JPH0543453B2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a polishing device, and in particular, a polishing device suitable for partial correction polishing that polishes the surface while removing local shape errors when processing an optical mirror surface. Regarding.

[Conventional technology] In order to obtain a smooth optical mirror surface by processing a workpiece such as a lens into the designed surface shape with high precision,
A surface created by grinding or the like is finished by uniform polishing, and after shape measurement, a partial correction polishing process is required in which the surface is polished while removing local shape errors based on the measurement results. A conventional device used for this partial correction polishing process is shown in FIG.

In this figure, 1 is a rotating work such as a lens, 2 is a felt attached to the tip of a spindle 4 that is rotated by a drive motor 3, and the spindle 4 is supported by a bracket 5 via a ball bearing. It is attached to a slide shaft 6 that is movable in the direction of the workpiece 1.

In the conventional device, with the above configuration, the felt 2 coated with an abrasive material is pressed against the rotated workpiece 1, and the felt 2 is rotated by the drive motor 3.
Work 1 was being partially corrected and polished.

[Problems to be Solved by the Invention] However, in the conventional device as described above, since a ball bearing is used to support the spindle 4,
High-precision rotation cannot be obtained, and as a result, the whirling (rotational wobbling) of the felt 2 increases, and the area that contacts the machining surface of the workpiece 1 becomes wider, making it difficult to locally polish small areas. Furthermore, since the portion of the felt 2 that contacts the workpiece 1 is always at the same position, there is a problem that the abrasive material applied to the felt 2 becomes clogged and the amount of polishing of the workpiece 1 is unstable. In addition to the felt mentioned above, Bakelite and cast iron are used as tools.
As abrasives, mixtures of diamond paste and grease or diamonds and oil (or water) are used, but the problem with both abrasive materials is that the amount of polishing cannot be maintained at a constant level due to floating abrasive particles. There is.

SUMMARY OF THE INVENTION In view of the above-mentioned problems, it is an object of the present invention to provide a polishing apparatus that can accurately perform corrective polishing of minute parts and stabilize the amount of polishing.

[Means for Solving the Problems] In order to achieve the above object, the present invention provides a polishing device that polishes a workpiece by pressing a tape with an abrasive material against a workpiece surface that moves in relative rotation and rotation. a rod-shaped nose member having a predetermined spherical surface on a portion facing the machined surface, a steel ball having a radius smaller than the radius of curvature of the machined surface is fixed to the tip of the nose member, and one end side of the nose member A groove and a roller are provided at the other end to guide the tape, and the tape is guided by the roller, and the tape is wound along the tip of the steel ball, so that the tape is wound along the surface of the steel ball. The method is characterized in that a tape running along the surface is pressed against the surface to be processed for polishing.

[Function] In the present invention, a steel ball harder than the nose member is attached to the tip of the nose member, and an abrasive tape is wrapped around the tip of the steel ball, so that the nose member is not damaged by the running of the tape. It is possible to prevent abrasion of the tip portion, and this also prevents changes in the radius of curvature of the tape wrapping, thereby preventing changes in polishing accuracy. Further, in the present invention, since the radius of the steel ball is smaller than the radius of curvature of the machined surface of the workpiece, the tape can be pressed at a point on the machined surface to be corrected (point contact). The tape is made into a rod shape and the tape is guided by rollers and grooves, which increases the stability of tape running and prevents wobbling when the tape runs.
The amount of polishing becomes stable. Therefore, according to the present invention, corrective polishing of minute parts can be stably achieved with extremely high precision.

Embodiments Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

A. Overall configuration of polishing apparatus FIGS. 1 and 2 show the overall configuration of an embodiment of a polishing apparatus to which the present invention is applied. In Fig. 1 showing the overall appearance of the device from the front, 10 is a surface plate;
12 is a large-diameter gear fixed above the swivel table 11, and 13 is a small-diameter gear 14 that meshes with the gear 12 to rotate the swivel table 11. an encoder (angle detector) that reads the rotation angle of the rotation table 11 (hereinafter referred to as rotation angle);
A bracket 15 fixes the encoder 13 on the surface plate 10. 16 is an origin switch for detecting the origin of the rotation angle of the turning table 11; 17 is a support for fixing the origin switch 16 on the surface plate 10;

18 is a base on the work side fixed to the rotary gear 12 of the turning table 11, 19 is a linear guardrail fixed to the base 18, 20 is a slider mounted on the linear guardrail 19 and can slide on the linear guardrail 19, and 21 is a slider. The spindle 20 is attached to the top of the spindle 20, and the workpiece 1 is attached to the tip of the spindle 21 via the spindle 21.
This is a work drive motor that rotates the workpiece. 23 is a workpiece feed handle for moving the slider 20 to align the center of curvature of the workpiece 1 with the center of rotation of the turning table 11; and 24 is a lock screw for stopping the movement of the slider 20.

