JPH0515786B2 - - Google Patents

Info

Publication number
JPH0515786B2
JPH0515786B2 JP59167676A JP16767684A JPH0515786B2 JP H0515786 B2 JPH0515786 B2 JP H0515786B2 JP 59167676 A JP59167676 A JP 59167676A JP 16767684 A JP16767684 A JP 16767684A JP H0515786 B2 JPH0515786 B2 JP H0515786B2
Authority
JP
Japan
Prior art keywords
layer
coated
cubic
cbn
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59167676A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6148568A (ja
Inventor
Minoru Nakano
Masaaki Tobioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP16767684A priority Critical patent/JPS6148568A/ja
Publication of JPS6148568A publication Critical patent/JPS6148568A/ja
Publication of JPH0515786B2 publication Critical patent/JPH0515786B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C23C16/342—Boron nitride

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Vapour Deposition (AREA)
JP16767684A 1984-08-09 1984-08-09 多層硬質膜被覆工具 Granted JPS6148568A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16767684A JPS6148568A (ja) 1984-08-09 1984-08-09 多層硬質膜被覆工具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16767684A JPS6148568A (ja) 1984-08-09 1984-08-09 多層硬質膜被覆工具

Publications (2)

Publication Number Publication Date
JPS6148568A JPS6148568A (ja) 1986-03-10
JPH0515786B2 true JPH0515786B2 (enrdf_load_stackoverflow) 1993-03-02

Family

ID=15854151

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16767684A Granted JPS6148568A (ja) 1984-08-09 1984-08-09 多層硬質膜被覆工具

Country Status (1)

Country Link
JP (1) JPS6148568A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH074385U (ja) * 1993-06-28 1995-01-24 公雄 服部 レトルト食品収納用容器材

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5700551A (en) * 1994-09-16 1997-12-23 Sumitomo Electric Industries, Ltd. Layered film made of ultrafine particles and a hard composite material for tools possessing the film
JP2007169743A (ja) * 2005-12-26 2007-07-05 Hitachi Tool Engineering Ltd 被覆部材

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52110209A (en) * 1976-03-15 1977-09-16 Mitsubishi Metal Corp Coated hard alloy tool
JPS6053721B2 (ja) * 1979-06-18 1985-11-27 三菱マテリアル株式会社 切削工具用複合焼結部材
JPS57174453A (en) * 1981-04-17 1982-10-27 Sumitomo Electric Ind Ltd Coated superhard alloy tool

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH074385U (ja) * 1993-06-28 1995-01-24 公雄 服部 レトルト食品収納用容器材

Also Published As

Publication number Publication date
JPS6148568A (ja) 1986-03-10

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