JPS63232939A - Polishing device - Google Patents

Abstract

PURPOSE:To stabilize stock removal in corrective polishing as well as to make yet more highly accurate polishing performable, by installing a tool holding device, holding a tip convex tool to polish a workpiece in a way of pressing a tape with an abradant to this workpiece free of slide motion and also a pressurizing force generating device, pressurizing the tool at constant pressure. CONSTITUTION:In this device, there is provided with a slide shaft 32 which holds a tip convex nose 38 to polish a work 1 in a way of pressing a lap tape 39 to a polishing surface of the work 1 free of slide motion toward the work 1, and the nose 38 is constituted so as to be pressurized in the work direction with a weight 33. In consequence, there is no variation in working pressure with movement of the slide shaft 32, and since pressurizing force during polishing is always constant, stable polishing can be done, thus accuracy of finishing is improvable. In addition, the slide shaft 32 is hydrostatically supported whereby the nose 38 follows the form of the polishing surface very smoothly, thus good fine corrective polishing is performable.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a polishing apparatus, and more particularly to a polishing apparatus suitable for partially correcting and polishing the surface shape of a workpiece having an optical mirror surface, such as a lens or a mold.

[Conventional technology] In order to process a workpiece such as a lens into the designed surface shape with high precision and obtain a smooth optical mirror surface, the surface created by grinding etc. is finished by uniform polishing. After shape measurement, a partial correction polishing process is required to polish the surface while removing local shape errors based on the measurement results. A conventional device used for this partial correction polishing process is shown in FIG.

In this figure, 1 is a rotating work such as a lens, 2 is a felt attached to the tip of a spindle 4 rotated by a drive motor 3, the spindle 4 is supported by a bracket 5 via a ball bearing, and the bracket 5 is It is attached to a slide shaft 6 that is movable in the direction of the workpiece 1.

In the conventional apparatus, with the above configuration, the felt 2 coated with an abrasive material is pressed against the work l which is prevented from rotating, and the felt 2 is rotated by the drive motor 3 to partially correct polish the work 1.

[Problems to be Solved by the Invention] However, in the conventional device as described above, since ball bearings are used to support the spindle 4, highly accurate rotation cannot be obtained, and as a result, the swinging of the felt 2 ( rotational shake)
As the felt 2 becomes larger, the part that touches the machined surface of the workpiece 1 becomes wider (which makes it difficult to polish small areas. Also, since the part of the felt 2 that touches the workpiece 1 is always at the same position, the felt 2 There is a problem that the abrasive applied to the workpiece 1 becomes clogged and the amount of polishing of the workpiece 1 becomes unstable.In addition to the above-mentioned felt, Bakelite and cast iron are used as tools, and as the abrasive, A mixture of diamond paste and grease or a mixture of diamond oil (or water), etc., has been used, but the problem is that the amount of polishing cannot be maintained constant because the abrasive materials are floating abrasive grains.

SUMMARY OF THE INVENTION In view of the above-mentioned conventional problems, it is an object of the present invention to provide a polishing apparatus that can stabilize the amount of polishing in correction polishing of minute portions and achieve more accurate polishing.

[Means for Solving the Problems] In order to achieve the above object, the present invention provides a tool with a convex tip that presses an abrasive tape on the surface of a workpiece to polish it, and a tool that slides the tool in a predetermined direction. The present invention is characterized in that it includes a tool holding means that holds the tool freely and a pressurizing force generating means that presses the tool with a constant pressure in the direction of the workpiece via the tool holding means.

[Function] In the present invention, a tool with a convex tip that is polished by pressing an abrasive tape on the processing surface of a workpiece is pressed with a constant pressure in the direction of the workpiece using a weight or the like. Holding means (
For example, there is no change in machining pressure due to movement of the slide shaft), and the applied force during machining is always constant, so stable polishing can be performed and machining accuracy can be improved. Further, by supporting the tool holding means under static pressure, the tool smoothly follows (traces) the shape of the tool machined surface, resulting in good micro-part correction polishing.

[Example] Hereinafter, an example of the present invention will be described in detail with reference to the drawings.

A. Overall Structure of Polishing Apparatus FIGS. 1 and 2 show the overall structure of an embodiment of a polishing apparatus to which the present invention is applied. In FIG. 1 showing the overall appearance of the device from the front, IO is a surface plate, 11 is a turning table fixed on the surface plate and can be rotated horizontally, and 12 is a turning table 11.
The rotation of the turning table 11 is transmitted through a small diameter gear 14 that meshes with the large diameter gear 13 fixed above the gear 12, and an encoder (hereinafter referred to as the turning angle) that reads the rotation angle of the turning table 11 (hereinafter referred to as the turning angle). 15 is a bracket for fixing the encoder 13 on the surface plate 10. 16 is an origin switch for detecting the origin of the turning angle of the turning table 11, and 17 is a support that fixes the origin switch 16 on a fixed position i10.

