JPH0397560A - Laminating device - Google Patents

Abstract

PURPOSE:To enhance laminating precision of a green sheet and to make interlaminar deviation small by raising and stopping a laminating table to the position in which the upper face of the green sheet laminated to an adhesive lower jig plate on the laminating plate is allowed to abut to the rear surface of a sheet pressing plate and pressed thereon and pressing the green sheet with the prescribed constant load. CONSTITUTION:Raising action of a laminating table 6 positioned at a laminating preparatory state 17 is stopped at the position described hereunder by the same action at a time for accepting and laminating a green sheet 1 in a laminating stage 16 shared with opening of a guide hole and cutting of outer periphery. In this position, the laminating table 6 is raised and the upper face of the green sheet 1 laminated on an adhesive lower jig plate 10 is allowed to abut to the rear surface of a sheet pressing plate 59 and pressed thereon. The reference hole 21 of the green sheet 1 is photographed by a TV camera 35b in such a state that the green sheet 1 on the laminating table 6 is pressed by the sheet pressing plate 59. The image 36b thereof is screened on a monitor TV 37b. When the positional error of the reference hole 21 is regulated in a range within the prescribed error, the laminating table 6 is lowered and returned to the position of an early stage.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a technology for manufacturing a multilayer ceramic substrate using a sheet lamination method, and in particular, the lamination of green sheets has extremely small interlayer deviation and high precision. High-quality, efficient multilayer ceramic substrates! ! The present invention relates to a laminating apparatus suitable for manufacturing.

[Conventional technology]

Conventionally, as a method for manufacturing multilayer ceramic substrates, there is a sheet lamination method in which conductors are filled into the via holes, multiple green sheets with printed wiring patterns are laminated, and the sheets are heated and pressed. As a laminating apparatus, there is one described in JP-A-62-124947.

In this conventional method, as described in the above-mentioned publication, a green sheet with reference holes drilled therein and attached to a picture frame is manually placed and fixed on a positioning table, and the reference holes are detected by a television camera. After the image is photographed and positional deviations in the X, Y, and θ directions are corrected and moved using the fine movement table on the positioning table, the positioning table is transported to the guide hole opening and outer circumference cutting and lamination stage, and the guide hole opening and outer circumference cutting mechanism cuts the guide hole. Holes are drilled and the outline is punched out. The punched green sheet is attracted by the upper die, and the positioning table is conveyed to the positioning stage side.

Next, the lamination table that was waiting at the lamination preparation stage is transported to the guide hole drilling and outer circumference cutting and lamination stage, and the green sheet that had been sucked by the upper mold is placed on the lower bonding jig plate placed on the lamination table. In order to stack the green sheets, the stacking table is raised to a height where it comes into contact with the green sheets,
The suction of the upper mold is turned off and the mold is laminated onto the lower bonding jig plate.

After that, the lamination table is transported to the lamination preparation stage side, the reference hole of the green sheet on the lamination table is photographed by a television camera, and the amount of positional deviation is inspected to see if it is within a predetermined error range. , the height adjustment mechanism of the stacking table is activated, the height of the stacking table is lowered by the thickness of the green sheets, and the stacking table is lowered by a certain amount sequentially to a predetermined height according to the number of stacked sheets, and the guide The height of the stacking table when stacking the green sheets adsorbed to the upper die in the hole punching, circumferential cutting and stacking stage also gradually decreased by a fixed amount in the same manner as described above. The second sheet J;l is laminated one after another in the same manner as above, and when a predetermined number of sheets have been laminated, the lower gluing jig plate on the lamination table is manually removed, and the gluing upper jig plate is placed on top of it. The desired multilayer ceramic substrate can be obtained by placing the substrate on the substrate and applying heat and pressure using a hot press.

[Problem to be solved by the invention]

However, in the above-mentioned stacking apparatus, since the bottom surface of the green sheet placed on the positioning table is not held, no consideration is given to the bending of the green sheet, and the variation in the amount of bending when photographing with a television camera causes the standard There was a problem that the hole position was shifted.

In addition, when stacking the green sheets on the guide hole drilling/circumferential cutting and stacking stage, due to variations in the thickness of the green sheets, the pressing force of the lower gluing jig plate on the stacking table against the green sheets adsorbed to the upper die may be increased. is not constant and the green sheet is thicker than the set thickness of the green sheet,
The pressing force increases, causing elongation and deformation of the green sheet.On the other hand, in the case of a thin green sheet, the pressing force against the lower bonding jig plate is insufficient, causing the green sheet to be inserted into the guide pin on the lower bonding jig plate. Green sheets that have been stacked are stacked floating, or green sheets that are attracted to the upper die are in close contact with the suction surface. Even when discharged, the green sheets are stacked floating when the stacking table is lowered, causing misalignment when observing the reference holes of the green sheets with a TV camera in the stacking preparation stage, and as a result, the multilayer ceramic substrate However, sufficient consideration was not given to improving lamination and adhesion accuracy, and there were problems that should be further improved.

Furthermore, it is necessary for the operator to manually supply the easily damaged green sheets, discharge the punched picture frame, and supply and discharge the bonding jig plate, and printing may occur due to dust adhering between the stacked green sheets. In addition to deteriorating quality such as pattern breakage, damage and deformation of the green sheet, the lamination work requires a lot of time from the operator, resulting in low work efficiency.

The present invention has been made to solve the above problems.

One object of the present invention is to provide a technique for manufacturing a multilayer ceramic substrate using a sheet lamination method, which can improve the lamination accuracy of green sheets and extremely reduce interlayer misalignment.

