JPH0517151Y2 - - Google Patents

Info

Publication number
JPH0517151Y2
JPH0517151Y2 JP3670188U JP3670188U JPH0517151Y2 JP H0517151 Y2 JPH0517151 Y2 JP H0517151Y2 JP 3670188 U JP3670188 U JP 3670188U JP 3670188 U JP3670188 U JP 3670188U JP H0517151 Y2 JPH0517151 Y2 JP H0517151Y2
Authority
JP
Japan
Prior art keywords
plasma
plasma processing
hollow tube
processing apparatus
honeycomb
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3670188U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01139830U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3670188U priority Critical patent/JPH0517151Y2/ja
Publication of JPH01139830U publication Critical patent/JPH01139830U/ja
Application granted granted Critical
Publication of JPH0517151Y2 publication Critical patent/JPH0517151Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Landscapes

  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP3670188U 1988-03-18 1988-03-18 Expired - Lifetime JPH0517151Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3670188U JPH0517151Y2 (enrdf_load_stackoverflow) 1988-03-18 1988-03-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3670188U JPH0517151Y2 (enrdf_load_stackoverflow) 1988-03-18 1988-03-18

Publications (2)

Publication Number Publication Date
JPH01139830U JPH01139830U (enrdf_load_stackoverflow) 1989-09-25
JPH0517151Y2 true JPH0517151Y2 (enrdf_load_stackoverflow) 1993-05-10

Family

ID=31263291

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3670188U Expired - Lifetime JPH0517151Y2 (enrdf_load_stackoverflow) 1988-03-18 1988-03-18

Country Status (1)

Country Link
JP (1) JPH0517151Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH01139830U (enrdf_load_stackoverflow) 1989-09-25

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