward, and brings the nose (hereinafter referred to as a contactor) 38 into direct contact with the workpiece 1 (step S22). ). continue,
The control computer 110 sets the current position of the slide shaft 32 to zero (step S23), outputs a drive signal to the rotation axis motor driver 116, and rotates the rotation table 11 and the gear 12 of the table at a constant speed ( step
S24), the position of the slide shaft 32 is input from the non-contact measuring device 121 at every fixed pitch angle (swivel angle), and is sequentially stored in the memory 111 (step S24).
S25), these steps S24 and S25 are repeated until the end angle of the turning table 11 is reached (step S26). The rotation angle of the rotation table 111 is detected by the encoder 13.

As a result, data of a measured value curve as shown in FIG. 27A is stored in the memory 111.
When the detected rotation angle reaches the predetermined end angle of the rotation table 111, the control computer 110 outputs a command signal to the nose feed motor driver 114 to reversely rotate the drive motor 48, thereby retracting the slide shaft 32 and making contact. The child 38 is separated from the workpiece 1 (step S27), and the value (D1-D2) obtained by subtracting the ideal curve (ideal value data) D2 of the floppy disk 132 from the above-mentioned measurement data D1 stored in the memory 111 is set as an error value. γ(θ) is calculated for each pitch angle of the turning angle θ (step S28), and the calculation results are sequentially written to the floppy disk 112 as an error curve (data) (step S29).

Next, an example of the operation of the automatic programmer 133 described above will be described in detail with reference to the flowchart shown in FIG.

First, the control computer 110 (or main computer) 118 is the FD driver 1
The error curve (measurement data) is read from the floppy disk 112 via the memory 111.
Store in. Also, floppy disk 113
Load the cutting amount curve (cutting amount data) from
The data is stored in the memory 111 (step S31).

Next, the cutting time for each turning angle is calculated from the above-mentioned cutting amount data (cutting amount curve) and measurement data (error curve) (step S32), and the turning time for each corresponding turning angle is calculated from the reciprocal of the calculated cutting time. The speed is calculated (step S33), and the calculation result is stored in the floppy disk 120 as processing data (step S34).

FIG. 31 shows an example of the operation of the processing machine 135 described above, but since it is almost the same as the control procedure shown in FIG. 23 described above, detailed explanation thereof will be omitted.

In addition, in the above-described embodiment of the present invention, when removing the protruding portion of the machined surface of the workpiece 1 by grinding and polishing, as shown in FIG.
Although the speed V ₁ of the workpiece 1 is kept constant and the speed (turning speed in this example) V ₂ of the workpiece 1 is controlled in inverse proportion to the amount of polishing (amount of grinding), the present invention is not limited to this. The speed V ₂ of the lap tape 39 may be kept constant and the speed V ₁ of the lap tape 39 may be controlled in proportion to the amount of polishing (amount of grinding), or both controls may be combined.

H Configuration of Pressure Means In the embodiment of the present invention, a weight 33 is used as a means for applying pressure in the direction of the workpiece to the tool of the modified polishing device equipped with the abrasive supply device.
As shown in the figure and FIG. 2, the slide shaft 32 to which the abrasive supply device 40 is attached is statically supported by a static pressure air bearing in the bearing box 31, and is connected to the slide shaft 32 via a wire 36 whose one end is connected to the slide shaft 32. A constant pressing force is applied to the nose (tool) 38 by the weight of the weight 33. In this way, since the machining pressure is applied by the weight 33, there is no change in the applied pressure due to the movement of the slide shaft 32. Further, since the slide shaft 32 is supported by static pressure, the nose 38 traces the shape of the polished surface of the workpiece 1 extremely smoothly. Further, since the pressing force of the lap tape 39 against the workpiece 1 is always constant, stable polishing can be performed.

Furthermore, as shown in FIG. 24, even when used as a polishing amount measuring means, extremely highly accurate measurement data can be obtained for the same reason as described above using the pressurizing means.

It goes without saying that the present invention can also be applied to a grinding device.

[Effects of the Invention] As explained above, according to the present invention, the relative position and relative speed of the polishing tool (nose) and the workpiece (workpiece) are controlled based on the measured data and design value data of the compound. Since the correction polishing process is performed, it is possible to fully automate the series of correction polishing operations from measurement to correction machining, which greatly reduces the operating work. Because the tool and workpiece are precisely controlled, more precise corrective polishing can be achieved.