Another object of the present invention is to automate a series of operations such as supplying a predetermined number of green sheets, laminating them onto a lower bonding jig plate, and discharging the lower bonding jig plate after lamination has been completed. An object of the present invention is to provide a laminating apparatus used for efficiently manufacturing a multilayer ceramic substrate.

Still another object of the present invention is to provide a lamination technique that can eliminate static electricity charging and dust adhesion to green sheets.

[Means to solve the problem]

In order to achieve the above object, in the lamination apparatus of the present invention, the lamination preparation stage includes a jig configured to allow the lower bonding jig plate placed on the lamination table to be vertically slidable and to be held by a pressing member. It has a plate holding mechanism, a press lowering position detecting mechanism for the bonding lower jig plate, and a stacking table lifting stop mechanism that stops the lifting operation of the stacking table and positions it based on a signal from the press lowering position detecting mechanism. A sheet holding plate is provided between the position recognition device that detects the position of the reference hole of the green sheet and the lamination table, and the upper surface of the green sheet laminated on the lower bonding jig plate on the lamination table is
The stacking table is raised and stopped until it reaches a position where it contacts and presses the lower surface of the sheet pressing plate, and the green sheet is pressed with a predetermined constant load.

The sheet holding plate is configured to remove the green sheet from the bonding jig plate using a vacuum suction plate when the positional deviation of the reference hole of the green sheet is larger than a predetermined amount.

Further, in the laminating apparatus of the present invention, the positioning stage includes a suction plate that suction-holds the lower surface of the green sheet placed on the positioning table, and a movement mechanism that moves the suction plate up and down. It has a position correction mechanism that corrects and moves the position of the green sheet on the positioning table based on a signal from the position recognition device.

Furthermore, in another stacking apparatus of the present invention, there is provided a magazine which is attached to a picture frame and is capable of storing a plurality of green sheets having at least two reference holes, and a positioning table for taking out the green sheets from the magazine. a positioning table on which the green sheet is placed and fixed and can be finely adjusted in X, Y, and θ directions; Place the position recognition device that detects the position and the lower gluing jig plate, and
It has a lamination table movable in the direction, a lamination preparation table on which the lamination table waits in order to prepare for lamination of green sheets on the lamination table, and a guide hole punching and outer circumferential cutting and lamination stage, and this stage performs the positioning. By simultaneously drilling guide holes and punching out the outline of a green sheet placed and fixed on a table, the punched green sheet can be adsorbed to the upper mold side, and the guide holes of the adsorbed green sheet can be a guide hole punching and peripheral cutting mechanism equipped with a mold consisting of an upper mold and a lower mold that can be inserted into the guide bin of the lower bonding jig plate on the lamination table and laminated; and a lamination table in the lamination preparation stage. a position recognition device for detecting the position of the reference hole of the punched green sheet; a transport mechanism capable of transporting the positioning table between the positioning stage and the guide hole punching/cutting and laminating stage; a conveyance mechanism capable of conveying the lamination table between the lamination preparation stage and the guide hole opening and outer circumference cutting/lamination stage; a frame discharging mechanism capable of adsorbing and conveying and discharging the pulled out picture frame, a jig plate supply mechanism that supplies the lower bonding jig plate to a lamination table, and a predetermined number of green sheets placed on the lamination table. The present invention is characterized by comprising a jig plate discharging mechanism capable of transporting and discharging the bonding lower jig plate on which the bonding lower jig plates are laminated.

Further, in the present invention, a means for spraying ionized gas to the green sheet to remove dust and static electricity can be provided.

[Effect]

In the above-described stacking apparatus of the present invention, the green sheets can be sequentially taken out from the magazine and placed on the positioning table by the green sheet conveying mechanism,
The frame-like frame of the green sheet fixed on the positioning table and punched out by the guide hole punching and cutting mechanism is suctioned and conveyed by the frame discharge mechanism and discharged to a predetermined position.

In addition, the bonding lower jig plate set in the jig plate supply mechanism can be slid and placed on the lamination table by the jig plate supply mechanism, and the bonding jig plate set in the jig plate supply mechanism can be placed on the lamination table after the predetermined number of green roots have been laminated. The jig plate can be pulled out from above the stacking table and discharged by the jig temporary discharge mechanism. As a result, a series of operations such as supplying the bonding lower jig plate and a predetermined number of green sheets and discharging the picture frame and the bonding lower jig plate can be performed without human intervention.

Since the green sheet placed and fixed on the positioning table has its lower surface suctioned and held by the sheet holding mechanism, the bending of the green sheet is corrected, and the position of the reference hole of the green sheet can be accurately detected by the position recognition device. When the positioning table is used to correct the positional deviation of the reference hole in the x, y, and θ directions, the suction of the sheet holding mechanism is released, and the suction is only performed when the position recognition device takes an image, so that the twisting of the green sheet is avoided. , does not cause wrinkles etc.

The green sheet whose guide holes and outer periphery have been punched by the guide hole punching and outer circumference cutting mechanism is adsorbed to the upper mold side, and the laminated table waiting at the lamination preparation stage moves the green sheet adsorbed to the upper mold onto the lamination table. The pressing member that comes into contact with the upper mold and holds the lower adhesive jig plate is compressed to set the height at which the pressing force on the green sheet is constant. The pressure lowering position detection mechanism of the lower bonding jig plate detects this and uses the signal to stop the lifting movement of the stacking table, so it is always pressed with a constant load regardless of variations in the thickness of the green sheet, so there is no possibility of excessive pressure. This can prevent the green sheet from stretching, deforming, or lifting due to insufficient pressure.