25 is a base on the tool side fixed to the surface plate 10;
6 is a linear guardrail fixed to the base 25,
27 is a slider mounted on the linear guard rail 26, 28 is a feed screw that slides the slider 27 straight in the horizontal direction, 29 is a handle attached to the feed screw 28, and 30 is a support for the feed screw 28 on the base 25. A bearing, 31 is a bearing box fixed to the slider 27, 32 is an air slide shaft that is supported by the bearing box 31 and slides in the horizontal direction, and 33 is a weight that applies a load to the slide shaft 32. The weight 33 is fixed to a pin 34 protruding from the end of the slide shaft 32, and attached to the lower end of a wire 36 wound around a pulley 35 attached to the bearing box 31, and uses its own weight to move the slide shaft 32 to the workpiece. It acts to press with a constant pressure in the direction of 1. 37 is slider 2
This is a lock screw that stops the movement of 7.

38 is attached to the tip of the slide shaft 32,
It is a tool with a spherical tip (hereinafter referred to as the nose) that presses the lap tape 39 against the workpiece 1. An abrasive material is uniformly applied and fixed on one surface of the lap tape 39 on the workpiece side, and as the tape 39 moves, the workpiece 1 Scrape off any small protrusions remaining on the surface using a uniform abrasive to polish it to a mirror finish. An abrasive supply device 40 supplies the wrap tape 39 between the work 1 and the nose 38, and has a supply reel 41 for feeding out the tape and a take-up reel 42 for winding the tape.

Next, in FIG. 2 showing the overall appearance of the device from above, 43 is a turning table drive motor that turns the turning table 11, 44 is a feed screw that slides the slider 27, and this feed screw 44
A handle 29 is attached to the handle. 45 is a bearing that supports the feed screw 44. 46 is a scale attached to the base 25, 47 is a scale 46
48 is a slide shaft drive motor that slides the slide shaft 32;
49 is a motor bracket fixed to the bearing box 31;
50 is a feed screw, and 51 is a stopper attached to the feed screw 50.

In the above configuration, the workpieces 1 are of various sizes and can be freely attached to and detached from the spindle 21. When starting work, the worker (operator) turns the right handle 23 in this figure and reads the value on the scale 46 while moving the slider 20.
Move the slider to a position that matches the size of the workpiece 1, and tighten the lock screw 24 to fix the movement of the slider 20. Next, the operator
Turn the abrasive supply device (tape feed device) 40
Slide the slider 27 until the nose 38 attached to the
to fix the slider 27.

Next, the worker presses the start button (not shown)
When pressed down, the drive motor 48 is started, rotates the feed screw 50, and slides the slide shaft 32 in the direction of the workpiece 1. At this time, by using an aerostatic bearing as the bearing box 31, the running (movement) of the slide shaft 32 can be controlled with high precision. In this way, the nose 38 attached to the abrasive supply device 40 fixed to the slide shaft 32 is attached to the wrap tape 39.
Sandwich it in between and hit it against work 1. At this time,
The abrasive coated surface of the latch tape 39 hits the workpiece 1. Further, since the weight 33 acts on the slide shaft 32, the nose 38 is pressed against the workpiece 1 with a constant pressure.

Next, the drive motor 22 is started to rotate the workpiece 1, and at the same time, the lap tape 39 is tensioned approximately vertically upward along the curved surface of the tip of the nose 38 by the drive motor, which will be described later, to polish the lap tape 39. Only the portion where the tip of the nose 38 and the workpiece 1 are in contact with the material is polished.

At this time, the amount of polishing with the lap tape 39 depends on the force with which the nose 38 presses the workpiece 1, the pressurizing time, the rotational speed of the workpiece 1, the running speed of the lap tape 39, and the type of abrasive material applied to the lap tape 39. It changes over time. Nose 38 of the work 1
The force F applied by can be adjusted by the weight W of the weight 33. Further, by changing the speed of the drive motor 43, the pressurizing time T during which the nose 38 is in contact with a certain angle of the workpiece 1 via the wrap tape 39 can be adjusted. Further, in order to partially polish the workpiece 1, the drive motor 43 is driven to rotate the rotary table 11 at a relatively high speed to a position (swivel angle) where the nose 38 touches the portion of the workpiece 1 to be polished. The turning angle at this time is encoder 1
Read with 3. Further, by using an aerostatic bearing for the bearing of the turning table 11, highly accurate rotation control can be obtained.

B. Configuration of Abrasive Supply Device FIGS. 3 to 8 show the configuration of an embodiment of the abrasive supply device 40 to which the present invention is applied, in which FIG. 3 is a front view, FIG. 4 is a right side view, Figure 5 is a plan view, Figure 6
The figure shows the A-A cross section in Fig. 3, and Fig. 7 shows the B-A cross section in Fig. 3.
Section B and FIG. 8 show the section CC in FIG. 3.

In FIG. 3, reference numerals 55 to 60 indicate guide rollers, and the wrap tape 39 supplied from the supply reel 41 is wound and fed in this order around the guide rollers 55 to 60 and a rotationally driven rubber ring 61, and finally is wound up. It is wound up with a ream 42. Guide roller 55,5
6, 58, 60 are roller shafts 55a, 56a, 58
The guide roller 57 is rotatably fixed to the bracket 62 via the arms 63a and 60a.
It is supported so that it can move by its own weight around a support shaft 64 from the position shown by the solid line in the figure to the position shown by the broken line in this figure, and its range of movement upward and downward is restricted by upper and lower stoppers 65 and 66. . When there is almost no wrap tape 39 left on the supply reel 41 or it comes off the guide rollers, etc.
As the tension of the wrap tape 39 decreases, the guide roller 57 immediately descends due to its own weight, and the micro switch 67 detects the descent of the guide roller 57 with the rod 68.
Detected through.