18 is a base on the work side fixed to the rotary gear 12 of the turning table 11; 19 is a linear guardrail fixed to the base 18; 20 is a slider mounted on the linear guardrail 19 and capable of sliding on the linear guardrail 19; 21
2 is a spindle mounted on the slider 20, and 22 is a workpiece drive motor that rotates the workpiece 1 attached to the tip of the spindle 21 via the spindle 21. 23 is a work feed handle for moving the slider 20 to align the center of curvature of the work 1 with the center of rotation of the turning table 11; 24 is a locking screw for stopping the movement of the slider 20;

25 is a base on the tool side fixed to the surface plate lO, 26 is a linear guardrail fixed to the base 25, 27 is a slider mounted on the linear guardrail 26, and 28 is a slider 2
7 is a feed screw that slides linearly in the horizontal direction; 29 is a handle attached to the feed screw 28; 30 is a bearing that supports the feed screw 28 on the base 25; and 31 is a slider 27.
32 is an air slide shaft that is supported by the bearing box 31 and slides in the horizontal direction; 33 is the slide shaft 3;
It is a weight that applies a weight to 2. The weight 33 is
It is fixed to a pin 34 protruding from the end of the slide shaft 32, and is attached to the lower end of a wire 36 wound around a pulley 35 attached to the bearing box 31.
It acts to press the workpiece 1 with a constant pressure in the direction of the workpiece 1. 37 is a locking screw that stops the movement of the slider 27.

Reference numeral 38 denotes a tool (hereinafter referred to as a nose) with a spherical tip that is attached to the tip of the slide shaft 32 and presses the wrap tape 39 against the workpiece 1°, and one surface of the wrap tape 39 on the workpiece side is coated with an abrasive material. is evenly applied and fixed, tape 3! ) The minute protrusions remaining on the surface of the workpiece 1 due to the transfer are scraped off with a uniform abrasive material and mirror-polished. 4
Reference numeral 0 denotes an abrasive supply device that supplies the wrap tape 39 between the workpiece 1 and the nose 38, and has a supply reel 41 for sending out the tape and a take-up reel 42 for winding the tape.

Next, in Figure 2 showing the overall appearance of the device from above,
43 is a turning table drive motor that turns the turning table 11, 44 is a feed screw that slides the slider 27, and a handle 29 is attached to this feed screw 44. 45 is a bearing that supports the feed screw 44. 46 is a scale attached to the base 25; 47 is an origin switch that detects the origin of the scale 46; 48 is a slide shaft drive motor that slides the slide shaft 32; 49-
5 is a motor bracket fixed to the bearing box 31, 50 is a feed screw, and 51 is a stopper attached to the feed screw 50.

In the above configuration, the work 1 is available in various sizes and can be freely attached to and detached from the spindle 21. When starting work, the worker (operator) turns the handle 23 on the right side of the figure, reads the value on the scale 46, moves the slider 20 to a position that matches the size of the workpiece 1, tightens the lock screw 24, and locks the slider. Fix 20 movements. Next, the operator
9 to slide the slider 27 until the nose 38 attached to the abrasive supply device (tape feeding device) 40 comes close to the workpiece 1, and then fix the slider 27 with the lock screw 37.

Next, when the operator presses a start button (not shown), the drive motor 48 is started, rotates the feeder 50, and slides the slide shaft 32 in the direction of the workpiece 1. At this time, by using an aerostatic bearing as the bearing box 31, the running (movement) of the slide shaft 32 can be controlled with high precision. In this way, the nose 38 attached to the abrasive supply device 40 fixed to the slide @h32 is attached to the lap tape 3.
Place 9 in between and hit it against work l. At this time, the abrasive coated surface of the wrap tape 39 hits the work 1. Also,
Since the weight 33 acts on the slide shaft 32, the nose 3
8 is to press the workpiece 1 with a constant pressure.

Next, the drive motor 22 is started to rotate the workpiece 1, and at the same time, the wrap tape 39 is tensioned approximately vertically upward along the curved surface of the tip of the nose 38 by the drive motor (described later), so that the wrap tape 39 is Only the portion where the tip of the nose 38 and the workpiece 1 are in contact is polished by the abrasive material.

At this time, the amount of polishing with the lap tape 39 depends on the force with which the nose 38 presses the workpiece 1, the pressurizing time, the rotational speed of the workpiece 1, the running speed of the lap tape 39, and the lap tape 39.
varies depending on the type of abrasive applied. The force F exerted by the nose 38 on the workpiece 1 is the weight W of the weight 33.
It can be adjusted by Further, by changing the speed of the drive motor 43, the pressurizing time T during which the nose 38 is in contact with a certain angle of the workpiece 1 via the wrap tape 39 can be adjusted. Further, in order to partially polish the workpiece 1, the drive motor 43 is driven to rotate the rotary table 11 at a relatively high speed until the nose 38 touches the part of the workpiece 1 to be polished (swivel angle). The turning angle at this time is read by the encoder 13. Further, by using an aerostatic bearing for the bearing of the turning table 11, highly accurate rotation control can be obtained.

B. Structure of Abrasive Supply Device FIGS. 3 to 8 show an abrasive supply device 4 to which the present invention is applied.
FIG. 3 is a front view, FIG. 4 is a right side view, FIG. 5 is a plan view, FIG. 6 is a sectional view taken along line 8 in FIG. 3, and FIG. 3 and FIG. 8 show a section C--C in FIG. 3.

In FIG. 3, reference numerals 55 to 60 indicate guide rollers, and the wrap tape 39 supplied from the supply reel 41 is wound and fed in the order of the guide rollers 55 to 60 and a rotationally driven rubber ring 61, and is finally wound. It is wound up by a take-up arm 42.

