JPH0516220U - Film peeling device from substrate surface - Google Patents

Abstract

(57) [Abstract] [Purpose] To provide a device for peeling a film from a substrate surface, which is capable of automatically peeling a film from a green ceramic substrate having a film adhered to the surface. [Structure] A dolly 8 that can move horizontally is provided above a holding table 2 that holds a substrate 50, an arm 10 having an adhesive roller 11 at the lower end for peeling off the film ears, and a pulling mechanism.
12 and 12 are provided on the lower surface of the carriage 8. The adhesive roller 11 slightly peels off the edge of the film, and the opening / closing claw of the pulling mechanism 12
The ears are gripped by 15 and the carriage 8 is moved and pulled up diagonally upward. The adhesive roller 11 is a turret type,
It is also possible to prevent the decrease of the adhesive force by using it only at the first peeling.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to an apparatus for peeling a film from a surface of a substrate used for automatically peeling the film from the surface of a green ceramics substrate having a film adhered to the surface.

[0002]

[Prior Art]

 In the manufacturing process of the multilayer laminated substrate, a film such as PET may be adhered to the surface of the substrate in order to prevent damage to the substrates when handling each green ceramic substrate with a vacuum chuck. Such a film needs to be peeled off before the substrates are laminated in multiple layers, and conventionally, peeling work has been performed manually. However, such a manual method cannot be adopted when it is desired to automate the production of a multilayer substrate.

[0003]

[Problems to be solved by the device]

 The present invention has been completed to solve the above-mentioned conventional problems and provide a film peeling apparatus for peeling a film from the surface of the substrate, which is capable of automatically peeling the film from the surface of the substrate.

[0004]

[Means for Solving the Problems]

 The present invention, which has been made to solve the above-mentioned problems, provides a carriage that can move horizontally in a position above a holding table that holds a substrate having a film adhered to the surface thereof. It is characterized in that an arm provided with a roller at the lower end and a pulling mechanism for gripping the ear of the film peeled by these adhesive rollers and lifting the film diagonally upward are provided.

[0005]

[Action]

 The device for peeling a film from the substrate surface of the present invention peels the edge of the film from the substrate surface by the adhesive roller at the lower end of the arm extending downward from the dolly, grasps the peeled film ear and diagonally moves upward by the pulling mechanism. The film can be automatically peeled from the surface of the substrate without being deformed by pulling it up.

[0006]

【Example】

 Hereinafter, the present invention will be described in more detail with reference to the illustrated embodiments. [First Embodiment] In FIGS. 1 and 2, 1 is an apparatus frame, 2 is a holding table provided on the apparatus frame 1, and a substrate 50 having a film adhered to the surface thereof is attached by a vacuum chuck. It has a structure that can be held. A beam 3 is attached to a position above the holding table 2 about a shaft 4. The beam 3 can be swung by the cylinder 5 between the horizontal position shown in FIG. 2 and the upper position shown in FIG. 3, and when the substrate 50 is transferred to the holding table 2, the position shown in FIG. However, after that, the horizontal position of FIG. 2 is maintained.

A rail 6 is provided on the beam 3, and a carriage 8 that can move along the rail 6 is supported by a cylinder 7. A pair of arms 10 are suspended from the lower surface of the carriage 8 via brackets 9. Adhesive rollers 11 are horizontally supported at the lower ends of the arms 10. As shown in FIG. 2, these adhesive rollers 11 come into contact with the edge of the substrate 50 on the holding table 2 and roll on the surface of the substrate 50 to slightly stick the film edge by the adhesive force from the surface of the substrate 50. It has a role of peeling. The pressing force of the roller 11 can be adjusted appropriately. Further, the curvature of these rollers 11 is preferably 10φ or less when via-embedding printing or the like is performed on the substrate 50. This is because if the curvature is 10φ or more, there is a risk that the via paste will adhere to the film and be removed.

A pull-up mechanism 12 is provided at an intermediate position between the pair of rollers 11 for holding the ear of the film and pulling it obliquely upward. The pulling mechanism 12 comprises a pulling cylinder 13 supported by the dolly 8 at an angle of about 45 degrees, and an opening / closing claw 15 provided at the lower end of a piston rod 14 of the pulling cylinder 13 as shown in FIG. It will be. As shown by an imaginary line in FIG. 2, the pulling mechanism 12 is capable of gradually pulling the opening / closing pawl 15 upward while moving with the carriage 8.

In order to peel off the film by the film peeling apparatus of the embodiment configured as described above, first the beam 3 is flipped upward as shown in FIG. 3, and the film is transferred onto the surface by a transport mechanism (not shown). The adhered substrate 50 is set on the holding table 2 and is more securely sucked by the vacuum. Next, the beam 3 is returned to the horizontal position, and the carriage 8 is moved to the tip of the beam 3 so that the pair of adhesive rollers 11 at the lower end of each arm 10 are brought to the end of the substrate 50 as shown by the solid line in FIG. Contact. Then, from this state, the carriage 8 is moved to the left in FIGS. 2 and 3. As a result, the adhesive roller 11 rotates on the film on the surface of the substrate 50, but since the adhesive force is applied to these adhesive rollers 11, the film adheres to the surface and the adhesive roller 11 rotates. Therefore, the ears of the film will start to peel slightly from the surface of the base plate 50.