69 is a tension roller that applies appropriate tension to the wrap tape 39, and 70 is a tension roller 6.
9 is a tension arm that supports the tension arm 70; 71 is a tension spring that pulls the tension arm 70; 72 is a support shaft that rotatably supports the tension arm 70; 73 is a tension arm that supports the tension arm 70;
is a spring support shaft of the tension spring 71. The tension arm 70 is biased by a tension spring 71 to press the tension roller 69 against the rubber ring 61 and apply appropriate tension to the wrap tape 39 running between the tension roller 69 and the rubber ring 61.

Numeral 74 is a sleeve that prevents the wrap tape 39 from coming off the nose 38. The wrap tape 39 passes through the inside of the sleeve 74, turns over at the tip of the nose 38, and passes through the inside of the sleeve 74 again to the guide roller 59. 75 is a belt that transmits rotational force to the take-up reel 42.

Next, in FIG. 4, 76 is the take-up reel 42.
and a reel drive motor 77 that drives the rubber ring 61.
A and 77b are a pair of bevel gears that transmit the rotation of the drive motor 76 to the pulley shaft 78, 79a and 79b are bearings for the pulley shaft 78, and the above-mentioned rubber ring 61 is fixed to the pulley shaft 78. 80 is a pulley shaft on the driven side, and the driving force is transmitted from the pulley shaft 78 on the driving side via the belt 75. 81
is the bearing of the pulley shaft 80, 82 is the pulley shaft 80
83 is a thrust washer arranged on both sides of the take-up reel 42 , 84 is a bearing of the take-up reel 42 , 85 is a presser washer for the take-up reel 42 , 86 is a compression spring, and 87 is a thrust washer provided on both sides of the take-up reel 42 . This is a presser screw that fixes the take-up reel 42 to the pulley shaft 80.

In FIG. 5, 88 is a support shaft of the supply reel 42, which is fixed to the bracket 62. 89～
The members 93 are used for attaching and detaching the supply reel 42, and 89 is a thrust washer, 90 is a bearing, 91 is a presser washer, 92 is a compression spring, and 93 is a presser screw.

FIG. 6 shows the structure near the arm 63, where 94 is a bearing provided on the roller shaft 57a of the guide roller 57, and 95 is a retaining ring that prevents the guide roller 57 from falling off. A groove portion (guide groove) 57b for guiding the wrap tape 39 is provided on the surface.
is formed. A bearing 96 rotatably supports the arm 63 to which the guide roller 57 is attached, and is attached to the support shaft 64 and prevented from slipping off by a retaining ring 97.

FIG. 7 shows the structure near the tension arm 70, where 98 is a retaining ring attached to the support shaft 72, 99 is a compression spring attached to the tension arm 70, 100 is a retaining ring for the compression spring 99, and 101 is a retaining ring attached to the tension arm 70. 102 is a retaining ring of the tension roller 69, 102 is a retaining pin of the tension roller 69, and 103 is a stopper shaft.

Further, FIG. 8 shows the structure in the vicinity of the guide roller 60. Here, 104 is the bearing of the guide roller 60, 1
05 is a retaining ring, and the guide roller 60 is the roller shaft 6.
It is rotatably fixed to the bracket 62 by 0a. Wrap tape 39 is attached to the circumferential surface of the guide roller 60.
A groove portion (guide groove) 60b is formed to guide the. Other fixed guide rollers 55 shown in FIG.
56, 58, and 59 also have substantially the same structure as the guide roller 60 shown in FIG.

As shown in FIGS. 3 and 4, the abrasive supply device (tape feeding device) 40 has a bracket 62 attached to the slide shaft 32, and moves integrally with the nose 38 as the slide shaft 32 slides.
Wrap tape 39 wrapped around supply reel 42
Guide rollers 55, 56, 57, 58, nose 3
8, the guide rollers 59 and 60 in that order,
It is sandwiched between a rubber ring 61 attached to a pulley shaft 78 and a tension roller 69, and wound around a rotating take-up reel 14. At this time, the pulley shaft 78
is rotated by a drive motor 76 via gears 77a and 78b, causing the rubber ring 61 to rotate. The rotational speed of the drive motor 76 can be changed arbitrarily, thereby making it possible to vary the running speed of the wrap tape 39.

When the pulley shaft 78 rotates, the pulley shaft 80 rotates via the belt 75, and the rotated pulley shaft 80 rotates the take-up reel 41 by the frictional force of the thrust washer 83. The friction force of the thrust washer 83 can be adjusted by adjusting the position of the cap screw 87, and the compression spring 80 is bent by the cap screw 87.
A frictional force of the thrust washer 83 is generated by the urging force of the thrust washer 83.

Wrap tape 39 wound on take-up reel 41
As the take-up diameter gradually increases, the take-up speed becomes faster than the speed of the tape being run by the rubber ring 61, so the pulley shaft 80 and take-up reel 41 are forced to slide through the thrust washer 83. Thus, the running speed of the lap tape 39 is always kept constant. Further, the force with which the tension roller 69 presses against the rubber ring 61 is exerted by a tension spring 71, and the pressing force can be changed by changing the position of the hole in the tension arm 70 through which the tension spring 71 is pulled.