Guide rollers 55, 56, 58, 60 are roller shafts 55a, 5
The guide roller 57 is rotatably fixed to the bracket 62 via arms 6a, 58a, and 60a, and the guide roller 57 moves from the solid line in the figure to the broken line in the figure by its own weight via the arm 63 around the support shaft 64. It is movably supported, and its range of upward and downward movement is limited by upper and lower stoppers 65° and 66. When the wrap tape 39 becomes almost empty on the supply reel 41 or comes off the guide roller, the tension of the wrap tape 39 decreases and the guide roller 57 immediately descends due to its own weight, and the microswitch 67 causes the guide roller 57 to drop. The descent is detected via the detection rod 68.

69 is a tension roller that applies appropriate tension to the wrap tape 39; 70 is a tension arm that supports the tension roller 69; 71 is a tension spring that pulls the tension arm 70; and 72 is a support shaft that rotatably supports the tension arm 70. , 73 is a spring support shaft of the tension spring 71. The tension arm 70 is biased by a tension spring 71,
The wrap tape 39 presses the tension roller 69 against the rubber ring 61 and runs between the tension roller 69 and the rubber ring 61.
Apply appropriate tension to the

74 is a sleeve that prevents the wrap tape 39 from coming off the nose 38; the wrap tape 39 passes through the inside of the sleeve 74, turns over at the tip of the nose 38, and passes through the inside of the sleeve 74 again to go to the guide roller 59. . 75
is a belt that transmits rotational force to the winding wheel 42.

Next, in FIG. 4, 76 is a reel drive motor that drives the take-up reel 42 and the rubber ring 61, 77a and 77b are a pair of bevel gears that transmit the rotation of the drive motor 76 to the pulley shaft 78, and 79a and 79b are It is a bearing of the pulley shaft 78,
The above-mentioned rubber m 61 is fixed to the pulley shaft 78. 80 is a pulley shaft on the driven side, and the driving force is transmitted from the pulley shaft 78 on the driving side via the belt 75. 8
1 is the bearing of the pulley shaft 80, and 82 is the pulley! 1iIk
80 is a retaining ring; 83 is a thrust washer provided on both sides of the take-up reel 42; 84 is a bearing for the take-up reel 42;
5 is a presser washer for the winding wheel 42, 86 is a compression spring, 87
The take-up reel 42 is connected to the pulley shaft 8 via the compression spring 86.
This is a cap screw that fixes it at 0.

In FIG. 5, reference numeral 88 denotes support and oil for the supply reel 42, which is fixed to the bracket 62. Members 89 to 93 are used for attaching and detaching the supply reel 42, and 89 is a thrust washer, 90 is a bearing, 91 is a presser washer, 92 is a compression spring, and 93 is a presser screw.

FIG. 6 shows the structure near the arm 63, where 94 is a bearing provided on the roller shaft 57a of the guide roller 57, and 95 is a retaining ring that prevents the guide roller 57 from falling off. A groove portion (guide groove) 57b for guiding the wrap tape 39 is formed on the surface. A bearing 96 rotatably supports the arm 63 to which the guide roller 57 is attached, and is attached to the support shaft 64 and prevented from slipping off by a retaining ring 97.

FIG. 7 shows the structure near the tension arm 70, where 98 is a retaining ring attached to the support shaft 72, 99 is a compression spring attached to the tension arm 70, 100 is a retaining ring of the compression spring 99, and 101 is a retaining ring attached to the tension arm 70. Retaining ring of tension roller 69,
102 is a stop pin for the tension roller 69, and 103 is a stopper shaft.

Further, FIG. 8 shows the structure in the vicinity of the guide roller 60. Here, 104 is a bearing of the guide roller 60, 105 is a retaining ring, and the guide roller 60 is rotatably fixed to the bracket 62 by the roller shaft 60a. A groove portion (guide groove) 60b for guiding the wrap tape 39 is provided on the circumferential surface of the guide roller 60.
is formed. The other fixed guide rollers 55.56, 58.5'1 shown in FIG. 3 also have a substantially four-post structure similar to the guide roller 60 shown in FIG. 8.

As shown in FIGS. 3 and 4, the abrasive supply device (tape feeding device) 40 has a bracket 62 attached to the slide @ 32 and moves together with the nose 38 by the slide of the slide shaft 32. As shown in FIGS. The wrap tape 39 wound around the supply reel 42 is wrapped around the guide rollers 55.5 [i, 57,
58, the tip of the nose 38, guide rollers 59 and 60, and is sandwiched between a rubber ring 61 attached to a pulley shaft 78 and a tension roller 69, and rotates the take-up reel 1.
It is rolled up to 4.

At this time, the pulley @78 is rotated by the drive motor 78 via gears 77a and 78b, thereby rotating the rubber ff1a i. The rotational speed of the drive motor 76 can be changed arbitrarily, thereby making it possible to vary the running speed of the wrap tape 39.

When the pulley shaft 78 rotates, the pulley shaft 80 rotates via the belt 75, and the rotated pulley shaft 80 rotates the take-up reel 41 by the frictional force of the thrust washer 83. The friction force of the thrust washer 83 is
The friction force of the thrust washer 83 is generated by the biasing force of the compression spring 80 bent by the retaining screw 87.

The wrap tape 39 wound on the winding wheel 41 gradually increases its winding diameter, and the winding speed becomes faster than the speed of the tape running on the rubber ring 61.
The pulley shaft 80 and the winding wheel 41 are configured to slide through a thrust washer 83, so that the running speed of the wrap tape 39 is always kept constant. Further, the force of pressing the tension roller 69 against the rubber ring 61 is exerted by a tension spring 71, and the pressing force can be changed by changing the position of the hole in the tension arm 70 through which the tension spring 71 is hooked.