In addition, when determining the quality of misalignment of green sheets after lamination at the lamination preparation stage, a sheet holding plate installed between the position recognition device that detects the reference hole position of the IJ sheet and the lamination table is used. , the stacking table is raised to a height where the stacked green sheets contact and press, and the lifting and stopping operations of the stacking table are performed by lifting the green sheets with a constant load in the same way as the stacking operation in the guide hole opening/circumferential cutting and stacking stage. Pressure prevents the green sheets stacked on the lower bonding jig plate from floating, and the position of the reference hole in the green sheet can be accurately detected to determine pass/fail, improving lamination accuracy and product quality. can be achieved.

Furthermore, by using the sheet pressing plate in conjunction with the removal of defective green sheets that are largely misaligned, the device can be made smaller and more multifunctional.

Moreover, by removing static electricity from the green sheet, a laminated green sheet of even higher quality can be obtained.

〔Example〕

Hereinafter, one embodiment of the present invention will be specifically described using the drawings.

FIG. 1 is a perspective view showing the overall configuration of a stacking apparatus according to an embodiment of the present invention. In FIG. 1, 1 is a green sheet, 2 is a picture frame, 3 is a positioning table, and 4a
, 4b is a position recognition device, 5 is a guide hole cutting mechanism, 6 is a stacking table, 7 is a magazine for storing the green sheet 1, 8 is a green sheet transport mechanism, 9 is a frame ejection mechanism, 10 is a stacking table 12 is a jig plate supply mechanism, 13 is a jig plate discharge mechanism,
14 is the base of the main body of the laminating device.

The overall structure of this laminating device consists of a positioning stage 15 that places and fixes the green sheet 1 and performs corrective movement for positioning, an upper die 18 and a lower die that simultaneously drill guide holes and cut the outer circumference of the green sheet 1. The punched green sheet 1 has a guide hole opening and outer periphery cutting mechanism 5 consisting of 19.
A guide hole opening outer periphery cutting and laminating stage 16 is inserted into the guide pin 20 on the lower adhesion jig plate 10 which is placed and fixed on the lamination table 6 while adsorbed to the upper mold 18 to perform lamination.
Then, the amount of positional deviation of the reference holes 2l of the green sheets stacked on the bonding lower jig plate 10 is detected to determine the quality, and the stacking table 6 is moved to stack the next green sheet.
The main part of the stacking preparation stage 17 is on standby, and furthermore, in order to automate the handling, there is a green sheet conveying mechanism 8 that automatically sequentially supplies the green sheets 1 to be stacked, and a green sheet transport mechanism 8 where the green sheets 1 are punched out. a frame discharge mechanism 9 that automatically discharges the picture frame-shaped frame 2; and a jig plate supply mechanism 1 that automatically supplies the bonding lower jig plate 10 to the stacking table 6.
2, and a jig plate discharging mechanism 13 that automatically discharges the bonding lower jig plate 10.

First, the green route 1 will be explained using FIG. 2.

This green route 1 is adhered to a picture frame 2 with adhesive, and the four reference holes 2l and the pier hole 22 are drilled by an NC drilling machine (not shown), and then the pier hole 22 is filled, printed, and wired. Printing of pattern 23 is performed and green number 1 is obtained.

Next, the detailed structure of the lamination apparatus will be explained using FIGS. 4 to 6.

FIG. 4 shows a perspective view of the green sheet conveying mechanism 8 on the left back side of the laminating apparatus in FIG.

A predetermined number of green sheets 1 are attached to a picture frame 2 and stored in a magazine 7. The green sheet transport mechanism 8a installed above the magazine 7 is provided with a chuck 24a at its tip for gripping the green sheet 1, and is configured to be slidable in the vertical and horizontal directions.

Further, a busher (not shown) that pushes up the lower part of the green sheet 1 to be taken out is built in the lower part of the magazine 7, and this busher moves the green sheet 1 in synchronization with the green sheet transport mechanism 8a. It is slidable so that it can be pushed up and grasped in sequence.

A static eliminator unit 25 is installed in front of the magazine 7 to remove dust and static electricity attached to the green sea 1 held and conveyed in the vertical direction. A spray nozzle (not shown) is built in to spray ionized air onto the front and back surfaces of the sheet 1 to remove dust and static electricity. The green sheet conveyance mechanism 8b conveys the green sheet 1 after dust and static elimination to the positioning table 3. The green sheet conveyance mechanism 8a grips the upper part of the green sheet 1 and moves the green sheet 1 from the vertical direction to the horizontal direction. A chuck 24b is provided to grip the green sheet 1 from the side in order to rotate it by 90 degrees.
In the horizontal state, it can slide up to the positioning table 3 and can further slide in the vertical direction.

FIG. 5 is a front view of the laminating apparatus in FIG. 1. In the illustrated position, a guide hole opening/circumferential cutting and lamination stage 16 is disposed at the center, and a lamination preparation stage 17 is disposed at the right side. The positioning table 3 of the positioning stage 15 brings the green sheet }1 transported by the green sheet transport mechanism 8b into contact with the positioning bin 30 on the positioning table 3 with the V*28 of the picture frame 2 and the end surface 29a, The opposite end surface 29b is pressed by the frame pressing member 31, and the lower surface of the frame outer peripheral part 32 is sucked by the frame vacuum suction mechanism 33, so that it can be positioned, placed, and fixed.
, a fine movement table 34a with a built-in pulse motor (not shown) that can be finely adjusted in the θ directions. 34b, 34
C, and a cylinder (not shown) is provided between the positioning stage 15 and the guide hole opening and outer periphery cutting and laminating stage l6.
It is configured to be able to slide left and right. Thereby, these fine movement tables 34a, 34b, and 34c can be corrected and moved when the positional deviation of the reference hole 21 of the green sheet 1 is large.