Wrap tape 39 is attached to the nose 38 as described below.
A tape guide groove is cut to prevent the tape from coming off, and the tip of the nose 38 is machined into a spherical shape to enable polishing of minute parts of the workpiece 1.
It is designed to match workpiece 1 at a point. Further, a cylindrical sleeve 74 is fitted around the outer periphery of the nose 38, and the wrap tape 39 is fed through between the upper and lower grooves of the sleeve 74 and the nose 38, so that the wrap tape 39 does not come off the nose 38.

Further, the guide roller 57 is attached to the arm 63 and supported by the tension of the wrap tape 39. The wrap tape 39 wound around the supply reel 42 is wound up by the take-up reel 41 as described above, and finally the wrap tape 39 is removed from the supply reel 42 and the tension of the wrap tape 39 is reduced, so that the guide roller 57 can no longer be supported, and the guide roller 57 descends toward the lower end. Immediately after the guide roller 57 is lowered, the micro switch 67 is activated to stop the drive motor 76 and stop the lap tape 39 from running.

On the other hand, the supply reel 42, as shown in FIG.
A brake is applied by the frictional force of the thrust washer 89, and tension is applied to the wrap tape 39. The friction force of the thrust washer 89 is the cap screw 9
3 to deflect the compression spring 92, and the spring force is applied. When storing the abrasive material supplying device 40 for a long period of time, the tension roller 69 is attached to the rubber ring 6.
1, the rubber ring 61 will deform and the running of the wrap tape 39 will become unstable during machining, so insert the stopper shaft 103 into the hole drilled in the bracket 62 and fix the tension roller 69. The tension roller 69 is separated from the rubber ring 61 (see FIG. 7).

C. Configuration of the nose (processing tool) Figures 9 to 18 show the nose 3 of the embodiment of the present invention.
An example of the configuration of No. 8 is shown below.

FIG. 9 shows a longitudinal section of the nose 38 during polishing, FIG. 10 shows a section taken along the line XX in FIG. 9, FIG. 11 shows a longitudinal section of only the nose 38, and FIG. 12 shows its right side. 9 to 12, 38a is a tape guide groove of the nose 38 formed along the running direction of the wrap tape 39, and 38b is a spherical portion (convex curved surface) at the tip of the nose 38. Furthermore, a cylindrical sleeve 74 that covers the groove 38a of the nose 38 is fitted at the position of the groove 38a. The wrap tape 39 is guided by the guide rollers 58 and enters between the groove 38a on the lower side of the nose 38 and the sleeve 74, passes through the exposed spherical tip 38b of the nose 38, and passes through the groove 38a on the upper side of the nose 38 and the sleeve 74.
and is guided by the guide rollers 59. In this way, since the sleeve 74 covers the groove 38a, the wrap tape 39 is accurately guided and does not come off. Further, since the tip portion 38b of the nose 38 is spherical, it makes contact with the workpiece 1 at a point, making it possible to polish a minute portion of the workpiece 1.

The shape of the tip of the nose 38 is required to have high shape accuracy in order to apply pressure to the correct processing position, and particularly in the embodiment of the present invention, highly accurate sphericity is required. However, in the integrally shaped nose 38 as shown in FIGS. 9 to 12, it is difficult to process the spherical surface of the tip portion 38b, and it is difficult to obtain a highly accurate spherical surface.

13 to 18 show an embodiment in which a separate steel ball 106 is attached to the tip of the nose 38 to obtain a highly accurate spherical surface. Steel balls 106 having the required high sphericity are easily available, and commercially available steel balls (eg, bearing balls) can also be used. This steel ball 106 is fixedly attached to the tip of the nose body 38c using an adhesive or the like, and tape guide grooves 106a are formed on the upper and lower surfaces of the nose body 38 and the steel ball 106. When the workpiece 1 has a large amount of machining, the amount of polishing is increased by using a steel ball 106 with a relatively large diameter as shown in the embodiments shown in FIGS. 13 to 16, and when the amount of machining is small, such as a small diameter workpiece For this purpose, it is preferable to use a steel ball 106 having a relatively small diameter as shown in FIGS. 17 and 18.

D Processing Principle Figures 19 to 21 show the processing principle of the embodiment of the present invention. As shown in Figure 19, wrap tape 3
With the surface coated with abrasive material No. 9 facing workpiece 1,
Press the tip of the nose 38 across the lap tape 39 to the part of work 1 that you want to polish, and then
When the lapping tape 39 is rotated in the clockwise direction of the arrow and the lap tape 39 is run upward, the part of the workpiece 1 that the nose 38 touches is polished. Since the abrasive material on the lap tape 39 can be applied uniformly, the problem of conventional floating abrasive grains does not occur, and the amount of polishing can be kept constant. In addition, since new abrasive material is always supplied to the workpiece 1 during polishing by the running of the lap tape 39, clogging of the abrasive material does not occur, and since the machined surface is always polished with an ideal cutting edge, the amount of polishing is reduced. is stabilized and a high-precision mirror finish can be obtained. In addition, since the tool (nose) 38 itself is not rotated, problems due to rotational vibration of the tool do not occur, and since the tip of the nose 38 is made into a true spherical surface, the nose 38 hits the workpiece 1 at a point, and only a very small area is affected. Polishing can be done with high precision. Further, since the constant pressure with which the nose 38 is pressed against the workpiece 1 is adjusted by the weight 33, the workpiece 1 can be polished with an optimum machining pressure, and the amount of machining can be stabilized.