As will be described later, a tape guide groove is cut into the nose 38 to prevent the wrap tape 39 from coming off, and the tip of the nose 38 is shaped into a spherical shape to enable polishing of minute parts of the workpiece 1. Therefore, it matches workpiece 1 at a point. Further, a cylindrical sleeve 74 is fitted around the outer periphery of the nose 38, and the wrap tape 39 is fed between the upper and lower grooves of the sleeve 74 and the nose 38, so that the wrap tape 39 does not come off the nose 38.

Further, the guide roller 57 is attached to the arm 63 and supported by the tension of the wrap tape 39. The wrap tape 39 that has been wound around the supply reel 42 is wound up by the take-up reel 41 as described above, and finally the wrap tape 39 comes off the supply reel 42 and the tension of the wrap tape 39 decreases, so that the guide It becomes impossible to support the rollers 57, and the guide rollers 57 descend toward the lower end. As soon as the guide roller 57 is lowered, the micro switch 67
is activated, the drive motor 76 is stopped, and the wrap tape 39 is
stop running.

On the other hand, as shown in FIG. 5, the supply reel 42 is braked by the frictional force of the thrust washer 89, applying tension to the wrap tape 39. Thrust washer 8
The frictional force 9 is provided by adjusting the presser foot 93 to deflect the compression spring 92, and by the spring force thereof. If the tension roller 69 is kept pressed against the rubber ring 61 when the abrasive supply device 40 is stored for a long period of time, the rubber ring 61 will deform and the running of the wrap tape 39 will become unstable during processing. Insert a stopper into the hole drilled in the bracket 62.
] 103 to fix the tension roller 69 so that the tension roller 69 is in contact with the rubber ring 61 (see FIG. 7).

Structure of C-nose (processing tool) FIGS. 9 to 18 show examples of the structure of the nose 38 according to the embodiment of the present invention.

Figure 9 is a longitudinal section of the nose 38 portion during polishing, 1θ
The drawings show a cross section taken along line XX in FIG. 9, FIG. 11 shows a longitudinal section of only the nose 38, and FIG. 12 shows its right side. Figures 9 to 12
In the figure, 38a is a tape guide groove of the nose 38 formed along the running direction of the wrap tape 39, and 38b is a spherical portion (convex curved surface) at the tip of the nose 38. Also,
A cylindrical sleeve 74 is fitted at the groove 38a of the nose 38 to cover the groove 38a. wrap tape 3
9 is guided by the guide roller 58 and enters between the groove 38a on the lower side of the nose 38 and the sleeve 74, passes through the exposed spherical tip 38b of the nose 38, and returns between the groove 38a on the upper side of the nose 38 and the sleeve 74. Enter, guide roller 5
Guided by 9. In this way, the sleeve 74 or the groove 38a
, the wrap tape 39 is accurately guided and does not come off. In addition, the tip portion 3 of the nose 38
Since 8b is spherical, it hits work 1 at a point, and 1 of work 1
It becomes possible to polish the damaged parts.

The shape of the tip of the nose 38 is required to have high shape accuracy in order to apply pressure to the correct processing position, and in particular, in the embodiment of the present invention, highly accurate sphericity is required. However, in the integrally shaped nose 38 as shown in FIGS. 9 to 12, it is difficult to process the spherical surface of the tip portion 38b, and it is difficult to obtain a highly accurate spherical surface.

13 to 18 show an embodiment in which a separate steel ball 106 is attached to the tip of the nose 38 to obtain a highly accurate spherical surface. Steel balls 106 having the required high sphericity are easily available, and commercially available steel balls (eg, bearing balls) can also be used. This steel ball 106 is fixedly attached to the tip of the nose body 38c using an adhesive or the like, and tape guide grooves 106a are formed on the upper and lower surfaces of the nose body 38 and the steel ball 106. When the amount of machining of the work l is large, the amount of polishing is increased by using a steel ball 106 with a relatively large diameter as shown in the embodiments of FIGS. 13 to 16, and when the amount of machining is small such as a small diameter work. For this purpose, it is preferable to use a relatively small diameter steel ball 10fi as shown in FIGS. 17 and 18.

D. Processing principle 19 to 21 show the processing principle of the embodiment of the present invention.

As shown in FIG. 19, with the surface of the lap tape 39 coated with the abrasive material facing the workpiece 1, press the tip of the nose 38 against the part of the workpiece 1 to be polished with the lap tape 39 sandwiched between the workpieces 1 and 1. When the wrap tape 39 is rotated in the clockwise direction of the arrow and the wrap tape 39 is run upward, the part of the workpiece 1 that the nose 38 hits is polished. Since the abrasive material on the lap tape 39 can be applied uniformly, the problem of conventional floating abrasive grains does not occur, and the amount of polishing can be kept constant. In addition, new abrasive material is constantly supplied to the workpiece l during polishing by the running of the lap tape 39, so clogging of the abrasive material does not occur, and the machined surface is always polished with an ideal cutting edge, so the polishing The amount is stabilized and a highly accurate mirror finish can be obtained. In addition, since the tool (nose) 38 itself is not rotated, there is no problem caused by rotational wobbling of the tool, and since the tip of the nose 38 is made into a true spherical surface, the nose 38 is attached to the workpiece 1.
8 hits the spot, allowing for highly accurate local polishing in extremely small areas. Furthermore, since the constant pressure with which the nose 38 is pressed against the workpiece 1 is adjusted by the weight 33, 9. The workpiece 1 can be polished with an appropriate machining pressure, and the amount of machining can be stabilized.