The position recognition device 4a above the positioning stage 15 includes four television cameras 35a that can observe the reference hole 21 of the green sheet 1 on the positioning table 3 on the positioning stage 15. A monitor television 37a is connected to which the image 36a of the reference hole 2l can be monitored. The camera mounting base 38 of the television camera 35a has a cylinder (
(not shown) allows it to slide up and down.

Further, below the positioning stage 15, there is a sheet holding mechanism 39 that sucks and holds the bottom surface of the green sheet 1 on the positioning table 3. is attached, and can be slid up and down by cylinders (not shown). A frame discharging mechanism 9 is provided at a friend portion of the positioning stage 15 for discharging the frame-like frame 2 on the positioning table 3 that has been returned to the positioning stage 15 after the green root 1 has been punched out by the guide hole punching and cutting mechanism 5. This frame discharging mechanism 9 has a frame discharging unit 42 for stacking the discharged picture frame frames 2, a frame vacuum suction unit 41, and a frame vacuum suction unit 41, which are moved vertically and vertically by a cylinder (not shown). It is configured to be slidable in the left and right direction.

Next, the guide hole opening and outer periphery cutting and stacking stage 16 has a guide hole opening and outer periphery cutting mechanism 5 equipped with a mold consisting of an upper mold 18 and a lower mold 19, and the mold is placed on the positioning table 3. A guide hole 4 is inserted into the fixed green 7-toe 1.
The hole punching process and the outline punching process in step 3 are performed simultaneously, and the punched green sheet 1 is placed on the vacuum suction plate 44 of the upper die 18.
(FIG. 7), and the guide hole 43 of the adsorbed green sea} 1 can be inserted into the guide pin 20 of the bonding lower jig plate 10 on the laminated tape 6 to stack it.

For more details, refer to upper die] 8, guide hole punch 45.
and a die part 46 for cutting the outer periphery, and a hole drilled with a hole punch sliding hole on which the guide hole punch 45 slides.
IJ per plate 47 and this stripper plate 47
It consists of a vacuum suction plate 44 with a vacuum suction hole 48 attached to the lower surface of the mold, and this upper mold part 8.
is attached to a crosshead 50 connected to a rod of an air cylinder 49 (FIG. 5), and can be moved up and down by protruding and retracting the rod.

On the other hand, the lower mold 19 includes a lower mold plate 53 having a droplet hole 52 for dropping the scraps 51 punched through the guide hole 43 of the green sheet 1 downward, and a lower mold plate 53 provided at the lower part of the lower mold plate 53. Removable waste receiving box 54
It is attached to a crosshead 55, and like the upper die 18, it can be moved up and down by an air cylinder (not shown). And guide hole punch 45
Drilling of the guide hole 43 can be performed simultaneously using the lower mold 19 and punching of the outer shape using the lower mold 19 and the outer periphery cutting die part 46.

Next, above the lamination preparation stage 17, there is a bonding lower jig plate 1 on the lamination table 6 on this lamination preparation stage 17.
There are four television cameras 35b that can observe the reference holes 21 of the green sheets 1 stacked on top of each other.
A monitor television 37b that can monitor is connected. The lower part of the camera mount 56 to which the television camera 35b is attached is provided with a bonding lower jig plate 10 on the stacking table 6 in order to be able to contact and suppress the upper surface of the green sheet I on the stacking table 6. A guide pin relief hole 57 into which the guide pin 20 is inserted is drilled, and a sheet holding plate 59 consisting of a vacuum suction plate 58 that is capable of suctioning the green sheet/sheet 1 on the lower bonding jig plate IO is attached. ing.

The stacking table 6 includes a jig mounting plate 60 on which the bonded lower jig plate 10 supplied by the jig plate supply mechanism 12 is placed and fixed;
A jig stand 62 equipped with a jig clamp 61 is mounted on a shaft 63.
It is attached to the jig base plate 65 via the jig base plate 65 so as to be able to slide up and down, and the jig stand 62 is held by the compressive force of the spring 64 attached between the jig base plate 62 and the jig base plate 65. ing.

This jig base plate 65 can be slid up and down by a motor 68 via a slide rail 69. A light shielding plate 66 attached to the lower surface of the jig table 62 and a position detection sensor 67 attached to the upper part of the jig base plate 65 allow
When the stacking table 6 moves up to stack the green sheets 1 adsorbed to the upper die 18 on the guide hole opening/circumferential cutting and stacking stage 16, and during the stacking operation to observe the reference hole 21 of the stacked green sheets 1. During the rising operation of the green sheet 1 to the height at which the green sheet 1 comes into contact with the sheet holding plate 59 on the second stage 17, the bonding lower jig plate 10 is placed in contact with and pressed against the upper mold 18 or the sheet holding plate 59. At the lowered position of the jig stand 62 where the pressing force is always constant, the light shielding plate 66 blocks light from the position detection sensor 67 attached to the jig base Fi65, and this position detection signal is This stops the lifting operation of the stacking table 6 by the motor 68. This lamination table 6 is configured to be able to slide left and right between the lamination preparation stage 17 and the guide hole opening/circumferential cutting/lamination stage 16 by means of a cylinder (not shown).