Here, the amount of polishing performed by the lap tape 39 is determined by the number of revolutions of the workpiece 1, the running speed of the lap tape 39, the type of abrasive applied to the lap tape 39, and the force applied to the nose 38 to press the workpiece 1. Determined by pressure and pressurization time.

Therefore, as shown in FIG. 20, the workpiece 1 is rotated at a constant speed of _V2 , and the lap tape 39 is
Assuming that the nose 38 travels at a constant speed of V ₁ , the pressing force F that the nose 38 presses against the workpiece 1 is adjusted to a constant pressure by the weight 33, and the type of abrasive material in the lap tape 20 is constant, the nose 38 presses against the workpiece 1. It can be seen that by adjusting and controlling the pressurization time, it is possible to appropriately control the amount of polishing and obtain highly accurate mirror polishing. However, the minute protrusions 107 on the workpiece 1 generally vary in size, and their positions also vary as shown in FIG. Workpiece 1 is placed at the measured position.
It is necessary to press the nose 38 by moving the protrusion 107, and increase or decrease the pressing time depending on the size of the protrusion 107. This movement of the workpiece 1 is achieved by controlling the rotation angle of the rotation table 11 with the drive motor 43, and the pressurizing time is controlled by the rotation angle of the rotation table 11.
This is achieved by variable control of the rotation speed of the It has also been confirmed through experiments that the amount of machining and the rotation speed described above are inversely proportional.

E. Configuration of Control Device FIG. 22 shows an example of the circuit configuration of the control system according to the embodiment of the present invention. In this figure, 110 is a control computer, and the 23rd
Processing control according to the present invention is controlled according to the control procedure shown in the figure. 112 is a work shaft motor driver (drive circuit) that drives and controls the drive motor 22 that rotates the workpiece 1; 113 is a tape feed motor driver that drives and controls the drive motor 76 that sends the lap tape 39; These motor drivers 112 to 114 are connected to the control computer 1.
The rotation of the corresponding motor is controlled according to the 10 command signals (control signals). 115 is turning table 1
a rotation axis angle detector 116 that inputs the output from the encoder 13 that detects the rotation angle of 1 and sends rotation axis angle data to the control computer 110;
is a pivot shaft motor drive that drives and controls the drive motor 43 that rotates (swivels) the pivot table 11.

A machining program input section 117 inputs a machining program as described below supplied from the main computer 118, and the machining program consists of combination data of the rotation angle and rotation speed of the rotation table 11. 119 is a floppy disk (FD)
This is an FD driver that drives and controls 120.

Next, referring to the flowchart of FIG. 23,
An example of control operation according to an embodiment of the present invention will be explained.

First, before partially modifying the workpiece 1, the control computer 110 inputs a modification program (machining program) from the machining program input section 117 and stores it in a predetermined area of the memory 111 (step S1). Next, the operator turns the handle 29 to align the center of curvature of the workpiece 1 with the center of rotation of the rotating table 11. When the control computer 110 confirms this alignment (step S2), the control computer 110 then controls the memory 111. A command is issued to the rotation axis motor driver 116 to operate the drive motor 43 based on the correction program stored in the correction program, and the rotation table 11 is rotated to the correction part of the workpiece 1 (step S3).

Next, the control computer 110 issues a command to the work shaft motor driver 112 to drive the drive motor 2.
2 to rotate the workpiece 1,
In addition, a command is issued to the tape feed motor driver 113 to operate the drive motor 76, and
9 is run (step S4).

Next, the control computer 110 issues a command to the nose feed motor driver 114 to operate the drive motor 48, and the nose 38 is brought into contact with the workpiece 1 with the wrap tape 39 interposed therebetween and stopped (step S5). Subsequently, the control computer 110 gives a rotation speed command to the rotation axis motor driver 116 based on the correction program stored in the memory 111 to operate the motor 43, and transmits rotation angle data from the encoder 13 to the rotation angle detector 115. (Step S6).

Subsequently, the control computer 110 reads the memory 1
Based on the correction program stored in 11,
A turning speed corresponding to the detected turning angle is output to the turning axis motor driver 116 to control the turning speed of the motor 43 (step S7). Step S mentioned above
6. The control operation in S7 is sequentially repeated until the detected value of the encoder 13 reaches the predetermined end angle stored in the correction program, and the detected turning angle detected by the encoder 13 reaches the above-mentioned predetermined end angle. After that (step S8), the control computer 110 issues a command to the nose feed motor driver 114 to operate the drive motor 48 to separate the lap tape 39 from the workpiece 1 (step S9).
A command is issued to the work axis motor driver 112 and tape feed motor driver 113 to drive both drive motors 2.
2 and 76 are stopped, and the corrective polishing of one portion is completed (step S10).

When all of the correction program data is not completed, that is, when other parts of the workpiece 1 are also to be corrected and polished, return to step S3 described above and repeat step S3.
The processes from S3 to S10 are repeated until the modification program is completed (step S11).

F. Configuration of processing amount measuring means By providing a non-contact measuring device to the apparatus according to the embodiment of the present invention shown in Fig. 1, it can be easily used (commonly used) as a processing amount measuring means (device) before and after polishing. is shown in Fig. 24.