[Brief explanation of the drawing]

FIG. 1 is a front view showing an example of the entire configuration of a modified polishing device to which the present invention is applied, FIG. 2 is a plan view thereof, and FIG. 3 is a front view showing an example of the entire configuration of the abrasive supply device of FIG. Figure 4 is a right side view of the same, Figure 5 is a front view of the same, Figure 6 is a sectional view taken along the A-A cutting line in Figure 3, and Figure 7 is a sectional view taken along the B-B cutting line in Figure 3. 8 is a sectional view taken along the line CC in FIG. 3, FIG. 9 is a vertical sectional view showing an example of the structure of the nose (polishing tool) in FIG. 1, and FIG. is X in Figure 9
11 is a vertical sectional view showing only the configuration of the nose in FIG. 9, FIG. 12 is a right side view of the nose in FIG. 14 is a right side view of the nose shown in FIG. 13, FIG. 15 is a vertical sectional view showing a modified example of the nose, FIG. 16 is a right side view of the nose shown in FIG. 15, FIG. 17 is a longitudinal sectional view showing still another modification of the nose, FIG. 18 is a right side view of the nose shown in FIG. 17, and FIG. Figure 20 is a schematic diagram showing the processing principle of the embodiment of the present invention, and Figure 21 is the Y-Y diagram in Figure 19.
22 is a block diagram showing an example of the circuit configuration of the control system according to the embodiment of the present invention; FIG. 23 is a flowchart showing an example of control operation during processing according to the embodiment of the present invention; and 24th is a sectional view taken along the cutting line. A front view showing the configuration of an embodiment of the present invention when the correction polishing device is also used as a polishing amount measuring means, FIG. 25 is a horizontal cross-sectional view showing the nose portion during measurement in FIG. 24, and FIG. 26 is a machining A block diagram showing the configuration of the data creation system according to the embodiment of the present invention, FIGS. 27A to 27D are diagrams showing the characteristics of the output data in the embodiment of FIG. 26, and FIG. An explanatory diagram showing an example,
FIG. 29 is a flowchart showing an example of the operation of the measuring instrument shown in FIG. 26, FIG. 30 is a flowchart showing an example of the operation of the automatic programmer shown in FIG.
FIG. 6 is a flowchart showing an example of the operation of the processing machine, and FIG. 32 is a front view of main parts showing the configuration of the conventional device. 1... Workpiece, 11... Rotating table, 13...
...Encoder, 16...Origin switch, 20...
Slider, 21... Spindle, 22... Work drive motor, 23... Handle, 24... Lock screw, 27... Slider, 28... Feed shaft, 29
... Handle, 30 ... Bearing box, 32 ... Slide shaft, 33 ... Weight, 37 ... Lock screw, 3
8...Nose (contact), 39...Lap tape,
40... Abrasive material supply device, 41... Supply reel,
42... Take-up reel, 43... Rotating table drive motor, 46... Scale, 47... Origin switch, 48... Slide shaft drive motor, 55-60
...Guide roller, 61...Rubber ring, 63...Arm, 67...Micro switch, 69...Tension roller, 70...Tension arm, 76...
Reel drive motor, 83... Thrust washer,
89...Thrust washer, 106...Steel ball, 1
10...Control computer, 111...Memory, 112-114, 116...Motor driver, 117...Machining program input section, 121...
...Non-contact measuring instrument, 131... Measuring instrument, 133...
Automatic programmer, 135...processing machine.

Claims (1)

[Scope of Claims] 1. Measuring means for measuring the machined surface of the workpiece while the workpiece is rotated by a turning means, and measuring data of the machined surface using the measurement data of the measuring means and predetermined design value data. a correction machining amount determination means for determining a correction machining amount to be corrected and a correction machining position; and data indicating a relationship between the data of the correction machining amount determining means and the turning angle and the correction machining amount at a predetermined constant turning speed. a calculation means for calculating the rotation speed of the position where the workpiece is to be corrected; a drive control means for controlling the rotation speed of the rotation means on which the workpiece is mounted according to the output of the calculation means; A correction polishing device comprising: processing means for supplying a tape with an abrasive material between the correction processing surface of the workpiece being rotated and a pressing tool to polish the processing surface to be corrected.