FIG. 6 shows a perspective view of the jig plate supply mechanism 12 and the jig plate discharge mechanism 13 on the right back side of the laminating apparatus in FIG. 1.

The jig plate supply mechanism 12 includes a jig plate conveyance rail 7 on which rollers 70 for placing and sliding the bonded lower jig plate lO are attached.
1, and a jig transport plate 72 that transports the lower bonding jig plate IO, and the lower bonding jig 10 has a supply position part 73 and a supply standby position part 74 on the jig plate transport rail 71. 2
The jig transport plate 72 can be placed at the supply position section 73.
and the supply standby position 74.
A jig busher 75 attached to the front end of the jig transport plate 72 is pushed upward by a spring 77 with a support shaft 76 as a fulcrum, and the jig busher 75 is attached to the rear end of the lower bonding jig plate 10 placed in the supply position section 73. The jig transport plate 72 is slid from the supply standby position 74 to the supply position 73, and the bonded lower jig plate 10 placed in the supply position 73 is placed on the jig mounting plate of the laminating table 6. It is possible to push it out and place it on 60.

Next, the jig plate discharging mechanism 13
It is comprised of a discharge conveyance rail 78 disposed perpendicularly below and a jig discharge chuck 80 disposed parallel to below the jig plate supply mechanism 12, and is placed on the stacking table 6. The lower bonding jig plate 10 can be clamped into the grooves 79 on both sides of the lower bonding jig plate 100 with a jig discharge chuck 80, and the lower bonding jig plate 10 can be pulled out and discharged to a discharge position portion 81 of the discharge conveyance rail 78. The bonding lower jig plate 10 that has been pulled out to the discharge position section 81 is attached to the discharge conveyance plate 8 which is installed below the discharge position section 81 and is slidable in parallel to the discharge conveyance rail 78.
2, and a plurality of bonding lower jig plates 10 can be discharged onto the discharge conveyance rail 78.

FIG. 3 is a cross-sectional view showing an example of interlayer misalignment of a multilayer ceramic substrate.
A plurality of green sheets 1 are stacked by inserting the guide hole 43 of the green sheet 1 into the green sheet 1, and each green sheet 1 has a pier hole 22 filled with a conductor. The interlayer deviation δ is 10 μm.
In this example, 32 guide pins 20 are set up on the bonding lower jig plate 10, and the clearance between the guide pins 20 (diameter d) and the guide hole 43 (hole diameter D) of the green sheet 1 is Even if C = (D-d) is 10 μm or less, the guide hole 43 of the green sheet 1 can be smoothly inserted into the guide pin 20 by placing and fixing it on the axis of the guide hole punch and the stacking table 6. The stacking table 6 is configured to be able to be positioned so that the axis of the guide pin 20 of the bonding lower jig plate 10 precisely coincides with the axis. The green sheets 1 laminated in this way are placed on the adhesion jig plate 11 and hot-breathed (
A desired multilayer ceramic substrate is obtained by heating and pressurizing the substrate (not shown).

Next, the operation of the laminating apparatus configured as above will be explained.

A predetermined number of green sheets 1 are stored in the magazine 7.
The green sheet is pushed up to a predetermined height by a busher (not shown) at the bottom of the magazine 7 positioned at a predetermined position to be taken out, gripped by the chuck 24a of the green sheet transport mechanism 8a, and transported to the dust removal and static elimination unit 25. After that, the chuck 24a is lowered, and the dust removal and static elimination unit 25
While inserting the green sheet 1 inside, ionized air is injected onto both the front and back surfaces of the green sheet 1 to remove dust adhering to the green sheet 1 and remove static electricity.

When dust removal and static elimination are completed, the chuck 24a is stopped rising, and
The chuck 24b of the green sheet conveying mechanism 8b grips the side surface of the green sheet 1, and the chuck 24a gripping the top of the green sheet 1 is released, and the magazine 7
After moving the chuck 24a to the take-out position of the next green sheet 1 above, the chuck rotation motor 27 of the chuck 24b rotates the green sheet 1 by 90 degrees to bring it into a horizontal state, and the green sheet conveyance mechanism 8b The green sheet 1 is conveyed to the top of the positioning table 3, and the green sheet 1 is lowered and placed on the positioning table 3. During the conveyance of the green sheet 1 from the magazine 7 to the positioning table 3, the jig plate supply mechanism 12
In order to place the bonding lower jig plate lO placed on the supply position part 73 on the jig plate conveyance rail 7l on the lamination table 6, the lamination table 6 positioned on the lamination preparation stage 17 is positioned upwardly. , a jig busher 75 in contact with the rear end of the bonded lower jig plate 10 on the jig plate conveyance rail 71
By sliding the jig conveying plate 72 on which is attached from the supply standby position 74 to the supply position 73, the lower bonding jig plate 10 is slid and placed on the jig stand 62 of the stacking table 6. It is positioned and fixed by the jig clamp 61.

The green sheet 1 placed on the positioning table 3 is pressed against the end surface 29b of the picture frame 2 by the frame pressing member 31, and the V-groove 28 and the end surface 29a are brought into contact with the positioning bin 30 installed on the opposite side. After positioning and fixing, the frame outer peripheral part 32
is suctioned and fixed by the frame vacuum suction mechanism 33.