In FIG. 24, 121 is a non-contact measuring device, such as a non-contact electric micrometer, a laser range finder,
A general non-contact measuring device such as an optical scale can be used. The non-contact measuring device 121 may be installed at any position as long as it can measure the displacement of the slide shaft 32 that moves integrally with the nose 38, for example, it may be placed behind the slide shaft 32 as shown in this figure. 122 is a position-adjustable stand for fixing the non-contact measuring instrument 121 in the mounting position;
3 is a measurement meter capable of amplifying and displaying the output signal of the non-contact measuring device 121. Measurement data from the non-contact measuring device 121 is amplified and then converted into a digital signal, which is sent to the control computer 110 in FIG. 22 for processing. Other components are the same as those in the embodiment shown in FIG. 1, so detailed explanation thereof will be omitted.

In the above configuration, the wrap tape 39 is removed from the nose (pressing member) 38 that presses the lap tape (tape-like abrasive member) 39 against the processing surface of the workpiece (workpiece) 1 for grinding and polishing. It is brought into direct contact with the workpiece 1 as a measuring element of the processing amount measuring means.

After bringing the nose 38 into direct contact with the workpiece 1, the turning angle of the turning table 11 is set to the origin position,
The bearing box 31 is fixed with the lock screw 37, and the turning table 11 is rotated. In this way, if the workpiece 1 is rotated after the nose 38 is brought into direct contact with the workpiece 1, the nose 38 is brought into contact with the workpiece 1 with a constant pressure via the slide shaft 32 due to the pressing force of the weight 33. , as shown in FIG.
The slide shaft 3 is displaced to follow the shape and fine irregularities of the surface of the slide shaft 3, and the nose 38 is attached to the slide shaft 3.
2 is also displaced together with the nose 38 at the same time.

The displacement of this slide shaft 32 is measured using a non-contact measuring device 12.
1 at a predetermined pitch, and the control computer 1
Output to 10. The control computer 110 once stores the measurement data of the measuring device 121 and the rotation angle data of the rotation table 11 obtained from the encoder 13 in the memory 111, and then calculates the difference (error) between the design data (ideal value) of the workpiece 1 and the rotation angle data of the rotation table 11 obtained from the encoder 13. , and create correction data consisting of the correction machining amount and its machining position.

In particular, in this embodiment, the slide shaft 32 is supported by an air bearing in the bearing box 31, an appropriate constant contact pressure is applied by the weight 33, and the tip of the nose 38 is formed into a spherical shape for point contact. The non-contact measuring device 121 has extremely good followability, and even minute changes in unevenness on the surface of the workpiece 1 can be detected, for example, from 5/100 to 5/100.
Extremely precise measurements can be made in units of 2/100 μm. In addition, in this embodiment, the pressing member, which is a tool, can also be used as a probe, so
There is no need to use an expensive dedicated measuring device, there are no problems caused by setting adjustment of the workpiece 1 (setting deviation), and correction grinding and polishing can be performed immediately after measurement, which greatly shortens the processing time. Become. Furthermore, since it is possible to fully automate everything from measurement to correction processing, operational work is significantly reduced, and manufacturing costs can be reduced.

G. Configuration of Machining Data Creation Means FIG. 26 shows an example of the configuration of a machining data creation means for creating machining data (correction program) provided to the partial correction polishing apparatus as shown in FIG. In this figure, 131 is a measuring device that outputs an error curve (data) from measurement data and an ideal curve (data) to be described later, and 132 is a measuring device 131 that outputs the ideal curve.
133 is an automatic programmer that outputs machining data from the error curve from the measuring device 131 and a cutting amount curve (data) to be described later, and 134 is a floppy disk (FD) that provides the cutting amount curve to the automatic programmer 133. The Tuppee disk 135 is a processing machine as shown in FIG. 1 which inputs machining data obtained from the automatic programmer 133 as a correction program and performs a partial correction polishing process.

The measuring device 131 includes a displacement measuring means such as the non-contact electric micrometer 121 shown in FIG.
It consists of arithmetic control means such as the control computer or main computer 118 shown in FIG.
According to the processing procedure shown in FIG. 29, which is stored in advance in a storage means such as the memory 111 shown in FIG. From the deviation γ between the measured value of No. 1 and the ideal curve (design curve) stored in the floppy disk 132, an error curve expressed in the γ-θ system as shown in FIG. 27B is calculated and output.

The automatic programmer 133 includes arithmetic and control means such as the main computer 118 shown in FIG.
From the cutting amount curve as shown in FIG. 27C stored in 4, machining data as shown in FIG. 27D is outputted according to the processing procedure shown in FIG.

FIG. 27C shows a cutting amount curve representing the relationship between the turning angle θ and the cutting amount when the turning table 11 is turned at a constant speed. When the turning angle θ is close to zero (origin), the nose 38 is located near the center of the rotating work 1, and as the turning angle θ increases, the nose 38 moves relatively toward the outer circumference of the work 1. Therefore, the peripheral speed of the rotating workpiece 1 decreases toward the center, and if the rotation speed is constant, the amount of machining decreases as the rotation angle θ increases.
shows. In addition, the cutting amount decreases as the rotation speed becomes faster, and increases as the rotation speed becomes slower.
As shown by the broken line curve in FIG. 7C, the amount of cutting is inversely proportional to the rotation speed.