Then, the ears of the film are grasped by the opening / closing claws 15 of the pulling mechanism 12 provided at the intermediate position of the adhesive rollers 11, and the whole of the pulling mechanism 12 is brought to the position of the imaginary line in FIG. 2 by the carriage 8. While moving, the opening and closing claws 15 are raised by the pulling-up cylinder 13 and the ears of the film are pulled obliquely upward. In this way, the film is gradually peeled from the surface of the substrate 50, and when the carriage 8 is moved to the position shown by the imaginary line in FIG. 2, the film is completely peeled from the surface of the substrate 50. .. Moreover, since the pair of rollers 11 continue to press the surface of the substrate 50 even during pulling up, there is no possibility that the substrate 50 made of green ceramic will be deformed.

The substrate 50 on which the peeling of the film is completed is again lifted from the holding table 2 by a transport mechanism (not shown) and transported to the next step.

[Second Embodiment] In a second embodiment shown in FIGS. 6 to 8, a turret 20 is provided at the lower end of the arm 10, and the adhesive roller 11 and the substrate pressing member are provided on four sides of the turret 20. A set of rollers 21 is provided. The turret 20 can be driven by an air index device 22 above the turret 20 via a timing belt 23. In this embodiment, when the adhesive force of the adhesive roller 11 decreases, the turret 20 can be indexed and a new set of the adhesive roller 11 and the substrate pressing roller 21 can be rotated downward for use. Further, the substrate pressing roller 21 is for preventing the substrate 50 on the lower side from being lifted up when the ear of the film is pulled up obliquely upward by the opening / closing claw 15. The other structure is similar to that of the first embodiment, and the description thereof is omitted.

Third Embodiment In the third embodiment shown in FIGS. 9 to 10, the adhesive roller 11 and the film pressing roller 29 are alternately provided at the lower end of the arm 10 so as to be able to descend. That is, a shaft 25 swingable by the air cylinder 24 is provided at the lower end of the arm 10, and an adhesive roller 11 is provided at the lower end of an arm 26 extending from the shaft 25. On the other hand, a shaft 27 parallel to the shaft 25 is provided at the lower end of the arm 10, and a film pressing roller 29 is provided at the tip of an arm 28 extending from the shaft 27. Since the sector gear 30 fixed to the shaft 25 meshes with the sector gear 31 fixed to the shaft 27, when the arm 10 is lowered to bring the adhesive roller 11 into contact with the substrate 50 as shown by the solid line in FIG. 27 is reversed and the film pressing roller 29 is raised, and conversely, when the adhesive roller 11 is raised, the film pressing roller 29 is lowered.

Reference numeral 32 denotes a substrate pressing roller provided at the tip of the arm 33. Since the arm 33 is always elastically urged downward by the spring 34, the substrate pressing roller 32 is always pressed against the surface of the substrate 50. Has been.

In this embodiment, first, the adhesive roller 11 is brought into contact with the substrate 50 to peel off the ears of the film from the surface, and the opening / closing claw 15 holds the ears of the film. After that, the adhesive roller 11 is raised and the film pressing roller 29 is lowered to press the upper surface of the film near the peeled portion. At the same time, the substrate pressing roller 32 presses the lower substrate 50 to prevent the substrate 50 from being lifted. As described above, in the third embodiment, the adhesive roller 11 is brought into contact with the substrate 50 only when it is necessary for the first time and is then lifted from the substrate 50, so that the adhesive force of the adhesive roller 11 is maintained for a long period of time. Becomes

[0016]

[Effect of the device]

 As described in detail above, according to the film peeling apparatus for peeling a substrate surface of the present invention, by grasping the edge of the film peeled by the adhesive roller and pulling it obliquely upward, the substrate is not deformed. The film can be automatically peeled from the surface, which is an advantage that the work efficiency can be significantly improved as compared with the conventional manual peeling of the film. Furthermore, if the curvature of the adhesive roller is set as described above, the peeling curvature of the film is regulated by the roller curvature, and the via paste can be prevented from coming off. Furthermore, by devising the part of the adhesive roller as in the second and third embodiments, it is possible to cover the decrease in the adhesive force of the adhesive roller and it is possible to continuously use it for a long period of time. Therefore, the present invention has an extremely large practical value as a film peeling apparatus for removing a film from the surface of a substrate which solves the conventional problems.

[Brief description of drawings]

FIG. 1 is a front view showing a first embodiment of the present invention.

FIG. 2 is a side view showing a first embodiment of the present invention.

FIG. 3 is a side view showing a state in which a beam is flipped up.

FIG. 4 is an enlarged front view of a main part of the first embodiment.

FIG. 5 is an enlarged side view of a main part of the first embodiment.

FIG. 6 is a front view showing a second embodiment.

FIG. 7 is an enlarged front view of the main part of the second embodiment.

FIG. 8 is an enlarged side view of a main part of the second embodiment.

FIG. 9 is an enlarged front view of the essential parts of the third embodiment.

FIG. 10 is an enlarged plan view of a main part of the third embodiment.

[Explanation of symbols]

 2 Holding table 8 Cart 10 Arm 11 Adhesive roller 12 Lifting mechanism 20 Turret 21 Substrate pressing roller 29 Film pressing roller 32 Substrate pressing roller 50 Substrate

Claims (3)

[Scope of utility model registration request] 1. An arm provided with a carriage that can move horizontally in a position above a holding table for holding a substrate having a film adhered to the surface thereof, and an arm provided with an adhesive roller at the lower end for peeling off the film ears. A film peeling device from a substrate surface, which is provided with a pulling mechanism for gripping an ear of the film peeled by these adhesive rollers and lifting the film obliquely upward. 2. The film peeling apparatus from the substrate surface according to claim 1, wherein a plurality of sets of adhesive rollers and substrate pressing rollers are mounted on the turret at the tip of the arm. 3. An apparatus for peeling a film from a substrate surface according to claim 1, wherein an adhesive roller and a film pressing roller are provided at the tip of the arm so as to be able to descend alternately.