JPH0515800B2 - - Google Patents

Info

Publication number
JPH0515800B2
JPH0515800B2 JP58199208A JP19920883A JPH0515800B2 JP H0515800 B2 JPH0515800 B2 JP H0515800B2 JP 58199208 A JP58199208 A JP 58199208A JP 19920883 A JP19920883 A JP 19920883A JP H0515800 B2 JPH0515800 B2 JP H0515800B2
Authority
JP
Japan
Prior art keywords
concentration
electrolytic polishing
water
polishing
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58199208A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6090628A (ja
Inventor
Keisuke Tajiri
Hirotoshi Nomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP58199208A priority Critical patent/JPS6090628A/ja
Priority to DE19843438433 priority patent/DE3438433A1/de
Publication of JPS6090628A publication Critical patent/JPS6090628A/ja
Priority to US06/816,379 priority patent/US4676833A/en
Publication of JPH0515800B2 publication Critical patent/JPH0515800B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
    • C25F7/02—Regeneration of process liquids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H3/00—Electrochemical machining, i.e. removing metal by passing current between an electrode and a workpiece in the presence of an electrolyte
    • B23H3/10—Supply or regeneration of working media
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/16—Polishing
    • C25F3/22—Polishing of heavy metals
    • C25F3/26—Polishing of heavy metals of refractory metals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
JP58199208A 1983-10-26 1983-10-26 ニオブ材用電解研磨液組成物の再生方法 Granted JPS6090628A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP58199208A JPS6090628A (ja) 1983-10-26 1983-10-26 ニオブ材用電解研磨液組成物の再生方法
DE19843438433 DE3438433A1 (de) 1983-10-26 1984-10-19 Verfahren zur reproduktion der zusammensetzung einer elektrolytischen poliermittelloesung fuer niobmaterial
US06/816,379 US4676833A (en) 1983-10-26 1986-01-06 Method for reproducing composition of electrolytic polishing solution for niobium material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58199208A JPS6090628A (ja) 1983-10-26 1983-10-26 ニオブ材用電解研磨液組成物の再生方法

Publications (2)

Publication Number Publication Date
JPS6090628A JPS6090628A (ja) 1985-05-21
JPH0515800B2 true JPH0515800B2 (US20030204162A1-20031030-M00001.png) 1993-03-02

Family

ID=16403929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58199208A Granted JPS6090628A (ja) 1983-10-26 1983-10-26 ニオブ材用電解研磨液組成物の再生方法

Country Status (3)

Country Link
US (1) US4676833A (US20030204162A1-20031030-M00001.png)
JP (1) JPS6090628A (US20030204162A1-20031030-M00001.png)
DE (1) DE3438433A1 (US20030204162A1-20031030-M00001.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0124484B1 (ko) * 1993-03-23 1997-12-10 모리시다 요이치 반도체 장치의 세정방법 및 그 장치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2466095A (en) * 1944-03-15 1949-04-05 Pennsylvania Salt Mfg Co Electrochemical process for polishing tantalum
DE1185780B (de) * 1962-11-10 1965-01-21 Erich Saelzle Dipl Chem Dr Verfahren zum Polieren von Gegenstaenden aus Kristall- oder Bleikristallglas
DE2609549C3 (de) * 1976-03-08 1979-04-12 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zum anodischen Polieren von Oberflächen aus intermetallischen Niobverbindungen und Nioblegierungen

Also Published As

Publication number Publication date
US4676833A (en) 1987-06-30
JPS6090628A (ja) 1985-05-21
DE3438433C2 (US20030204162A1-20031030-M00001.png) 1987-04-30
DE3438433A1 (de) 1985-05-15

Similar Documents

Publication Publication Date Title
JPS5821028B2 (ja) ドウ オヨビ ドウゴウキン ノ カガクツヤダシヨウエキ
CS221940B2 (en) Method of polishing the glass objects in the polishing bath containing the sulphuric acid and hydrofluoric acid
JPH0515800B2 (US20030204162A1-20031030-M00001.png)
JPH09295833A (ja) フロートガラス基板の平坦化方法
US5098517A (en) Baths and process for chemical polishing of copper or copper alloy surfaces
US4149702A (en) Method and apparatus for recycling heat treating salts
US3951681A (en) Method for descaling ferrous metals
US2553937A (en) Method of electrolytically polishing aluminum and its alloys
JPS6254195B2 (US20030204162A1-20031030-M00001.png)
US2594124A (en) Electrolytic polishing of metals
US2419076A (en) Removal of carbonaceous deposits
US3486954A (en) Method for etching aluminum
JPH06207278A (ja) チタン合金部品用の酸腐食浴
US2418955A (en) Process of removing foreign matter from magnesium surfaces
JPH01165800A (ja) 高速電解酸洗研磨法
US4496466A (en) Wet-process phosphoric acid brightening reagent for aluminum
KR900004489B1 (ko) 질화알루미늄 분말의 제조방법
SU670607A1 (ru) Раствор дл электрополировани металлов
US1373573A (en) Method of treating steel and iron parts
US3232855A (en) Process for electrolytic polishing of aluminum
US4137050A (en) Coal desulfurization
US2521106A (en) Method and bath for electropolishing
KR102083948B1 (ko) 알루미늄합금 제품의 tac방법
JPS6056797B2 (ja) ＺｒおよびＨｆ並びにその合金の表面酸化被膜除去方法
JPS61217592A (ja) 遷移金属のハロゲン化物の溶融塩浴電解により得られる遷移金属純度の改良方法