Therefore, the automatic programmer 133 sets the error curve and the cutting amount curve at a predetermined pitch (at the same turning angle).
Compare and calculate the turning speed for each turning angle during partial correction machining. For example, at a certain turning angle θ _i , the error is 5 μm, and the cutting amount at a constant turning speed V ₀ is
Assuming that it is 1μm, the rotation speed V during machining is V=
It becomes V ₀ /5. In addition, since it is considered that the actual correction machining parts are randomly scattered on the workpiece 1, the machining data given to the machining machine 135 is
As shown in FIG. 8, the content is an instruction to turn at a calculated turning speed between certain turning angles.

The processing machine 135 inputs the processing data as a correction program, and executes the control procedure as shown in FIG.
Alternatively, partial correction polishing of the workpiece 1 is performed according to the control procedure as shown in FIG. 23 described above.

Next, an example of the operation of the measuring device 131 described above will be described in detail with reference to the flowchart of FIG.

As shown in FIG. 24 above, a non-contact measuring device (for example, a non-contact electric micrometer) 121 is placed behind the slide shaft 32, the work 1 is attached to the spindle 21, and the work 1 is moved by operating the handle 29. The center of curvature of the rotary table 11 is aligned with the center of rotation of the rotary table 11, the wrap tape 39 is removed from the nose 38, the nose 38 is moved closer to the workpiece 1 by operating the handle 29, and the bearing box 31 is fixed with the lock nut 37. Further, the weight 33 is selected to provide an appropriate contact pressure. After completing the above preparation work, the operator presses a measurement start button on the operation desk (not shown). By pressing this button, the control procedure shown in FIG. 29 is started.

First, in response to a measurement start instruction, the control computer 110 starts the drive motor 43 via the rotation axis motor driver 116, and sets the rotation angle of the rotation table 11 to the origin 0°. This origin position is detected by the origin switch 16 (see FIG. 1) (step S21).

Next, the control computer 110 controls the drive motor 48 via the nose feed motor driver 114.
is started, and the slide shaft 32 is advanced to bring the nose (hereinafter referred to as a contactor) 38 into direct contact with the workpiece 1 (step S22). Next, the control computer 110 sets the current position of the slide shaft 32 to zero (step S23), and outputs a drive signal to the rotation shaft motor driver 116 to rotate the rotation table 11 and the gear 12 of the table at a constant speed. (Step S24), the position of the slide shaft 32 is input from the non-contact measuring device 121 at every fixed pitch angle (swivel angle), and is sequentially stored in the memory 111 (Step S25). Processing turning table 11
Repeat until the end angle is reached (step S2
6). The rotation angle of the rotation table 111 is detected by the encoder 13.

As a result, data of a measured value curve as shown in FIG. 27A is stored in the memory 111. When the detected rotation angle reaches the predetermined end angle of the rotation table 111, the control computer 110 outputs a command signal to the nose feed motor driver 114 to reversely rotate the drive motor 48, thereby retracting the slide shaft 32 and making contact. The child 38 is separated from the workpiece 1 (step S27), and the value (D1-D2) obtained by subtracting the ideal curve (ideal value data) D2 of the floppy disk 132 from the above-mentioned measurement data D1 stored in the memory 111 is set as an error value. γ(θ) is calculated for each pitch angle of the turning angle θ (step S28), and the calculation results are sequentially written to the floppy disk 112 as an error curve (data) (step S29).

Next, an example of the operation of the automatic programmer 133 described above will be described in detail with reference to the flowchart shown in FIG.

First, the control computer 110 (or main computer 118)
The error curve (measurement data) is read from the floppy disk 112 via the floppy disk 112 and stored in the memory 111. Also, the cutting amount curve (cutting amount data) is read from the floppy disk 113, and the memory 11
1 (step S31).

Next, the cutting time for each turning angle is calculated from the above-mentioned cutting amount data (cutting amount curve) and measurement data (error curve) (step S32), and the turning speed for each corresponding turning angle is calculated from the reciprocal of the calculated cutting time. is calculated (step S33), and the calculation result is stored in the floppy disk 120 as processed data (step S34).

FIG. 31 shows an example of the operation of the processing machine 135 described above, but since it is almost the same as the control procedure shown in FIG. 23 described above, detailed explanation thereof will be omitted.

In addition, in the above-described embodiment of the present invention, when removing the protruding portion of the machined surface of the workpiece ₁ by grinding and polishing, as shown in FIG. Although the speed of the workpiece 1 (in this example, the rotation speed) _V2 is controlled in inverse proportion to the speed of the wrap tape ₃₉ , the present invention is not limited to this. V ₁ may be controlled in proportion to the amount of polishing (amount of grinding), or both controls may be combined.

H Composition of Pressure Means In the embodiment of the present invention, a weight 33 is used as a means for applying processing pressure in the direction of the workpiece to the tool of a polishing device equipped with an abrasive supply device, as shown in FIGS. 1 and 2. The slide shaft 32 to which the abrasive supply device 40 is attached is statically supported by the static air bearing of the bearing box 31, and the nose ( A constant pressure force is applied to the tool) 38. In this way, since the machining pressure is applied by the weight 33, there is no change in the machining pressure due to movement of the slide shaft 32. Further, since the slide shaft 32 is supported by static pressure, the nose 38 traces the shape of the polished surface of the workpiece 1 extremely smoothly. Further, since the pressing force of the lap tape 39 against the workpiece 1 is always constant, stable polishing can be performed.