Here, the amount of polishing performed by the lap tape 39 is:
As mentioned above, it is determined by the rotational speed of the workpiece 1, the traveling speed of the wrap tape 39, the type of abrasive material applied to the wrap tape 39, and the pressure and pressurization time with which the nose 38 is pressed against the workpiece 1.

Therefore, as shown in FIG. 20, the workpiece 1 is rotated at a constant speed v2, and the wrap tape 39 is rotated at a speed ■! If the nose 38 travels at a constant speed, the pressing force F that the nose 38 presses against the workpiece 1 is adjusted to a constant pressure by the weight 33, and the type of abrasive material in the wrap tape 20 is constant, then the nose 38 presses against the workpiece 1.
It can be seen that by adjusting and controlling the pressurizing time, it is possible to appropriately control the amount of polishing and obtain highly accurate mirror polishing. However, the minute protrusions 107 on the workpiece 1 generally vary in size, and their positions also vary.
As shown in Figure 1, the position and size of the protrusion 107 to be polished are measured in advance, and the workpiece 1 is moved to the measured position and the nose 38 is pressed against it to determine the size of the protrusion 1070. It is necessary to increase or decrease the pressing time depending on the situation. This movement of the workpiece 1 is achieved by controlling the rotation angle of the rotation table 11 with the drive motor 43, and the pressurization time is achieved by variable control of the rotation speed of the rotation table II. Furthermore, it has been confirmed through experiments that the amount of machining described above and the rotation speed are in an inversely proportional relationship.

E. Configuration of control device FIG. 22 shows an example of the circuit configuration of the control system according to the embodiment of the present invention.

In this figure, reference numeral 110 denotes a control computer, which controls processing according to the present invention according to the control procedure shown in FIG. 23, which is stored in advance in a memory 111. 112 is a work shaft motor driver (drive circuit) that drives and controls the drive motor 22 that rotates the work l; 113 is a tape feed motor driver that drives and controls the drive motor 76 that feeds the wrap tape 39; and 114 is a shaft that slides the nose 38 onto the slide shaft 32.
This is a nose feed motor driver that drives and controls the drive motor 48 that sends data via the motor driver 112.
114 control the rotation of the corresponding motors in accordance with command signals (control signals) from the control computer 110. Reference numeral 115 denotes a turning axis angle detector that manually inputs the output from the encoder 13 that detects the turning angle of the turning table 11 and sends turning axis angle data to the control computer +10, and 116 rotates (swivels) the turning table 11. This is a rotation axis motor driver that drives and controls the drive motor 43.

Reference numeral 117 denotes a cannibal program manual unit that manually generates a cannibal program as described below, which is supplied from the main computer 1ift. Reference numeral 119 is an FD driver that drives and controls a floppy disk (FD) 120.

Next, an example of the control operation of the embodiment of the present invention will be described with reference to the flowchart of FIG.

First, before partially modifying the workpiece 1, the control computer 110 inputs a correction program (cannibal program) from the cannibal program input section 117 and stores it in a predetermined area of the memory 11.1 (step SL). Next, the operator turns the handle 29 to align the center of curvature of the workpiece 1 with the center of rotation of the rotating table 11, but when the control computer 110 confirms this alignment (step S2), the control computer 110 controls the memory 111. A command is issued to the rotation axis motor driver 116 to operate the drive motor 43 based on the correction program stored in the correction program, and the rotation table 11 is rotated to the correction part of the workpiece 1 (step S3).
.

Next, the control computer 110 issues a command to the work shaft motor driver 112 to operate the drive motor 22,
While rotating the workpiece 1, a command is issued to the tape feed motor driver 113 to operate the drive motor 76 to run the wrap tape 39 (step S4).
.

Next, the control computer 110 issues a command to the nose feed motor driver 114 to operate the drive motor 48, and the nose 38 hits the workpiece 1 with the wrap tape 39 sandwiched therebetween and stops (step 55). Next, the control computer 110 gives a rotation speed command to the rotation axis motor driver 116 based on the correction program stored in the memory 111 to operate the motor 43, and transmits rotation angle data from the encoder 13 to the rotation angle detector 11.
5 (step 56).

Subsequently, the control computer +10 outputs a turning speed corresponding to the detected turning angle to the turning axis motor driver 116 based on the correction program stored in the memory 111, and controls the turning speed of the motor 43 (step S7).
). Step S6 above. The control operation in S7 is sequentially repeated until the detected value of the encoder 13 reaches a predetermined end angle stored in the correction program, and when the detected turning angle detected by the encoder 13 reaches the above-mentioned predetermined end angle (step s8), the control computer +10 issues a command to the nose feed motor driver 114 to operate the drive motor 48 to separate the wrap tape 39 from the workpiece 1.Step s9), the workpiece Φ mountain motor driver 11
2 and tape feed motor driver +13 to stop both drive motors 22 and 76, and finish the corrective polishing of one part (step S10).

When all of the data in the correction program is not completed, that is, when other parts of the work 1 are also to be corrected and polished, the process returns to step S3 described above and the processes from steps S3 to 510 are repeated until the correction program is completed (step Sll). .

F. Structure of processing amount measuring means By providing a non-contact measuring device to the apparatus according to the embodiment of the present invention shown in FIG. 1, processing amount measuring means (
The 24th point is that it can be easily used (shared) as a device).
As shown in the figure.