Next, as shown in FIG. 9, the sheet holding mechanism 39 is raised on the positioning stage 15, brought into contact with the lower surface of the green sheet 1 on the positioning table 3, and the green sheet 1 is moved to the sheet suction plate of the sheet holding mechanism 39. 40, and in this state, in order to observe the reference hole 21 of the green sheet 1 on the positioning table 3, the position of the reference hole 21 is observed by the TV camera 35a with the camera mount 38 lowered to a predetermined height. The image 36a is displayed on the monitor television 37a, and the position of the base hole 21 is minimized in the x, y, and θ directions.
The fine movement tables 34a, 34b, and 34C are moved for correction. During this correction movement, the suction of the sheet holding mechanism 39 is released and the green sheet 1 is made free, so that no twists or wrinkles occur. green sheet 1
When the positioning is completed, the camera mount 38 rises to the initial position, and the sheet holding mechanism 39 descends to the initial position.

Next, the positioning table 3 is transported and positioned from the positioning stage 15 to the guide hole punching and outer periphery cutting and laminating stage 16, and as shown in FIG. Then, the upper die 18 is lowered, and the guide hole 43 is bored in the green sheet 1 by the guide hole punch 45 and the lower die 19, and the outer circumferential cutting die part 46 and the lower die 19, The outer shape of the green root 1 is punched out and separated from the frame-like frame 2. At the same time, the vacuum suction plate 44 of the upper mold 18 is operated to suck the punched green sheet 1, and the punched scraps 51 in the guide hole 43 fall from the scrap drop hole 52 into the punched scrap receiving box 54 below. Then, the upper die 18 rises and the lower die 19 descends, returning to the initial state. The positioning table 3 is returned to the positioning stage 15, and the frame-like frame 2 left on the positioning table 3 and separated is adsorbed by the frame vacuum suction unit 41 of the frame ejection mechanism 9, and the frame ejection table 4
2. It is discharged and removed.

Next, the lamination table 6, which has been waiting on the lamination preparation stage 17, is transported and positioned to the guide hole opening/circumferential cutting/lamination stage l6. As shown in FIG. 8, the stacking table 6 rises and is attracted to the vacuum suction plate 44 of the upper mold 18, and the guide pins 20 of the lower bonding jig plate 10 are inserted into the guide holes 43 of the punched green sheet 1. Then, the guide pin 20 is inserted into the hole punch sliding hole of the upper die 18, and the green sheet 1 is bonded to the upper surface of the lower jig plate 10 (from next time onwards, the upper surface of the green sheet 1 laminated last time).
When the lower jig plate 10 is placed and fixed, the spring 64 holding the jig stand 62 is compressed, the jig stand 62 is pushed down, and the pressing force is constantly maintained. At a constant lowering position of the jig table 62, a light shielding plate 66 attached to the jig table 62 blocks light from a position detection sensor 67 attached to the jig base plate 65, and this position detection signal causes the motor 68 to
The lifting operation of the stacking table 6 is stopped. The vacuum suction is cut off, air is discharged from the vacuum suction hole 48, and Green Sea}1 is separated from the vacuum suction plate 44 and stacked on the bonding lower jig plate 10. The stacking table 6 descends to the running height and stops, then moves to the stacking preparation stage 17, which is the initial position, is positioned, and stops. The stacking table 6 positioned on the stacking preparation stage 17 rises, and as shown in FIG. At this position, the lifting operation of the stacking table 6 is stopped in the same manner as when receiving and stacking the Green Sea}1 on the guide hole drilling/circumferential cutting and stacking stage 16. While the green sheet 1 on the stacking table 6 is pressed by the sheet pressing plate 59, the reference hole 21 of the green sheet 1 is photographed by the television camera 35b, and the image 36b is
is displayed on the monitor television 37b.

If the position error of the reference hole 21 is within a predetermined error range,
The stacking table 6 descends and returns to its initial position. If the positional error is larger than the predetermined error range, the green sheet 1 on the stacking table 6 is pressed against the sheet pressing plate 59, and the vacuum suction plate 58 of the sheet pressing plate 59 presses the green sheet 1. In the adsorbed state, the laminating table 6 is lowered to remove the green sheet 1 on the bonding lower jig plate 10, and the laminating table 6 is moved to the same cutting and laminating stage 16 where guide holes are made and the green sheet 1 is held down by the sheet holder. The vacuum suction of the vacuum suction plate 58 of the plate 59 is cut off, and the green sheet 1 is dropped onto the discharge sheet holder 83 provided on the upper right side of the stacking table 6 and is ejected.

Next, when the first green sheet 1 is stacked normally, the removal and conveyance of the second green sheet 1 from the magazine 7 is started. A second green sheet l is laminated on top, and this process is repeated.

When the stacking of a predetermined number of green sheets 1 is completed in this way, the stacking table 6 is positioned at the height of the discharge position part 81 of the jig plate discharge mechanism l3, and the jig clamp 61 of the stacking table 6 is released. The jig ejection chuck 80 grips the groove 79 of the bonding lower jig plate 10 on the stacking table 6 and pulls it to the ejection position 8l. After releasing the jig ejection chuck 80, the ejection is carried out by the ejection transport plate 82. The bonding lower jig plate 10 is transported onto the transport rail 78 and discharged.

The lower adhesion jig plate 10 on which the predetermined number of green sheets 1 are laminated is taken out from above the discharge conveyance rail 78, the upper adhesion jig plate l1 is placed on top of it, and heated and pressed using a hot press. , the desired multilayer ceramic substrate is obtained.

