JPH0515975B2 - - Google Patents
Info
- Publication number
- JPH0515975B2 JPH0515975B2 JP57146653A JP14665382A JPH0515975B2 JP H0515975 B2 JPH0515975 B2 JP H0515975B2 JP 57146653 A JP57146653 A JP 57146653A JP 14665382 A JP14665382 A JP 14665382A JP H0515975 B2 JPH0515975 B2 JP H0515975B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- vibrator
- tuning fork
- gas
- piezoelectric vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007789 gas Substances 0.000 description 16
- 238000007789 sealing Methods 0.000 description 7
- 239000013078 crystal Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 239000006059 cover glass Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14665382A JPS5935122A (ja) | 1982-08-23 | 1982-08-23 | 気体の圧力センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14665382A JPS5935122A (ja) | 1982-08-23 | 1982-08-23 | 気体の圧力センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5935122A JPS5935122A (ja) | 1984-02-25 |
JPH0515975B2 true JPH0515975B2 (zh) | 1993-03-03 |
Family
ID=15412586
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14665382A Granted JPS5935122A (ja) | 1982-08-23 | 1982-08-23 | 気体の圧力センサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5935122A (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6150031A (ja) * | 1984-08-20 | 1986-03-12 | Nippon Dempa Kogyo Co Ltd | センサ用圧電変換素子 |
JPS6190031A (ja) * | 1984-10-11 | 1986-05-08 | Nippon Dempa Kogyo Co Ltd | 水晶振動子圧力センサ |
JPH0720579Y2 (ja) * | 1985-01-30 | 1995-05-15 | 株式会社長野計器製作所 | 圧力測定装置 |
JPS61201129A (ja) * | 1985-03-04 | 1986-09-05 | Toyo Commun Equip Co Ltd | ガス圧力センサ |
JPS62184446U (zh) * | 1986-05-13 | 1987-11-24 | ||
JPS6378228U (zh) * | 1986-11-07 | 1988-05-24 | ||
JPH09105U (ja) * | 1991-10-29 | 1997-02-25 | 東洋通信機株式会社 | ガス圧力センサ |
JP2024017607A (ja) * | 2022-07-28 | 2024-02-08 | 藤森工業株式会社 | 圧力測定装置、バイオリアクター、培養装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5484979U (zh) * | 1977-11-28 | 1979-06-15 |
-
1982
- 1982-08-23 JP JP14665382A patent/JPS5935122A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5935122A (ja) | 1984-02-25 |
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