In FIG. 24, reference numeral 121 denotes a non-contact measuring device, and for example, a general non-contact measuring device such as a non-contact electric micrometer such as Magnescale, a laser range finder, an optical scale, etc. can be used. The mounting position of this non-contact measuring device 121 is on the slide shaft 32 which is displaced integrally with the nose 38.
It may be placed anywhere as long as the displacement can be measured; for example, it may be placed behind the slide shaft 32 as shown in this figure. 1
22 is a position-adjustable stand that fixes the non-contact measuring device 121 at a mounting position, and 123 is a measuring meter that can amplify and display the output signal of the non-contact measuring device 121. After the measurement data of the non-contact measuring device 121 is amplified, it is converted into a digital signal and sent to the control computer 110 in FIG. 22 for processing. Other components are the same as those in the embodiment shown in FIG. 1, so detailed explanation thereof will be omitted.

In the above configuration, the lap tape (tape-like abrasive member) 39 is pressed against the processing surface of the workpiece (workpiece) 1 for grinding and
The wrap tape 39 is removed from the above-mentioned nose (suppressing member) 38 to be polished, and the nose 38 is brought into direct contact with the work l as a measuring element of a processing amount measuring means.

After bringing the nose 38 into direct contact with the workpiece 1, the turning angle of the turning table 11 is set to the original position, the bearing box 31 is fixed with the lock screw 37, and the turning table 11 is rotated.

In this way, if the workpiece 1 is rotated after the nose 38 is brought into direct contact with the workpiece 1, the nose 38 will slide due to the pressing force of the weight 33! Since it is in contact with the workpiece 1 at a constant pressure through the 1ith 32, as shown in FIG.
A slide 11iII that is displaced to follow the shape and fine irregularities of the surface of the workpiece 1 and has a nose 38 attached thereto.
At the same time, I32 is also displaced together with nose 38.

The displacement of this slide @32 is measured at a predetermined pitch by a non-contact measuring device 121 and outputted to the control computer 110. The control computer 10 uses the measurement data of the measuring device 121 and the rotation table 11 obtained from the encoder 13.
After storing the turning angle data in memory II,
The difference (error) from the design data (ideal value) of the workpiece 1 is determined, and correction data consisting of the correction processing amount and its processing position is created.

In particular, in this embodiment, the slide shaft 32 is
The weight 33 applies an appropriate constant contact pressure, and the tip of the nose 38 is formed into a spherical shape for point contact, so it has extremely good followability and is able to contact fine particles on the surface of the workpiece 1. Changes in unevenness can also be measured extremely accurately using the non-contact measuring device 121, for example, in units of □1100Ii. In addition, in this embodiment, the suppression member, which is a tool, can also be used as a probe, so there is no need to use an expensive dedicated measuring device, and the workpiece
This has the advantage that there are no problems caused by set adjustment (setting deviation), and correction grinding and polishing can be performed immediately after measurement, which greatly shortens the processing time. moreover,
Since it is possible to fully automate everything from measurement to corrective processing, operational work is significantly reduced and manufacturing costs can be reduced.

G. Structure of Processing Data Creation Means i26 FIG. 26 shows an example of the structure of the processing data creation means for creating processing data (correction program) provided to the partial correction polishing apparatus as shown in FIG. In this figure, 131 is a measuring device that outputs an error curve (data) from measurement data and an ideal curve (data) to be described later, 132 is a floppy disk (FD) that provides the ideal curve to the measuring device 13;
33 is an automatic programmer that outputs machining data from an error curve from the measuring device 131 and a cutting amount curve (data) to be described later; 134 is a floppy disk that provides the cutting amount curve to the automatic programmer 133; 135 is an automatic programmer 13
This is a processing machine as shown in FIG. 1, which manually inputs the processing data obtained from Step 3 as a correction program and performs a partial correction polishing process.

The measuring device 131 includes, for example, a displacement measuring means such as the non-contact electric micrometer 121 shown in FIG. 24, and an arithmetic control means such as the control computer or main computer 118 shown in FIG. According to the processing procedure as shown in FIG. 29 stored in advance in a storage means such as the above, the measurement value of the workpiece 1 represented by the turning angle θ and the deviation from the spherical surface of the workpiece 1 as shown in FIG. 27(^),
The ideal curve (
Based on the deviation γ from the design curve), an error curve expressed using the γ-θ method as shown in FIG. 27(B) is calculated and output.

The automatic programmer 133 includes arithmetic control means such as the main computer 118 shown in FIG.
The error curve as shown in FIG. 27 CB supplied from 31 and the second
From the cutting amount curve as shown in Figure 7 (C), the 30th
Processing data as shown in FIG. 27 (DJ) is output according to the processing procedure shown in the figure.

FIG. 27(C) shows a cutting amount curve representing the relationship between the turning angle θ and the cutting amount when the turning table 11 is turned at a constant speed. When the turning angle θ is close to the drop (origin), the nose 38 is located near the center of the rotating workpiece 1, and the turning angle θ
As the rotation speed increases, the nose 38 moves relatively toward the outer circumference of the workpiece 1, so the circumferential speed of the rotating workpiece 1 decreases at the center, and if the rotation speed is constant, the rotation angle θ increases. Figure 27 (C) shows that the amount of processing decreases accordingly.
) is shown. Also, the amount of cutting decreases as the rotation speed increases, and increases as the rotation speed decreases, so see Figure 27 (C).
As shown by the broken line curve, the cutting amount is inversely proportional to the turning speed.