According to the embodiment described above, supplying the green sheet 1, conveying it, removing dust and static electricity, punching out the guide hole 43 and its outline, laminating it on the lower bonding jig plate 10, supplying the lower bonding jig plate 10,
A series of stacking operations such as ejection, ejection of picture frame 2, and ejection of defective green sheets 1 whose positional deviation is larger than a predetermined range are automated, and can be performed without human intervention. It is possible to stack the green sheets 1 without damaging or deforming them or mixing or generating dust, which has the effect of improving product quality and work efficiency.

In addition, the sheet holding mechanism 39 of the positioning stage 15 causes the green sheet 1 on the positioning table 3 to bend,
Wrinkles are corrected and always held at a constant height and horizontally.
Reference hole 21 of green sheet 1 by position recognition device 4a
Since the position of can be detected accurately, it has the effect of improving the lamination accuracy.

Furthermore, since the clearance C between the guide pin 20 and the guide hole 43 is minute when the green root 1 that has been adsorbed to the upper die 18 side by the sheet holding plate 59 of the lamination preparation stage 17 is laminated onto the lower bonding jig plate 10. Even if the vacuum suction of the green sheet 1 adsorbed to the vacuum suction plate 44 of the upper die 18 is turned off, air is discharged, and the green sheet 1 is peeled off from the vacuum suction plate 44, the green sheet can be inserted into the guide pin 20. Even if the guide holes 43 of the green sheets 1 do not come into close contact and are lifted up and stacked, the green sheets 1 are pressed,
The lifting of the green sheet 1 is corrected, and the reference hole 21 of the green sheet 1 can be observed at a constant height regardless of variations in the thickness of the green sheet 1, making it possible to accurately judge whether it is good or bad. There is.

In addition, the bonding lower jig plate 10 placed on the lamination table 6 is
By making it possible to slide up and down, holding it with a spring 64, and detecting a constant pressure drop position, a constant load is always applied regardless of the number and thickness variations of the green sheets 1 stacked on the bonding jig plate 10. This has the effect of preventing the green sheet 1 from deforming or floating.

Note that the present invention is not limited to the above embodiments,
Various other variations are possible.

〔Effect of the invention〕

Among the inventions disclosed in this application, the effects obtained by typical inventions are briefly described below.

(1). In other words, a constant pressing force is applied to the green sheets in the lamination preparation stage, regardless of their number or thickness, which prevents the green sheets stacked on the bonding jig plate from floating and prevents the green sheets from floating. We provide a lamination device that can always accurately detect the position of the reference hole, accurately judge non-defective products, and improve the lamination accuracy and product quality of Greenroot in the manufacturing technology of multilayer ceramic substrates using the sheet lamination method. can do.

(2). Since the sheet pressing plate can also be used to remove defective green sheets, the device can be made more compact and multifunctional.

(3) Since the positioning stage has a sheet holding mechanism, it is possible to prevent the green sheet from bending and perform accurate position detection.

Further, when the green sheet is moved for correction, the suction force by the sheet holding mechanism is released, and it is possible to prevent the green sheet from being twisted or wrinkled.

(4) By removing dust and static electricity from the green sheet,
You can get even better quality products.

(5) By automating a series of operations such as green sheet feeding, conveyance, hole punching, outline punching, and lamination, efficient work is possible without the need for manpower.

[Brief explanation of drawings]

FIG. 1 is a perspective view showing the overall configuration of a laminated device according to an embodiment of the present invention, FIG. 2 is a perspective view of the green root in FIG. 4 is a perspective view of the green sheet conveyance mechanism, FIG. 5 is a front view of the laminating device in FIG. 1, FIG. 6 is a perspective view of the bonding jig board supply and discharge mechanism, and FIG. The figure is a detailed cross-sectional view showing the mold and the state in which green sheets are punched out. Figure 8 is a front view showing the mold and the state in which it is stacked on the stacking table. Figure 9 is a partial front view of the positioning stage. FIG. 10 is a partial front view of the lamination preparation stage. l...Green sheet, 2...Picture frame, 3...
Positioning table, 4a, 4b... position recognition device, 5
... Guide hole opening and outer circumference cutting mechanism, 6... Lamination table, 7... Magazine, 8.3a, 3b... Green sheet conveyance mechanism, 9... Frame ejection mechanism, 10... Adhesion bottom Jig plate, l1...Adhesive jig plate, 12...Jig plate supply mechanism, 13...Jig plate discharge mechanism, 14...Base of the main body of the laminating apparatus, l5...Positioning stage ,l6
...Guide hole drilling outer periphery cutting and lamination stage, 17...
・Lamination preparation stage, l8...upper mold, l9...lower mold, 20...guide pin, 21...reference hole, 22...
・Pire hole, 23...Wiring pattern, 24a, 2
4b... Chuck, 25... Source removal static electricity removal unit, 2
6... Support shaft, 27... Chuck rotation motor, 28.
...V groove, 29a, 29b... end surface, 30... positioning pin, 31... frame pressing member, 32... frame outer periphery, 33... frame vacuum suction mechanism, 34a, 34b, 34c
...Fine movement table, 35a. 35b...TV camera, 36a, 36b...Video, 37a, 37b...
Monitor TV, 38...Camera mounting stand, 39...
Sheet holding mechanism, 40... Sheet suction plate, 41...
Frame vacuum suction unit, 42... Frame discharge stand, 43...
Guide hole, 44... Vacuum suction plate, 45... Guide hole punch, 46... Googly part for cutting outer periphery, 47...
} IJ plate, 48...Vacuum suction hole, 4
9...Air cylinder, 50...Cross head, 51
...Pulling dregs, 52...Drag pit, 53...
Lower mold plate, 54...Drag receiving box, 55...
Cross head, 56...Camera mounting stand, 57...Guide pin escape hole, 58...Vacuum suction plate, 59...Seat holding plate, 60...Jig mounting plate, 6l... Jig clamp, 62... Jig stand, 63... Shaft, 6
4... Spring, 65... Jig base plate, 66... Light shielding plate, 67... Position detection sensor, 68... % ta,
69...Slide rail, 70...Roller 71
...Jig plate transport rail, 72...Jig transport plate, 73
... Supply position section, 74... Supply standby position section, 75.
...Jig busher 76...support shaft, 77...spring,
78...Discharge conveyance rail, 79...Groove, 80...
Jig ejection chuck, 81... Ejection position portion, 82...
Ejection conveyance plate, 83...Ejection sheet holder.

