JPH051662Y2 - - Google Patents
Info
- Publication number
- JPH051662Y2 JPH051662Y2 JP11604490U JP11604490U JPH051662Y2 JP H051662 Y2 JPH051662 Y2 JP H051662Y2 JP 11604490 U JP11604490 U JP 11604490U JP 11604490 U JP11604490 U JP 11604490U JP H051662 Y2 JPH051662 Y2 JP H051662Y2
- Authority
- JP
- Japan
- Prior art keywords
- diffusion pump
- oil
- shutter
- vacuum
- oil diffusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000009792 diffusion process Methods 0.000 claims description 24
- 238000001514 detection method Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- VWVRASTUFJRTHW-UHFFFAOYSA-N 2-[3-(azetidin-3-yloxy)-4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]pyrazol-1-yl]-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound O=C(CN1C=C(C(OC2CNC2)=N1)C1=CN=C(NC2CC3=C(C2)C=CC=C3)N=C1)N1CCC2=C(C1)N=NN2 VWVRASTUFJRTHW-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11604490U JPH051662Y2 (OSRAM) | 1990-11-05 | 1990-11-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11604490U JPH051662Y2 (OSRAM) | 1990-11-05 | 1990-11-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0471779U JPH0471779U (OSRAM) | 1992-06-25 |
| JPH051662Y2 true JPH051662Y2 (OSRAM) | 1993-01-18 |
Family
ID=31863860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11604490U Expired - Lifetime JPH051662Y2 (OSRAM) | 1990-11-05 | 1990-11-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH051662Y2 (OSRAM) |
-
1990
- 1990-11-05 JP JP11604490U patent/JPH051662Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0471779U (OSRAM) | 1992-06-25 |
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