Therefore, the automatic programmer 133 compares the error curve and the cutting amount curve at a predetermined pitch (at the same turning angle), and calculates the turning speed for each turning angle during partial correction machining. For example, in a certain turning angle section of 0, the error is 5 μm and the turning speed is constant V.

Assuming that the amount of cutting is 1 μm, it is thought that the parts to be machined during machining are randomly scattered on the workpiece 1, so the machining data given to the machining machine 135 is as shown in FIG. This is an instruction to turn at a turning speed calculated between turning angles.

The processing machine 135 inputs the processing data as a correction program, and performs a partial correction polishing process on the workpiece 1 according to the control procedure shown in FIG. 31 or the control procedure shown in FIG. 23 described above.

Next, an example of the operation of the measuring device 131 described above will be described in detail with reference to the flowchart in FIG.

As shown in FIG. 24 above, a non-contact measuring device (e.g.
A non-contact electric micrometer) 121 is placed behind the slide shaft 32, the workpiece 1 is attached to the spindle 21,
By operating the handle 29, align the center of curvature of the workpiece 1 with the center of rotation of the turning table 11, remove the wrap tape 39 from the nose 38, bring the nose 38 closer to the workpiece 1 by operating the handle 29, and lock the bearing box 31 with the lock nut. Fix it at 37. Further, the weight 33 is selected to provide an appropriate contact pressure. After completing the above preparation work, the operator presses a measurement start button on the operation desk (not shown). By pressing this button, the control procedure shown in FIG. 29 is started.

First, in response to a measurement start instruction, the control computer 11
0 is the drive motor 4 via the rotation axis motor driver 116.
3 and set the rotation angle of the rotation table 11 to the origin O°. This origin position is detected by the origin switch 1B (see FIG. 1) (step 521).

Next, the control computer 110 starts the drive motor 48 via the nose feed motor driver 114 and moves the slide shaft 32 forward to bring the nose (hereinafter referred to as a contactor) 38 into direct contact with the workpiece 1 (step 522).
). Subsequently, the control computer 110 controls the slide shaft 3.
Set the current position of 2 to the drop (Step 523), output a drive signal to the rotation axis motor driver 116, rotate the rotation table 11 and the gear 12 of the table at a constant speed (Step 524), and set the pitch angle ( The non-contact measuring device 121 measures the position of the slide shaft 32 at
Step 5
25), the processes of steps S24 and S25 are repeated until the end angle of the turning table 11 is reached (step 526). The rotation angle of the rotation table 111 is detected by the encoder 13.

As a result, the data of the measured value curve as shown in FIG. Driver 11
output a command signal to 4 to reversely rotate the drive motor 48,
As a result, the slide ll1lb32 is moved back to separate the contactor 38 from the workpiece 1 (Step 527), and then the ideal curve (ideal value data) D2 of the floppy disk 132 is obtained from the above-mentioned measurement data DI stored in the memory 111.
Calculation is performed for each pitch angle of the turning angle θ by subtracting the value (Di-02) from the error value γ(θ) (step 52B).
, the calculation results are sequentially written to the floppy disk 112 as error curves (data) (step 529).

Next, an example of the operation of the automatic programmer 133 described above will be described in detail with reference to the flowchart in FIG.

First, the control computer 110 (or the main computer 118) reads an error curve (measurement data) from the floppy disk 112 via the FD driver 119, and stores it in the memory 111. Also, the cutting curve (cutting amount data) is read from the floppy disk 113,
The data is stored in the memory 111 (step 531).

Next, the above-mentioned cutting amount data (cutting curve) and measurement data (
Calculate the cutting time for each rotation angle from the error curve (step 532), calculate the rotation speed for each corresponding rotation angle from the reciprocal of the calculated cutting time (step 533), and save the calculation results to the floppy disk 120 as machining data. Store (step 534).

FIG. 31 shows an example of the operation of the processing machine 135 described above, but since it is almost the same as the control procedure shown in FIG. 23 described above, detailed explanation thereof will be omitted.

In the above-described embodiment of the present invention, when removing the protruding portion of the machined surface of the workpiece 1 by grinding and polishing, as shown in FIG. Although the speed (in this example, the turning speed) V2 of the workpiece 1 is controlled in inverse proportion to the amount of the wrap tape 39, the present invention is not limited to this. The speed v1 may be controlled in proportion to the amount of polishing (amount of grinding), or both controls may be combined.

H1 Composition of Pressure Means In the embodiment of the present invention, a weight 33 is used as a means for applying processing pressure in the direction of the workpiece to the tool of a polishing device equipped with an abrasive supply device, as shown in FIGS. 1 and 2. As shown in FIG.
The slide shaft 3 is statically supported by the static pressure air bearing 1.
A constant pressure force is applied to the nose (tool) 38 by the weight of the weight 33 via a wire 36 whose one end is connected to the nose (tool) 38. In this way, since the machining pressure is applied by the weight 33, there is no change in the machining pressure due to movement of the slide shaft 32. In addition, since the slide 4ilh32 is supported by static pressure, the nose 38 can be scraped smoothly.
Trace the shape of the polished surface. Also, wrap tape 3
Since the pressing force of the workpiece 9 on the workpiece 1 is always constant, stable polishing can be performed.

Furthermore, as shown in FIG. 24, even when used as a polishing amount measuring means, very highly accurate measurement data can be obtained due to the same reason as described above using the pressurizing means.