Claims (1)

[Claims] 1. By drilling guide holes in the green sheets and inserting the guide holes into guide pins set upright on the lower bonding jig plate, the green sheets are sequentially stacked and bonded on top of the guide holes. A laminating apparatus used for laminating green sheets in a method for manufacturing a multilayer ceramic substrate by a sheet lamination method, in which a lower jig plate is mounted and heated and pressurized to manufacture a multilayer ceramic substrate, the laminating apparatus comprising: a frame; A magazine capable of storing a plurality of attached green sheets with at least two reference holes bored therein, a positioning table on which the green sheets are placed and positioned, and the bonding lower jig plate are placed, and the Z a stacking table movable in the direction; a stacking preparation stage where the stacking table waits to prepare for stacking green sheets on the stacking table; and a guide hole opening and outer periphery cutting for drilling guide holes and cutting the outer periphery of the green sheet. The lamination preparation stage includes a jig plate holding mechanism configured to allow the lower bonding jig plate placed on the lamination table to vertically slide and hold it with a pressing member; It has a jig plate press lowering position detection mechanism, and a stacking table lifting stop mechanism that stops the lifting operation of the stacking table and positions it based on a signal from the press lowering position detecting mechanism, A sheet pressing plate is provided between the position recognition device that detects the position of the reference hole and the laminating table, and the upper surface of the green sheet laminated on the lower bonding jig plate on the laminating table is pressed against the sheet pressing plate. A laminating apparatus characterized in that the laminating table is raised to a position where it comes into contact with and presses the lower surface of the board, then stopped, and presses the green sheet with a predetermined constant load. 2. The sheet pressing plate is configured to remove the green sheet from the bonding jig plate using a vacuum suction plate when the positional deviation of the reference hole of the green sheet is larger than a predetermined amount. The laminating apparatus according to claim 1, characterized in that: 3. The positioning stage includes a sheet suction plate that suction-holds the lower surface of the green sheet placed on the positioning table, a sheet holding mechanism having a moving mechanism that moves the sheet suction plate up and down, and a position recognition device. By the signal
A claim characterized in that the green sheet has a position correction mechanism that corrects and moves the position of the green sheet on the positioning table, and the suction of the green sheet is turned off during the position correction movement, and the suction is performed only when the position of the reference hole of the green sheet is recognized. Item 1 or 2
Laminating device as described. 4. The laminating apparatus according to claim 1, 2 or 3, further comprising means for spraying ionized gas onto the green sheet to remove dust and static electricity. 5. By drilling guide holes in the green sheets and inserting the guide holes into guide pins set upright on the lower bonding jig plate, the green sheets are sequentially stacked, and the lower bonding jig plate is placed on top of the green sheets. A laminating device used for laminating the green sheets in a method for manufacturing a multilayer ceramic substrate by a sheet lamination method in which a multilayer ceramic substrate is manufactured by heating and pressurizing the green sheets, which is attached to a picture frame,
a magazine capable of storing a plurality of green sheets having at least two reference holes bored therein; a green sheet transport mechanism capable of sequentially taking out and transporting the green sheets from the magazine; Y, θ
A positioning table that can be finely adjusted in the direction, a position recognition device that detects the reference hole position of the green sheet on the positioning table on the positioning stage, and the lower bonding jig plate are placed thereon and can be moved in the Z direction. a stacking table, a stacking preparation stage where the stacking table waits to prepare green sheets for stacking on the stacking table, and a guide hole drilling/external cutting and stacking stage, and this stage is used to place green sheets on the positioning table. By simultaneously drilling guide holes and punching out the outer shape of the fixed green sheet, the punched green sheet can be adsorbed to the upper die side, and the guide holes of the adsorbed green sheet can be attached to the laminated sheet. a guide hole opening and outer periphery cutting mechanism equipped with a mold consisting of an upper mold and a lower mold that can be inserted into the guide pins of the lower bonding jig plate on the table and stacked;
a position recognition device that detects the position of the reference hole of the punched green sheet on the lamination table in the lamination preparation stage; and a position recognition device that transports the positioning table between the positioning stage and the guide hole opening and outer circumference cutting and lamination stage. a conveyance mechanism capable of conveying the lamination table between the lamination preparation stage and a guide hole opening/exit cutting and lamination stage; a frame discharging mechanism capable of adsorbing and transporting and discharging a frame-shaped frame from which a green sheet has been punched using an opening and peripheral cutting mechanism; a jig plate supply mechanism that supplies the lower adhesion jig plate to a lamination table; A laminating apparatus comprising: a jig plate discharging mechanism capable of transporting and unloading the lower bonding jig plate on which a predetermined number of green sheets are laminated.