JPH0516491Y2 - - Google Patents

Info

Publication number
JPH0516491Y2
JPH0516491Y2 JP479186U JP479186U JPH0516491Y2 JP H0516491 Y2 JPH0516491 Y2 JP H0516491Y2 JP 479186 U JP479186 U JP 479186U JP 479186 U JP479186 U JP 479186U JP H0516491 Y2 JPH0516491 Y2 JP H0516491Y2
Authority
JP
Japan
Prior art keywords
deflector
points
length
amplitude
point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP479186U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62117507U (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP479186U priority Critical patent/JPH0516491Y2/ja
Publication of JPS62117507U publication Critical patent/JPS62117507U/ja
Application granted granted Critical
Publication of JPH0516491Y2 publication Critical patent/JPH0516491Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP479186U 1986-01-16 1986-01-16 Expired - Lifetime JPH0516491Y2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP479186U JPH0516491Y2 (ko) 1986-01-16 1986-01-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP479186U JPH0516491Y2 (ko) 1986-01-16 1986-01-16

Publications (2)

Publication Number Publication Date
JPS62117507U JPS62117507U (ko) 1987-07-25
JPH0516491Y2 true JPH0516491Y2 (ko) 1993-04-30

Family

ID=30785780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP479186U Expired - Lifetime JPH0516491Y2 (ko) 1986-01-16 1986-01-16

Country Status (1)

Country Link
JP (1) JPH0516491Y2 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2521964B2 (ja) * 1987-07-08 1996-08-07 株式会社ニコン 電子顕微鏡の測長方法

Also Published As

Publication number Publication date
JPS62117507U (ko) 1987-07-25

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