It goes without saying that the present invention can also be applied to a grinding device.

[Effects of the Invention] As explained above, according to the present invention, a tool with a convex tip that is polished by pressing an abrasive tape on the processing surface of a workpiece is applied with a constant pressure in the direction of the workpiece using a weight or the like. Since the tool is pressurized, there is no change in machining pressure due to movement of the tool holding means (e.g. slide shaft), and the pressurizing force during machining is always constant, resulting in stable polishing and improved machining accuracy. It will be done. Further, by supporting the tool holding means under static pressure, the tool smoothly follows (traces) the shape of the tool machined surface, resulting in good micro-part correction polishing.

[Brief explanation of the drawing]

FIG. 1 is a front view showing an example of the overall configuration of a polishing device to which the present invention is applied, FIG. 2 is a plan view thereof, and FIG. 3 is a front view showing an example of the overall configuration of the abrasive supply device of FIG. 1. , Figure 4 is a right side view, Figure 5 is a front view, Figure 6 is a cross-sectional view taken along section line A-A in Figure 3, and Figure 7 is a cross-sectional view taken along section line B-8 in Figure 3. 8 is a sectional view along the line C-C in FIG. 3, and FIG. 9 is a sectional view along the nose (
Fig. 10 is a longitudinal cross-sectional view showing an example of the configuration of the polishing tool (polishing tool);
Fig. 1 is a vertical sectional view showing the configuration of only the nose in Fig. 9, Fig. 12 is a right side view of the nose in Fig. 11, Fig. 13 is a longitudinal sectional view showing another embodiment of the nose, and Fig. 14. is a right side view of the nose in FIG. 13, FIG. 15 is a vertical sectional view showing a modified example of the nose, FIG. 16 is a right side view of the nose in FIG. 15, and FIG. 17 is a further modified example of the nose. FIG. 18 is a right side view of the nose in FIG. 17, FIG. 19 is a perspective view of main parts showing the processing principle of the embodiment of the present invention, and FIG. 20 is the processing principle of the embodiment of the present invention. The schematic shown in FIG. 21 is a sectional view taken along the Y-Y cutting line in FIG. 19, FIG. 22 is a block diagram showing an example of the circuit configuration of the control system according to the embodiment of the present invention, and FIG. 23 is a processing diagram of the embodiment of the present invention. FIG. 24 is a front view showing the configuration of the embodiment of the present invention when the polishing device is also used as a polishing amount measuring means, and FIG. 25 is a flowchart showing an example of the control operation when
4 is a horizontal cross-sectional view showing the nose portion during measurement, FIG. 26 is a block diagram showing the configuration of the processing data creation system according to the embodiment of the present invention, and FIGS. 27 (8) to (D) are shown in FIG. 28 is an explanatory diagram showing a specific example of the processed data in FIG. 26; FIG. 29 is a flowchart showing an example of the operation of the measuring instrument in FIG. 26; 30. FIG. 31 is a flowchart showing an example of the operation of the automatic programmer shown in FIG. 26, FIG. 31 is a flowchart showing an example of the operation of the processing machine shown in FIG. 26, and FIG. 32 is a front view of main parts showing the configuration of the conventional device. DESCRIPTION OF SYMBOLS 1... Workpiece, 11... Turning table, 13... Encoder, 16... Origin switch, 20... Slider, 21... Spindle, 22... Work drive motor, 23... Handle, 24... Lock screw, 27... Slider, 28... Feed screw, 29... Handle, 30... Bearing box, 32... Slide shaft, 33... Weight, 37 ... lock screw, 38 ... nose (contact), 39 ... wrap tape, 40 ... abrasive supply device, 41 ... supply reel, 42 ... take-up reel, 43 ...・Swivel table drive motor, 46...Scale, 47...Origin switch, 48...Slide Ith drive motor, 55-60...
・Guide roller, 61... Rubber ring, 63... Arm, 67... Micro switch, 69... Tension roller, 70... Tension arm, 76... Reel drive motor, 83... Thrust washer, 89... Thrust washer, 106... Steel ball, 110... Control computer, +11... Memory, 112-114. 116... Motor driver, 117
...Canada Program Human Resources Department, 121...Non-contact measuring instrument, 131...Measuring instrument, 133...Automatic programmer, 135...Processing machine. Kuchiguchi Yasu 1 Toro upper work rotation direction Hitoshi Hitoshi Imari's processing source I! Nopuko Oyazu t9th drawing - Gokaichi and Ikuri's Karoe "Rinoya Ginya no Kami m. Figure 21 1 Wharf Mostly colored people Rinoka Ede! Figure 28 shows the evening meat port Figure 28 Automatic programmer addition machine Figure 31

Claims (1)

[Scope of Claims] 1) A tool with a convex tip that presses an abrasive tape on the surface of a workpiece to polish it, a tool holding means that holds the tool so that it can slide freely in a predetermined direction, and the tool A polishing apparatus comprising: a pressurizing force generating means for pressurizing the tool at a constant pressure in the direction of the workpiece via a holding means. 2) In the apparatus according to claim 1, the tool holding means is a slide shaft supported by an aerostatic bearing, and the pressing force generating means is connected to the slide shaft via a wire to hold the workpiece. A polishing device characterized by comprising a weight that applies pressure in a direction. 3) In the apparatus according to claim 1 or 2, the tool holding means includes an abrasive supply device that feeds the abrasive tape between the workpiece and the tool. A polishing device characterized in that it is held together with the polishing device.