Furthermore, as shown in FIG. 24, even when used as a polishing amount measuring means, extremely highly accurate measurement data can be obtained for the same reason as described above using the pressurizing means.

It goes without saying that the present invention can also be applied to a grinding device.

[Effects of the Invention] As explained above, according to the present invention, a steel ball harder than the nose member is attached to the tip of the nose member, and an abrasive tape is wrapped around the tip of the steel ball. Therefore, it is possible to prevent the distal end portion of the nose member from being worn out due to tape running, and this also prevents changes in the radius of curvature of the tape wrapping, thereby preventing changes in polishing accuracy.
Further, in the present invention, since the radius of the steel ball is smaller than the radius of curvature of the machined surface of the workpiece, the tape can be pressed at a point on the machined surface to be corrected (point contact). into a stick shape,
Since the tape is guided by rollers and grooves, the stability of the tape running is increased, the wobbling of the tape during running can be prevented, and the amount of polishing is stabilized.
Therefore, according to the present invention, there is an effect that corrective polishing of minute parts can be stably achieved with extremely high precision.

[Brief explanation of the drawing]

FIG. 1 is a front view showing an example of the overall configuration of a polishing device to which the present invention is applied, FIG. 2 is a plan view thereof, and FIG. 3 is a front view showing an example of the overall configuration of the polishing supply device of FIG. Fig. 4 is a right side view, Fig. 5 is a front view, Fig. 6 is a sectional view taken along the A-A section line in Fig. 3, and Fig. 7 is taken along the B-B section line in Fig. 3. 8 is a sectional view taken along the line C-C in FIG. 3, FIG. 9 is a vertical sectional view showing an example of the structure of the nose (polishing tool) in FIG. 1, and FIG. X in Figure 9
11 is a vertical sectional view showing only the configuration of the nose in FIG. 9, FIG. 12 is a right side view of the nose in FIG. 14 is a right side view of the nose shown in FIG. 13, FIG. 15 is a vertical sectional view showing a modified example of the nose, FIG. 16 is a right side view of the nose shown in FIG. 15, FIG. 17 is a longitudinal sectional view showing still another modified example of the nose, FIG. 18 is a right side view of the nose shown in FIG. 17, and FIG. Figure 20 is a schematic diagram showing the processing principle of the embodiment of the present invention, and Figure 21 is the Y-Y diagram in Figure 19.
22 is a block diagram showing an example of a circuit configuration of a control system according to an embodiment of the present invention; FIG. 23 is a flowchart showing an example of control operation during processing according to an embodiment of the present invention; FIG. 24 is a sectional view taken along the cutting line; 25 is a horizontal sectional view showing the nose portion during measurement in FIG. 24, and FIG. 26 is a machining A block diagram showing the configuration of the data creation system according to the embodiment of the present invention, FIGS. 27A to 27D are diagrams showing the characteristics of output data in the embodiment of FIG. 26, and FIG. An explanatory diagram showing an example, FIG. 29 is a flowchart showing an example of the operation of the measuring instrument shown in FIG. 26, FIG. 30 is a flowchart showing an example of the operation of the automatic programmer shown in FIG.
FIG. 6 is a flowchart showing an example of the operation of the processing machine, and FIG. 32 is a front view of main parts showing the configuration of the conventional device. 1...Workpiece, 11...Turning table, 13...Encoder, 16...Origin switch, 20...Slider,
21...Spindle, 22...Work drive motor, 2
3... Handle, 24... Lock screw, 27... Slider, 28... Feed screw, 29... Handle, 30... Bearing box, 32... Slide shaft, 33... Weight, 37...
Lock screw, 38... Nose (contact), 39... Wrap tape, 40... Abrasive material supply device, 41... Supply reel, 42... Take-up reel, 43... Swivel table drive motor, 46... Scale, 47... Origin switch, 48 ...Slide shaft drive motor, 55-60...
Guide roller, 61...Rubber ring, 63...Arm, 67
...Micro switch, 69...Tension roller, 7
0... Tension arm, 76... Reel drive motor, 83... Thrust washer, 89... Thrust washer, 106... Steel ball, 110... Control computer, 111... Memory, 112 to 114, 116
...Motor driver, 117...Machining program input section, 121...Non-contact measuring instrument, 131...Measuring instrument, 1
33...Automatic programmer, 135...Processing machine.

Claims (1)

[Scope of Claims] 1. A polishing device for polishing a workpiece by pressing a tape with an abrasive material against a workpiece surface that rotates and rotates relative to each other, comprising: a predetermined spherical surface provided in a portion facing the workpiece surface; A rod-shaped nose member is provided, a steel ball having a radius of curvature smaller than the radius of curvature of the machined surface is fixed to the tip of the nose member, and a groove that receives a pressing force from one end of the nose member and guides the tape at the other end. and a roller is provided, the tape is guided by the roller, the tape is wound along the tip of the steel ball, and the tape running along the surface of the steel ball is pressed against the processed surface and polished. A polishing device characterized by: