JPH0516088A - Suction type holding tool - Google Patents

Abstract

PURPOSE:To hold substrate having a high degree of flatness with a suction type holding tool of a liquid crystal plate or the like by fitting a plate porous fine particle sintered body having multiple holes on the surface thereof to one surface of a base, in which vacuum exhaust holes are formed in the other surface, and performing the vacuum suction from the vacuum discharge port to suck the substrate to the surface of the sintered body. CONSTITUTION:Particles such as steatite or the like are sintered to form a porous body, and one surface thereof is ground precisely to form a fine particle sintered body 3. Suction holes 5 are formed in this fine particle sintered body 3. Exhaust holes 10 to be communicated with vertical and horizontal grooves 9 are formed in the recessed surface 8 of a base 2. The fine particle sintered body 3 is fitted to the recessed surface 8 of the base 2 by screws 4, and the exhaust holes 10 and the suction holes 5 are connected to a vacuum pump through connecting nipples 7 and connecting tubes 6. A substrate 1 is placed on the fine particle sintered body 3, and the vacuum pump is operated for suction.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a suction holder for holding a fragile substrate such as a liquid crystal plate or a semiconductor wafer by suction.

[0002]

2. Description of the Related Art FIGS. 2A and 2B are a plan view and a side view of a conventional suction holder. Conventionally, this type of suction holding device is, as shown in FIGS. 2 (a) and 2 (b),
For example, a plate-shaped base 20 made of a plate material of stainless steel, aluminum, or iron, a substrate 1 placed on one surface of the base 20, a plurality of suction holes 22 and a groove 24 communicating between these suction holes 22 are formed. And a connecting nipple 23 for evacuating a plurality of spaces of the suction holes 22 and the grooves 24.

When a thin, fragile substrate is held and conveyed to another by using this suction holder, first, the suction surface 21 is used.
With the surface of the substrate 1 through the connection nipple 23,
The spaces of the suction holes 22 and the grooves 24 are evacuated. As a result, the substrate 1 is suction-held on the suction surface 21. Next, the suction holder is transported to a predetermined place, and the work is performed in a state where the suction holder is sucked and held at the predetermined place.

Further, by increasing the number of the grooves 2 of the suction holes 22 of the suction surface 21, the area for vacuum suction of the substrate 1 is increased and the substrate is sucked uniformly to some extent.

[0005]

In this conventional suction holder, since the substrate 1 is sucked only by the portion of the suction surface 21 which is in contact with the suction hole 22 or the groove 24, it serves only to hold the substrate. It is sufficient if the substrate 1 corresponding to the groove 24 and the suction hole 22 is required, for example, when a higher degree of flatness of the substrate surface is required in a printing process or a minute amount coating process.
However, there is a problem that the surface of is deformed, and uneven printing or uneven application occurs.

The object of the present invention is to solve such a problem.
An object of the present invention is to provide a suction holder that can hold the flatness of a substrate with high accuracy by suction.

[0007]

In the adsorption and holding of the present invention, a plate-like porous fine particle sintered body having a porous surface, and the porous fine particle sintered body is attached to one surface and the first surface is attached to the other surface.
And a base on which a vacuum exhaust hole is formed, the substrate is placed on the porous fine particle sintered body, and the substrate is adsorbed and held on the porous fine particle sintered body by evacuation from the vacuum exhaust hole. It has a feature.

[0008]

The present invention will be described below with reference to the drawings.

FIGS. 1 (a) and 1 (b) are a plan view and a side view of a suction holder showing an embodiment of the present invention. In this suction holder, as shown in the figure, a substrate 1 is placed and a fine particle sintered body 3 which is tightly fixed by a screw 4 is provided on a recessed surface 8 of a base 2 in which a groove 9 and an exhaust hole 10 are formed. That is.

Further, the fine particle sintered body 3 is formed into a porous shape by sintering an inexpensive particle material such as steatite, and is formed as a porous body having a large number of pores of about 10 to 50 μm. Is precisely polished. Then, a suction hole 5 is opened in the fine particle sintered body 3, and a groove 9 connected vertically and horizontally to connect the groove 9 to form a space between the hollow surface 8 of the base 2 and the fine particle sintered body 3. Exhaust hole 1
0 is formed. Further, the exhaust hole 10 and the suction hole 5 are connected to an external vacuum pump via a connection nipple 7 and a connection tube 6.

Next, the operation of the suction holder will be described. First, the substrate 1 is placed on the fine particle sintered body 3. Next, the space portion communicating with the suction hole 5 is evacuated to vacuum and hold the substrate 1. Next, the substrate 1 is placed on a table inside the printing machine together with the suction holder, air is introduced into the space portion communicating with the suction hole 5 and returned to the atmosphere, and the valve of the vacuum pump system communicating with the suction hole 5 is closed. Next, the space of the groove 9 communicating with the exhaust hole 10 is evacuated. As a result, the space between the fine particle sintered body 3 and the substrate 1 is evacuated through the minute holes, and the substrate 1 is held with a uniform suction force. Further, since the flatness of the surface of the fine particle sintered body 3 is precisely ground, the substrate 1 is also sucked and held while maintaining the flatness.

[0012]

As described above, according to the present invention, by using a porous fine particle sintered body having a good flatness on the surface for adsorbing a substrate, the entire surface of the substrate can be held with a uniform adsorbing force, Moreover, since the substrate follows the surface of the fine particle sintered body having a good flatness, there is an effect that a suction holding tool can be obtained which can hold the substrate by suction while maintaining the flatness with high accuracy.

[Brief description of drawings]

FIG. 1 shows an embodiment of the present invention, (a) is a plan view of a suction holder, and (b) is a side view.

2A and 2B show a conventional example, FIG. 2A is a plan view of a suction holder, and FIG.

[Explanation of symbols]

1 substrate 2,20 base 3 Fine particle sintered body 4 screws 5,22 Suction hole 6 connection tube 7,23 connection nipple 8 hollow surface 9,24 groove 10 exhaust holes

Claims (2)

[Claims] 1. A plate-shaped porous fine particle sintered body having a porous surface, and a base on which the porous fine particle sintered body is mounted on one surface and a first vacuum exhaust hole is formed on the other surface. A suction holder, wherein a substrate is placed on the porous fine particle sintered body, and the porous fine particle sintered body is sucked and held by vacuum evacuation from the vacuum exhaust hole. 2. A plurality of holes are formed in the porous fine particle sintered body, and a second vacuum exhaust hole communicating with the holes is formed in the base, and the substrate is evacuated from the second vacuum exhaust hole. The adsorption holder according to claim 1, wherein the adsorption is carried out on the porous fine particle sintered body.